Forward pushing type clamping manipulator

Abstract

The utility model relates to the technical field of semiconductor clamp tools, and discloses a forward-pushing type clamping manipulator, so as to solve the problem that the yield of wafers is reduced due to dust pollution and organic matter pollution generated in the operation process of an execution mechanism. The forward pushing type clamping manipulator comprises a mounting base, a power connecting rod, a sliding piece and a power corrugated pipe. A transmission through hole is formed in the mounting base in the first linear direction, and the power connecting rod is partially inserted into the transmission through hole. In the first linear direction, the sliding piece is located on one side of the transmission through hole, and the end, close to the sliding piece, of the power connecting rod is fixedly connected with the sliding piece. In the first linear direction, the power connecting rod is inserted into the power corrugated pipe between the mounting base and the sliding piece, and the two ends of the power corrugated pipe are connected with the mounting base and the sliding piece in a sealed mode. The forward pushing type clamping mechanical arm is used for clamping preset objects such as wafers.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor fixtures and tooling, in particular to a forward-pushing clamping manipulator. Background Art

[0002] In semiconductor equipment, many wafer handling operations require the use of gripping robots. The part of the robot that grasps the wafer is called an actuator, which includes a guide mechanism and a sealing mechanism. The guide mechanism ensures that the gripping motion is linear, thereby improving equipment accuracy, while the sealing mechanism prevents other malfunctions caused by water ingress.

[0003] During actuator operation, the guide mechanism can generate dust contamination due to friction between moving parts, or the lubricant in the guide mechanism can volatilize and drip, causing organic contamination. The dynamic seal mechanism also generates dust contamination due to friction between moving parts. Both these dust and organic contamination reduce wafer yield. Utility Model Content

[0004] In view of this, the utility model provides a forward-pushing clamping robot to solve the problem of dust pollution and organic pollution generated during the operation of the actuator, which reduces the wafer yield.

[0005] The utility model provides a forward-pushing clamping manipulator comprising a mounting base, a power connecting rod, a sliding member, and a power bellows. The mounting base is provided with a transmission through-hole along a first linear direction, and the power connecting rod is partially inserted into the transmission through-hole. Along the first linear direction, the sliding member is located on one side of the transmission through-hole, and the end of the power connecting rod proximal to the sliding member is fixedly connected to the sliding member. Along the first linear direction, the power connecting rod is inserted into the power bellows between the mounting base and the sliding member, and both ends of the power bellows are sealed to the mounting base and the sliding member.

[0006] Beneficial effect: Along the first straight line direction, on the side of the transmission through hole away from the sliding part, the power connecting rod is controlled to drive the sliding part to slide back and forth along the first straight line direction, so that the preset objects such as wafers can be clamped and transported by the clamping mechanism.

[0007] During this process, along the first linear direction, between the mounting base and the sliding member, a power bellows is sheathed around the outside of the power connecting rod, which is exposed to the outside. The two ends of the power bellows are sealed to the mounting base and the sliding member, thereby preventing the lubricating oil used in the power connecting rod from leaking out during the reciprocating sliding of the sliding member and causing organic contamination. Because the power bellows' bellows structure is capable of reciprocating contraction and extension, during the telescopic movement of the power connecting rod, the two ends of the power bellows along the first linear direction remain relatively stationary with the connected mounting base and sliding member, forming a statically sealed connection structure between the power bellows, the mounting base, and the sliding member. This reduces or prevents dust contamination caused by sliding friction between the components of the dynamic sealing structure. This reduces dust and organic contamination of wafers and other pre-set objects during the clamping and transportation process, thereby improving the processing accuracy and production yield of wafers and other pre-set objects.

[0008] In some embodiments, the forward-pushing clamping robot further includes a first flange ring. Along the first straight line direction, a first flange ring is provided at one end of the power bellows close to the mounting base, and a first flange ring is provided at one end of the power bellows close to the sliding member, so that the power bellows is sealedly connected to the mounting base and the sliding member.

[0009] Beneficial effect: By setting two first flange rings connected to the mounting base and the sliding part, the end of the power bellows can be squeezed and set between the first flange ring and the mounting base (or sliding part) to ensure that the power bellows is sealed and connected to the mounting base and the sliding part, and meet the static sealing structure, which is simple in structure and easy to install.

[0010] In some embodiments, the first flange ring is a split structure along the circumferential direction.

[0011] Advantageous Effects: The first flange ring comprises two semi-annular structures, each of which is provided with a plurality of connecting through holes along its axial direction. At the end of the power bellows, the two semi-annular structures can be brought radially close together and snapped into the outer side of the smaller bellows ring of the power bellows, resulting in a simple structure and convenient installation and removal.

[0012] In some embodiments, the forward-pushing clamping robot further includes a first linear bearing, which is installed between the mounting base and the power connecting rod in the transmission through hole.

[0013] Beneficial Effects: The first linear bearing converts sliding friction between the power connecting rod and the mounting base into rolling friction between the power connecting rod and the first linear bearing. This provides low damping, smooth operation, high rigidity, and resistance to deformation, improving the accuracy of the reciprocating movement of the power connecting rod and the sliding member in the first linear direction.

[0014] In some embodiments, the forward-pushing gripping manipulator further includes a connecting member, the connecting member including a first fastener and / or a second fastener. Along the first linear direction, the sliding member is connected to the power connecting rod via the first fastener. Along the radial direction of the power connecting rod, the sliding member is connected to the power connecting rod via the second fastener.

[0015] Beneficial effect: By disposing the first fastener and the second fastener, the freedom of the power connecting rod and the sliding member along the first straight line direction is limited, and the power connecting rod is prevented from rotating relative to the sliding member.

[0016] In some embodiments, the forward-pushing gripper further includes a guide assembly comprising a guide link and a guide bellows. A positioning hole is defined on the mounting base, facing the slider, along a first linear direction. One end of the guide link is inserted into the positioning hole. The slider also has a guide hole defined along the first linear direction. The guide link is inserted into the guide hole, allowing the slider to slide along the length of the guide link. The guide link is inserted into the guide bellows between the mounting base and the slider along the first linear direction. The guide bellows is sealed to the mounting base and the slider at both ends.

[0017] Beneficial Effects: As the slider reciprocates along the first linear direction driven by the power connecting rod, the sliding support provided by the guide connecting rod provides enhanced structural strength and rigidity, ensuring high precision during the reciprocating movement of the slider along the first linear direction. Furthermore, the sealing provided by the guide bellows prevents organic contamination caused by the lubricating oil dripping from the guide connecting rod. Furthermore, the static sealing structure of the guide bellows prevents dust contamination caused by sliding friction between the two sealing components, thereby improving the processing precision and production yield of wafers and other intended objects.

[0018] In some embodiments, the guide assembly further includes a second flange ring. Along the first straight line direction, a second flange ring is provided at one end of the guide bellows close to the mounting base, and a second flange ring is provided at one end of the guide bellows close to the sliding member, so that the guide bellows is sealedly connected to the mounting base and the sliding member.

[0019] Beneficial effect: By setting two second flange rings at both ends of the guide bellows to connect with the mounting base and the sliding part, the end of the guide bellows can be squeezed and set between the second flange ring and the mounting base (or sliding part) to make the guide bellows sealed and connected to the mounting base and the sliding part, and meet the static sealing structure, which is simple in structure and easy to install.

[0020] In some embodiments, the guide assembly further includes a second linear bearing, which is disposed in the guide hole between the sliding member and the guide link.

[0021] Beneficial Effects: The second linear bearing converts the sliding friction between the guide link and the sliding member into rolling friction between the guide link and the second linear bearing. This provides low damping, smooth operation, high rigidity, and resistance to deformation, thereby improving the accuracy of the sliding member's reciprocating movement in the first linear direction.

[0022] In some embodiments, there are multiple guide assemblies, each of which is spaced apart and distributed along a second linear direction on opposite sides of the power connecting rod, with the second linear direction being perpendicular to the first linear direction. Also, there are multiple second linear bearings, each of which is sequentially distributed within the guide hole along the first linear direction.

[0023] Beneficial effect: Multiple guide components are distributed at intervals on opposite sides of the power connecting rod along the second straight line direction, so as to further improve the accuracy of the forward-pushing clamping manipulator.

[0024] Taking the example of two second linear bearings, the two second linear bearings in the guide hole are distributed in sequence along the first straight line direction to ensure that the guide hole and the guide connecting rod are coaxially arranged. That is, when the sliding body slides along the first straight line direction over a long stroke, the gap between the sliding body and the guide connecting rod is small and the shaking is small, which is beneficial to improving the accuracy of the equipment.

[0025] In some embodiments, the mounting base includes a first base, a second base, and a support member. The first base has a transmission through hole defined along a first linear direction. The first base and the second base are spaced apart along the first linear direction. Positioning holes are defined on the sides of the first and second bases where they approach each other, and a sliding member is positioned between the first and second bases. One end of the support member is fixedly connected to the first base, and the other end of the support member is fixedly or removably connected to the second base along the first linear direction.

[0026] Beneficial effect: The installation base of the I-shaped structure or the frame structure is connected by the first base, the second base and the support member, which is beneficial to improving the bending strength and rigidity of the guide connecting rod and further improving the accuracy of the reciprocating movement of the sliding body. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0028] Figure 1 This is a schematic diagram of the three-dimensional structure of a forward-pushing clamping manipulator according to an embodiment of the present utility model;

[0029] Figure 2 for Figure 1 A first cross-sectional view of the forward-pushing gripping manipulator is shown;

[0030] Figure 3 for Figure 1 A schematic diagram of a three-dimensional structure of the sliding member shown;

[0031] Figure 4 for Figure 1 A partial cross-sectional view of the mounting base and the sliding member shown in ;

[0032] Figure 5 for Figure 4 A cross-sectional view along the axial direction of the guide connecting rod;

[0033] Figure 6 for Figure 1 A schematic diagram of a three-dimensional structure of the mounting base is shown in FIG.

[0034] Description of reference numerals:

[0035] 100. Forward-pushing clamping manipulator;

[0036] 10. Mounting base; 11. Transmission through hole; 12. Positioning hole; 13. First base; 14. Second base; 15. Support member;

[0037] 20. Sliding member; 21. Sliding body; 22. First fastening hole; 23. Second fastening hole; 24. Guide hole; 25. Finger support; 26. Clamping portion;

[0038] 31. Power connecting rod; 32. Connecting member; 321. First fastener; 322. Second fastener;

[0039] 41. Power bellows; 42. First flange ring; 43. First linear bearing;

[0040] 50. Guide assembly; 51. Guide connecting rod; 52. Guide bellows; 53. Second flange ring; 54. Second linear bearing. DETAILED DESCRIPTION

[0041] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts shall fall within the scope of protection of the present invention.

[0042] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0043] The terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Therefore, features specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, unless otherwise specified, "plurality" means two or more.

[0044] The following combination Figures 1 to 6 , describing a forward-pushing clamping robot according to an embodiment of the present invention.

[0045] like Figure 1 As shown, the present invention provides a forward-pushing clamping manipulator 100, comprising a mounting base 10, a sliding member 20, a power connecting rod 31, and a power bellows 41. Figure 2 The mounting base 10 is provided with a transmission through-hole 11 along a first linear direction (i.e., the X-direction), and the power connecting rod 31 is partially inserted into the transmission through-hole 11. Along the X-direction, the sliding member 20 is located on one side of the transmission through-hole 11, and the end of the power connecting rod 31 closest to the sliding member 20 is fixedly connected to the sliding member 20. Along the X-direction, the power connecting rod 31 is inserted into the power bellows 41 between the mounting base 10 and the sliding member 20, and both ends of the power bellows 41 are sealed to the mounting base 10 and the sliding member 20.

[0046] In this manner, along the X-direction, on the side of the transmission through-hole 11 away from the slider 20, the power connecting rod 31 is controlled to drive the slider 20 to slide back and forth in the X-direction, facilitating the gripping and transport of a predetermined object, such as a wafer, via the clamping mechanism. During this process, along the X-direction, between the mounting base 10 and the slider 20, a power bellows 41 is sheathed around the exposed power connecting rod 31, with both ends of the power bellows 41 sealed to the mounting base 10 and the slider 20. This prevents leakage of lubricating oil applied to the power connecting rod 31 during the reciprocating motion of the slider 20, potentially causing organic contamination. Because the bellows structure of the power bellows 41 can reciprocate and contract, during the telescopic movement of the power connecting rod 31, the two ends of the power bellows 41 along the X-direction remain relatively stationary with the connected mounting base 10 and slider 20. This forms a static seal between the power bellows 41, the mounting base 10, and the slider 20, thereby reducing or avoiding dust contamination caused by sliding friction between the components of the dynamic seal structure. This reduces dust and organic contamination during the clamping and transportation of wafers and other pre-set objects, thereby improving the processing accuracy and production yield of wafers and other pre-set objects.

[0047] It should be noted that in the embodiments of the present application, fixed connection refers to multiple components connected to form an integral structure with high structural strength. The connection method of fixed connection can be detachable connection or non-detachable connection, which is not limited.

[0048] In some embodiments, as Figure 2 As shown, the forward-pushing clamping robot 100 also includes a first flange ring 42. Along the X direction, a first flange ring 42 is provided at one end of the power bellows 41 close to the mounting base 10, and a first flange ring 42 is provided at one end of the power bellows 41 close to the sliding member 20, so that the power bellows 41 is sealedly connected to the mounting base 10 and the sliding member 20.

[0049] By setting two first flange rings 42 to connect with the mounting base 10 and the sliding member 20, the end of the power bellows 41 can be squeezed and set between the first flange ring 42 and the mounting base 10 (or the sliding member 20) so that the power bellows 41 is sealed and connected with the mounting base 10 and the sliding member 20, and a static sealing structure is satisfied, which has a simple structure and is easy to install.

[0050] Illustratively, along the X direction, the first flange ring 42 is provided with a plurality of connecting through holes spaced apart along its circumference, and each connecting through hole is provided with a corresponding connecting threaded hole at the mounting base 10 and the sliding member 20, and the first flange ring 42 is then fastened to the mounting base 10 (or sliding member 20) by screws.

[0051] Alternatively, an external thread structure may be provided on the outside of the first flange ring 42, and a corresponding internal thread structure may be provided on the mounting base 10 (or sliding member 20), and the first flange ring 42 may be screwed to fasten the first flange ring 42 and the mounting base 10 (or sliding member 20).

[0052] The inner diameter of the first flange ring 42 is smaller than the maximum outer diameter of the power bellows 41. Alternatively, the inner diameter of the first flange ring 42 may be slightly larger than the minimum outer diameter of the power bellows 41. This allows a portion of the end of the power bellows 41 to be squeezed between the first flange ring 42 and the mounting base 10 (or the sliding member 20), thereby achieving a sealed connection between the two.

[0053] In some embodiments, the first flange ring 42 is a split structure along the circumferential direction. For example, the first flange ring 42 comprises two semi-annular structures, each of which has multiple connecting holes along its axial direction. At the end of the power bellows 41, the two semi-annular structures can be radially brought close together and snapped into place outside the smaller bellows ring of the power bellows 41, resulting in a simple structure and easy installation and removal.

[0054] In some embodiments, as Figure 2 As shown, the forward-pushing gripper robot 100 further includes a connecting member 32, which includes at least one of a first fastener 321 and a second fastener 322. Along the X-direction, the sliding member 20 is fixedly connected to the power link 31 via the first fastener 321. Along the radial direction of the power link 31, the sliding member 20 is fixedly connected to the power link 31 via the second fastener 322.

[0055] Illustratively, the first fastener 321 and the second fastener 322 may be bolts or screws, such as hexagon socket bolts, hexagon socket bolts, cross bolts, flat head bolts, and the like.

[0056] like Figure 3 As shown, the sliding member 20 includes a sliding body 21. Along the X direction, the sliding body 21 is provided with a first fastening hole 22. Figure 2 The power connecting rod 31 is inserted into the first fastening hole 22 from one end of the first fastening hole 22 along the X direction, and the end of the power connecting rod 31 inserted in the first fastening hole 22 is provided with a threaded hole along the X direction, and the first fastener 321 is inserted from the other end of the first fastening hole 22 along the X direction and connected to the power connecting rod 31, so that the power connecting rod 31 is fixedly connected to the sliding body 21 to limit the freedom of the two in the X direction and prevent the power connecting rod 31 from rotating relative to the sliding body 21.

[0057] like Figure 3As shown, the sliding body 21 is further provided with a plurality of second fastening holes 23. Taking the number of the second fastening holes 23 as an example, the plurality of second fastening holes 23 are spaced apart along the X direction. The second fastening holes 23 are arranged along the radial direction of the first fastening hole 22 and are in communication with the first fastening hole 22. The second fastening holes 23 are threaded hole structures, combined with Figure 2 By screwing the second fastener 322 into the second fastening hole 23 and making the end of the second fastener 322 squeeze and contact with the power link 31, while limiting the freedom of the power link 31 and the sliding body 21 in the X direction, the power link 31 is further prevented from rotating relative to the sliding body 21.

[0058] It should be noted that in the process of driving the sliding member 20 to slide back and forth along the X direction by the power connecting rod 31, the end of the power connecting rod 31 away from the sliding member 20 along the X direction can be a screw structure, so that the power connecting rod 31 can be driven to move back and forth along the X direction through the threaded cooperation between the rotating motor and the screw structure.

[0059] Alternatively, a linear motor, a cylinder structure or a hydraulic structure may be provided at the end of the power connecting rod 31 away from the sliding member 20 in the X direction, and connected to the power connecting rod 31 , which can also drive the power connecting rod 31 to move back and forth in the X direction.

[0060] In some embodiments, as Figure 2 As shown, the forward-pushing clamping manipulator 100 further includes a first linear bearing 43 . The first linear bearing 43 is installed between the mounting base 10 and the power connecting rod 31 in the transmission through hole 11 .

[0061] The first linear bearing 43 converts the sliding friction between the power connecting rod 31 and the mounting base 10 into rolling friction between the power connecting rod 31 and the first linear bearing 43. This provides low damping, smooth operation, high rigidity, and resistance to deformation, thereby improving the accuracy of the reciprocating movement of the power connecting rod 31 and the sliding member 20 in the X direction.

[0062] Alternatively, a bushing structure made of metal or non-metal material may be installed between the mounting base 10 and the power connecting rod 31 in the transmission through hole 11 , and this is not limited to this.

[0063] In some embodiments, as Figure 4 As shown, the forward-pushing gripping manipulator 100 further includes a guide assembly 50, which includes a guide link 51 and a guide bellows 52. Along the X direction, the mounting base 10 is provided with a positioning hole 12 toward the sliding member 20, and one end of the guide link 51 is inserted into the positioning hole 12. Figure 3The slider 20 is provided with a guide hole 24 along the X direction, and the guide link 51 is disposed in the guide hole 24 so that the slider 20 can slide along the length of the guide link 51. Along the X direction, the guide link 51 is inserted into the guide bellows 52 between the mounting base 10 and the slider 20, and both ends of the guide bellows 52 are sealed to the mounting base 10 and the slider 20.

[0064] As the slider 20 reciprocates in the X-direction driven by the power link 31, the sliding support provided by the guide link 51 provides enhanced structural strength and rigidity, ensuring high precision during the reciprocating movement of the slider 20 in the X-direction. Furthermore, the sealing provided by the guide bellows 52 prevents organic contamination caused by the lubricating oil dripping from the guide link 51. Furthermore, the static sealing structure of the guide bellows 52 prevents dust contamination caused by sliding friction between the two sealing components, thereby improving the machining accuracy and production yield of wafers and other intended objects.

[0065] It should be noted that, when the sliding member 20 includes a sliding body 21 , the sliding body 21 is provided with a guide hole 24 along the X direction for passing the guide link 51 .

[0066] For example, combined Figure 1 There are multiple guide assemblies 50, and multiple (such as two) guide assemblies 50 are spaced apart along the Y direction on opposite sides of the power link 31, and the Y direction is set perpendicular to the X direction to further improve the accuracy of the forward-pushing clamping robot 100.

[0067] Alternatively, the number of the guide assembly 50 may be one, and it is disposed on one side of the power connecting rod 31 along the Y direction, with a simple structure.

[0068] In some embodiments, as Figure 4 As shown, the guide assembly 50 also includes a second flange ring 53. Along the X direction, a second flange ring 53 is provided at one end of the guide bellows 52 close to the mounting base 10, and a second flange ring 53 is provided at one end of the guide bellows 52 close to the sliding member 20, so that the guide bellows 52 is sealedly connected to the mounting base 10 and the sliding member 20.

[0069] By providing two second flange rings 53 at both ends of the guide bellows 52 to connect with the mounting base 10 and the sliding member 20, the ends of the guide bellows 52 can be squeezed and positioned between the second flange rings 53 and the mounting base 10 (or sliding member 20), thereby sealing the guide bellows 52 with the mounting base 10 and the sliding member 20 and achieving a static sealing structure. This structure is simple and easy to install.

[0070] It should be noted that the structure of the second flange ring 53 can be set with reference to the first flange ring 42, such as the setting of the connecting through holes and the connecting threaded holes, and the circumferential split structure setting, which is not limited.

[0071] In some embodiments, as Figure 4 As shown, the guide assembly 50 further includes a second linear bearing 54 . The second linear bearing 54 is disposed between the sliding member 20 and the guide link 51 in the guide hole 24 .

[0072] The second linear bearing 54 can convert the sliding friction between the guide link 51 and the slider 20 into rolling friction between the guide link 51 and the second linear bearing 54. This has the characteristics of low damping, smooth operation, high rigidity and resistance to deformation, which helps to improve the accuracy of the reciprocating movement of the slider 20 in the X direction.

[0073] Alternatively, a bushing structure made of metal or non-metal material may be installed between the sliding member 20 and the guide link 51 in the guide hole 24 , and this is not limited to the above.

[0074] In some embodiments, as Figure 5 and Figure 6 As shown, the mounting base 10 includes a first base 13, a second base 14, and a support member 15. Along the X direction, the first base 13 is provided with a transmission through hole 11, and the first base 13 and the second base 14 are spaced apart. The first base 13 and the second base 14 are both provided with a positioning hole 12 on the side close to each other, and the sliding member 20 is located between the first base 13 and the second base 14. Along the X direction, one end of the support member 15 is fixedly connected to the first base 13, and the other end of the support member 15 is fixedly connected or detachably connected to the second base 14 to guide the connecting rod 51 (as shown in FIG. Figure 4 As shown) is squeezed and fixed between two oppositely arranged positioning holes 12 along the X direction.

[0075] Positioning holes 12 are provided on the sides of the first base 13 and the second base 14 that are adjacent to each other along the X-direction, for inserting and positioning the guide link 51, thereby enabling the sliding body 21 to move stably and accurately along the length of the guide link 51. Furthermore, the mounting base 10, which is connected by the first base 13, the second base 14, and the support member 15 to form an I-shaped or frame-shaped structure, helps to improve the bending strength and rigidity of the guide link 51, further enhancing the accuracy of the reciprocating movement of the sliding body 21.

[0076] like Figure 5As shown, along the X-direction, as the sliding body 21 reciprocates, the lengths of the guide links 51 on either side of the sliding body 21 continuously change. To this end, the guide links 51 between the sliding body 21 and the first base 13 are disposed within a guide bellows 52, which is sealed to the first base 13 and the sliding body 21. The guide links 51 between the sliding body 21 and the second base 14 are similarly disposed within a guide bellows 52, which is sealed to the second base 14 and the sliding body 21.

[0077] That is, both ends of the sliding body 21 along the X direction are sealed and connected by the guide bellows 52, so as to effectively prevent the lubricating oil at the guide connecting rod 51 from being contaminated by external organic matter, and also to avoid dust pollution caused by sliding friction between the dynamic sealing structures.

[0078] Furthermore, the provision of the guide bellows 52 and the power bellows 41 can prevent external water vapor or moisture from entering the second linear bearing 54 and the first linear bearing 43 , which is beneficial to improving the service life of the second linear bearing 54 and the first linear bearing 43 .

[0079] It should be noted that, in a guide assembly 50, as Figure 5 As shown, there are multiple second linear bearings 54 , and the multiple second linear bearings 54 are sequentially distributed along the X direction in the guide hole 24 .

[0080] Combine Figure 5 Taking the example of two second linear bearings 54, along the X direction, one second linear bearing 54 is located at the end of the guide hole 24 near the first base 13, and the other second linear bearing 54 is located at the end of the guide hole 24 near the second base 14. This ensures that the guide hole 24 and the guide link 51 remain coaxial. That is, during the long sliding stroke of the sliding body 21 along the X direction, the gap between the sliding body 21 and the guide link 51 is small, and the shaking is small, which helps to improve the accuracy of the equipment.

[0081] The positioning holes 12 on the first base 13 and the second base 14 are tapered holes, and both ends of the guide link 51 are corresponding conical structures, so that the guide link 51 inserted into the positioning holes 12 has better concentricity.

[0082] For example, along the Y direction, two guide assemblies 50 are spaced apart on opposite sides of the two power rods 31. That is, through the arrangement of the two guide links 51 and the four second linear bearings 54, the sliding body 21 has the characteristics of long travel and small wobble when sliding back and forth along the X direction, and has high precision.

[0083] In some embodiments, as Figure 1As shown, the sliding member 20 further includes a finger support 25 and a clamping portion 26. Along the Y direction, the two finger supports 25 are located on the sliding body 21 (as shown in FIG. Figure 3 ), and each finger support 25 is away from the first linear bearing 43 (as shown in the X direction). Figure 2 A clamping portion 26 is connected to one end of the finger support 25 away from the sliding body 21 along the X direction.

[0084] For example, if the X-direction is the left-right direction, when the sliding body 21 moves leftward along the X-direction, the finger supports 25 drive the clamping portion 26 away from the wafer or other object. When the sliding body 21 moves rightward along the X-direction, the finger supports 25 drive the clamping portion 26 toward and squeeze the wafer or other object. Because the clamping portion 26 is made of a flexible material such as rubber or silicone, it can securely and securely hold the wafer or other object without damage, enabling rapid gripping and transportation of the wafer or other object.

[0085] Although the embodiments of the present invention have been described with reference to the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations shall fall within the scope defined by the appended claims.

Claims

1. A forward-pushing gripping manipulator, characterized in that: include: A mounting base (10), wherein the mounting base (10) is provided with a transmission through hole (11) along a first linear direction; A power connecting rod (31), wherein the power connecting rod (31) is partially inserted into the transmission through hole (11); A sliding member (20), along the first straight line direction, the sliding member (20) is located on one side of the transmission through hole (11), and one end of the power connecting rod (31) close to the sliding member (20) is fixedly connected to the sliding member (20); And a power bellows (41), along the first straight direction, between the mounting base (10) and the sliding member (20), the power connecting rod (31) is inserted into the power bellows (41), and the two ends of the power bellows (41) are sealed and connected to the mounting base (10) and the sliding member (20).

2. The forward-pushing gripping manipulator according to claim 1, characterized in that: The forward-pushing clamping manipulator further comprises: A first flange ring (42) is provided along the first straight direction at one end of the power bellows (41) close to the mounting base (10), and the first flange ring (42) is provided at one end of the power bellows (41) close to the sliding member (20), so that the power bellows (41) is sealedly connected to the mounting base (10) and the sliding member (20).

3. The forward-pushing gripping manipulator according to claim 2, characterized in that: The first flange ring (42) is a split structure along the circumferential direction.

4. The forward-pushing gripping manipulator according to claim 1, characterized in that: The forward-pushing clamping manipulator further comprises: A first linear bearing (43) is installed in the transmission through hole (11) between the installation base (10) and the power connecting rod (31).

5. The forward-pushing gripping manipulator according to claim 1, characterized in that: The forward-pushing clamping manipulator further comprises a connecting member (32), wherein the connecting member (32) comprises: A first fastener (321), wherein the sliding member (20) and the power connecting rod (31) are connected along the first straight line direction through the first fastener (321); and / or a second fastener (322), along the radial direction of the power connecting rod (31), the sliding member (20) and the power connecting rod (31) are connected via the second fastener (322).

6. The forward-pushing gripping manipulator according to any one of claims 1 to 5, characterized in that: The forward-pushing clamping manipulator further comprises a guide assembly (50), wherein the guide assembly (50) comprises: A guide link (51), along the first straight direction, the mounting base (10) is provided with a positioning hole (12) toward the sliding member (20), and one end of the guide link (51) is inserted into the positioning hole (12); the sliding member (20) is provided with a guide hole (24) along the first straight direction, and the guide link (51) is passed through the guide hole (24) so ​​that the sliding member (20) is slidably arranged along the length direction of the guide link (51); And a guide bellows (52), along the first straight direction, between the mounting base (10) and the sliding member (20), the guide connecting rod (51) is inserted into the guide bellows (52), and the two ends of the guide bellows (52) are sealed and connected to the mounting base (10) and the sliding member (20).

7. The forward-pushing gripping manipulator according to claim 6, characterized in that: The guide assembly (50) further includes: A second flange ring (53) is provided along the first straight direction at one end of the guide bellows (52) close to the mounting base (10), and the second flange ring (53) is provided at one end of the guide bellows (52) close to the sliding member (20), so that the guide bellows (52) is sealedly connected to the mounting base (10) and the sliding member (20).

8. The forward-pushing gripping manipulator according to claim 6, characterized in that: The guide assembly (50) further includes: A second linear bearing (54) is provided in the guide hole (24), wherein the second linear bearing (54) is provided between the sliding member (20) and the guide link (51).

9. The forward-pushing gripping manipulator according to claim 8, characterized in that: The number of the guide assemblies (50) is multiple, and the multiple guide assemblies (50) are distributed at intervals on opposite sides of the power connecting rod (31) along a second linear direction, and the second linear direction is perpendicular to the first linear direction; And / or, the number of the second linear bearings (54) is multiple, and the multiple second linear bearings (54) are distributed in sequence in the guide hole (24) along the first linear direction.

10. The forward-pushing gripping manipulator according to claim 6, characterized in that: The mounting base (10) comprises: A first base (13), wherein the first base (13) is provided with the transmission through hole (11) along the first straight line direction; A second base (14), wherein the first base (13) and the second base (14) are spaced apart along the first straight line direction, the positioning hole (12) is provided on a side where the first base (13) and the second base (14) are close to each other, and the sliding member (20) is located between the first base (13) and the second base (14); And a support member (15), along the first straight line direction, one end of the support member (15) is fixedly connected to the first base (13), and the other end of the support member (15) is fixedly connected or detachably connected to the second base (14).

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