Miniature vacuum pump

Abstract

The utility model discloses a miniature vacuum pump, which relates to the technical field of air pumps and comprises a pump body and a valve body, the pump body comprises a shell and an air bag, a containing cavity is formed in the shell, and the air bag is arranged in the containing cavity; the valve body is arranged on one side of the pump body and provided with an air inlet and an air outlet. A first air chamber and a second air chamber which are not communicated with each other are formed in the air bag, the first air chamber can be communicated with the air inlet and the air outlet, and the containing cavity is unidirectionally communicated with the second air chamber through a communication channel. According to the technical scheme, the first air chamber and the second air chamber which are not communicated with each other are formed in the containing cavity through the air bag, the containing cavity is in one-way communication with the second air chamber through the communication channel, and after air in the containing cavity is communicated to the second air chamber, the negative pressure environment in the containing cavity generates vacuum suction force to the air bag; when vacuum suction force is generated on the side, close to the air inlet, of the air bag, pressure balance can be achieved on the two opposite sides of the air bag, and therefore the risk that the air bag is adsorbed upwards by the vacuum suction force is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of air pumps, in particular to a miniature vacuum pump. Background Art

[0002] A vacuum pump is a device used to extract gas from a container, creating a vacuum within it. Existing vacuum pumps have an air inlet chamber connected to the container, which in turn is connected to an airbag. When the vacuum pump creates a negative pressure in the inlet chamber during vacuuming, the inner wall of the airbag may be pulled upward, preventing the airbag from properly restoring itself. Consequently, gas from the container cannot effectively enter the airbag, affecting the pump's extraction efficiency. Utility Model Content

[0003] The main purpose of the utility model is to provide a micro vacuum pump, aiming to reduce the risk of an air bag of the micro vacuum pump being sucked upward by vacuum suction.

[0004] To achieve the above-mentioned purpose, the micro vacuum pump proposed in the present invention comprises:

[0005] The pump body comprises a shell and an air bag, wherein the shell is formed with an accommodating cavity, and the air bag is arranged in the accommodating cavity;

[0006] A valve body is provided on one side of the pump body, and the valve body has an air inlet and an air outlet;

[0007] The airbag is formed with a first air chamber and a second air chamber which are not connected to each other. The first air chamber can be connected to the air inlet and the air outlet. The accommodating cavity is unidirectionally connected to the second air chamber through a connecting channel.

[0008] In one embodiment, the valve body includes a valve seat and a valve cover, the valve seat is arranged between the pump body and the valve cover, and forms a connecting cavity with the valve cover, the connecting channel includes a first connecting section, the connecting cavity and a second connecting section distributed along the upstream and downstream, the first connecting section is connected to the accommodating cavity, and the second connecting section is connected to the second air chamber.

[0009] In one embodiment, one of the first communicating section and the second communicating section is provided with a first check valve, and the first check valve is used to allow the accommodating cavity to communicate with the second air chamber in a one-way manner.

[0010] In one embodiment, the valve seat is provided with a first communicating hole connected to the accommodating cavity and the communicating cavity, and the shell is provided with a connecting pipe portion, one end of the connecting pipe is connected to the accommodating cavity, and the other end is inserted into the first communicating hole, and the first communicating hole and the connecting pipe portion together form the first communicating section.

[0011] In one embodiment, the valve seat is provided with a second communicating hole communicating with the second air chamber and the communicating cavity to form the second communicating section, and the first check valve is provided corresponding to the second communicating hole.

[0012] In one embodiment, a plurality of mutually separated grooves are formed on the side of the valve cover facing the valve seat, and the valve seat is blocked by the notches of the plurality of grooves so that the plurality of grooves form the connecting cavity, the air inlet cavity and the air outlet cavity that are not connected to each other, the air inlet cavity is connected to the air inlet and the first air chamber, and the air outlet cavity is connected to the air outlet and the first air chamber.

[0013] In one embodiment, the valve seat includes a first valve plate and a second valve plate, the second valve plate is arranged between the first valve plate and the valve cover, the connecting cavity and the air inlet cavity are distributed on the periphery of the air outlet cavity, the second valve plate is correspondingly arranged at the bottom of the connecting cavity and the air inlet cavity, and a clearance port is provided corresponding to the air outlet cavity, and the clearance port is provided with a second check valve for allowing the first air chamber to conduct one-way to the air outlet cavity.

[0014] In one embodiment, a plurality of limiting ribs are arranged at intervals on the edge of the first valve plate, and a limiting protrusion extending outward is formed on the edge of the second valve plate, and the limiting protrusion is correspondingly clamped between two adjacent limiting ribs.

[0015] In one embodiment, the limiting rib is provided at the corner of the first valve plate, a corresponding clearance gap is provided at the corner of the second valve plate, and a connecting portion is provided at the corner of the valve cover, the connecting portion is provided in the clearance gap and abuts the limiting rib.

[0016] In one embodiment, the airbag forms a plurality of mutually unconnected first air chambers, the number of the first air chambers is greater than the number of the second air chambers, the volume of the air inlet cavity is greater than the volume of the connecting cavity, and the air inlet cavity is distributed corresponding to the plurality of the first air chambers.

[0017] The technical solution of the present utility model forms a first air chamber and a second air chamber that are not connected to each other in the accommodating cavity through the airbag, and the accommodating cavity is unidirectionally connected to the second air chamber through a connecting channel. After the gas in the accommodating cavity is conducted to the second air chamber, the negative pressure environment in the accommodating cavity generates a vacuum suction force on the airbag. When the airbag generates vacuum suction force on the side close to the air inlet, the pressure balance can be achieved on the opposite sides of the airbag, thereby reducing the risk of the airbag of the micro vacuum pump being adsorbed upward by the vacuum suction force. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0019] Figure 1 A schematic structural diagram of an embodiment of a micro vacuum pump provided by the present utility model;

[0020] Figure 2 for Figure 1 Exploded diagram of a micro vacuum pump;

[0021] Figure 3 for Figure 2 Exploded view of the middle valve seat;

[0022] Figure 4 for Figure 2 Schematic diagram of the structure of the middle valve cover;

[0023] Figure 5 for Figure 1 Cross-section of the micro vacuum pump along M1-M1;

[0024] Figure 6 for Figure 1 Cross-section of the micro vacuum pump along M2-M2;

[0025] Figure 7 for Figure 1 Cross-sectional view of the micro vacuum pump along M3-M3.

[0026] Description of Figure Numbers:

[0027] 10. Micro vacuum pump; 100. Pump body; 200. Valve seat; 300. Valve cover; 400. First check valve; 500. Second check valve; 110. Shell; 111. Accommodating chamber; 112. Connecting pipe; 120. Airbag; 121. First air chamber; 122. Second air chamber; 210. First valve plate; 211. Position limiting rib; 220. Second valve plate; 221. Make way port; 222. Position limiting convex portion; 223. Make way notch; 230. First connecting hole; 240. Second connecting hole; 310. Air inlet; 320. Air outlet; 330. Connecting chamber; 340. Air inlet chamber; 350. Air outlet chamber; 360. Connecting part.

[0028] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0030] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0031] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of such features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0032] The utility model provides a micro vacuum pump 10 .

[0033] See also Figure 2 、 Figures 5 to 7 In one embodiment of the present utility model, the micro vacuum pump 10 includes a pump body 100 and a valve body. The pump body 100 includes a shell 110 and an air bag 120. The shell 110 is formed with a accommodating cavity 111, and the air bag 120 is arranged in the accommodating cavity 111; the valve body is arranged on one side of the pump body 100, and the valve body has an air inlet 310 and an air outlet 320; the air bag 120 is formed with a first air chamber 121 and a second air chamber 122 that are not connected to each other, the first air chamber 121 can be connected to the air inlet 310 and the air outlet 320, and the accommodating cavity 111 is unidirectionally connected to the second air chamber 122 through a connecting channel.

[0034] Specifically, the housing 110 is formed with a housing chamber 111, and the airbag 120 is arranged in the housing chamber 111. An eccentric component is also provided in the housing chamber 111. The eccentric component is connected to the airbag 120 and the motor under the pump body 100. Under the action of the eccentric component, the airbag 120 can swing up and down, so that the first air chamber 121 and the second air chamber 122 can expand and compress. Among them, the first air chamber 121 is connected to the pumped container through the air inlet 310 and is connected to the atmosphere through the air outlet 320. When the first air chamber 121 expands, the air flow in the pumped container is discharged from the air inlet 310 according to the pressure. Figure 5 and Figure 6 The arrow in the figure indicates the direction of flow and enters the first air chamber 121; when the first air chamber 121 is compressed, the gas in the first air chamber 121 flows out of the air outlet 320 according to the Figure 7 The arrow in the figure indicates the direction of discharge, so that the first air chamber 121 can pump gas and realize the vacuum of the pumped container. The second air chamber 122 is independent of the first air chamber 121 and does not interfere with each other. Initially, the second air chamber 122 begins to expand under the action of the eccentric component, and the gas in the accommodating cavity 111 is discharged according to the direction of discharge. Figure 5 and Figure 6 The arrow in the figure indicates the direction of flow and enters the second air chamber 122, creating a negative pressure environment within the accommodating chamber 111. This creates a vacuum suction force within the accommodating chamber 111 on the airbag 120. The communication channel acts as a one-way airflow channel. After entering the second air chamber 122, the gas within the accommodating chamber 111 does not flow back, thereby maintaining a negative pressure in the accommodating chamber 111.

[0035] In this way, when the first air chamber 121 is performing piston movement, a vacuum force is formed on the side of the air bag 120 toward the air inlet 310, causing the inner wall of the first air chamber 121 to be adsorbed on the valve body toward the air inlet 310. However, because a vacuum force is also generated in the accommodating cavity 111 on the other side of the air bag 120 away from the air inlet 310, a pressure balance is formed on the opposite sides of the air bag 120, which can reduce the risk of the inner wall of the first air chamber 121 being adsorbed on the valve body, so that the first air chamber 121 can recover in time and expand and compress normally, so that the gas in the pumped container can enter the first air chamber 121 in a timely and effective manner, thereby ensuring the pumping efficiency of the micro vacuum pump 10.

[0036] The technical solution of the present utility model forms a first air chamber 121 and a second air chamber 122 that are not connected to each other in the accommodating chamber 111 through the airbag 120, and the accommodating chamber 111 is unidirectionally connected to the second air chamber 122 through a connecting channel. After the gas in the accommodating chamber 111 is conducted to the second air chamber 122, the negative pressure environment in the accommodating chamber 111 generates a vacuum suction force on the airbag 120. When the airbag 120 generates vacuum suction force on the side close to the air inlet 310, the opposite sides of the airbag 120 can achieve pressure balance, thereby reducing the risk of the airbag 120 of the micro vacuum pump 10 being adsorbed upward by the vacuum suction force.

[0037] In one embodiment, see Figure 2 、 Figure 5 and Figure 6 The valve body includes a valve seat 200 and a valve cover 300. The valve seat 200 is arranged between the pump body 100 and the valve cover 300, and forms a connecting cavity 330 with the valve cover 300. The connecting channel includes a first connecting section, a connecting cavity 330 and a second connecting section distributed along the upstream and downstream. The first connecting section is connected to the accommodating cavity 111, and the second connecting section is connected to the second air chamber 122.

[0038] The first connecting section is connected to the accommodating chamber 111 as the upstream of the connecting passage. The gas in the accommodating chamber 111 is Figure 5 The arrow in the figure indicates the direction of flow and enters the communication cavity 330. The communication cavity 330 is formed by the valve seat 200 and the valve cover 300. The gas in the accommodating cavity 111 changes its flow direction through the communication cavity 330. Figure 6 The arrow indicates the direction of flow from the second connecting section to the second air chamber 122, thereby unidirectionally conducting the gas in the accommodating chamber 111 to the second air chamber 122, so that the accommodating chamber 111 forms a negative pressure environment, thereby generating a downward vacuum suction force on the airbag 120, thereby reducing the risk of the airbag 120 being adsorbed upward by the vacuum suction force.

[0039] In one embodiment, see Figure 6 One of the first communicating section and the second communicating section is provided with a first check valve 400 , and the first check valve 400 is used to allow the accommodating cavity 111 to communicate with the second air chamber 122 in a one-way manner.

[0040] When gas flows from the accommodating chamber 111 to the second air chamber 122, the first check valve 400 opens, allowing the fluid to pass. When gas attempts to flow back from the second air chamber 122 to the accommodating chamber 111, the first check valve 400 closes, preventing reverse flow, thereby maintaining a negative pressure in the accommodating chamber 111. The first check valve 400 can be located in the first connecting section to prevent gas from flowing back from the connecting chamber 330 into the accommodating chamber 111. The first check valve 400 can also be located in the second connecting section to prevent gas from flowing back from the second air chamber 122 into the connecting chamber 330. The first check valve 400 can be a spring check valve, a gravity check valve, a diaphragm check valve, or an umbrella valve. In other embodiments, the first check valve 400 is located in both the first and second connecting sections, providing dual protection and further ensuring that gas from the second air chamber 122 does not flow back into the accommodating chamber 111.

[0041] In one embodiment, see Figure 2 and Figure 5 The valve seat 200 is provided with a first communicating hole 230 connected to the accommodating chamber 111 and the communicating chamber 330, and the shell 110 is provided with a connecting pipe portion 112, one end of the connecting pipe is connected to the accommodating chamber 111, and the other end is inserted into the first communicating hole 230, and the first communicating hole 230 and the connecting pipe portion 112 together form a first communicating section.

[0042] The first connecting section is composed of a first connecting hole 230 and a connecting pipe portion 112. The first connecting hole 230 is provided on the valve seat 200 and serves to connect the accommodating chamber 111 with the connecting chamber 330. The connecting pipe portion 112 is provided on the housing 110, with one end communicating with the accommodating chamber 111 and the other end inserted into the first connecting hole 230. Gas within the accommodating chamber 111 can flow from the interior of the connecting pipe portion 112 into the connecting chamber 330 along the direction in which the connecting pipe portion 112 extends. The connecting pipe portion 112 not only guides gas flow but also provides a fixed connection between the housing 110 and the valve seat 200. By inserting the connecting pipe portion 112 into the first connecting hole 230, the housing 110 and the valve seat 200 can be quickly and accurately connected, reducing the risk of displacement between the housing 110 and the valve seat 200. Furthermore, the outer wall of the connecting pipe portion 112 and the inner wall of the first connecting hole 230 are tightly matched to prevent the connecting pipe portion 112 from shaking in the first connecting hole 230 , thereby further improving the accuracy of the connection between the shell 110 and the valve seat 200 .

[0043] In one embodiment, see Figure 2 and Figure 6 The valve seat 200 is provided with a second communicating hole 240 communicating with the second air chamber 122 and the communicating cavity 330 to form a second communicating section, and the first check valve 400 is provided corresponding to the second communicating hole 240 .

[0044] The valve seat 200 is provided with a second communication hole 240, which forms a second communication section, ensuring that gas can flow from the communication cavity 330 to the second air chamber 122. A first check valve 400 is provided corresponding to the second communication hole 240, ensuring that gas can only flow from the communication cavity 330 to the second air chamber 122 in one direction, preventing gas from flowing back from the second air chamber 122 to the communication cavity 330. Specifically, the valve seat 200 is provided with a mounting portion, and the second communication hole 240 is arranged around the mounting portion. The first check valve 400 is mounted on the valve seat 200 through the mounting portion and blocks the second communication hole 240, thereby achieving unidirectional flow in the second communication section.

[0045] In one embodiment, see Figure 2 、 Figure 4 and Figure 6 A plurality of mutually separated grooves are formed on the side of the valve cover 300 facing the valve seat 200, and the valve seat 200 is blocked by the notches of the plurality of grooves so that the plurality of grooves form a communicating cavity 330, an air inlet cavity 340 and an air outlet cavity 350 that are not connected to each other. The air inlet cavity 340 is connected to the air inlet 310 and the first air chamber 121, and the air outlet cavity 350 is connected to the air outlet 320 and the first air chamber 121.

[0046] The valve cover 300 is formed with a plurality of mutually separated grooves on the side facing the valve seat 200. By shielding the valve seat 200 from the notches of these grooves, one of the grooves forms a connecting cavity 330, connecting the first connecting section and the second connecting section; at least one other groove forms an air inlet cavity 340, connecting the air inlet 310 and the first air chamber 121; and at least one other groove forms an air outlet cavity 350, connecting the air outlet 320 and the first air chamber 121. The connecting cavity 330, the air inlet cavity 340, and the air outlet cavity 350 are primarily formed in the valve cover 300, while the valve seat 200 primarily serves to seal and separate the cavities, preventing them from communicating with each other. This prevents gas leakage between the connecting cavity 330, the air inlet cavity 340, and the air outlet cavity 350, ensuring that the first air chamber 121 can evacuate the container being evacuated and the second air chamber 122 can evacuate the gas within the accommodating chamber 111.

[0047] In one embodiment, see Figure 2 、 Figure 3 and Figure 6 The valve seat 200 includes a first valve plate 210 and a second valve plate 220. The second valve plate 220 is arranged between the first valve plate 210 and the valve cover 300. The communicating cavity 330 and the air inlet cavity 340 are distributed on the periphery of the air outlet cavity 350. The second valve plate 220 is correspondingly arranged at the bottom of the communicating cavity 330 and the air inlet cavity 340, and a clearance port 221 is provided corresponding to the air outlet cavity 350. The clearance port 221 is provided with a second check valve 500 for allowing the first air chamber 121 to flow unidirectionally to the air outlet cavity 350.

[0048] The first valve plate 210 is located between the pump body 100 and the second valve plate 220, providing support and separation. The second valve plate 220 is located between the first valve plate 210 and the valve cover 300, corresponding to the bottoms of the connecting cavity 330 and the air inlet cavity 340, and has a clearance port 221 corresponding to the air outlet cavity 350. The second valve plate 220 isolates the air path through the valve seat 200, preventing air leakage from the first connecting hole 230, the second connecting hole 240, and the first air chamber 121, thereby improving the sealing performance of the valve seat 200 and reducing noise generated by gas flow. Furthermore, the valve seat 200, consisting of a first valve plate and a second valve plate 220, is easier to manufacture. The outlet cavity 350 is located in the center of the valve cover 300, corresponding to the outlet port 320. The connecting cavity 330 and the inlet cavity 340 are distributed around the periphery of the outlet cavity 350. The outlet cavity 350 communicates with the first air chamber 121 through the clearance port 221 of the second valve plate 220. A second check valve 500 is provided at the clearance port 221 of the second valve plate 220 to ensure that gas can only flow from the first air chamber 121 to the outlet cavity 350 in one direction, preventing gas backflow.

[0049] In one embodiment, see Figure 2 and Figure 3 The edge of the first valve plate 210 is provided with a plurality of limiting ribs 211 at intervals, and the edge of the second valve plate 220 is formed with a limiting protrusion 222 extending outward, and the limiting protrusion 222 is correspondingly clamped between two adjacent limiting ribs 211.

[0050] Multiple limiting ribs 211 are spaced apart along the edge of the first valve plate 210 to limit the position of the second valve plate 220. A limiting protrusion 222 extending outward from the edge of the second valve plate 220 is positioned between two adjacent limiting ribs 211, ensuring accurate positioning and relative fixation of the second valve plate 220. The cooperation between the limiting ribs 211 and the limiting protrusions 222 ensures the relative fixation of the first and second valve plates 210, 220, and enhances the sealing effect between the first and second valve plates 210, 220. This ensures that the various gas paths passing through the first and second valve plates 210, 220 will not be misaligned, thereby ensuring the normal operation of the micro vacuum pump 10.

[0051] In one embodiment, see Figure 3 and Figure 4 The limiting rib 211 is arranged at the corner of the first valve plate 210, and the corner of the second valve plate 220 is correspondingly provided with a clearance notch 223. The corner of the valve cover 300 is provided with a connecting portion 360, which is arranged in the clearance notch 223 and abuts the limiting rib 211.

[0052] The first valve plate 210 and the second valve plate 220 are generally rectangular. Limiting ribs 211 are located at the corners of the first valve plate 210, and clearance notches 223 are located at the corners of the second valve plate 220. The edges of the limiting ribs 211 and the clearance notches 223 form a roughly triangular limiting space. The connecting portion 360 is embedded in this limiting space, enabling precise positioning of the valve cover 300 and the valve seat 200, improving assembly efficiency of the valve cover 300 and the valve seat 200; at the same time, it ensures a tight connection between the valve cover 300 and the valve seat 200, enhancing the stability of the overall structure.

[0053] In one embodiment, see Figure 2 and Figure 4 The airbag 120 forms a plurality of first air chambers 121 that are not connected to each other. The number of the first air chambers 121 is greater than the number of the second air chambers 122 , and the volume of the air inlet cavity 340 is greater than the volume of the connecting cavity 330 . The air inlet cavity 340 is distributed corresponding to the plurality of first air chambers 121 .

[0054] After the second air chamber 122 evacuates the gas within the receiving chamber 111, it does not participate in the subsequent vacuuming of the container being evacuated. Therefore, only one second air chamber 122 may be provided to reduce production costs and the space occupied by the second air chamber 122. In other embodiments, multiple second air chambers 122 may be provided. If one second air chamber 122 fails, the remaining second air chambers 122 can still maintain the negative pressure in the receiving chamber 111.

[0055] The airbag 120 forms a plurality of mutually disconnected first air chambers 121, which are greater in number than the second air chambers 122. Multiple first air chambers 121 evacuate the container being evacuated, thereby improving the vacuuming efficiency of the micro-vacuum pump 10. Furthermore, even if one of the first air chambers 121 malfunctions, the remaining first air chambers 121 can continue to operate, ensuring the stability and reliability of the micro-vacuum pump 10.

[0056] The volume of the air inlet cavity 340 is greater than that of the connecting cavity 330 and corresponds to the distribution of the multiple first air chambers 121, ensuring that the gas in the air inlet cavity 340 is evenly distributed to each first air chamber 121, thereby improving the efficiency and reliability of the micro-vacuum pump 10. Furthermore, the design of the air inlet cavity 340 corresponding to the multiple first air chambers 121 minimizes the path that the gas takes when entering the first air chambers 121, reducing airflow resistance and allowing for rapid distribution to each first air chamber 121. This reduces the time that the gas spends in the path between the air inlet cavity 340 and the first air chambers 121, thereby improving the response speed of the micro-vacuum pump 10.

[0057] The above description is merely an exemplary embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made using the contents of the present invention specification and drawings under the technical concept of the present invention, or direct / indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A micro vacuum pump, characterized in that: include: The pump body comprises a shell and an air bag, wherein the shell is formed with an accommodating cavity, and the air bag is arranged in the accommodating cavity; A valve body is provided on one side of the pump body, and the valve body has an air inlet and an air outlet; The airbag is formed with a first air chamber and a second air chamber which are not connected to each other. The first air chamber can be connected to the air inlet and the air outlet. The accommodating cavity is unidirectionally connected to the second air chamber through a connecting channel.

2. The micro vacuum pump according to claim 1, wherein The valve body includes a valve seat and a valve cover. The valve seat is arranged between the pump body and the valve cover and forms a communicating cavity with the valve cover. The communicating channel includes a first communicating section, the communicating cavity and a second communicating section distributed along the upstream and downstream. The first communicating section is connected to the accommodating cavity, and the second communicating section is connected to the second air chamber.

3. The micro vacuum pump according to claim 2, wherein: One of the first communicating section and the second communicating section is provided with a first check valve, and the first check valve is used to allow the accommodating cavity to communicate with the second air chamber in a one-way manner.

4. The micro vacuum pump according to claim 3, wherein: The valve seat is provided with a first communicating hole connected to the accommodating cavity and the communicating cavity, and the shell is provided with a connecting pipe portion, one end of the connecting pipe is connected to the accommodating cavity, and the other end is inserted into the first communicating hole, and the first communicating hole and the connecting pipe portion together form the first communicating section.

5. The micro vacuum pump according to claim 3, wherein: The valve seat is provided with a second communicating hole communicating with the second air chamber and the communicating cavity to form the second communicating section, and the first check valve is provided corresponding to the second communicating hole.

6. The micro vacuum pump according to claim 2, wherein: A plurality of mutually separated grooves are formed on the side of the valve cover facing the valve seat, and the valve seat is blocked by the notches of the plurality of grooves so that the plurality of grooves form the connecting cavity, the air inlet cavity and the air outlet cavity that are not connected to each other, the air inlet cavity is connected to the air inlet and the first air chamber, and the air outlet cavity is connected to the air outlet and the first air chamber.

7. The micro vacuum pump according to claim 6, wherein: The valve seat includes a first valve plate and a second valve plate, the second valve plate is arranged between the first valve plate and the valve cover, the communicating cavity and the air inlet cavity are distributed on the outer periphery of the air outlet cavity, the second valve plate is correspondingly arranged at the cavity bottoms of the communicating cavity and the air inlet cavity, and a clearance port is provided corresponding to the air outlet cavity, and the clearance port is provided with a second check valve for allowing the first air chamber to unidirectionally conduct to the air outlet cavity.

8. The micro vacuum pump according to claim 7, wherein: A plurality of limiting ribs are arranged at intervals on the edge of the first valve plate, and a limiting convex portion extending outward is formed on the edge of the second valve plate. The limiting convex portion is correspondingly clamped between two adjacent limiting ribs.

9. The micro vacuum pump according to claim 8, wherein The limiting rib is arranged at the corner of the first valve plate, and the corner of the second valve plate is correspondingly provided with a clearance gap. The corner of the valve cover is provided with a connecting part, which is arranged in the clearance gap and abuts the limiting rib.

10. The micro vacuum pump according to claim 6, wherein: The airbag forms a plurality of mutually unconnected first air chambers, the number of the first air chambers is greater than the number of the second air chambers, the volume of the air inlet cavity is greater than the volume of the connecting cavity, and the air inlet cavity is distributed corresponding to the plurality of the first air chambers.

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