Silicon wafer cleaning basket

Abstract

The utility model is suitable for the technical field of silicon wafers, and provides a silicon wafer cleaning basket which comprises two side plates and two end face plates. The two side plates and the two end panels enclose to form a placing groove, and the placing groove is used for placing a silicon wafer; clamping grooves are formed in the opposite inner walls of the two side plates, and the clamping grooves in the two side plates are in one-to-one correspondence; the two ends, connected with the two end face plates, of the side plates are provided with a plurality of clamping pieces with the same number, and adjusting grooves are formed in the positions, corresponding to the clamping pieces, of the end face plates. And the clamping piece slides along the adjusting groove so as to adjust the inclination angle of the side plate. According to the silicon wafer cleaning flower basket, the inclination angles of the two side plates can be adjusted, the silicon wafer cleaning flower basket can be matched with silicon wafers of multiple specifications, and meanwhile the silicon wafer cleaning quality is not affected.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon wafers, and in particular relates to a silicon wafer cleaning basket. Background Art

[0002] When measuring electrical properties such as oxygen-carbon resistivity on single crystal ingots, sample cleaning is a crucial step. Currently, there are two cleaning methods: stack cleaning and fixed basket cleaning. Stack cleaning involves stacking the ingots together, placing them in a beaker, pouring cleaning solution over them, and then rinsing them with a large amount of pure water. Fixed basket cleaning involves using a fixed basket with a non-adjustable slot. While both methods can meet cleaning requirements to a certain extent, they both present potential problems:

[0003] Stacked cleaning of samples will lead to uneven corrosion rate on the silicon wafer surface and affect the surface cleaning quality, thereby affecting measurement accuracy. The size of the fixed flower basket cannot be adjusted, the shapes and sizes of the samples to be cleaned are inconsistent, and multiple specifications of flower baskets are required, resulting in poor adaptability. Utility Model Content

[0004] The embodiment of the utility model provides a silicon wafer cleaning basket, which aims to solve the problems that a conventional silicon wafer cleaning basket cannot rinse evenly and cannot adapt to silicon wafers of different shapes and sizes.

[0005] The embodiment of the utility model provides a silicon wafer cleaning basket, comprising: two side panels and two end panels;

[0006] The two side panels and the two end panels enclose a placement groove, and the placement groove is used to place silicon wafers; the two side panels are provided with a card slot on the inner walls opposite to each other, and the card slots on the two side panels correspond to each other one by one;

[0007] The side panels are provided with a plurality of clamping members of the same number at both ends connected to the two end panels, and the end panels are provided with adjustment slots at positions corresponding to the plurality of clamping members;

[0008] The clamping member slides along the adjusting slot to adjust the inclination angle of the side plate.

[0009] In some embodiments, the clamping member includes a sliding rod and a clamping plate; the clamping plate is sleeved on the sliding rod passing through the adjustment slot.

[0010] In some embodiments, two clamping members are provided at both ends of the side panel connected to the two end panels.

[0011] In some embodiments, the end panel is provided with two adjustment slots on both sides connected to the two side panels.

[0012] In some embodiments, the adjustment slots on both sides of the end panel are symmetrically arranged, and the adjustment slots on the same side of the end panel are parallelly arranged.

[0013] In some embodiments, the adjustment slot is in an arc shape.

[0014] In some embodiments, the end panel includes a base portion and a support portion, the base portion is rectangular, the support portion is trapezoidal, and the support portion is used to connect with the side panel.

[0015] In some embodiments, the silicon wafer cleaning basket further includes a handle, and both ends of the handle are respectively disposed on the two end panels.

[0016] The silicon wafer cleaning basket provided by the utility model is provided with a clamping piece and an adjustment groove. The clamping piece slides in the adjustment groove, and the inclination angle of the side plate can be adjusted according to the size and shape of the silicon wafer. The relative width and angle of the two side plates can then be changed, so that the clamping slot of the silicon wafer cleaning basket matches the silicon wafer, thereby being able to clean silicon wafers of different specifications without affecting the cleaning quality of the silicon wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the overall structure of a silicon wafer cleaning basket provided by an embodiment of the present utility model;

[0018] Figure 2 This is one of the partial structural diagrams of the silicon wafer cleaning basket provided by the embodiment of the utility model;

[0019] Figure 3 This is the second partial structural diagram of the silicon wafer cleaning basket provided by the embodiment of the present utility model. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0021] References to "embodiments" or "implementations" in this disclosure mean that a particular feature, component, or characteristic described in connection with an embodiment or implementation may be included in at least one embodiment of the disclosure. The appearance of such phrases in various places in the specification does not necessarily refer to the same embodiment, nor do they constitute independent or alternative embodiments that are mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0022] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "left", "right", "horizontal", "top", "bottom", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the said features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0023] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections, or mutual communication; direct connections or indirect connections through an intermediate medium; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0024] The following combination Figures 1 to 3 , the silicon wafer cleaning basket provided by the embodiment of the present invention is described in detail through specific embodiments and application scenarios.

[0025] Figure 1 It is a schematic diagram of the overall structure of a silicon wafer cleaning basket provided by an embodiment of the utility model.

[0026] like Figure 1 As shown, the silicon wafer cleaning basket includes: two side panels 10 and two end panels 20;

[0027] The two side panels 10 and the two end panels 20 enclose a placement groove for placing silicon wafers. The two side panels 10 are provided with a card slot 30 on the inner walls facing each other, and the card slots 30 on the two side panels 10 correspond to each other.

[0028] The side panel 10 is provided with a plurality of clamping members 40 of the same number at both ends connected to the two end panels 20, and the end panels 20 are provided with adjustment slots 50 at positions corresponding to the plurality of clamping members 40;

[0029] The clamping member 40 slides along the adjusting slot 50 to adjust the tilt angle of the side panel 10 .

[0030] In actual implementation, the two side panels 10 of the silicon wafer cleaning basket are arranged opposite to each other, and the two end panels 20 are arranged opposite to each other. The two side panels 10 have the same shape and size, and the two end panels 20 have the same shape and size.

[0031] The two end panels 20 are connected to the two side panels 10 to form a closed structure that serves as a space for placing silicon wafers, namely, a placement slot. The two end panels 20 are parallel to each other, while the two side panels 10 can be tilted at a certain angle. Specifically, the planes of the two side panels 10 can be parallel or at a certain angle. The tilt angle of the side panels 10 can be determined based on the size and shape of the silicon wafer and is not specifically limited here.

[0032] like Figure 2 As shown, each side panel 10 is provided with a slot 30 on its inner wall for inserting and removing silicon wafers. To ensure precise alignment of the silicon wafers and prevent misalignment during placement, the slots 30 on both side panels 10 must be aligned to facilitate secure placement of all silicon wafers to be cleaned. Furthermore, the spacing between the slots 30 can be designed based on the size of the silicon wafers and is not specifically limited here.

[0033] It is understood that a side panel 10 is connected to two end panels 20, and a plurality of clamping members 40 are provided at both ends of the side panel 10 where it is connected to the end panels 20. The clamping members 40 are used to support the side panel 10 to tilt relative to the end panels 20 within a certain angle range. The angle range can be determined by the shape and size of the adjustment slot 50.

[0034] The adjustment groove 50 is a track for the sliding of the clamping member 40. By sliding the clamping member 40 in the adjustment groove 50, the inclination angle of the side plate 10 can be adjusted, and then the relative width and angle of the two side plates 10 can be adjusted to ensure that the slot 30 of the silicon wafer cleaning basket matches silicon wafers of different specifications.

[0035] The number and position of the clamping members 40 provided on the two side panels 10 are the same, and the number and position of the adjustment slots 50 provided on the two end panels 20 are the same. The shape of the adjustment slot 50 can be designed according to the needs and is not specifically limited here.

[0036] In practice, when the side panels 10 need to be adjusted in angle, the clamping member 40 can be operated to slide within the adjustment slot 50. As the clamping member 40 slides, the side panels 10 tilt relative to the end panels 20, thereby changing the shape of the placement slot to match the silicon wafer. For example, when the two side panels 10 are parallel, the placement slot can accommodate rectangular silicon wafers; when the two side panels 10 are at an angle, the placement slot can accommodate sector-shaped or circular silicon wafers.

[0037] The silicon wafer cleaning basket provided by the embodiment of the present invention is provided with a clamping piece and an adjustment slot. The clamping piece slides in the adjustment slot to adjust the inclination angle of the side plate. According to the size and shape of the silicon wafer, the relative width and angle of the two side plates can be changed, so that the clamping slot of the silicon wafer cleaning basket matches the silicon wafer to be cleaned, thereby being able to clean silicon wafers of different specifications without affecting the cleaning quality of the silicon wafers.

[0038] In some embodiments, as Figure 2 As shown, the clamping member 40 includes a slide rod 401 and a clamping piece 402 ; the clamping piece 402 is sleeved on the slide rod 401 passing through the adjustment slot 50 .

[0039] It should be noted that the adjustment groove 50 can be a long groove or track used to guide or limit the sliding of the clamping member 40 therein. The clamping member 40 can then slide freely in the adjustment groove 50 or move along a specific path as needed to adjust the inclination angle of the side panel 10 relative to the end panel 20.

[0040] The size of the adjustment slot 50 can be designed according to the shape and size of the clamping member 40 to ensure that the clamping member 40 can smoothly pass through the adjustment slot 50 and remain stable.

[0041] The slide bar 401 is the main part of the clamping member 40, which is responsible for sliding in the adjustment slot 50, thereby adjusting the tilt angle of the side panel 10. The shape and size of the slide bar 401 need to match the adjustment slot 50 to ensure smooth sliding and stability.

[0042] The clamping piece 402 secures the slide bar 401 from outside the adjustment slot 50. When the slide bar 401 reaches the designated position, it locks the slide bar 401, preventing it from accidentally sliding or falling off. This ensures the stability and reliability of the clamping piece 40 during adjustment. The designated position is determined by the shape and size of the silicon wafer within the slot. The design of the clamping piece 402 also simplifies and swifts the installation, removal, and adjustment of the slide bar 401 and side panel 10, reducing maintenance costs and time.

[0043] The clamping piece 402 can be connected to the slide rod 401 and the end panel 20 by fasteners such as bolts or nuts, or can be fixed by other mechanical structures (such as buckles, pins, etc.), which is not specifically limited here.

[0044] In practice, when the tilt angle of the side panel 10 needs to be adjusted, the clamping piece 402 can be adjusted to allow the slide bar 401 to slide within the adjustment slot 50. As the slide bar 401 slides along the adjustment slot 50, it causes the connected side panel 10 to tilt, thereby changing the tilt angle of the side panel 10. Once the side panel 10 has tilted to the desired angle, the clamping piece 402 can be re-tightened to fix the position of the slide bar 401 and the side panel 10.

[0045] The silicon wafer cleaning basket provided in the embodiment of the present invention can conveniently adjust the inclination angle of the side panels through the combined design of the sliding rod and the clamping plate to meet the needs of different application scenarios.

[0046] In some embodiments, as Figure 2 As shown, two clamping members 40 are provided at both ends of the side panel 10 connected to the two end panels 20 .

[0047] In actual implementation, each side plate 10 may be provided with four clamping members 40. Figure 1 Taking the orientation of the middle silicon wafer cleaning basket as an example, the two side panels 10 can be divided into a left side panel and a right side panel, and the two end panels 20 can be divided into a front side panel and a rear side panel.

[0048] Two clamping members 40, namely the first clamping member and the second clamping member, are set at the first end of the left side panel connected to the front panel; two clamping members 40, namely the third clamping member and the fourth clamping member, are set at the second end of the left side panel connected to the rear panel.

[0049] Among them, the first clamping member and the third clamping member are located at different ends of the left side plate and are equidistant from the upper edge of the left side plate, and the second clamping member and the fourth clamping member are located at different ends of the left side plate and are equidistant from the lower edge of the left side plate.

[0050] Two clamping members 40, namely the fifth clamping member and the sixth clamping member, are provided at the first end where the right side panel is connected to the front panel; two clamping members 40, namely the seventh clamping member and the eighth clamping member, are provided at the second end where the right side panel is connected to the rear panel.

[0051] Among them, the fifth clamping member and the seventh clamping member are located at different ends of the right side plate and are equidistant from the upper edge of the right side plate, and the sixth clamping member and the eighth clamping member are located at different ends of the right side plate and are equidistant from the lower edge of the right side plate.

[0052] In some embodiments, two adjustment slots 50 are provided on both sides of the end panel 20 connected to the two side panels 10 .

[0053] It is understandable that, when two clamping members 40 are provided at one end of the side panel 10 connected to the end panel 20 , two adjustment slots 50 are provided at positions corresponding to the two clamping members 40 on the end panel 20 .

[0054] by Figure 1 Taking the position of the middle silicon wafer cleaning basket as an example, the front panel is provided with four adjustment slots 50, and the rear panel is provided with four adjustment slots 50. The positions of the adjustment slots 50 on the front panel are the same as those on the rear panel.

[0055] The two adjustment slots 50 at one end of the front panel connected to the left side panel correspond to the first clamping member and the second clamping member respectively, and the two adjustment slots 50 at one end of the front panel connected to the right side panel correspond to the fifth clamping member and the sixth clamping member respectively.

[0056] The two adjustment slots 50 at one end where the rear end panel is connected to the left side panel correspond to the third clamping member and the fourth clamping member respectively, and the two adjustment slots 50 at one end where the front end panel is connected to the right side panel correspond to the seventh clamping member and the eighth clamping member respectively.

[0057] In some embodiments, as Figure 3 As shown, the adjustment slots 50 on both sides of the end panel 20 are symmetrically arranged, and the adjustment slots 50 on the same side of the end panel 20 are parallelly arranged.

[0058] It should be noted that the two sides of the end panel 20 refer to the two sides connected to the two side panels 10 , and the same side of the end panel 20 refers to the side connected to one side panel 10 .

[0059] by Figure 1 Taking the orientation of the middle silicon wafer cleaning basket as an example, the first side of the front panel refers to the side where the first clamping member and the second clamping member are located, and the second side of the front panel refers to the side where the fifth clamping member and the sixth clamping member are located.

[0060] The adjustment groove 50 corresponding to the first clamping member and the adjustment groove 50 corresponding to the second clamping member are arranged in parallel, and the adjustment groove 50 corresponding to the fifth clamping member and the adjustment groove 50 corresponding to the sixth clamping member are arranged in parallel; the adjustment groove 50 corresponding to the first clamping member and the adjustment groove 50 corresponding to the fifth clamping member are arranged symmetrically, and the adjustment groove 50 corresponding to the second clamping member and the adjustment groove 50 corresponding to the sixth clamping member are arranged symmetrically.

[0061] The first side of the rear end panel refers to the side where the third clamping member and the fourth clamping member are located, and the second side of the rear end panel refers to the side where the seventh clamping member and the eighth clamping member are located.

[0062] The adjustment groove 50 corresponding to the third clamping member and the adjustment groove 50 corresponding to the fourth clamping member are arranged in parallel, and the adjustment groove 50 corresponding to the seventh clamping member and the adjustment groove 50 corresponding to the eighth clamping member are arranged in parallel; the adjustment groove 50 corresponding to the third clamping member and the adjustment groove 50 corresponding to the seventh clamping member are arranged symmetrically, and the adjustment groove 50 corresponding to the fourth clamping member and the adjustment groove 50 corresponding to the eighth clamping member are arranged symmetrically.

[0063] It is understandable that the first clamping member and the third clamping member need to slide at the same time, the second clamping member and the fourth clamping member need to slide at the same time, the fifth clamping member and the seventh clamping member need to slide at the same time, and the sixth clamping member and the eighth clamping member need to slide at the same time. It should be noted that both side panels 10 can be in a sliding state, or only one side panel 10 can be in a sliding state. The angle between the two side panels 10 can be adjusted according to needs so that the placement groove is suitable for the shape of rectangular silicon wafers, fan-shaped silicon wafers or circular silicon wafers, and can also be adaptively adjusted according to the size of the silicon wafer.

[0064] In some embodiments, the adjustment slot 50 is in an arc shape.

[0065] It should be noted that the shape and size of the adjustment slot 50 can be determined according to specific application requirements, for example, it can be a straight line or an arc shape.

[0066] The adjustment slot 50 can be a rectangular hollowed-out slot, allowing the side panel 10 to slide linearly. Alternatively, the adjustment slot 50 can be an arcuate hollowed-out slot. This arcuate hollowed-out slot design allows the slide bar 401 to be fine-tuned along an arc within the slot, providing greater flexibility and precision than a linear adjustment method. For example, when adjusting the tilt angle of the side panel 10, the arcuate hollowed-out slot provides a smoother adjustment path.

[0067] In some embodiments, as Figure 3 As shown, the end panel 20 includes a base portion 201 and a support portion 202 . The base portion 201 is rectangular, and the support portion 202 is trapezoidal. The support portion 202 is used to connect with the side panel 10 .

[0068] It should be noted that the end panel 20 includes two parts, namely a base portion 201 and a support portion 202 .

[0069] The support portion 202 adopts a trapezoidal structure, which can facilitate the adjustment of the tilt angle of the side plate 10; the base portion 201 adopts a rectangular structure, which is convenient for the stable placement of the silicon wafer cleaning basket.

[0070] Alternatively, the end panel 20 may also adopt other shapes, such as a rectangle or a trapezoid, which are not specifically limited here. The trapezoid refers to a trapezoid with one short base being a straight line, the other long base being an arc, and both sides being straight lines.

[0071] In some embodiments, the silicon wafer cleaning basket further includes a handle 60 , with both ends of the handle 60 respectively disposed on the two end panels 20 .

[0072] It should be noted that the handle 60 is an important component of the silicon wafer cleaning basket. By positioning the ends of the handle 60 on the two end panels 20, the basket's stability and safety are ensured during transport. This also facilitates the handling and movement of the entire basket without requiring direct contact with the silicon wafers, thereby preventing contamination or damage to the wafers.

[0073] In actual implementation, Figure 1 As shown, the silicon wafer for measuring oxygen-carbon resistivity is cut into square silicon wafers, fan-shaped silicon wafers or round silicon wafers. The cut silicon wafers are placed in the flower basket slot and then placed in the cleaning liquid for cleaning. After cleaning, the flower basket is taken out of the cleaning liquid and placed in pure water for rinsing.

[0074] Silicon wafer cleaning baskets in the prior art are generally fixed baskets or have inconsistent size adjustment methods, and cannot adjust the angle and width at the same time. The silicon wafer cleaning basket provided in the embodiment of the utility model has side panels that are adjusted by means of adjustment slots, and the angles and widths of both side panels can be adjusted to meet different silicon wafer cleaning requirements; in addition, the basket is used to provide a carrier for cleaning silicon wafers for testing oxygen-carbon resistivity, and can also meet the cleaning requirements of fan-shaped silicon wafers, square silicon wafers, or round silicon wafers of different sizes, and has good versatility.

[0075] It is understandable that those skilled in the art can, under the guidance of the above embodiments, combine various implementation methods in the above embodiments to obtain technical solutions of multiple implementation methods.

[0076] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A silicon wafer cleaning basket, characterized in that: include: two side panels and two end panels; The two side panels and the two end panels enclose a placement groove, and the placement groove is used to place silicon wafers; the two side panels are provided with a card slot on the inner walls opposite to each other, and the card slots on the two side panels correspond to each other one by one; The side panels are provided with a plurality of clamping members of the same number at both ends connected to the two end panels, and the end panels are provided with adjustment slots at positions corresponding to the plurality of clamping members; The clamping member slides along the adjusting slot to adjust the inclination angle of the side plate.

2. The silicon wafer cleaning basket according to claim 1, characterized in that: The clamping member comprises a sliding rod and a clamping piece; the clamping piece is sleeved on the sliding rod passing through the adjusting slot.

3. The silicon wafer cleaning basket according to claim 1, characterized in that: Two clamping pieces are provided at both ends of the side plate connected to the two end panels.

4. The silicon wafer cleaning basket according to claim 3, characterized in that: The end panel is provided with two adjustment slots on both sides connected to the two side panels.

5. The silicon wafer cleaning basket according to claim 4, characterized in that: The adjustment slots on both sides of the end panel are symmetrically arranged, and the adjustment slots on the same side of the end panel are parallelly arranged.

6. The silicon wafer cleaning basket according to any one of claims 1 to 5, characterized in that: The shape of the adjustment groove is arc-shaped.

7. The silicon wafer cleaning basket according to any one of claims 1 to 5, characterized in that: The end panel includes a base portion and a support portion, the base portion is rectangular, the support portion is trapezoidal, and the support portion is used to connect with the side panel.

8. The silicon wafer cleaning basket according to claim 1, characterized in that: The silicon wafer cleaning basket further comprises a handle, and both ends of the handle are respectively arranged on the two end panels.

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