Flower basket frame, liquid medicine tank assembly and semiconductor cleaning device

Abstract

The utility model discloses a flower basket frame, a liquid medicine tank assembly and a semiconductor cleaning device, and relates to the technical field of semiconductor processing, and the flower basket frame comprises a flower basket frame body and a first locking piece; two symmetrically-arranged sliding grooves are formed in the flower basket frame body; a containing cavity allowing a workpiece to be cleaned to be movably inserted therein is formed between the two sliding grooves. One ends of the two sliding grooves extend out of the flower basket frame, and an insertion opening for a workpiece to be inserted is formed between the two sliding grooves. The other end of at least one sliding groove is provided with a stop structure which can abut against the workpiece in a contact mode. The first locking piece is movably installed around the insertion opening and can move between an unlocking position and a locking position in a switching mode. When the first locking piece is located at the locking position, part of the structure on the first locking piece can stretch into the insertion opening so as to stop the workpiece from being separated from the insertion opening. According to the flower basket frame, to-be-cleaned workpieces can be taken and placed more conveniently, and the cleaning efficiency and the user experience are improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor processing technology, and in particular to a flower basket stand, a liquid medicine tank assembly, and a semiconductor cleaning device. Background Art

[0002] In semiconductor manufacturing, wafer surface cleanliness is crucial to ensuring the performance of micro- and nano-devices. Any particles or residue on the wafer surface can affect critical process steps like photolithography and etching, ultimately impacting the quality of the final product. To achieve the required cleanliness standards, tank cleaning technology is widely used in the wafer cleaning process. This technique utilizes the chemical action of liquid chemicals to remove contaminants from the wafer surface.

[0003] In the tank cleaning process, in order to ensure that the wafer is in stable and sufficient contact with the cleaning liquid, a flower basket rack is usually used to fix and carry the wafer. For example, Chinese Patent Publication No. CN118053795A introduces a scientific research wet etching fully automated system and machine, which is designed with a flower basket rack for holding workpieces. The flower basket rack consists of two fixed plates and multiple connecting rods, and a holding cavity for placing the workpiece is formed between the connecting rods and the fixed plates. Although this design meets the needs of wafer cleaning to a certain extent, the wafer placement process is relatively complicated and inconvenient to operate, which affects the cleaning efficiency and user experience.

[0004] Therefore, there is an urgent need to propose a new solution that can make the placement and removal of wafers more convenient, improve cleaning efficiency and user experience. Utility Model Content

[0005] In view of this, the purpose of this application is to provide a flower basket rack, a liquid medicine tank assembly and a semiconductor cleaning device, which can make the removal and placement of workpieces to be cleaned more convenient, improve cleaning efficiency and user experience.

[0006] In order to achieve the above technical objectives, the present application provides a flower basket stand, comprising a flower basket stand body and a first locking member;

[0007] The flower basket body is provided with two symmetrically arranged sliding grooves;

[0008] A placement cavity is formed between the two chutes for movably inserting the workpiece to be cleaned;

[0009] One end of the two slide grooves extends out of the basket frame, and an insertion port for inserting the workpiece is formed therebetween;

[0010] The other end of at least one of the slide grooves is provided with a stop structure capable of contacting and abutting against the workpiece;

[0011] The first locking element is movably mounted around the insertion port and is capable of switching between an unlocked position and a locked position;

[0012] When the first locking element is in the locking position, a portion of the structure thereon can extend into the insertion opening to prevent the workpiece from being separated from the insertion opening.

[0013] Furthermore, the slide groove is provided with a hollow structure connected to the outside of the flower basket stand body.

[0014] Furthermore, a stop structure is provided at the other end of the two chute;

[0015] The stopping structure is a convex structure.

[0016] Furthermore, the first locking element is rotatably connected to the flower basket stand body, and is used to switch between an unlocked position and a locked position by rotating itself.

[0017] Furthermore, the rotational connection between the first locking member and the flower basket stand body is located above the top of one end of the slide groove, and the distance between the rotational connection and the top of one end of the slide groove is less than the rotation arm length of the first locking member.

[0018] Furthermore, the first locking member is connected to the flower basket body in a damped rotation manner.

[0019] Furthermore, it also includes a label member;

[0020] The label piece is installed on the flower basket frame.

[0021] Furthermore, the label element includes one or more of a barcode label, an RFID label, and an NFC label.

[0022] Furthermore, the flower basket body includes two fixing plates;

[0023] The two fixing plates are arranged in parallel and spaced apart, and a plurality of first connecting members are fixedly connected between them;

[0024] A handle block is fixed at the top position between the two fixing plates;

[0025] The two sliding grooves are respectively arranged on the inner side surface of the fixing plate in a one-to-one correspondence.

[0026] Furthermore, it also includes a jig stand;

[0027] The jig frame is used to hold the workpiece;

[0028] The placement cavity is for the jig frame to be movably inserted;

[0029] The stop structure can contact and abut against the jig frame;

[0030] When the first locking member is in the locked position, it can be used to prevent the jig holder from being separated from the insertion port.

[0031] Furthermore, the fixture frame includes a bottom frame, a top frame, a second connecting member, a second locking member and a plurality of support rods;

[0032] The top of the base frame is provided with a plurality of first limiting structures for fixing the workpiece;

[0033] The bottom of the top frame is provided with a plurality of second limiting structures which correspond one-to-one with the first limiting structures and are used to fix the workpiece;

[0034] One end of the second connecting member is hinged to one end of the top frame, and the other end is hinged to one end of the bottom frame;

[0035] The other end of the top frame is detachably connected to the other end of the bottom frame via a second locking member;

[0036] A plurality of support rods are arranged on the bottom frame or the top frame, and are used to contact the bottom frame and the top frame respectively when the top frame and the bottom frame are connected through the second locking member.

[0037] Furthermore, the second locking member is fixed to the top of the base frame, and a buckle portion is provided at one end away from the base frame;

[0038] The top frame is provided with a step portion which is engaged with the buckle portion.

[0039] The present application also discloses a liquid medicine tank assembly, including a tank body and the flower basket stand;

[0040] The groove body is used for movably inserting the flower basket stand.

[0041] Furthermore, a first positioning structure is provided on the flower basket body of the flower basket stand;

[0042] The inner wall of the tank body is provided with a second positioning structure which is positioned and matched with the first positioning structure.

[0043] Furthermore, the first positioning structure and the second positioning structure are plug-fitted together.

[0044] Furthermore, the first positioning structure is a positioning slot;

[0045] The second positioning structure is a positioning protrusion that can be movably inserted into the positioning slot.

[0046] Furthermore, the positioning slot includes a positioning slot section and a guide slot section;

[0047] The guide groove section is connected to the bottom end of the positioning groove section and is used to guide the positioning ridge into the positioning groove section.

[0048] The present application also discloses a semiconductor cleaning device, comprising a device body and the aforementioned chemical solution tank assembly.

[0049] From the above technical solutions, it can be seen that the flower basket stand designed in this application has the following beneficial effects:

[0050] 1. By designing two symmetrically arranged chutes to form a placement cavity, the workpiece to be cleaned can be quickly placed in or removed from the placement cavity using a pull-in method, greatly saving time in placing and retrieving the workpiece and improving work efficiency. In the actual cleaning process, frequent pick-and-place operations become more convenient and smooth, reducing operational pauses caused by difficult pick-and-place operations.

[0051] 2. The stop structure at one end of the slot ensures that the workpiece is inserted accurately into place, providing a stable foundation for subsequent cleaning operations. It also effectively prevents the workpiece from accidentally sliding out of this end of the slot during placement, ensuring the stability of the workpiece placement. At the same time, the first locking member designed around the insertion port partially extends into the insertion port when in the locked position, cooperating with the stop structure to secure the workpiece from both ends. This prevents the workpiece from detaching from the insertion port during the entire cleaning process, ensuring smooth cleaning and avoiding problems such as incomplete cleaning due to workpiece shaking.

[0052] 3. When removing a workpiece, simply actuate the first locking element to position it completely outside the insertion port. This convenient access significantly reduces workpiece access time, thereby improving overall cleaning efficiency. For operators, the simple and easy access process reduces operational difficulty and labor intensity, making work easier and more convenient, thereby enhancing the user experience. BRIEF DESCRIPTION OF THE DRAWINGS

[0053] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0054] Figure 1 This is a first stereoscopic view of a flower basket stand provided in this application;

[0055] Figure 2 This is a second stereoscopic view of a flower basket stand provided in this application;

[0056] Figure 3 This is a partial structural diagram of a flower basket stand provided in this application;

[0057] Figure 4 A three-dimensional diagram of a flower basket stand with a jig stand provided in this application;

[0058] Figure 5 This is a first stereoscopic view of a jig frame for a flower basket stand provided in this application;

[0059] Figure 6 This is a second stereoscopic view of a jig frame for a flower basket stand provided in this application;

[0060] Figure 7 for Figure 6 A magnified schematic diagram of position A in FIG;

[0061] In the figure: 1. flower basket stand body; 11. fixing plate; 111. slide groove; 112. insertion port; 113. placement cavity; 114. stop structure; 115. hollow structure; 12. first connecting member; 13. first positioning structure; 131. positioning groove section; 132. guide groove section; 14. handle block; 15. label member; 2. first locking member; 3. fixture frame; 31. bottom frame; 32. top frame; 321. step portion; 33. second connecting member; 34. second locking member; 341. snap portion; 35. support rod; 36. first limiting structure; 361. U-shaped block; 37. second limiting mechanism. DETAILED DESCRIPTION

[0062] The following will clearly and completely describe the technical solutions of the embodiments of the present application in conjunction with the accompanying drawings. Obviously, the embodiments described are only part of the embodiments of the present application, not all of them. Based on the embodiments of the present application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the embodiments of the present application.

[0063] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, they should not be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0064] In the description of the embodiments of the present application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, replaceable connections, or integral connections. They can also refer to mechanical connections or electrical connections. They can also refer to direct connections or indirect connections through an intermediate medium. They can also refer to internal connections between two components. For those skilled in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0065] The embodiments of the present application disclose a flower basket stand, a liquid medicine tank assembly, and a semiconductor cleaning device.

[0066] See also Figures 1 to 3 An embodiment of a flower basket stand provided in the embodiments of the present application includes:

[0067] The flower basket body 1 and the first locking member 2 .

[0068] Two symmetrically arranged sliding grooves 111 are provided in the flower basket body 1 , and a placement cavity 113 for movably inserting a workpiece to be cleaned is formed between the two sliding grooves 111 .

[0069] One end of the two slide grooves 111 extends out of the basket frame, and an insertion port 112 for inserting a workpiece is formed therebetween; the other end of at least one slide groove 111 is provided with a stop structure 114 capable of contacting and abutting against the workpiece.

[0070] The first locking element 2 is movably installed around the insertion port 112 and can switch between an unlocked position and a locked position; when the first locking element 2 is in the locked position, part of the structure thereon can extend into the insertion port 112 to prevent the workpiece from detaching from the insertion port 112.

[0071] The flower basket stand designed in this application has the following beneficial effects:

[0072] 1. By designing two symmetrically arranged chutes 111 to form a placement chamber 113, the workpiece to be cleaned can be quickly placed in or removed from the placement chamber 113 using a pull-in / pull-out method, greatly saving time in placing and retrieving the workpiece and improving work efficiency. In the actual cleaning process, frequent pick-up and placement operations become more convenient and smooth, reducing operational pauses caused by difficult pick-up and placement.

[0073] 2. The stop structure 114 provided at one end of the groove can, on the one hand, ensure that the workpiece is accurately inserted into place, providing a stable foundation for subsequent cleaning operations. On the other hand, it can effectively prevent the workpiece from accidentally sliding out of this end of the slide 111 during the placement process, thereby ensuring the stability of the workpiece placement. At the same time, the first locking member 2 designed around the insertion port 112 can partially extend into the insertion port 112 when in the locked position, cooperating with the stop structure 114 to fix the workpiece from both ends, so that the workpiece will not be separated from the insertion port 112 during the entire cleaning process, ensuring the smooth progress of the cleaning work and avoiding problems such as incomplete cleaning due to shaking of the workpiece.

[0074] 3. When the workpiece needs to be removed, simply drive the first locking element 2 so that it is completely located outside the insertion port 112, and the workpiece can be easily removed from the insertion port 112. This convenient access method greatly shortens the time required to access the workpiece, thereby improving overall cleaning efficiency. For operators, the simple and easy-to-operate access process reduces operational difficulty and labor intensity, making work easier and more convenient, thereby improving the user experience.

[0075] The above is the first embodiment of a flower basket stand provided by the embodiment of the present application. The following is the second embodiment of a flower basket stand provided by the embodiment of the present application. For details, please refer to Figures 1 to 7 .

[0076] Based on the solution of the above embodiment 1:

[0077] Furthermore, if Figure 2 as well as Figure 3 As shown, a hollow structure 115 communicating with the outside of the flower basket body 1 is provided on the slide 111. The hollow structure 115 can be a hollow hole, so that the workpiece in the placement cavity 113 can be in contact with the cleaning liquid more fully, thereby improving the cleaning efficiency.

[0078] Furthermore, a stop structure 114 is provided at the other end of each of the two slide grooves 111; the stop structure 114 is a raised structure. The two stop structures 114 can achieve a better stopping effect, and the raised structure design facilitates integration with the flower basket body 1, making processing more convenient.

[0079] Taking the placement of workpieces in the placement chamber 113 as an example, in order to achieve cleaning of multiple workpieces at a time, the placement chamber 113 can be actually multiple, that is, multiple groups of slide grooves 111 are designed, and the multiple placement chambers 113 can be distributed in sequence from bottom to top. The corresponding first locking members 2 are also designed in multiples, which are arranged one by one around the insertion port 112 of the placement chamber 113.

[0080] Furthermore, if Figure 2 as well as Figure 3As shown, the first locking member 2 is rotatably connected to the flower basket stand body 1 and is used to switch between an unlocked position and a locked position by rotating itself.

[0081] The first locking member 2 is locked and unlocked by rotating, which is easy and quick to operate. The design of the rotating connection makes the switching of the first locking member 2 between the unlocked position and the locked position more flexible and reliable, further improving the convenience of taking and placing workpieces.

[0082] Furthermore, if Figure 2 as well as Figure 3 As shown, the rotational connection between the first locking member 2 and the flower basket body 1 is located above the top of one end of a slide groove 111, and the distance between the rotational connection and the top of one end of the slide groove 111 is less than the rotation arm length of the first locking member 2.

[0083] This design enables the end of the first locking member 2 away from the rotating connection to smoothly extend into or out of the insertion opening 112 when the first locking member 2 is rotated, thereby locking or unlocking the workpiece.

[0084] The first locking element 2 of the present application may be a block structure, without specific limitation.

[0085] Furthermore, the first locking member 2 is connected to the flower basket body 1 in a damped rotation manner.

[0086] The damped rotation connection design provides a certain resistance when the first locking element 2 is rotated to the locked or unlocked position, preventing the first locking element 2 from easily rotating due to accidental contact, further improving the stability and safety of the flower basket stand. Moreover, due to the damping force, the first locking element 2 can hover at any rotational position. To remove a workpiece, the first locking element 2 only needs to be rotated to the outside of the insertion port 112, eliminating the need for other means to fix the first locking element 2 in place, providing greater convenience for workpiece removal.

[0087] Furthermore, if Figure 2 As shown, a label part 15 is also included; the label part 15 is installed on the flower basket stand.

[0088] The design of the label part 15 facilitates marking relevant information on the flower basket rack, such as workpiece type, cleaning time, etc., thereby improving the convenience and accuracy of management.

[0089] Furthermore, the label element 15 includes one or more of a barcode tag, an RFID tag, and an NFC tag. In practical applications, operators can quickly obtain information about the flower basket and workpiece by scanning the barcode, RFID tag, or NFC tag on the label element 15, greatly improving work efficiency and the accuracy of information management. Furthermore, the label element 15 can be flexibly installed in a specific location and can be set according to actual needs, meeting the needs of different scenarios.

[0090] Furthermore, if Figure 2 as well as Figure 3 As shown, the structural design of the flower basket stand body 1 includes two fixed plates 11; the two fixed plates 11 are arranged in parallel and spaced apart, and a plurality of first connecting members 12 are fixedly connected between them. The first connecting members 12 can be connecting rods, which connect and fix the two fixed plates 11 and form a certain space between the two fixed plates 11. The number of the first connecting members 12 can be changed according to actual needs and is not limited.

[0091] A handle block 14 is fixed at the top position between the two fixing plates 11 to facilitate a robot to grab and move the flower basket stand body 1.

[0092] The two sliding grooves 111 are respectively disposed on the inner side surface of the fixing plate 11 in a one-to-one correspondence.

[0093] Furthermore, if Figure 4 As shown, it also includes a jig frame 3; the jig frame 3 is used to hold the workpiece; the placement cavity 113 is for the jig frame 3 to be movably inserted; the stop structure 114 can contact and resist the jig frame 3; when the first locking member 2 is in the locked position, it can be used to stop the jig frame 3 from detaching from the insertion port 112.

[0094] The design of the jig holder 3 further enhances the practicality and flexibility of the flower basket stand. In practical applications, the jig holder 3 can be used to hold different types of workpieces, allowing the flower basket stand to adapt to a wider range of cleaning needs. By flexibly inserting the jig holder 3 into the placement cavity 113 and securing it with the stop structure 114 and the first locking member 2, the stability of the jig holder 3 and the workpieces during the cleaning process is ensured, preventing them from shaking or falling, thereby improving cleaning effectiveness and safety. Furthermore, the combination of the jig holder 3 and the flower basket stand makes it easier to remove and place workpieces, facilitating the cleaning of batches of workpieces (especially small ones), further enhancing overall cleaning efficiency.

[0095] Furthermore, if Figures 5 and 6 As shown, the fixture frame 3 includes a bottom frame 31 , a top frame 32 , a second connecting member 33 , a second locking member 34 and a plurality of support rods 35 .

[0096] The top of the base frame 31 is equipped with several first retaining structures 36 for securing the workpiece. The bottom of the top frame 32 is equipped with several second retaining structures that correspond one-to-one with the first retaining structures 36 and are used to secure the workpiece. The design of the first and second retaining structures 36 ensures a stable and reliable fixation of the workpiece, preventing it from shaking or falling during the cleaning process. Furthermore, the one-to-one correspondence between the first and second retaining structures 36 ensures that the workpiece is evenly and tightly secured to the jig frame 3, further improving the cleaning effect.

[0097] The first limiting structure 36 can be two symmetrically arranged U-shaped blocks 361, forming a first limiting groove for the bottom of the workpiece to be inserted therebetween, and the second limiting mechanism 37 can be an inverted V-shaped second limiting groove for the top of the workpiece to be inserted, without specific limitation.

[0098] One end of the second connecting member 33 is hinged to one end of the top frame 32, and the other end is hinged to one end of the bottom frame 31. This design allows the top frame 32 and the bottom frame 31 to rotate relative to each other, facilitating the operator's insertion and removal of workpieces from the jig frame 3. The hinged design also makes the jig frame 3 more structurally stable, capable of withstanding greater external forces without deformation. The second connecting member 33 can be a connecting rod or a connecting block, and its number can be varied according to actual needs and is not limited.

[0099] The other end of the top frame 32 is detachably connected to the other end of the bottom frame 31 via a second locking member 34. The design of the second locking member 34 allows the top frame 32 and the bottom frame 31 to be quickly and conveniently connected or separated when needed, further improving the practicality and flexibility of the jig frame 3.

[0100] Several support rods 35 are provided on the bottom frame 31 or the top frame 32. When the top frame 32 and the bottom frame 31 are connected via the second locking member 34, they contact the bottom frame 31 and the top frame 32, respectively, to support and stabilize the jig frame 3. The design of the support rods 35 makes the jig frame 3 more structurally stable, capable of withstanding greater external forces without collapsing or deforming, further improving the safety and stability of the cleaning process.

[0101] The fixture rack 3 designed in the present application has the advantages of stable structure, simple operation, and strong practicality, which can greatly improve the cleaning efficiency and effect and meet the usage requirements in different scenarios.

[0102] Furthermore, if Figure 6 as well as Figure 7 As shown, the second locking member 34 is fixed to the top of the bottom frame 31 , and a buckle portion 341 is provided at one end away from the bottom frame 31 ; a step portion 321 is provided on the top frame 32 to be buckled with the buckle portion 341 .

[0103] The design of the buckle 341 and the stepped portion 321 makes locking and unlocking the second locking member 34 much simpler and faster. The operator simply engages or disengages the buckle 341 and the stepped portion 321 to quickly connect or disconnect the top frame 32 and the bottom frame 31, further enhancing the convenience and efficiency of using the jig stand 3. Furthermore, the buckle and the stepped portion 321 provide a certain degree of stability, ensuring a secure connection between the top frame 32 and the bottom frame 31, preventing accidental separation and the release of workpieces.

[0104] The second locking member 34 may be a rod structure, which is vertically fixed on the base frame 31 , and is not particularly limited.

[0105] The workpiece referred to in this application can be a semiconductor device such as a wafer / chip waiting to be cleaned, without specific limitation.

[0106] This application also discloses a liquid medicine tank assembly, comprising a tank body (not shown) and a flower basket frame; the tank body is for the flower basket frame to be movably inserted. The tank body is an existing liquid medicine tank structure and will not be described in detail.

[0107] Furthermore, if Figure 2 As shown, the flower basket body 1 of the flower basket is provided with a first positioning structure 13 (the first positioning structure 13 is arranged on the outer wall of the fixing plate 11 ); the inner wall of the groove body is provided with a second positioning structure that is positioned and matched with the first positioning structure 13 .

[0108] The coordinated design of the first and second positioning structures 13 secures the flower basket in place within the trough, preventing problems such as incomplete cleaning or damage to workpieces caused by shaking or shifting during the cleaning process. The positioning structures also facilitate easy installation. Operators simply align the first positioning structure 13 with the second positioning structure within the trough and insert the flower basket, rapidly completing installation and significantly improving work efficiency.

[0109] Furthermore, the first positioning structure 13 is plugged into and matched with the second positioning structure.

[0110] The plug-in design makes the connection between the flower basket stand and the trough body more stable and reliable, and is not prone to shaking or displacement due to external forces.

[0111] Furthermore, the first positioning structure 13 is a positioning slot; and the second positioning structure is a positioning ridge that can be movably inserted into the positioning slot.

[0112] The design of the positioning slots and ridges is not only simple and easy to implement, but also provides a tight fit, effectively preventing the flower basket from shaking or shifting within the trough, ensuring stability and safety during the cleaning process. Furthermore, the coordination of the positioning slots and ridges makes the flower basket quick and easy to install. Operators simply align the ridges with the slots and insert them to quickly install the flower basket, significantly improving work efficiency.

[0113] Furthermore, if Figure 2 As shown, the positioning slot includes a positioning slot section 131 and a guide slot section 132 ; the guide slot section 132 is connected to the bottom end of the positioning slot section 131 and is used to guide the positioning protrusion into the positioning slot section 131 .

[0114] The design of guide groove section 132 allows the positioning protrusion to be inserted more smoothly and accurately into the positioning slot, avoiding installation inconveniences caused by difficult alignment. Guide groove section 132 also provides a certain buffering effect, reducing the impact of the positioning protrusion on the positioning slot during insertion, protecting the integrity of the positioning structure and extending its service life.

[0115] The present application also discloses a semiconductor cleaning device, comprising a device body and a chemical liquid tank assembly, wherein the chemical liquid tank assembly is installed on the device body.

[0116] The above is a detailed introduction to the flower basket stand, liquid medicine tank assembly and semiconductor cleaning device provided by the present application. For those skilled in the art, according to the ideas of the embodiments of the present application, there may be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on the present application.

Claims

1. A flower basket stand, characterized in that: It comprises a flower basket frame body (1) and a first locking member (2); The flower basket body (1) is provided with two symmetrically arranged sliding grooves (111); A placement cavity (113) is formed between the two chutes (111) for movably inserting a workpiece to be cleaned; One end of the two slide grooves (111) extends out of the basket frame, and an insertion opening (112) for inserting the workpiece is formed therebetween; The other end of at least one of the slide grooves (111) is provided with a stop structure (114) capable of contacting and abutting against the workpiece; The first locking element (2) is movably mounted around the insertion opening (112) and is capable of switching between an unlocked position and a locked position; When the first locking element (2) is in the locking position, a portion of the structure thereon can extend into the insertion opening (112) to prevent the workpiece from detaching from the insertion opening (112).

2. The flower basket stand according to claim 1, characterized in that: The slide groove (111) is provided with a hollow structure (115) communicating with the outside of the flower basket frame body (1).

3. The flower basket stand according to claim 1, characterized in that: A stop structure (114) is provided at the other end of each of the two slide grooves (111); The stop structure (114) is a convex structure.

4. The flower basket stand according to claim 1, characterized in that: The first locking member (2) is rotatably connected to the flower basket stand body (1) and is used to switch between an unlocked position and a locked position by rotating itself.

5. The flower basket stand according to claim 4, characterized in that: The rotational connection between the first locking member (2) and the flower basket frame body (1) is located above the top of one end of the slide groove (111), and the distance between the rotational connection and the top of one end of the slide groove (111) is less than the rotation arm length of the first locking member (2).

6. The flower basket stand according to claim 5, characterized in that: The first locking member (2) is connected to the flower basket frame body (1) in a damping rotation manner.

7. The flower basket stand according to claim 1, characterized in that: Also included is a label member (15); The label member (15) is mounted on the flower basket frame.

8. The flower basket stand according to claim 7, characterized in that: The label element (15) includes one or more of a barcode label, an RFID label, and an NFC label.

9. The flower basket stand according to claim 1, characterized in that: The flower basket body (1) comprises two fixing plates (11); The two fixing plates (11) are arranged in parallel and spaced apart, and a plurality of first connecting members (12) are fixedly connected between them; A handle block (14) is fixed at the top position between the two fixing plates (11); The two sliding grooves (111) are respectively provided on the inner side surface of the fixing plate (11) in a one-to-one correspondence.

10. The flower basket stand according to claim 1, characterized in that: Also included is a fixture frame (3); The jig frame (3) is used to hold the workpiece; The placement cavity (113) is for the jig frame (3) to be movably inserted; The stop structure (114) is capable of contacting and abutting against the jig frame (3); When the first locking member (2) is in the locked position, it can be used to prevent the jig frame (3) from detaching from the insertion port (112).

11. The flower basket stand according to claim 10, characterized in that: The fixture frame (3) comprises a bottom frame (31), a top frame (32), a second connecting member (33), a second locking member (34), and a plurality of support rods (35); The top of the base frame (31) is provided with a plurality of first limiting structures (36) for fixing the workpiece; The bottom of the top frame (32) is provided with a plurality of second limiting structures that correspond one-to-one with the first limiting structures (36) and are used to fix the workpiece; One end of the second connecting member (33) is hinged to one end of the top frame (32), and the other end is hinged to one end of the bottom frame (31); The other end of the top frame (32) is detachably connected to the other end of the bottom frame (31) via a second locking member (34); A plurality of support rods (35) are arranged on the bottom frame (31) or the top frame (32) and are used to contact the bottom frame (31) and the top frame (32) respectively when the top frame (32) and the bottom frame (31) are connected via the second locking member (34).

12. The flower basket stand according to claim 11, characterized in that: The second locking member (34) is fixed to the top of the base frame (31), and a buckle portion (341) is provided at one end away from the base frame (31); The top frame (32) is provided with a step portion (321) that is engaged with the buckle portion (341).

13. The liquid medicine tank assembly is characterized in that: It comprises a trough body and a flower basket stand according to any one of claims 1 to 12; The groove body is used for movably inserting the flower basket stand.

14. The liquid medicine tank assembly according to claim 13, characterized in that: A first positioning structure (13) is provided on the flower basket body (1) of the flower basket; The inner wall of the tank body is provided with a second positioning structure that cooperates with the first positioning structure (13).

15. The liquid medicine tank assembly according to claim 14, characterized in that: The first positioning structure (13) and the second positioning structure are plug-fitted.

16. The liquid medicine tank assembly according to claim 15, characterized in that: The first positioning structure (13) is a positioning slot; The second positioning structure is a positioning protrusion that can be movably inserted into the positioning slot.

17. The liquid medicine tank assembly according to claim 16, wherein: The positioning slot comprises a positioning slot section (131) and a guide slot section (132); The guide groove section (132) is connected to the bottom end of the positioning groove section (131) and is used to guide the positioning ridge into the positioning groove section (131).

18. A semiconductor cleaning device, characterized in that: It comprises a device body and a medicine liquid tank assembly as described in any one of claims 13 to 17.

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