Disassembling and assembling module and deposition system

Abstract

The utility model discloses a disassembly and assembly module and a deposition system. The dismounting and mounting module comprises a paddle rod, a first dismounting and mounting assembly and a second dismounting and mounting assembly. The first dismounting assembly is arranged at one end of the paddle rod and used for supporting the first end of the electrode feed-in assembly. And the second dismounting assembly is arranged at the other end of the paddle rod and is used for supporting the second end of the electrode feed-in assembly. In this way, the electrode feed-in assembly can be conveniently and directly disassembled and assembled.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a disassembly module and a deposition system. Background Art

[0002] During the deposition process of a deposition system depositing thin films on a substrate, an electrode feed assembly is required to feed current to the carrier to achieve electrical connection of the entire deposition system. During the process, the electrode feed assembly may malfunction due to particle contamination or unexpected film deposition and need to be disassembled for maintenance. In related technologies, the electrode feed assembly can only be safely disassembled after the temperature of the process chamber cools down, resulting in a decrease in the production capacity of the deposition system. Utility Model Content

[0003] The embodiments of the present application provide a disassembly module and a deposition system that can conveniently and directly disassemble the electrode feed assembly.

[0004] In a first aspect, embodiments of the present application provide a disassembly module for use in a deposition system. The disassembly module includes a paddle shaft, a first disassembly assembly, and a second disassembly assembly. The first disassembly assembly is disposed at one end of the paddle shaft and is used to support one end of an electrode feed assembly of the deposition system. The second disassembly assembly is disposed at the other end of the paddle shaft and is used to support the other end of the electrode feed assembly.

[0005] Optionally, the first disassembly and assembly component includes a first extension member, and the first extension member is connected to the paddle rod.

[0006] Optionally, the electrode feeding assembly includes a first support member, and the first extension member cooperates with the first support member to disassemble and assemble the electrode feeding assembly.

[0007] Optionally, the first disassembly assembly includes a first support member and a first extension member, and the first extension member is connected to the paddle rod; the first extension member and the first support member cooperate to disassemble and assemble the electrode feed assembly.

[0008] Optionally, two paddle rods are arranged at intervals, one end of the two paddle rods are connected to each other by a connecting piece, the first extension piece extends from the connecting piece along the extension direction of the paddle rod; the first support piece extends along a direction perpendicular to the extension direction of the paddle rod.

[0009] Optionally, the second disassembly and assembly component includes a second extension member and at least two second support members, the second extension member is connected to the paddle rod, and the second support member is connected to the second extension member; the second extension member extends in a direction perpendicular to the extension direction of the paddle rod; the second support members are spaced apart from each other, and the extension direction of the second support member is consistent with the extension direction of the paddle rod; the second support members are respectively installed at both ends of the second extension member.

[0010] In a second aspect, an embodiment of the present application provides a deposition system. The deposition system includes a process tube, an electrode feed assembly, a paddle rod, a first disassembly assembly, and a second disassembly assembly. The electrode feed assembly is detachably arranged in the process tube, and the electrode feed assembly has a first end and a second end arranged opposite to each other in the axial direction of the process tube. The paddle rod is used to transfer the electrode feed assembly. The first disassembly assembly is arranged at one end of the paddle rod, for supporting the first end of the electrode feed assembly. The second disassembly assembly is arranged at the other end of the paddle rod, for supporting the second end of the electrode feed assembly. Among them, the paddle rod transfers the electrode feed assembly through the first disassembly assembly and the second disassembly assembly.

[0011] Optionally, the electrode feeding assembly includes at least two support rods arranged at intervals, and the electrode feeding devices are provided on the support rods.

[0012] Optionally, the electrode feed assembly includes a first support member connecting at least two support rods, and the first disassembly assembly includes a first extension member, the first extension member is connected to the paddle rod, and the first extension member and the first support member selectively abut to selectively support the first end.

[0013] Optionally, the first disassembly and assembly component includes a first support member and a first extension member, the first extension member is connected to the paddle rod, the first support member is connected to the first extension member, and the first support member selectively abuts against at least two support rods to selectively support the first end.

[0014] Optionally, two paddle rods are arranged at intervals, the paddle rods are located between the intervals of the support rods, the parts of the two paddle rods close to the first end are connected to each other by a connecting member, and the first extension member extends from the connecting member in a direction close to the first end; the first support member extends in the interval direction of at least two support rods.

[0015] Optionally, the second disassembly assembly includes a second extension member and a second support member, the second extension member is connected to the paddle rod, and the second support member is connected to the second extension member;

[0016] The end portion of the support rod close to the second end is provided with an opening, and the second support member is used to selectively extend into the support rod from the opening to selectively support the second end.

[0017] Optionally, the second extension member extends along the direction of the spacing between at least two support rods, the number of second support members corresponds to the number of support rods, the second support members are arranged at intervals from each other, and the extension direction of the second support member is consistent with the extension direction of the support rods; the second support members are respectively installed on the second extension members.

[0018] Optionally, the cross-sectional area of ​​the second support member gradually decreases in the extending direction of the support rod.

[0019] Optionally, the deposition system further comprises a bracket, the paddle rod is mounted on the bracket, and the bracket is used to transfer the paddle rod.

[0020] Optionally, a plurality of support frames are spaced apart on the electrode feed assembly between the first end and the second end, and the paddle rod, the first detachable assembly and / or the second detachable assembly selectively support the support frames.

[0021] The beneficial effect of this application is that, unlike the prior art, a first detachable assembly and a second detachable assembly are respectively installed at both ends of the paddle shaft to support both ends of the electrode feed assembly, so that the electrode feed assembly can be transferred by moving the paddle shaft. In this way, the transfer of the electrode feed assembly will not be interrupted due to excessive temperature of the process tube, thereby saving cooling time and improving the production capacity of the deposition system. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of part of the structure of the deposition system of the present application;

[0023] Figure 2 yes Figure 1 Schematic diagram of the enlarged structure at A in the middle;

[0024] Figure 3 yes Figure 1 Schematic diagram of the enlarged structure at B in the middle;

[0025] Figure 4 It is a structural diagram of the disassembly and assembly module of this application.

[0026] Reference numerals:

[0027] Deposition system, 1; support rod, 111; paddle rod, 12; disassembly module, 13; first disassembly component, 131; first support member, 1311; first extension member, 1312; connecting member, 1313; second disassembly component, 132; second extension member, 1322; second support member, 1321; bracket, 14. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0029] In related technologies, the electrode feed assembly in a deposition system consists of two ceramic tubes, a support boat, an electrode rod, and other feed systems. The electrode feed assembly is placed in a slot within the coating chamber. If a problem arises with the electrode feed assembly, the entire electrode assembly can be disassembled by removing the ceramic tubes for inspection and maintenance.

[0030] However, the coating temperature of the coating process (such as PECVD coating) is around 500 degrees. Obviously, it is unrealistic to disassemble and maintain the electrode feed assembly in such a high temperature environment. Cooling down the process chamber, such as the process tube, takes several hours. This kind of maintenance greatly increases the maintenance time on the mass production machine, thereby affecting the production capacity and causing huge production capacity losses. Therefore, how to save the maintenance time of the electrode feed assembly and reduce the production capacity loss is a technical problem that needs to be solved. In order to improve the above technical problems, the present application can provide the following embodiments.

[0031] Combine Figures 1 to 4 , an embodiment of the present application provides a disassembly module 13. The disassembly module 13 includes a paddle shaft 12, a first disassembly assembly 131, and a second disassembly assembly 132. The first disassembly assembly 131 is disposed at one end of the paddle shaft 12 and is used to support one end of the electrode feed assembly. The second disassembly assembly 132 is disposed at the other end of the paddle shaft 12 and is used to support the other end of the electrode feed assembly. The following will be described in conjunction with a specific embodiment of the deposition system 1.

[0032] An embodiment of the present application provides a deposition system 1. The deposition system 1 includes a process tube (not shown), an electrode feed assembly (only the support rod 111 is shown in the figure), a paddle rod 12, a first disassembly assembly 131 and a second disassembly assembly 132. The process tube can accommodate the electrode feed assembly and the carrier. On the one hand, the electrode feed assembly can support the carrier, and on the other hand, it can feed current into the carrier. The electrode feed assembly is detachably arranged in the process tube, and the electrode feed assembly has a first end and a second end arranged opposite to each other in the axial direction of the process tube. Specifically, the electrode feed assembly can be extended into the process tube, and the first end and the second end of the electrode feed assembly correspond to the two ends of the process tube, respectively.

[0033] The paddle rod 12 can be used to transfer the electrode feed assembly when the first disassembly assembly component 131 and the second disassembly assembly component 132 are installed. The paddle rod 12 can be used to transfer the carrier when the first disassembly assembly component 131 and the second disassembly assembly component 132 are not installed. The paddle rod 12, the first disassembly assembly component 131 and the second disassembly assembly component 132 may not be located in the process tube during the process. The paddle rod 12, the first disassembly assembly component 131 and the second disassembly assembly component 132 are more used as process equipment or jigs. Specifically, the first disassembly assembly 131 is provided at one end of the paddle rod 12 to support the first end of the electrode feed assembly. The second disassembly assembly 132 is provided at the other end of the paddle rod 12 to support the second end of the electrode feed assembly. In other words, the first disassembly assembly 131 is provided corresponding to the first end of the electrode feed assembly, and the second disassembly assembly 132 is provided corresponding to the second end of the electrode feed assembly. The paddle rod 12 transfers the electrode feed assembly through the first disassembly assembly 131 and the second disassembly assembly 132. The paddle rod 12 can be extended into the process tube, and the carrier can be lifted and transferred out of the process tube by moving upward, or the carrier can be placed by moving downward. After the first disassembly component 131 is installed on one end of the paddle rod 12, the paddle rod 12 can lift or lower the first end of the electrode feed assembly during the transfer process. After the second disassembly component 132 is installed on the other end of the paddle rod 12, the paddle rod 12 can lift or lower the second end of the electrode feed assembly during the transfer process. In this way, the paddle rod 12 cooperates with the first disassembly component 131 and the second disassembly component 132 to transfer the electrode feed assembly. During the use of the deposition system 1, if there is no need to transfer the electrode feed device, the paddle rod 12 without the first disassembly component 131 and the second disassembly component 132 can also be used to transfer the carrier alone.

[0034] In some embodiments, combined Figures 1 to 3 , the electrode feeding assembly includes at least two support rods 111 arranged at intervals. The support rods 111 are made of insulating material. The support rods 111 can be ceramic, or can be insulating ceramic sheathed on the outer periphery of silicon carbide, which is not specifically limited here. An electrode feeding device (not shown) is provided on each support rod 111, and the electrode feeding device can be a boat block, which can cooperate with the boat foot of the carrier, so that while supporting the carrier, current is fed into the carrier through the boat block. The boat block is electrically connected through the electrode rod, and the electrode rod can be connected to a power source, so that external current is fed into the boat block.

[0035] In some embodiments, combined Figure 1 and Figure 3The electrode feeding assembly includes a first support member 1311 connecting the two support rods 111, or the first disassembly assembly 131 includes the first support member 1311. In other words, the first support member 1311 can be a structure originally possessed by the electrode feeding assembly, which can be borrowed by the first disassembly assembly 131 when transferring the electrode feeding assembly, or the first support member 1311 can be a structure of the first disassembly assembly 131, which is used to abut against the support rods 111. The first disassembly assembly 131 includes a first extension member 1312, which is connected to the paddle rod 12. The first extension member 1312 and the first support member 1311 cooperate to disassemble and assemble the electrode feeding assembly.

[0036] Specifically, in the deposition system 1, the first support member 1311 is connected to at least two support rods 111. The two ends of the first support member 1311 can be respectively mounted on the two support rods 111, or fixed to the two support rods 111 by fixing members. The first support member 1311 can form a portion for support between the two support rods 111. The first support member 1311 can also control the spacing between the two support rods 111, playing a certain limiting role. The first extension member 1312 and the first support member 1311 are not installed with each other, but can abut each other. In other words, during the transfer process of the paddle rod 12, the first extension member 1312 can be driven to transfer together, but the first support member 1311 always maintains a connection relationship with the support rod 111 and cannot be driven by the paddle rod 12. The first extension member 1312 and the first support member 1311 selectively abut to selectively support the first end. The first extension member 1312 is mounted on the paddle rod 12. During the process of transferring the electrode feed assembly, the first extension member 1312 can extend below the first support member 1311, thereby supporting the first end of the electrode feed assembly during transfer via the support portion formed by the first support member 1311. The selective abutment between the first extension member 1312 and the first support member 1311 means that the first extension member 1312 can extend into the process tube and abut against the first support member 1311 to support the first end when the electrode feed assembly needs to be transferred. However, during the movement of the disassembly module 13 into or out of the process tube, the first extension member 1312 does not need to abut against the first support member 1311.

[0037] Furthermore, in some embodiments, two paddle rods 12 are arranged at intervals, and the paddle rods 12 are located between the support rods 111. The portions of the two paddle rods 12 near the first end are connected to each other by a connector 1313, and the first extension member 1312 extends from the connector 1313 toward the first end. The first support member 1311 extends in the direction of the interval between at least two support rods 111. The first support member 1311 extends in a direction perpendicular to the extension direction of the paddle rods 12. The connector 1313 can connect the two paddle rods 12 so as to provide for the installation of the first extension member 1312. The connection of the connector 1313 can enable the first extension member 1312 to be installed in a relatively centered position between the two support rods 111, thereby helping to maintain balance during the transfer process. The connector 1313 can also control the spacing between the two paddle rods 12, thereby playing a certain limiting role.

[0038] Alternatively, in some embodiments, the paddle shaft 12 may be provided with only one first extension member 1312, and the first extension member 1312 may extend from the end of the paddle shaft toward the first end. Alternatively, the first extension member 1312 may be the portion of the paddle shaft 12 near the first end.

[0039] In other embodiments, the first disassembly and assembly component 131 includes a first support member 1311 and a first extension member 1312, the first extension member 1312 is connected to the paddle rod 12, and the first support member 1311 is connected to the first extension member 1312. In other words, the first extension member 1312 is installed on the paddle rod 12, and the first support member 1311 is installed on the first extension member 1312. During the transfer process, the paddle rod 12 can drive the first extension member 1312 and the first support member 1311 to transfer together. When the electrode feed assembly needs to be transferred, the paddle rod 12 can be placed under the first end of the electrode feed assembly with the first extension member 1312 and the first support member 1311, and the first support member 1311 selectively abuts against at least two support rods 111 to selectively support the first end. The selective abutment between the first support member 1311 and the support rod 111 means that the first support member 1311 can be extended into the process tube and abut against the support rod 111 when the electrode feed assembly needs to be transferred. During the movement of the disassembly and assembly module 13 moving out of or into the process tube, the first support member 1311 does not need to abut against the support rod 111.

[0040] Furthermore, in some embodiments, two paddle rods 12 are arranged at intervals, and the paddle rods 12 are located between the support rods 111. The portions of the two paddle rods 12 near the first end are connected to each other by a connector 1313, and the first extension member 1312 extends from the connector 1313 toward the first end. The first support member 1311 extends in the direction of the interval between at least two support rods 111. The first support member 1311 extends in a direction perpendicular to the extension direction of the paddle rods 12. The connector 1313 can connect the two paddle rods 12 so as to provide for the installation of the first extension member 1312. The connection of the connector 1313 can enable the first extension member 1312 to be installed in a relatively centered position between the two support rods 111, thereby helping to maintain balance during the transfer process. The connector 1313 can also control the spacing between the two paddle rods 12, thereby playing a certain limiting role.

[0041] In some embodiments, combined Figure 1 and Figure 3 The second disassembly and assembly component 132 includes a second extension member 1322 and a second support member 1321. The second extension member 1322 is connected to the paddle rod 12, and the second support member 1321 is connected to the second extension member 1322. The second extension member 1322 extends in a direction perpendicular to the extension direction of the paddle rod 12. The second extension member 1322 can form a sufficient distance in the spacing direction of the support rods 111. Multiple second support members 1321 are arranged at intervals from each other, and the extension direction of the second support members 1321 is consistent with the extension direction of the paddle rod 12. Multiple second support members 1321 are respectively installed at both ends of the second extension member 1322. Under the action of the second extension member 1322, the spacing between the two second support members 1321 can be consistent with the spacing between the two support rods 111. Among them, the end of the support rod 111 close to the second end has an opening, and the second support member 1321 is used to selectively extend into the support rod 111 from the opening to selectively support the second end. Selectively supporting the second end means that when the electrode feedthrough assembly needs to be transferred, the second support member 1321 can be extended into the support rod 111 by moving the paddle rod 12. This allows the second end of the electrode feedthrough assembly to be lifted simultaneously with the paddle rod 12. However, when the assembly / disassembly module 13 is being transferred into or out of the process tube, the second support member 1321 does not need to be extended into the support rod 111.

[0042] In some embodiments, the second extension members 1322 extend along the direction separating the two support rods 111, and the number of second support members 1321 corresponds to the number of support rods 111. The second support members 1321 are spaced apart from each other, and the extension direction of the second support members 1321 is consistent with the extension direction of the support rods 111. The second support members 1321 are respectively mounted on the second extension members 1322. In this manner, as the paddle rod 12 moves along the axis of the process tube, the second support members 1321 can be extended into the corresponding support rods 111.

[0043] In some embodiments, the cross-sectional area of ​​the second support member 1321 gradually decreases in the direction approaching the support rod 111, i.e., in the extending direction of the support rod 111. In this way, the second support member 1321 can be more easily aligned with the support rod 111 during the extension process, thereby playing a certain guiding role.

[0044] In some embodiments, the deposition system 1 further includes a bracket 14, to which the paddle rod 12 is mounted. The bracket 14 is used to transfer the paddle rod 12. A second extension member 1322 is mounted on the bracket 14, and two paddle rods 12 are spaced apart on the second extension member 1322. Two support rods 111 are respectively disposed on sides of the paddle rod 12 facing away from each other. The second support members 1321 are connected to both ends of the second extension member 1322 and correspond to the positions of the two support rods 111. The bracket 14 can provide mechanical support for the paddle rod 12 and the second extension member 1322, and facilitates the transfer of the paddle rod 12 and the first and second disassembly assemblies 131 and 132 by a robot or manually.

[0045] In some embodiments, a plurality of support frames (not shown) are spaced apart on the electrode feed assembly between the first end and the second end, and the paddle rod 12, the first disassembly assembly 131 and / or the second disassembly assembly 132 can selectively support the support frames. Selective support means that when the electrode feed assembly needs to be transferred, the support frame can be supported, and during the movement of the disassembly module 13 into or out of the process tube, the disassembly module 13 does not need to support the support frame. By providing a plurality of support frames, more fulcrums can be formed between the first end and the second end of the electrode feed assembly during the transfer process, thereby facilitating the transfer of the electrode feed assembly and reducing the bending of the electrode feed assembly.

[0046] The above are merely embodiments of the present application and are not intended to limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A disassembly module, used in a deposition system, characterized in that: include: Paddle shaft, A first disassembly assembly is provided at one end of the paddle rod and is used to support one end of the electrode feed assembly of the deposition system; The second disassembly assembly is arranged at the other end of the paddle rod and is used to support the other end of the electrode feeding assembly.

2. The disassembly module according to claim 1, characterized in that: The first disassembly and assembly component includes a first extension piece, and the first extension piece is connected to the paddle rod.

3. The disassembly module according to claim 2, characterized in that: The electrode feeding assembly includes a first supporting member, and the first extending member cooperates with the first supporting member to disassemble and assemble the electrode feeding assembly.

4. The disassembly module according to claim 1, wherein: The first disassembly assembly includes a first support member and a first extension member, wherein the first extension member is connected to the paddle rod; the first extension member cooperates with the first support member to disassemble and assemble the electrode feed assembly.

5. The disassembly module according to claim 3 or 4, characterized in that: Two paddle rods are arranged at intervals, one end of the two paddle rods is connected to each other by a connecting piece, the first extending piece extends from the connecting piece along the extending direction of the paddle rod; the first supporting piece extends along a direction perpendicular to the extending direction of the paddle rod.

6. The disassembly module according to claim 1, characterized in that: The second disassembly and assembly assembly includes a second extension member and at least two second support members, the second extension member is connected to the paddle rod, and the second support member is connected to the second extension member; the second extension member extends in a direction perpendicular to the extension direction of the paddle rod; the second support members are arranged at intervals from each other, and the extension direction of the second support member is consistent with the extension direction of the paddle rod; the second support members are respectively installed at both ends of the second extension member.

7. A deposition system, characterized in that: include: process pipes; an electrode feed assembly, detachably disposed in the process tube, the electrode feed assembly having a first end and a second end disposed opposite to each other in the axial direction of the process tube; a paddle rod, the paddle rod being used to transfer the electrode feed assembly; A first disassembly assembly is provided at one end of the paddle rod and is used to support the first end of the electrode feed assembly; A second disassembly assembly is provided at the other end of the paddle rod, and is used to support the second end of the electrode feed assembly; Wherein, the paddle rod transfers the electrode feeding assembly through the first disassembly assembly assembly and the second disassembly assembly assembly.

8. The deposition system according to claim 7, wherein: The electrode feeding assembly comprises at least two support rods arranged at intervals, and the electrode feeding devices are arranged on the support rods.

9. The deposition system according to claim 8, wherein: The electrode feed assembly includes a first support member connecting at least two support rods, and the first disassembly assembly includes a first extension member, which is connected to the paddle rod. The first extension member and the first support member selectively abut against each other to selectively support the first end.

10. The deposition system according to claim 8, wherein: The first disassembly and assembly component includes a first support member and a first extension member, the first extension member is connected to the paddle rod, the first support member is connected to the first extension member, and the first support member selectively abuts against the at least two support rods to selectively support the first end.

11. The deposition system according to claim 9 or 10, characterized in that: Two paddle rods are arranged at intervals, and the paddle rods are located between the intervals of the support rods. The parts of the two paddle rods close to the first end are connected to each other through a connecting member, and the first extension member extends from the connecting member in a direction close to the first end; the first support member extends in the interval direction of the at least two support rods.

12. The deposition system according to claim 8, wherein: The second disassembly assembly includes a second extension member and a second support member, the second extension member is connected to the paddle rod, and the second support member is connected to the second extension member; The end of the support rod close to the second end has an opening, and the second support member is used to selectively extend into the support rod from the opening to selectively support the second end.

13. The deposition system according to claim 12, wherein: The second extension member extends along the direction of the spacing between the at least two support rods, the number of the second support members corresponds to the number of the support rods, the second support members are arranged at intervals from each other, and the extension direction of the second support member is consistent with the extension direction of the support rods; the second support members are respectively installed on the second extension member.

14. The deposition system according to claim 12, wherein: The cross-sectional area of ​​the second support member gradually decreases in the extending direction of the support rod.

15. The deposition system according to claim 7, wherein: The deposition system further includes a bracket, the paddle rod is mounted on the bracket, and the bracket is used to transfer the paddle rod.

16. The deposition system according to claim 7, wherein: Between the first end and the second end, a plurality of support frames are spaced apart on the electrode feed assembly, and the paddle rod, the first detachable assembly and / or the second detachable assembly selectively support the support frames.

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