Bearing device and base thereof

Abstract

The utility model discloses a bearing device and a base thereof. The bearing device comprises the base and a tongue piece unit. The base comprises a main body part. The main body part is provided with a bottom wall and adjusting walls; the bottom wall extends along a first direction and a second direction which is not parallel to the first direction; the adjusting walls extend from the bottom wall to a third direction which is not parallel to the first direction and the second direction and are arranged at intervals in the second direction; the side walls extend from the bottom wall to the third direction and are arranged at intervals in the first direction, and the movable row teeth are arranged on one of the opposite faces of the adjusting walls. The bottom wall, the adjusting wall and the side wall jointly define a movable groove. The tongue piece unit is inserted into the movable groove and comprises displacement row teeth, and the displacement row teeth can be movably meshed with the movable row teeth, so that the position of the tongue piece unit relative to the base can be adjusted.

Description

Technical Field

[0001] The utility model relates to a carrying device and a base thereof, in particular to a carrying device and a base thereof suitable for fixing wafers. Background Art

[0002] The semiconductor industry has been booming in recent years. A key component is the circular semiconductor crystal, or wafer. Wafers are placed in a wafer cassette and supported by a carrier within the cassette. However, conventional carriers typically consisted of fixed, soldered tabs to support the wafer, which presented significant limitations. Utility Model Content

[0003] An object of the present invention is to provide a carrying device that can solve the above-mentioned problem.

[0004] The carrying device of the utility model comprises a base and a tongue unit.

[0005] The base includes a main body. The main body has a bottom wall extending in a first direction and a second direction non-parallel to the first direction, adjustment walls extending from the bottom wall in a third direction non-parallel to the first and second directions and spaced apart in the second direction, side walls extending from the bottom wall in the third direction and spaced apart in the first direction, and a row of movable teeth disposed on one of the surfaces facing the adjustment wall. The bottom wall, the adjustment wall, and the side walls collectively define a movable slot.

[0006] The tongue unit is inserted into the movable groove and includes a displacement row of teeth. The displacement row of teeth can be movably engaged with the movable row of teeth, so that the position of the tongue unit relative to the base can be adjusted.

[0007] In the carrying device of the present invention, the base further includes side parts respectively connected to two opposite sides of the main body and arranged in the second direction.

[0008] In the carrying device of the present invention, each of the side parts has a through hole penetrating through two opposite surfaces thereof and extending along the third direction, and the through holes are arranged at intervals in the first direction.

[0009] In the load-bearing device described in the present invention, each of the adjustment walls has a movable surface, the movable surfaces facing each other and defining the movable groove. The movable row of teeth is formed on one of the movable surfaces. The tongue unit includes a displacement portion embedded in the movable groove, and a tongue portion connected to the displacement portion and protruding from the movable groove. The displacement portion has a displacement surface facing each of the movable surfaces. The displacement row of teeth is formed on one of the displacement surfaces adjacent to the movable row of teeth.

[0010] The supporting device of the present invention comprises the base including two movable rows of teeth, each of which is formed on the movable surface. The tongue unit comprises two displacement rows of teeth, each of which is formed on the displacement surface and is movably engaged with the movable rows of teeth.

[0011] The supporting device of the present invention further comprises an elongated hole extending through two opposite sides of the bottom wall and extending along the third direction. The tongue unit further comprises a stopper disposed through the elongated hole and connected to a side of the displacement portion away from the tongue portion, the stopper being configured to prevent the tongue unit from falling off the base.

[0012] Another object of the present invention is to provide a base for the aforementioned carrying device.

[0013] The base of the utility model is suitable for a tongue unit. The surface of the tongue unit is formed with displacement teeth and comprises a main body.

[0014] The main body includes a bottom wall extending along a first direction and a second direction non-parallel to the first direction, adjustment walls extending from the bottom wall toward a third direction non-parallel to the first and second directions and spaced apart in the second direction, side walls extending from the bottom wall toward the third direction and spaced apart in the first direction, and a movable row of teeth disposed on one of the surfaces facing the adjustment wall. The bottom wall, the adjustment wall, and the side wall collectively define a movable groove into which the tongue unit is inserted. The displacement row of teeth is movably engaged with the movable row of teeth, allowing the position of the tongue unit relative to the base to be adjusted.

[0015] The base of the present invention further includes side parts respectively connected to two opposite sides of the main body and arranged in the second direction.

[0016] In the base of the present invention, each of the side parts includes a through hole penetrating through two opposite surfaces thereof and extending along the third direction, and the through holes are arranged at intervals in the first direction.

[0017] In the base of the present invention, each of the adjustment walls has a movable surface, the movable surfaces face each other and define the movable groove, and the movable row of teeth is formed on one of the movable surfaces.

[0018] The base of the present invention is adapted to form two displacement rows of teeth on the surface of the tongue unit. The base includes two movable rows of teeth. The displacement rows of teeth are respectively movably engaged with the movable rows of teeth.

[0019] The base of the present invention, the main body further includes an elongated hole penetrating through two opposite surfaces of the bottom wall and extending along the third direction.

[0020] The beneficial effects of the present invention are as follows: by enabling the displacement row of teeth to movably engage with the movable row of teeth, the tongue unit can be securely inserted into the movable groove and its position relative to the base can be adjusted according to actual needs, thereby improving the convenience and durability of the support device in use. Furthermore, by enabling the displacement rows of teeth located on opposite sides to movably engage with the movable row of teeth, the opposite sides of the tongue unit can be evenly stressed, thereby improving the installation stability of the support device. In addition, by preventing the tongue unit from falling off the base through the limiting member, the durability of the support device can also be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Other features and effects of the present invention will be clearly presented in the embodiments with reference to the accompanying drawings, in which:

[0022] Figure 1 is a perspective view illustrating an embodiment of the carrying device of the present utility model;

[0023] Figure 2 It is a three-dimensional exploded diagram;

[0024] Figure 3 It is along Figure 1 A partially enlarged view of the section along line III-III in FIG. 1 illustrates the connection relationship between the base and the plurality of tongue units of the embodiment;

[0025] Figure 4 is a rear view illustrating the connection relationship between the stopper of the tongue unit and the base;

[0026] Figure 5 It is similar Figure 3 A partially enlarged view illustrating the implementation details of another embodiment of the embodiment. DETAILED DESCRIPTION

[0027] See Figures 1 to 4 , is an embodiment of the carrier device 100 of the present invention. First, the directional terms used in the description herein are defined. In the subsequent description, the "front", "back", "left", and "right" directions of the structural configuration of the carrier device 100 are defined by the upper left, lower left, upper right, and lower right directions of the drawing. Figure 1In the figure, the upper left side as shown in the figure is defined as the "left side", the lower right side as shown in the figure is defined as the "right side", the lower left side as shown in the figure is defined as the "front side", and the upper right side as shown in the figure is defined as the "rear side". The carrier 100 is suitable for carrying multiple wafers 3 (only one is shown in the figure) and is installed in a wafer box (not shown). The carrier 100 includes a base 1 and a plurality of tongue units 2 arranged on the base 1. However, in other embodiments, the number of the tongue unit 2 can also be only one, which is not limited here.

[0028] The base 1 includes a main body 11 , two side bodies 12 connected to two opposite sides (herein, the left and right sides) of the main body 11 , and two movable rows of teeth 13 formed on the main body 11 .

[0029] The main body 11 is in the shape of a rectangular parallelepiped but is not limited thereto, and is arranged along a first direction X( Figure 1 a direction pointing upward from the bottom of the drawing) and a second direction Y ( Figure 1 In this embodiment, the second direction Y is perpendicular to the first direction X, and a third direction Z ( Figure 1 The direction (from the upper right to the lower left in the figure) is perpendicular to the first direction X and the second direction Y. The main body 11 has a bottom wall 111 extending along the first direction X and the second direction Y, two adjustment walls 112 extending from the bottom wall 111 toward the third direction Z and spaced apart in the second direction Y, and two side walls 113 extending from the bottom wall 111 toward the third direction Z and spaced apart in the first direction X. The bottom wall 111, the adjustment walls 112, and the side walls 113 collectively define a movable slot 114. The main body 11 also has an elongated hole 115 extending through two opposite surfaces of the bottom wall 111 and along the third direction Z. In this embodiment, the elongated hole 115 extends along the first direction X. The adjustment wall 112 has two movable surfaces 116 defining the movable slot 114. The movable teeth 13 are formed on the movable surfaces 116 and extend along the first direction X. The movable teeth 13 have a serrated shape.

[0030] Each of the side parts 12 has a plurality of through holes 121 (four in this example) that penetrate through two opposite sides (the front and rear sides in this example) and extend along the third direction Z. The through holes 121 are arranged at intervals in the first direction X. The through holes 121 are used to reduce the weight of the base 1. In this embodiment, each of the side parts 12 also has a plurality of coupling holes 122. The coupling holes 122 are suitable for allowing fixing members (such as screws) not shown in the figure to pass through from left to right, so that

[0031] The side body 12 is mounted on the wafer cassette.

[0032] The tongue units 2 are arranged along the first direction X. Each tongue unit 2 includes a displacement portion 21 that is movably inserted into the movable groove 114, and a tongue portion 22 connected to the lower left of the displacement portion 21 and protruding from the movable groove 114. The tongue portion 22 is elongated and extends from the top surface of the displacement portion 21 toward the third direction Z.

[0033] In this embodiment, each displacement portion 21 has two displacement surfaces 211, each facing the movable surface 116, and two displacement teeth 212, each formed on the displacement surfaces 211. The displacement teeth 212 of each tongue unit 2 are sawtooth-shaped and are movably engaged with a portion of the movable teeth 13. When the displacement teeth 212 of any tongue unit 2 synchronously shifts from engaging with a portion of the movable teeth 13 to engaging with another portion of the movable teeth 13, the corresponding tongue unit 2 is stably moved in the first direction X, and the tongue portion 22 of the corresponding tongue unit 2 is freely adjustable in the first direction X. In this way, the tongue unit 2 can be adjusted to a suitable position according to the positioning accuracy of the robotic arm (not shown) that transports the wafer 3.

[0034] See Figure 2 and Figure 4 Each of the tongue units 2 further includes a limiting member 23 connected to a side of the displacement portion 21 away from the tongue portion 22 and inserted into the elongated hole 115. Specifically, the limiting member 23 has a head portion 231 and a rod portion 232 extending from the head portion 231 to the lower left. The rod portion 232 can be detachably inserted into the elongated hole 115 and respectively connected to the displacement portion 21. The outer diameter of the head portion 231 is greater than the inner diameter of the elongated hole 115 in the second direction Y, so that the head portion 231 is restricted by the bottom wall 111 and cannot move along the third direction Z, thereby preventing the tongue unit 2 from falling off from the movable groove 114 of the base 1.

[0035] See Figure 5, which is another implementation aspect of this embodiment. In this implementation aspect, one of the displacement row teeth 212 and one of the adjacent movable row teeth 13 can be omitted. In other words, the base 1 includes the main body 11, the two side bodies 12 and one movable row teeth 13. And each of the displacement portions 21 has two displacement surfaces 211 and one displacement row teeth 212. The displacement row teeth 212 is formed on a side of the displacement surface 211 adjacent to the movable row teeth 13. Each of the tongue units 2 is movably engaged with the movable row teeth 13 through the displacement row teeth 212, and moves relative to the base 1.

[0036] In summary, by enabling the displacement row of teeth 212 to movably engage with the movable row of teeth 13, the tongue unit 2 can be firmly inserted into the movable groove 114 and its position relative to the base 1 can be adjusted according to actual needs, thereby improving the convenience and durability of the carrier 100 in use. Furthermore, by enabling the displacement row of teeth 212 located on two opposite sides to movably engage with the movable row of teeth 13, the two opposite sides of the tongue unit 2 can be uniformly stressed, thereby improving the installation stability of the carrier 100. In addition, by preventing the tongue unit 2 from falling off the base 1 through the limiter 23, the durability of the carrier 100 can also be improved. Therefore, the purpose of this utility model can indeed be achieved.

[0037] The above description is merely an embodiment of the present invention and should not be used to limit the scope of implementation of the present invention. That is, any simple equivalent changes and modifications made according to the claims and description of the present invention still fall within the scope of the present invention.

Claims

1. A carrying device, characterized in that: The carrying device comprises: A base, comprising a main body, the main body having a bottom wall extending along a first direction and a second direction non-parallel to the first direction, adjustment walls extending from the bottom wall toward a third direction non-parallel to the first direction and the second direction and arranged at intervals in the second direction, side walls extending from the bottom wall toward the third direction and arranged at intervals in the first direction, and a movable row of teeth provided on one of the surfaces facing the adjustment wall, wherein the bottom wall, the adjustment wall, and the side walls jointly define a movable slot; and The tongue unit is inserted into the movable groove and includes a displacement row of teeth. The displacement row of teeth can be movably engaged with the movable row of teeth, so that the position of the tongue unit relative to the base can be adjusted.

2. The carrying device according to claim 1, characterized in that: The base further includes side parts respectively connected to two opposite sides of the main body and arranged in the second direction.

3. The carrying device according to claim 2, characterized in that: Each of the side parts has a through hole penetrating through two opposite surfaces thereof and extending along the third direction, and the through holes are arranged at intervals in the first direction.

4. The carrying device according to claim 1, wherein: Each of the adjustment walls has a movable surface, which faces each other and defines the movable groove. The movable row of teeth is formed on one of the movable surfaces. The tongue unit includes a displacement portion embedded in the movable groove, and a tongue portion connected to the displacement portion and protruding from the movable groove. The displacement portion has a displacement surface facing the movable surface respectively, and the displacement row of teeth is formed on one of the displacement surfaces adjacent to the movable row of teeth.

5. The carrying device according to claim 4, characterized in that: The base includes two movable rows of teeth, which are respectively formed on the movable surface. The tongue unit includes two displacement rows of teeth respectively formed on the displacement surface, which are respectively movably engaged with the movable rows of teeth.

6. The carrying device according to claim 4, characterized in that: The main body also has an elongated hole passing through two opposite sides of the bottom wall and extending along the third direction. The tongue unit also includes a limiting member passing through the elongated hole and connected to the side of the displacement portion away from the tongue portion. The limiting member is used to prevent the tongue unit from falling off the base.

7. A base, suitable for a tongue unit, wherein the surface of the tongue unit is formed with displacement teeth, characterized in that: The base comprises: The main body includes a bottom wall extending along a first direction and a second direction not parallel to the first direction, an adjustment wall extending from the bottom wall toward a third direction not parallel to the first direction and the second direction and arranged at intervals in the second direction, a side wall extending from the bottom wall toward the third direction and arranged at intervals in the first direction, and a movable row of teeth arranged on one of the surfaces facing the adjustment wall, the bottom wall, the adjustment wall and the side wall jointly define a movable groove, the movable groove is for the tongue unit to be inserted, and the displacement row of teeth can be movably engaged with the movable row of teeth, so that the position of the tongue unit relative to the base can be adjusted.

8. The base according to claim 7, characterized in that: The base further includes side parts respectively connected to two opposite sides of the main body and arranged in the second direction.

9. The base according to claim 8, characterized in that: Each of the side parts includes a through hole penetrating through two opposite surfaces thereof and extending along the third direction, and the through holes are arranged at intervals in the first direction.

10. The base according to claim 7, characterized in that: Each of the adjustment walls has a movable surface, the movable surfaces face each other and define the movable groove, and the movable row of teeth is formed on one of the movable surfaces.

11. The base according to claim 10, characterized in that: Two displacement rows of teeth are formed on the surface of the tongue unit, and the base includes two movable rows of teeth. The displacement rows of teeth are respectively movably engaged with the movable rows of teeth.

12. The base according to claim 7, characterized in that: The main body further includes an elongated hole penetrating through two opposite surfaces of the bottom wall and extending along the third direction.

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