Online sampling device for semiconductor precursor material production

Abstract

The utility model belongs to the technical field of sampling devices, and relates to an on-line sampling device for semiconductor precursor material production, which comprises a U-shaped sampling pipe arranged on a conveying main pipe, a sampling straight pipe valve and a sampling one-way valve are arranged on the horizontal part of the sampling pipe, and the sampling straight pipe valve is connected with the sampling one-way valve. A sampling branch pipe is arranged between the sampling straight pipe valve and the sampling one-way valve, a sampling port valve is arranged on the sampling branch pipe, the end part of the sampling branch pipe is connected with a sampling steel bottle, the sampling steel bottle comprises a steel bottle body and a bottle opening valve connected to the bottle opening of the steel bottle body, one end of the bottle opening valve is connected with a VCR female head, and the other end of the bottle opening valve is connected with a VCR male head. The end part of the sampling branch pipe is connected with a VCR male head, and a sampling port pressure gauge is arranged between the VCR male head and the sampling port valve. The sampling device can prevent residual air in the sampling bottle from polluting materials, the purity of the materials is ensured, the sampling straight pipe can be maintained without disconnecting the conveying main pipe, and the production progress is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of sampling devices, in particular to an online sampling device for semiconductor precursor material production. Background Art

[0002] In atomic layer deposition semiconductor processes like ALD and CVD, the precursor source is a core material. During the production process, it is necessary to periodically sample and monitor the purity and other relevant parameters of this material.

[0003] Patent No. CN202220674226.X discloses a pipeline liquid sampling device, including a pipeline and a rigid sampling tube, wherein a three-way valve is provided at the connection point between the pipeline and the sampling tube, and connecting flanges are provided at both ends of the three-way valve; the end of the sampling tube away from the pipeline is connected to a bottle cap, and a through hole for liquid to pass through is provided on the bottle cap, and a receiving bottle or sampling bottle is threadedly connected to the bottom of the bottle cap; when the receiving bottle is connected, the sampling tube and the pipeline are in a non-connected state; when the sampling bottle is connected, the sampling tube and the pipeline are connected to each other through the three-way valve. Therefore, the utility model proposes an online sampling device for semiconductor precursor material production. When sampling is required, unscrew the receiving bottle 7 and replace it with a clean sampling bottle 6. Slowly turn the handle so that the liquid in the flowing state enters the interior of the sampling bottle 6 through the three-way valve 2, the sampling tube 4, and the insertion tube 9, thereby realizing rapid sampling of the flowing liquid and improving sampling efficiency. The three-way valve 2 is installed on the main body of the pipeline 1. When the three-way valve 2 fails, the liquid in the pipeline 1 needs to be cut off before maintenance can be carried out, which affects the production progress. The sampling bottle 6 contains air, which will cause sample contamination when sampling some materials that easily react with air. Therefore, the utility model provides an online sampling device for semiconductor precursor material production. Utility Model Content

[0004] The main purpose of the utility model is to provide an online sampling device for semiconductor precursor material production, which can prevent the residual air in the sampling bottle from contaminating the material during the sampling process, and the sampling components can be replaced or maintained without disconnecting the conveying main pipe, thereby ensuring production progress.

[0005] The utility model achieves the above-mentioned purpose through the following technical solutions: an online sampling device for semiconductor precursor material production, comprising a sampling tube arranged on a conveying main pipe, the sampling tube being U-shaped, the horizontal portion of the sampling tube being provided with a sampling straight tube valve and a sampling one-way valve, a sampling branch tube being provided between the sampling straight tube valve and the sampling one-way valve, a sampling port valve being provided on the sampling branch tube, a sampling steel cylinder being connected to the end of the sampling branch tube, the sampling steel cylinder comprising a steel cylinder body and a bottle mouth valve connected to the bottle mouth of the steel cylinder body, one end of the bottle mouth valve being connected to a VCR female head, the end of the sampling branch tube being connected to a VCR male head, a sampling port pressure gauge being provided between the VCR male head and the sampling port valve.

[0006] Preferably, the axis of the vertical portion of the sampling tube forms an angle of 60° with the axis of the main conveying tube, and the connection between the vertical portion and the horizontal portion of the sampling tube forms an arc-shaped transition.

[0007] Preferably, an inclined tube is formed on the main conveying pipe by drawing a hole, and the end of the sampling branch pipe is welded and fixed to the inclined tube.

[0008] Preferably, the sampling branch tube and the cylinder body are both made of stainless steel.

[0009] The beneficial effects of the technical solution of this utility model are:

[0010] The mouth of the steel cylinder body is provided with a bottle mouth valve. The bottle mouth valve of the steel cylinder body is opened, the steel cylinder body is evacuated by a vacuum pump, and then the bottle mouth valve is closed to keep the steel cylinder body in a vacuum state, thereby preventing residual air in the bottle from contaminating the material and ensuring the purity of the material.

[0011] Close the sampling straight pipe valve. At this time, the sampling one-way valve will ensure that the material in the conveying main pipe cannot flow back into the sampling straight pipe. Therefore, the sampling port valve or the sampling straight pipe can be maintained as needed to ensure the production progress of the material. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a layout diagram of the online sampling device for semiconductor precursor material production in operation according to an embodiment.

[0013] The numbers in the figure represent:

[0014] 1. Delivery main pipe; 2. Sampling pipe; 3. Sampling straight pipe valve; 4. Sampling one-way valve; 5. Sampling branch pipe; 6. Sampling port valve; 7. Sampling cylinder; 8. Cylinder body; 9. Bottle mouth valve; 10. Pressure gauge; 11. Inclined tube. DETAILED DESCRIPTION

[0015] The present invention will be further described in detail below with reference to specific embodiments.

[0016] Example:

[0017] like Figure 1 As shown, the utility model is an online sampling device for semiconductor precursor material production, including a sampling tube 2 arranged on a conveying main pipe 1, the sampling tube 2 is U-shaped, and the horizontal part of the sampling tube 2 is provided with a sampling straight pipe valve 3 and a sampling one-way valve 4, a sampling branch pipe 5 is provided between the sampling straight pipe valve 3 and the sampling one-way valve 4, a sampling port valve 6 is provided on the sampling branch pipe 5, and a sampling cylinder 7 is connected to the end of the sampling branch pipe 5, the sampling cylinder 7 includes a cylinder body 8 and a bottle mouth valve 9 connected to the bottle mouth of the cylinder body 8, one end of the bottle mouth valve 9 is connected to a VCR female connector, the end of the sampling branch pipe 5 is connected to a VCR male connector, and a sampling port pressure gauge 10 is provided between the VCR male connector and the sampling port valve 6.

[0018] The inner walls of the sampling tube 2 and the sampling branch tube 5 are both electrochemically polished to form a layer of chromium-rich oxide film on their surfaces through electrochemistry. The inner surface roughness is ≤0.3μm, which can effectively improve their surface corrosion resistance.

[0019] The axis of the vertical portion of the sampling tube 2 forms an angle of 60° with the axis of the main conveying tube 1 , and the connection between the vertical portion and the horizontal portion of the sampling tube 2 forms an arc-shaped transition, allowing the material to pass smoothly in the pipeline.

[0020] The conveying main pipe 1 is processed with an inclined tube 11 through a hole-drawing process, and the end of the sampling branch pipe 5 is welded and fixed to the inclined tube 11, thereby realizing pipe-to-pipe welding, making the welding point smooth and flat, preventing solder from penetrating into the pipeline, reducing turbulence, and preventing material deposition.

[0021] The sampling tube 2, the sampling branch tube 5 and the cylinder body 8 are all made of ultra-pure 316L stainless steel. This material has excellent corrosion resistance and oxidation resistance, fewer non-metallic impurities, and higher material purity, which improves the process purity of the entire system and can minimize the impact of material factors on the contamination of the medium in the system.

[0022] The working process of this application is as follows: During normal production, the material passes through the conveying main pipe 1 and the sampling pipe 2. When sampling is required, the bottle mouth valve 9 at the cylinder body 8 is opened, the cylinder body 8 is evacuated by a vacuum pump, and then the bottle mouth valve 9 is closed to keep the cylinder body 8 in a vacuum state, thereby preventing the residual air in the bottle from contaminating the material. The cylinder body 8 is connected to the sampling branch pipe 5 through a VCR connector, and the bottle mouth valve 9 is opened. The sampling port pressure gauge 10 shows the vacuum reading in the sampling bottle body. The sampling port valve 6 is opened to allow the material to flow along the sampling port. The sampling branch pipe 5 enters the cylinder body 8. When the pressure displayed by the sampling port pressure gauge 10 is consistent with the pressure of the delivery main pipe 1, it means that the material in the cylinder body 8 has been filled. At this time, the sampling port valve 6 and the bottle mouth valve 9 are opened respectively, and the cylinder body 8 can be removed from the sampling branch pipe 5. The bottle mouth valve 9 and the end of the sampling branch pipe 5 are blocked by a special plug; the sampling straight pipe valve 3 is closed. At this time, the sampling one-way valve 4 will ensure that the material in the delivery main pipe 1 cannot flow back into the sampling straight pipe, so that the sampling port valve 6 or the sampling straight pipe can be maintained as needed.

[0023] The above descriptions are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, and these all fall within the scope of protection of the present invention.

Claims

1. An online sampling device for semiconductor precursor production, characterized by: The utility model comprises a sampling tube arranged on the conveying main pipe, wherein the sampling tube is U-shaped, and a sampling straight pipe valve and a sampling one-way valve are arranged on the horizontal part of the sampling tube, a sampling branch pipe is arranged between the sampling straight pipe valve and the sampling one-way valve, a sampling port valve is arranged on the sampling branch pipe, and a sampling steel cylinder is connected to the end of the sampling branch pipe, the sampling steel cylinder comprises a steel cylinder body and a bottle mouth valve connected to the bottle mouth of the steel cylinder body, one end of the bottle mouth valve is connected to a VCR female connector, the end of the sampling branch pipe is connected to a VCR male connector, and a sampling port pressure gauge is arranged between the VCR male connector and the sampling port valve.

2. The online sampling device for semiconductor precursor production according to claim 1, characterized in that: The axis of the vertical portion of the sampling tube forms an angle of 60° with the axis of the main conveying tube, and the connection between the vertical portion and the horizontal portion of the sampling tube forms an arc-shaped transition.

3. The online sampling device for semiconductor precursor production according to claim 2, characterized in that: An inclined tube is formed on the main conveying pipe by drawing a hole, and the end of the sampling branch pipe is welded and fixed to the inclined tube.

4. The online sampling device for semiconductor precursor production according to claim 1, characterized in that: The sampling branch pipe and the cylinder body are both made of stainless steel.

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