Supporting carrier

Abstract

The utility model belongs to the technical field of semiconductors, and provides a supporting carrier which comprises a carrier body and a supporting part, a first through groove and a second through groove are formed in the carrier body, the first through groove is used for containing a to-be-tested piece, and the supporting part is arranged on the groove wall of the first through groove and extends into the first through groove to support the to-be-tested piece. The plurality of second through grooves surround the first through groove and are communicated with the first through groove; the first through groove comprises a first groove wall and a second groove wall which are oppositely arranged, the groove wall of the first through groove is provided with a first vertex angle and a second vertex angle at the two ends of the first groove wall, and the supporting part comprises a first supporting part located at the first vertex angle, a second supporting part located at the second vertex angle and a third supporting part connected to the second groove wall. During use, the to-be-tested piece is positioned through the first vertex angle and the second vertex angle, and the risk that the to-be-tested piece collides with the groove wall of the first through groove is reduced. According to the supporting carrier, the protection effect on the to-be-tested piece is effectively improved, and the use convenience, operability and applicability of the supporting carrier are improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a supporting carrier. Background Art

[0002] During the semiconductor manufacturing process, the transportation of semiconductor devices is crucial to the semiconductor manufacturing process. In the semiconductor industry, after the mask design is completed, the patterned area of ​​the mask needs to be inspected to determine whether the product meets the design requirements. Currently, photomask inspection is often performed using microscopic metrology equipment. Microscopic metrology equipment offers simple operation and high measurement accuracy, enabling effective measurement of microscopic and complex pattern shapes.

[0003] When using a microscopic measuring device to measure the photomask, the photomask is placed in a carrier for measurement. Before measuring the photomask, a worker needs to take the photomask out of the photomask box, and then place the taken-out photomask in the carrier with the chrome side facing up and the glass side facing down. The contact points between the carrier and the photomask are made of metal, which has a high hardness and can easily scratch the photomask. In addition, when taking and placing the photomask, the taking and placing actions are all done manually. In actual applications, it is often impossible to effectively control the accuracy and strength when taking and placing the photomask, which makes the placement position of the photomask uncertain, and it is easy to cause scratches on the surface of the photomask, which can make the test piece scrapped. Based on the above problems, there is an urgent need for a new support carrier that can effectively protect the photomask. Utility Model Content

[0004] The purpose of the present application is to provide a supporting carrier for carrying a test piece, which can improve the protection effect of the test piece.

[0005] To achieve the above-mentioned and other related purposes, the present application provides a support carrier for carrying a test piece, comprising a carrier body and a support portion, wherein a first through slot and a second through slot are provided in the carrier body;

[0006] The first through slot is used to accommodate the test piece, the slot wall of the first through slot includes a first slot wall and a second slot wall arranged opposite to each other, and the slot wall of the first through slot has a first vertex angle and a second vertex angle at both ends of the first slot wall respectively;

[0007] The support portion is provided on the slot wall of the first through slot and extends into the first through slot to support the test piece, the support portion includes a first support portion, a second support portion and a third support portion, the first support portion is located at the first vertex corner, the second support portion is located at the second vertex corner, and the third support portion is connected to the second slot wall;

[0008] A plurality of second through slots surround the outer side of the first through slot and are connected to the first through slot.

[0009] Optionally, the support portion is a plate-shaped structure, the upper surfaces of the first support portion, the second support portion and the third support portion are coplanar, and the third support portion is located in the middle area of ​​the second groove wall along the extension direction of the second groove wall.

[0010] Optionally, a convex ring for supporting the test piece is provided on the support portion, and the convex ring includes a first convex ring located on the first support portion, a second convex ring located on the second support portion, and a third convex ring located on the third support portion.

[0011] Optionally, a first through hole is provided in the first convex ring, a second through hole is provided in the second convex ring, and a third through hole is provided in the third convex ring;

[0012] A vacuum passage connected to a vacuum pipeline is provided in the carrier body, and the vacuum passage includes a first passage, a second passage, and a third passage. The first passage is connected to the first through hole, the second passage is connected to the second through hole, and the third passage is connected to the third through hole.

[0013] Optionally, a plurality of limiting protrusions with arc-shaped columnar structures are further provided on the groove wall of the first through groove to define the bearing position of the test piece, and the plurality of limiting protrusions are arranged above the supporting portion at intervals.

[0014] Optionally, the support carrier further includes a horizontal adjustment portion, which includes an adjustment bolt and an adjustment hole. A plurality of the adjustment holes are arranged at intervals in the carrier body, and the position of the support carrier is adjusted by cooperating with the adjustment bolt through the adjustment hole.

[0015] Optionally, a first mounting groove is formed between the first support portion and the carrier body, a second mounting groove is formed between the second support portion and the carrier body, and the supporting carrier further includes a limiting portion, and the limiting portion includes:

[0016] A first limiting block is disposed in the first mounting groove, wherein the first limiting block has a first limiting groove on a side close to the first through groove, and a side wall of the first limiting groove forms a first vertex angle of a groove wall of the first through groove;

[0017] A second limiting block is disposed in the second mounting groove, wherein the second limiting block is provided with a second limiting groove on a side close to the first through groove, and a side wall of the second limiting groove forms a second vertex angle of a groove wall of the first through groove;

[0018] The third limiting block includes a limiting vertical plate and a supporting horizontal plate that are perpendicular to each other. The supporting horizontal plate is placed on the third supporting portion and connected to the limiting vertical plate. The surface of the limiting vertical plate close to the side of the first through groove is coplanar with the second groove wall to form the first through groove together with the first limiting groove and the second limiting groove.

[0019] Optionally, at least one limiting protrusion with an arc-shaped columnar structure is provided on the side wall of the first limiting groove, the side wall of the second limiting groove and the surface of the limiting vertical plate close to the first through groove to define the bearing position of the test piece.

[0020] Optionally, a first convex ring is provided on the bottom surface of the first limiting groove, a second convex ring is provided on the bottom surface of the second limiting groove, and a third convex ring is provided on the supporting horizontal plate to support the test piece.

[0021] Optionally, a first through-slot hole is provided at the bottom of the first limiting groove, a second through-slot hole is provided at the bottom of the second limiting groove, a third through-slot hole is provided in the bearing horizontal plate, a first through-hole is provided in the first convex ring so that the first convex ring surrounds the first through-slot hole, a second through-hole is provided in the second convex ring so that the second convex ring surrounds the second through-slot hole, and a third through-hole is provided in the third convex ring so that the third convex ring surrounds the third through-slot hole;

[0022] The carrier body is provided with a vacuum passage connected to the vacuum pipeline, and the vacuum passage includes a first passage, a second passage and a third passage. The first through hole is connected to the first passage, the second through hole is connected to the second passage, and the third through hole is connected to the third passage.

[0023] The support vehicle provided in this application has at least the following beneficial effects:

[0024] The support carrier of the present application has a second through-slot surrounding the first through-slot, reducing the contact between the test piece and the carrier body; the first support portion and the second support portion are respectively located at the first and second vertex corners, and the third support portion is connected to the second groove wall. When in use, the test piece can be prevented from colliding with the groove wall of the first through-slot, thereby improving the protection effect of the test piece; a convex ring is provided on the support portion to support the test piece, effectively preventing scratches on the test piece; a vacuum passage is provided in the carrier body and communicates with the through hole in the convex ring, which can achieve adsorption of the test piece and determine whether the placement posture of the test piece is correct based on the pressure of the vacuum adsorption, effectively avoiding shutdown failures caused by fluctuations in the vacuum value; a limiting protrusion is provided on the groove wall of the first through-slot, which can limit the position of the test piece, reduce the contact between the test piece and the carrier body, and improve the protection effect of the test piece; the position of the support carrier can be adjusted according to the usage scenario through the horizontal adjustment portion to keep it in a horizontal state; the limiting portion can define the carrying position of the test piece, thereby improving the applicability and operability of the support carrier. Therefore, the support carrier of this embodiment can prevent the test piece from being damaged by contact, effectively improve the protection effect of the test piece, and improve its convenience, operability and applicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 Shown is a top view of the support carrier provided in Example 1 of the present application.

[0027] Figure 2 Shown is a structural schematic diagram of the support carrier provided in Example 1 of the present application.

[0028] Figure 3 Shown is a structural schematic diagram of the first supporting portion provided in Example 1 of the present application.

[0029] Figure 4 Shown is a structural schematic diagram of the second support portion provided in Example 1 of the present application.

[0030] Figure 5 Shown is a structural schematic diagram of the third support portion provided in Example 1 of the present application.

[0031] Figure 6 Shown is a top view of the support carrier provided in the second embodiment of the present application.

[0032] Figure 7 Shown is a structural schematic diagram of the support carrier provided in Example 2 of the present application.

[0033] Figure 8 Shown is a schematic structural diagram of the carrier body provided in Example 2 of the present application.

[0034] Figure 9 Shown is a structural schematic diagram of the first supporting portion provided in Example 2 of the present application.

[0035] Figure 10 Shown is a structural schematic diagram of the second supporting portion provided in Example 2 of the present application.

[0036] Figure 11 Shown is a schematic structural diagram of the third support portion provided in Example 2 of the present application.

[0037] Reference numerals:

[0038] 1. Carrier body; 11. First through-slot; 111. First slot wall; 112. Second slot wall; 113. First vertex angle; 114. Second vertex angle; 115. Third slot wall; 116. Fourth slot wall; 12. Second through-slot; 13. Vacuum passage; 131. First passage; 132. Second passage; 133. Third passage; 141. First mounting groove; 142. Second mounting groove; 2. Support portion; 21. First support portion; 22. Second support portion; 23. Third support portion; 3. Raised ring; 31. First raised ring ;311, first through hole; 32, second convex ring; 321, second through hole; 33, third convex ring; 331, third through hole; 4, limiting protrusion; 5, horizontal adjustment part; 51, adjusting bolt; 52, adjusting hole; 6, limiting part; 61, first limiting block; 611, first limiting groove; 612, first through-slot hole; 62, second limiting block; 621, second limiting groove; 622, second through-slot hole; 63, third limiting block; 631, limiting vertical plate; 632, supporting horizontal plate; 633, third through-slot hole. DETAILED DESCRIPTION

[0039] To make the technical objectives, technical solutions, and technical effects of this application more clear, the technical solutions of this application will be clearly and completely described below in conjunction with embodiments. Obviously, the described embodiments are only part of the embodiments of this application, not all of them. Generally, the components of the embodiments of this application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0040] Therefore, the following detailed description of the embodiments of the present application is not intended to limit the scope of the claimed application, but rather merely represents selected embodiments of the present application. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments in this application without creative effort are within the scope of protection of this application. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance.

[0041] In the description of this application, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0042] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection. In addition, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in combination with the implementation or example are included in at least one implementation or example of this application. In this specification, the schematic representation of the above terms does not necessarily refer to the same implementation or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more implementations or examples in a suitable scheme.

[0043] Example 1

[0044] This embodiment provides a support carrier for carrying a test piece, referring to Figure 1 and Figure 2 The supporting carrier provided in the present application includes a carrier body 1 and a supporting portion 2 , and a first through slot 11 and a second through slot 12 are provided in the carrier body 1 .

[0045] The first through slot 11 is used to accommodate the test piece. Optionally, the test piece can be, for example, a photomask. The slot wall of the first through slot 11 includes a first slot wall 111 and a second slot wall 112 arranged opposite to each other. The slot wall of the first through slot 11 has a first vertex 113 and a second vertex 114 at both ends of the first slot wall 111, respectively. Specifically, the first vertex 113 and the second vertex 114 are respectively located at the two ends of the extension direction of the first slot wall 111; the support portion 2 is provided on the slot wall of the first through slot 11 and extends into the first through slot 11 to support the test piece. The support portion 2 includes a first support portion 21, a second support portion 22 and a third support portion 23. The first support portion 21 is located at the first vertex 113, the second support portion 22 is located at the second vertex 114, and the third support portion 23 is connected to the second slot wall 112; there are multiple second through slots 12, and the multiple second through slots 12 surround the outer side of the first through slot 11 and penetrate the first through slot 11.

[0046] In this embodiment, the first through-slot 11 is located in the accommodating space for the DUT. The support portion 2 is capable of supporting the DUT in the first through-slot 11. The second through-slot 12 is arranged around the first through-slot 11, i.e., the first through-slot 11 and the second through-slot 12 share a common slot wall. The second through-slot 12 intersects the first through-slot 11, leaving part of the side wall of the DUT suspended in the air. This reduces contact between the DUT and the carrier body 1, thereby reducing the risk of scratching the DUT and improving the protection of the DUT. The first support portion 21 and the second support portion 22 are located at the first and second corners 113 and 114, respectively. The third support portion 23 is connected to the second slot wall 112. During use, the DUT is first positioned using the first and second corners 113 and 114, then placed on the first and second support portions 21 and 22, and then placed on the third support portion 23. This prevents the DUT from colliding with the slot wall of the first through-slot 11, reducing the risk of scratching the DUT and improving the protection of the DUT.

[0047] The first through groove 11 also has a third groove wall 115 and a fourth groove wall 116 that are arranged opposite to each other. The first groove wall 111, the third groove wall 115, the second groove wall 112, and the fourth groove wall 116 are connected in sequence along the circumference of the first through groove 11. The outer sides of the first groove wall 111, the outer sides of the third groove wall 115, the outer sides of the second groove wall 112, and the outer sides of the fourth groove wall 116 are all provided with a second through groove 12.

[0048] The carrier body 1 has an upper surface and a lower surface that are positioned opposite each other. The support portion 2 is a plate-like structure. The upper surfaces of the first support portion 21, the second support portion 22, and the third support portion 23 are coplanar, allowing the test piece to be placed horizontally. The upper surface of the first support portion 21 is the surface of the first support portion 21 that is close to the upper surface of the carrier body 1, the upper surface of the second support portion 22 is the surface of the second support portion 22 that is close to the upper surface of the carrier body 1, and the upper surface of the third support portion 23 is the surface of the first support portion 21 that is close to the upper surface of the carrier body 1. Furthermore, the third support portion 23 is located in the middle region of the second groove wall 112 along the extension direction of the second groove wall 112.

[0049] In an alternative embodiment, the first through-slot 11 has a rectangular structure when viewed from above, the first support portion 21 and the second support portion 22 each have a right-angled triangular plate-like structure, and the third support portion 23 has a rectangular plate-like structure. The two mutually perpendicular side surfaces of the right-angled triangular structure of the first support portion 21 are connected to the carrier body 1 at a first vertex 113, while the two mutually perpendicular side surfaces of the right-angled triangular structure of the second support portion 22 are connected to the carrier body 1 at a second vertex 114. The side surfaces of the rectangular plate-like structure are connected to the carrier body 1.

[0050] Reference Figures 3 to 5 In this embodiment, the supporting carrier further includes a convex ring 3, which is arranged on the supporting portion 2 and is used to support the test piece. The convex ring 3 includes a first convex ring 31, a second convex ring 32 and a third convex ring 33. The first convex ring 31 is arranged on the first supporting portion 21, the second convex ring 32 is arranged on the second supporting portion 22, and the third convex ring 33 is arranged on the third supporting portion 23. Optionally, the convex ring 3 is an annular structure, wherein the first convex ring 31 has a first through hole 311, the second convex ring 32 has a second through hole 321, and the third convex ring 33 has a third through hole 331. Furthermore, the first convex ring 31 and the second convex ring 32 have circular ring structures, and the third convex ring 33 is a strip-shaped ring structure.

[0051] In an optional embodiment, the material of the raised ring 3 is an elastic material, and the thickness of the first raised ring 31, the thickness of the second raised ring 32, and the thickness of the third raised ring 33 are the same, so that the test piece can be placed horizontally in the first through groove 11. The raised ring 3 can effectively protect the test piece from scratches, thereby improving the protective effect of the support carrier. Optionally, the material of the raised ring 3 can be, for example, polytetrafluoroethylene.

[0052] Reference Figures 3 to 5In this embodiment, a vacuum passage 13 is further provided in the carrier body 1. The vacuum passage 13 is connected to a vacuum pipeline and includes a first passage 131, a second passage 132, and a third passage 133. The first passage 131 intersects the first through-hole 311, the second passage 132 intersects the second through-hole 321, and the third passage 133 intersects the third through-hole 331. When the DUT is placed on the convex ring 3, the DUT and the convex ring 3 are tightly fitted. The vacuum pipeline can be used to evacuate the vacuum passage 13, thereby adsorbing the DUT into the first through-groove 11. Furthermore, the vacuum adsorption pressure value can be used to determine whether the DUT is correctly placed and fixed, effectively avoiding shutdown failures caused by vacuum value fluctuations.

[0053] In an alternative embodiment, the first passage 131 has a first opening, the second passage 132 has a second opening, and the third passage 133 has a third opening. The first opening is provided on the upper surface of the first support portion 21, the second opening is provided on the upper surface of the second support portion 22, and the third opening is provided on the upper surface of the third support portion 23. The first through hole 311 surrounds and exposes the first opening, the second through hole 321 surrounds and exposes the second opening, and the third through hole 331 surrounds and exposes the third opening. This allows the first raised ring 31, the second raised ring 32, and the third raised ring 33 to fit tightly against the first support portion 21, the second support portion 22, and the third support portion 23, respectively, ensuring airtightness between the raised rings 3 and the support portion 2. The vacuum passage 13 has a passage opening provided on one side of the carrier body 1. The first passage 131, the second passage 132, and the third passage 133 are all connected to the passage opening. The vacuum passage 13 is connected to the vacuum passage 13 through the passage opening to achieve suction of the test piece.

[0054] Reference Figure 1 In this embodiment, a plurality of limiting protrusions 4 are further provided on the groove wall of the first through groove 11 to define the carrying position of the piece to be tested. Optionally, the limiting protrusion 4 is an arc-shaped columnar structure, and the arc surface of the arc-shaped columnar structure faces the first through groove 11, so that the carrying position of the piece to be tested is defined by the arc surface of the limiting protrusion 4, which effectively reduces the contact area between the piece to be tested and the carrier body 1, reduces the risk of scratching the piece to be tested, and improves the protection effect on the piece to be tested; further, the extension direction of the arc-shaped columnar structure of the limiting protrusion 4 is the direction from the upper surface of the carrier body 1 to the lower surface of the carrier body 1.

[0055] Reference Figure 2In an optional embodiment, a plurality of limiting protrusions 4 are arranged at intervals above the support portion 2. Optionally, one limiting protrusion 4 is provided on each of the two mutually perpendicular groove walls of the first through groove 11 at the first vertex corner 113, one limiting protrusion 4 is provided on each of the two mutually perpendicular groove walls of the first through groove 11 at the second vertex corner 114, and two limiting protrusions 4 are provided at intervals above the third support portion 23.

[0056] In an optional embodiment, the arcuate surface of the limiting protrusion 4 is coated with an elastic material, such as polytetrafluoroethylene. Optionally, the limiting protrusion 4 is made of the elastic material, and further, the portion of the groove wall of the first through-slot 11 above the support portion 2 is coated with the elastic material. By using the elastic material, when the test piece contacts the limiting protrusion 4, it can effectively prevent scratches on the test piece, further improving the protection effect on the test piece.

[0057] Reference Figure 2 In this embodiment, the supporting carrier also includes a horizontal adjustment part 5, which includes an adjusting bolt 51 and an adjusting hole 52. A plurality of adjusting holes 52 are arranged at intervals in the carrier body 1. The adjusting bolt 51 cooperates with the adjusting hole 52 to adjust the position of the supporting carrier. Optionally, the adjusting hole 52 is a bolt through hole, and a plurality of bolt through holes are arranged at intervals on the upper surface of the supporting carrier. Furthermore, the number of the bolt through holes is 3, and the 3 bolt through holes are arranged in a triangular shape on the upper surface of the supporting carrier. The number and structural dimensions of the adjusting bolts 51 are adapted to the bolt through holes to adjust the position of the supporting carrier.

[0058] In an optional embodiment, the supporting carrier as a whole is a plate-like structure with a groove in the middle, and the first through groove 11 and the second through groove 12 are both groove structures. Optionally, according to needs, the supporting carrier can also be a plate-like structure with a through hole in the middle, and the first through groove 11 and the second through groove 12 are both through holes.

[0059] In the supporting carrier of this embodiment, the second through groove 12 is connected to the first through groove 11, so that part of the side wall of the test piece is in a suspended state, which reduces the contact between the test piece and the carrier body 1 and reduces the risk of scratching the test piece; the first supporting part 21 and the second supporting part 22 are respectively located at the first vertex 113 and the second vertex 114, and the third supporting part 23 is connected to the second groove wall 112, which can prevent the test piece from colliding with the groove wall of the first through groove 11 during use, thereby improving the protection effect on the test piece; a convex ring 3 of elastic material is provided on the supporting part 2 to support the test piece, effectively avoiding scratches on the test piece; the convex ring 3 is annular The carrier body 1 is provided with a vacuum passage 13 connected to a vacuum pipeline, which can achieve adsorption of the test piece. The vacuum adsorption pressure can be used to determine whether the placement posture of the test piece is correct and whether the position is fixed, effectively avoiding shutdown failures caused by fluctuations in the vacuum value. The multiple limiting protrusions 4 located on the wall of the first through groove 11 can limit the position of the test piece, reducing the contact area between the test piece and the carrier body. The limiting protrusions 4 and the test piece can achieve elastic contact, thereby improving the protection effect of the test piece. The horizontal adjustment part 5 can adjust the position of the support carrier according to the use scenario to keep it in a horizontal state. Therefore, the support carrier of this embodiment can prevent the test piece from being damaged by contact, effectively improve the protection effect of the test piece, and improve its convenience and operability.

[0060] Example 2

[0061] This embodiment provides another supporting vehicle, referring to Figure 6 and Figure 7 , also includes a carrier body 1, the carrier body 1 is provided with a first through slot 11, a second through slot 12 and a support portion 2. Specifically, the same points as those in the first embodiment are not repeated here, and the difference is that:

[0062] Reference Figures 8 to 11In this embodiment, a first mounting groove 141 is formed between the first support portion 21 and the carrier body 1, and a second mounting groove 142 is formed between the second support portion 22 and the carrier body 1. The supporting carrier also includes a limiting portion 6, and the limiting portion 6 includes a first limiting block 61, a second limiting block 62 and a third limiting block 63. The first limiting block 61 is installed in the first mounting groove 141. The first limiting block 61 is provided with a first limiting groove 611 on a side close to the first through groove 11. The side wall of the first limiting groove 611 forms the first vertex 113 of the groove wall of the first through groove 11. The second limiting block 62 is installed in the second mounting groove In 142, the second limiting block 62 is provided with a second limiting groove 621 on the side close to the first through groove 11, and the side wall of the second limiting groove 621 forms the second top angle 114 of the groove wall of the first through groove 11. The third limiting block 63 includes a limiting vertical plate 631 and a supporting horizontal plate 632 perpendicular to each other. The supporting horizontal plate 632 is placed on the third support part 23 and connected to the limiting vertical plate 631. The surface of the limiting vertical plate 631 close to the side of the first through groove 11 is coplanar with the second groove wall 112, so that the first limiting groove 611 and the second limiting groove 621 form the first through groove 11 between the limiting vertical plate 631.

[0063] Reference Figure 6 and Figure 7 In an optional embodiment, the first limit block 61 forms a stepped shape through the first limit groove 611, and the first limit groove 611 has two side walls vertically connected to each other to form a first vertex 113. The second limit block 62 forms a stepped shape through the second limit groove 621, and the second limit groove 621 has two side walls vertically connected to each other to form a second vertex 114. In the third limit block 63, the interconnected supporting horizontal plate 632 and the limiting vertical plate 631 constitute an L-shaped right-angle plate structure. Optionally, the bottom surface of the first limit groove 611, the bottom surface of the second limit groove 621 and the upper surface of the supporting horizontal plate 632 are coplanar, so when carrying the test piece, it can ensure that the test piece is placed horizontally.

[0064] In this embodiment, the limiting protrusion 4 is arranged on the side wall of the first limiting groove 611, the side wall of the second limiting groove 621 and the surface of the limiting vertical plate 631 close to the first through groove 11. Optionally, at least one limiting protrusion 4 with an arc-shaped columnar structure is arranged on the side wall of the first limiting groove 611, the side wall of the second limiting groove 621 and the surface of the limiting vertical plate 631 close to the first through groove 11. The bearing position of the test piece can be defined by multiple limiting protrusions 4.

[0065] In an optional embodiment, a limiting protrusion 4 is provided on each of the two mutually perpendicular side walls of the first limiting groove 611, and a limiting protrusion 4 is provided on each of the two mutually perpendicular side walls of the first limiting groove 611. Two limiting protrusions 4 are spaced apart on the surface of the limiting vertical plate 631 on the side close to the first through groove 11.

[0066] Reference Figures 9 to 11 In this embodiment, the convex ring 3 is arranged on the bottom surface of the first limiting groove 611, the bottom surface of the second limiting groove 621 and the supporting horizontal plate 632. Optionally, a first convex ring 31 is provided on the bottom surface of the first limiting groove 611, a second convex ring 32 is provided on the bottom surface of the second limiting groove 621, and a third convex ring 33 is provided on the limiting horizontal plate. Furthermore, the first convex ring 31 and the second convex ring 32 are circular ring structures, and the third convex ring 33 is a strip-shaped ring structure.

[0067] In an optional embodiment, the convex ring 3 is an annular structure. Optionally, a first through hole 311 is provided in the first convex ring 31 , a second through hole 321 is provided in the second convex ring 32 , and a third through hole 331 is provided in the third convex ring 33 .

[0068] Reference Figures 9 to 11 In this embodiment, a first through-slot hole 612 is provided at the bottom of the first limiting groove 611, and the first through-slot hole 612 passes through the first limiting block 61 at the bottom surface of the first limiting groove 611; a second through-slot hole 622 is provided at the bottom of the second limiting groove 621, and the second through-slot hole 622 passes through the second limiting block 62 at the bottom surface of the second limiting groove 621; a third through-slot hole 633 is provided in the supporting horizontal plate 632, and the third through-slot hole 633 passes through the supporting horizontal plate 632; the first convex ring 31 surrounds the first through-slot hole 612, the second convex ring 32 surrounds the second through-slot hole 622, and the third convex ring 33 surrounds the third through-slot hole 633, so that there is airtightness between the first convex ring 31 and the first limiting block 61, between the second convex block and the second limiting block 62, and between the third limiting block 63 and the third convex ring 33.

[0069] A vacuum passage 13 is provided in the carrier body 1, and the vacuum passage 13 is connected to the vacuum pipeline. The vacuum passage 13 includes a first passage 131, a second passage 132 and a third passage 133. The first passage 131 and the first through-slot hole 612 are connected to the first through-hole 311, the second passage 132 and the second through-slot hole 622 are connected to the second through-hole 321, and the third passage 133 and the third through-slot hole 633 are connected to the third through-hole 331. When in use, after the time to be tested is placed above the convex ring 3, vacuum adsorption of the test piece can be achieved through the vacuum pipeline to fix the test piece in the first through-slot 11.

[0070] In an optional embodiment, the surfaces of the first limit block 61, the second limit block 62 and the third limit block 63 are all covered with elastic material, and a limit protrusion 4 made of the elastic material is formed on the side walls of the first limit groove 611, the side walls of the second limit groove 621 and the side walls of the limit vertical plate 631. At the same time, a first convex ring 31, a second convex ring 32 and a third convex ring 33 made of the elastic material are formed around the first through-slot hole 612, the second through-slot hole 622 and the third through-slot hole 633 respectively. In addition, the first limit block 61, the second limit block 62 and the third limit block 63 are detachably installed in the carrier body 1, which improves the protection effect of the test piece, effectively avoids scratches on the test piece, and improves the operability and applicability of the supporting carrier.

[0071] The supporting carrier of this embodiment also includes the carrier body, the first through groove 11, the second through groove 12, the supporting portion 2, the convex ring 3 and the limiting protrusion 4 in the first embodiment, and therefore also has the beneficial effects of the first embodiment. In addition, the supporting carrier of this embodiment also includes a limiting portion 6, which is detachably installed in the carrier body 1, and the convex ring 3 and the limiting protrusion 4 are connected to the limiting portion 6, which improves the operability and applicability of the supporting carrier while ensuring the protective effect of the test piece.

[0072] The above embodiments are merely illustrative of the principles and effects of this application and are not intended to limit this application. Anyone skilled in the art may modify, alter, or combine the above embodiments without departing from the spirit and scope of this application. Therefore, all equivalent modifications or variations accomplished by a person of ordinary skill in the art without departing from the spirit and technical concepts disclosed in this application shall be covered by the claims of this application.

Claims

1. A support carrier for carrying a test piece, characterized in that: It comprises a carrier body and a support portion, wherein the carrier body is provided with a first through slot and a second through slot; The first through slot is used to accommodate the test piece, the slot wall of the first through slot includes a first slot wall and a second slot wall arranged opposite to each other, and the slot wall of the first through slot has a first vertex angle and a second vertex angle at both ends of the first slot wall respectively; The support portion is provided on the slot wall of the first through slot and extends into the first through slot to support the test piece, the support portion includes a first support portion, a second support portion and a third support portion, the first support portion is located at the first vertex corner, the second support portion is located at the second vertex corner, and the third support portion is connected to the second slot wall; A plurality of second through slots surround the outer side of the first through slot and are connected to the first through slot.

2. The support carrier according to claim 1, characterized in that: The support portion is a plate-shaped structure, the upper surfaces of the first support portion, the second support portion and the third support portion are coplanar, and the third support portion is located in the middle area of ​​the second groove wall along the extension direction of the second groove wall.

3. The support carrier according to claim 1, characterized in that: The supporting portion is provided with a convex ring for supporting the test piece, and the convex ring includes a first convex ring located on the first supporting portion, a second convex ring located on the second supporting portion, and a third convex ring located on the third supporting portion.

4. The support carrier according to claim 3, characterized in that: A first through hole is provided in the first convex ring, a second through hole is provided in the second convex ring, and a third through hole is provided in the third convex ring; A vacuum passage connected to a vacuum pipeline is provided in the carrier body, and the vacuum passage includes a first passage, a second passage, and a third passage. The first passage is connected to the first through hole, the second passage is connected to the second through hole, and the third passage is connected to the third through hole.

5. The support carrier according to claim 1, characterized in that: A plurality of limiting protrusions with arc-shaped columnar structures are further provided on the groove wall of the first through groove to define the bearing position of the test piece, and the plurality of limiting protrusions are arranged above the supporting portion at intervals.

6. The support carrier according to claim 1, characterized in that: The support carrier further includes a horizontal adjustment portion, which includes an adjustment bolt and an adjustment hole. A plurality of the adjustment holes are arranged at intervals in the carrier body, and the position of the support carrier is adjusted by cooperating with the adjustment bolt through the adjustment hole.

7. The support carrier according to claim 1, characterized in that: A first mounting groove is formed between the first support portion and the carrier body, a second mounting groove is formed between the second support portion and the carrier body, and the supporting carrier further includes a limiting portion, which includes: A first limiting block is disposed in the first mounting groove, wherein the first limiting block has a first limiting groove on a side close to the first through groove, and a side wall of the first limiting groove forms a first vertex angle of a groove wall of the first through groove; A second limiting block is disposed in the second mounting groove, wherein the second limiting block is provided with a second limiting groove on a side close to the first through groove, and a side wall of the second limiting groove forms a second vertex angle of a groove wall of the first through groove; The third limiting block includes a limiting vertical plate and a supporting horizontal plate that are perpendicular to each other. The supporting horizontal plate is placed on the third supporting portion and connected to the limiting vertical plate. The surface of the limiting vertical plate close to the side of the first through groove is coplanar with the second groove wall to form the first through groove together with the first limiting groove and the second limiting groove.

8. The support carrier according to claim 7, characterized in that: At least one limiting protrusion with an arc-shaped columnar structure is provided on the side wall of the first limiting groove, the side wall of the second limiting groove and the surface of the limiting vertical plate close to the first through groove to define the supporting position of the test piece.

9. The support carrier according to claim 7, characterized in that: A first convex ring is provided on the bottom surface of the first limiting groove, a second convex ring is provided on the bottom surface of the second limiting groove, and a third convex ring is provided on the bearing horizontal plate to bear the test piece.

10. The support carrier according to claim 9, characterized in that: A first through-slot hole is provided at the bottom of the first limiting groove, a second through-slot hole is provided at the bottom of the second limiting groove, a third through-slot hole is provided in the bearing horizontal plate, a first through-hole is provided in the first convex ring so that the first convex ring surrounds the first through-slot hole, a second through-hole is provided in the second convex ring so that the second convex ring surrounds the second through-slot hole, and a third through-hole is provided in the third convex ring so that the third convex ring surrounds the third through-slot hole; The carrier body is provided with a vacuum passage connected to the vacuum pipeline, and the vacuum passage includes a first passage, a second passage and a third passage. The first through hole is connected to the first passage, the second through hole is connected to the second passage, and the third through hole is connected to the third passage.

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