Sheet body feeding device and sheet body detection equipment

By using an independent transfer and conveying mechanism and rotating mechanism in the sheet loading device, the efficient steering and loading of the sheet is achieved, and the problem of low loading efficiency in the prior art is solved, and the production efficiency of the sheet detection equipment is improved.

CN223284952UActive Publication Date: 2025-08-29WUXI AUTOWELL TECH
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Patent Information

Application Number
CN202422268371.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-14
Publication Date
2025-08-29
Estimated Expiration
2034-09-14

AI Technical Summary

Technical Problem

The existing sheet loading device has a large suction cup load and requires reciprocating and transverse movement and rotation, resulting in low loading efficiency.

Method used

The first conveying mechanism, transfer conveying mechanism and rotating mechanism are arranged in parallel. The transfer conveying mechanism only completes the handling function, and the rotating mechanism only completes the steering function and works independently. The steering and feeding of the sheet body is achieved through the combination of the transfer conveying conveying belt and the rotating platform or the conveying belt and the motor.

Benefits of technology

The loading efficiency of the sheet loading device is improved, the waiting time for handling and rotation is saved, the working rhythm is enhanced, and the inspection requirements of the subsequent process are met.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The utility model relates to sheet body detection equipment and a feeding device thereof. The sheet body feeding device comprises a first conveying mechanism, a second conveying mechanism, a transfer conveying mechanism and a rotating mechanism; the transferring and conveying mechanism stretches across the first conveying mechanism and the second conveying mechanism, the transferring and conveying mechanism partially coincides with the first conveying mechanism and the second conveying mechanism on the vertical projection, and the rotating mechanism is located below the transferring and conveying mechanism; the transferring and conveying mechanism picks up the sheet bodies on the first conveying mechanism and transversely conveys the sheet bodies to the rotating mechanism. The rotating mechanism rotates the sheet body by a preset angle in a horizontal plane; the transferring and conveying mechanism further transversely moves and conveys the sheet bodies which are rotated by the preset angle on the rotating mechanism to the second conveying mechanism. The transferring and conveying mechanism only completes the carrying function, the rotating mechanism only completes the steering function, the transferring and conveying mechanism and the rotating mechanism work independently and do not interfere with each other, the waiting time of carrying and rotating can be fully saved, the working rhythm is improved, and the feeding efficiency of the sheet feeding device is improved.
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Description

Technical Field

[0001] The present application relates to the field of solar photovoltaic production, and specifically to a sheet loading device and a sheet detection device. Background Art

[0002] During the wafer production process, when silicon ingots are cut into wafers, linear marks are formed on the cut surfaces. The wafers are then transported to wafer inspection equipment for various tests. In some of these tests, the linear marks on the wafers must be perpendicular to the conveying direction to avoid interference. If the linear marks on the wafers conveyed by the wafer loading device are not perpendicular to the conveying direction, the wafers must be rotated so that the linear marks are perpendicular to the conveying direction.

[0003] In the prior art, a suction cup is generally used to absorb the sheet and rotate it to achieve the angle adjustment of the sheet. This adjustment method has a high load on the suction cup and requires the suction cup to move back and forth and rotate, resulting in low efficiency in sheet feeding. Utility Model Content

[0004] In order to solve the problem of low efficiency of existing sheet loading, the present application provides a sheet loading device and sheet detection equipment with high loading efficiency.

[0005] The technical solution of this application is as follows:

[0006] In a first aspect, the present application provides a sheet loading device, comprising a first conveying mechanism and a second conveying mechanism, a transfer conveying mechanism, and a rotating mechanism arranged in parallel; wherein:

[0007] The first conveying mechanism is located on a first side of the second conveying mechanism, and the first conveying mechanism and the second conveying mechanism are respectively configured to convey the sheet along a first direction;

[0008] The transfer conveying mechanism spans above the first conveying mechanism and the second conveying mechanism, and the transfer conveying mechanism partially overlaps with the first conveying mechanism and the second conveying mechanism in vertical projection, and the rotating mechanism is located below the transfer conveying mechanism;

[0009] The transfer conveying mechanism is configured to pick up the sheet on the first conveying mechanism and convey the sheet laterally to the rotating mechanism; the rotating mechanism is configured to rotate the sheet by a predetermined angle in a horizontal plane; the transfer conveying mechanism is further configured to convey the sheet laterally after being rotated by the predetermined angle on the rotating mechanism to the second conveying mechanism;

[0010] The second conveying mechanism is further configured to convey the sheet to a subsequent workstation.

[0011] The present application transports the sheet before turning through the first conveying mechanism, transports the sheet before turning to the rotating mechanism through the transfer conveying mechanism and then turns it, and transports the turned sheet from the rotating mechanism to the second conveying mechanism, and transports the turned sheet through the second conveying mechanism, thereby realizing the turning and loading of the sheet; and the transfer conveying mechanism only completes the transporting function, and the rotating mechanism only completes the steering function. When the rotating mechanism is turning, the transfer conveying mechanism can transport, and when the transfer conveying mechanism is transporting, the rotating mechanism can turn. The transfer conveying mechanism and the rotating mechanism work independently and do not interfere with each other, which can fully save the waiting time for transportation and rotation, improve the work rhythm, and improve the loading efficiency of the sheet loading device.

[0012] Optionally, the line marks of the sheet conveyed by the first conveying mechanism are parallel to the first direction, and the line marks of the sheet conveyed by the second conveying mechanism are perpendicular to the first direction.

[0013] By rotating the rotating mechanism, the line marks of the sheet conveyed to the second conveying mechanism are made perpendicular to the conveying direction of the second conveying mechanism, so as to meet the inspection requirements of the subsequent process.

[0014] Optionally, the transfer conveyor mechanism includes an adsorption unit and a transfer conveyor belt arranged in parallel along a second direction. The adsorption unit is arranged between the parallel arranged transfer conveyor belts or corresponding to each transfer conveyor belt. The adsorption unit is configured to adsorb the sheet and suspend it on the transfer conveyor belt. The transfer conveyor belt is configured to convey the sheet along the second direction, and the second direction is perpendicular to the first direction.

[0015] The sheet is sucked by the suction unit and transported by the transfer conveyor belt, achieving suspended transfer of the sheet. The suspended transfer method can better cooperate with the rotating mechanism below the transfer conveyor mechanism to complete the pickup and transportation of the sheet. Compared with setting up a transverse suction cup between the first and second conveyor mechanisms, there is no need for reciprocating movement. The transfer conveyor mechanism only needs to transport in a single direction, which can effectively improve the transfer efficiency.

[0016] Optionally, the transfer conveyor belt includes two first transfer conveyor belts arranged in parallel, two second transfer conveyor belts arranged in parallel, and the adsorption unit includes a first adsorption unit and a second adsorption unit;

[0017] The two second transfer conveyor belts are arranged in parallel between the two first transfer conveyor belts, and the two second transfer conveyor belts and the two first transfer conveyor belts partially overlap along the second direction to form an overlapping area, and the rotating mechanism is arranged below the overlapping area;

[0018] The first adsorption unit is arranged between two first transfer conveyor belts arranged in parallel or corresponding to each first transfer conveyor belt; the second adsorption unit is arranged between two second transfer conveyor belts arranged in parallel or corresponding to each second transfer conveyor belt.

[0019] First, the first transfer conveyor belt is used to suck up the sheet on the first conveying mechanism and release the sheet onto the rotating mechanism after conveying it to the overlapping area. After the sheet is turned by the rotating mechanism, the second transfer conveyor belt is used to suck up the turned sheet on the rotating mechanism and convey it to the top of the second conveying mechanism and release the sheet onto the second conveying mechanism. The two transfer conveyor belts work independently and do not interfere with each other. It is only necessary to ensure that the first transfer conveyor belt does not lower a sheet and convey it to the overlapping area before the second transfer conveyor belt sucks up the sheet on the rotating mechanism (that is, before the second transfer conveyor belt sucks up the sheet on the rotating mechanism, the first transfer conveyor belt can pick up the next sheet on the first conveying mechanism in advance), so that the turning and transfer of the sheet from the first conveying mechanism to the second conveying mechanism can be completed quickly, thereby improving the loading efficiency of the sheet loading device.

[0020] Optionally, the rotating mechanism includes a rotating platform and a rotating assembly, and the rotating platform is mounted on the driving end of the rotating assembly;

[0021] Alternatively, the rotating mechanism includes a first conveyor belt and a second conveyor belt arranged in parallel, a first motor driving the first conveyor belt and a second motor driving the second conveyor belt, and the first conveyor belt and the second conveyor belt are configured to rotate at different speeds to drive the sheet to rotate in a horizontal plane.

[0022] The rotating mechanism adopts a solution combining a rotating platform and a rotating assembly, which has a simple structure and low cost. The rotating mechanism adopts a solution combining two conveyor belts and two motors, which has flexible operation and high precision.

[0023] Optionally, there are two transfer and conveying mechanisms and two rotating mechanisms;

[0024] The two transfer conveying mechanisms are arranged at intervals along the first direction and both span above the first conveying mechanism and the second conveying mechanism. A rotating mechanism is arranged below each transfer conveying mechanism.

[0025] By configuring the first conveying mechanism with two transfer conveying mechanisms, the efficiency of loading sheets can be further increased and the production capacity can be improved. In addition, by controlling the action time, speed and other parameters of the first conveying mechanism and the transfer conveying mechanism, the two transfer conveying mechanisms can synchronously release the sheets they transfer to the second conveying mechanism, so that the sheets on the second conveying mechanism can maintain a relatively consistent sheet spacing.

[0026] Optionally, the sheet loading device further includes a sheet picking mechanism, which is installed at a front station of the first conveying mechanism and is configured to convey the sheet to the first conveying mechanism.

[0027] By configuring the sheet taking mechanism, the sheet can be automatically conveyed to the first conveying mechanism, thereby improving the loading efficiency.

[0028] Optionally, there are two film taking mechanisms and two first conveying mechanisms;

[0029] Another first conveying mechanism is mounted on a second side of the second conveying mechanism opposite to the first side.

[0030] The two sheet-taking mechanisms and the two first conveying mechanisms are used in conjunction with one second conveying mechanism, and materials can be alternately loaded from both sides of the second conveying mechanism, thereby further improving the loading efficiency of the sheet loading device.

[0031] Optionally, the sheet picking mechanism is used to pick up and transport the whole sheets stored in the whole sheet basket, or the half sheets stored in two parallel rows in the half sheet basket;

[0032] When the sheet picking mechanism is used to pick up and transport the half-sheets in the half-sheet flower basket, the sheet loading device also includes a translation mechanism, and the sheet picking mechanism is installed on the translation mechanism; the translation mechanism is configured to drive the sheet picking mechanism to translate along the second direction, so that the sheet picking mechanism alternately docks with the two rows of half-sheets in the half-sheet flower basket.

[0033] The sheet picking mechanism can dock with the whole flower basket and pick up the whole sheet, and can also dock with the half flower basket and pick up the half sheet, which expands the application range of the sheet feeding device; by configuring the translation mechanism, the sheet picking mechanism can realize the alternate picking of the two rows of half sheets in the half flower basket, thereby improving the sheet picking efficiency.

[0034] Optionally, the sheet feeding device further includes a tidying mechanism, which is installed on the conveying path of the sheet taking mechanism and is located in front of the first conveying mechanism;

[0035] and / or, the tidying mechanism is installed on the conveying path of the first conveying mechanism and is located in the front path of the transfer conveying mechanism;

[0036] and / or, the tidying mechanism is installed on the conveying path of the second conveying mechanism and is located after the transfer conveying mechanism;

[0037] The aligning mechanism is configured to align the sheets at corresponding positions.

[0038] By configuring a regularizing mechanism, the sheets at corresponding positions can be regularized to prevent the loading efficiency from being affected by the skew of the sheets.

[0039] Optionally, the sheet feeding device further includes an appearance detection mechanism and / or a hidden crack detection mechanism;

[0040] The appearance detection mechanism and / or the hidden crack detection mechanism are installed after the regularization mechanism to detect the sheet.

[0041] By configuring an appearance inspection mechanism and / or a hidden crack inspection mechanism to inspect the sheet, unqualified sheets can be screened out to prevent unqualified sheets from flowing into subsequent processes and affecting production efficiency.

[0042] Optionally, the sheet loading device further includes a receiving box, which is installed at the discharge end of the first conveying mechanism and is used to collect unqualified sheets after inspection or sheets that the transfer conveying mechanism has not had time to transfer.

[0043] By configuring a collection box, unqualified sheets or sheets that cannot be transferred in time can be collected centrally, which is convenient for subsequent centralized processing.

[0044] Optionally, the sheet feeding device further includes a rejection mechanism, which is installed after the appearance inspection mechanism and / or the hidden crack inspection mechanism and is used to reject unqualified sheets after inspection.

[0045] By configuring a rejection mechanism to reject unqualified sheets, it is convenient for subsequent centralized processing of unqualified sheets.

[0046] In a second aspect, the present application provides a sheet detection device, comprising the sheet loading device and the detection device according to any one of the first aspects; wherein:

[0047] The detection device is installed at the downstream station of the sheet loading device;

[0048] The sheet loading device is configured to load the sheet to be inspected onto the inspection device;

[0049] The detection device is configured to receive the sheet to be detected conveyed by the second conveying mechanism and detect the sheet.

[0050] By configuring a sheet loading device including a transfer conveying mechanism and a rotating mechanism in the sheet detection equipment, the transfer conveying mechanism only completes the transporting function, and the rotating mechanism only completes the steering function. When the rotating mechanism turns, the transfer conveying mechanism can transport, and when the transfer conveying mechanism transports, the rotating mechanism can turn. The transfer conveying mechanism and the rotating mechanism work independently and do not interfere with each other, which can fully save the waiting time for transportation and rotation, improve the work rhythm, improve the loading efficiency of the sheet loading device, and thereby improve the production efficiency of the sheet detection equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] Figure 1 This is a schematic diagram of the planar layout of an optional embodiment of the sheet detection device in this application;

[0052] Figure 2 This is a schematic diagram of the three-dimensional structure of an optional embodiment of the sheet loading device in the present application;

[0053] Figure 3 for Figure 2Schematic diagram of the three-dimensional structure from another perspective;

[0054] Figure 4 for Figure 2 A top view of

[0055] Figure 5 This is a schematic diagram of the three-dimensional structure of an optional embodiment of the transfer and conveying mechanism in this application;

[0056] Figure 6 for Figure 5 The main view;

[0057] Figure 7 This is a schematic diagram of the three-dimensional structure of an optional embodiment of the rotating mechanism in this application;

[0058] Figure 8 for Figure 7 Schematic diagram of the three-dimensional structure after removing the sheet.

[0059] Figures 1 to 8 Including:

[0060] Sheet detection equipment 1;

[0061] Sheet loading device 10, first conveying mechanism 11, second conveying mechanism 12, transfer conveying mechanism 13, first transfer conveyor belt 311, first suction unit 312, second transfer conveyor belt 321, second suction unit 322, overlapping area 331, rotating mechanism 14, first conveyor belt 141, second conveyor belt 142, first motor 143, second motor 144, suction assembly 145, sheet taking mechanism 15, flower basket 151, tidying mechanism 16, material receiving box 18;

[0062] Detection device 20;

[0063] Translation mechanism 30;

[0064] Sheet 100 , first direction 101 , second direction 102 . DETAILED DESCRIPTION

[0065] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0066] When silicon ingots are cut into wafers, they leave line marks on the cut surface. Before being manufactured into solar cells, the wafers undergo various tests. For some of these tests, the line marks on the wafers must be perpendicular to the conveying direction to avoid interference. If the line marks on the wafers are not perpendicular to the conveying direction, the wafers must be rotated to align them.

[0067] like Figure 1As shown, a sheet detection device 1 includes a sheet loading device 10 and a detection device 20.

[0068] Wherein: the detection device 20 is installed at the back-end station of the sheet loading device 10;

[0069] The sheet loading device 10 is configured to load the sheet 100 to be inspected onto the inspection device 20 ;

[0070] The detection device 20 is configured to receive the sheet 100 to be detected, which is conveyed by the second conveying mechanism 12 of the sheet feeding device 10 , and to detect the sheet 100 .

[0071] The detection device 20 in the sheet detection apparatus 1 can adopt any structure in the prior art.

[0072] The present application mainly improves the sheet loading device 10 in the above-mentioned sheet detection device 1 , and the sheet loading device 10 is introduced in detail below.

[0073] like Figures 2 to 4 As shown, as an optional embodiment, a sheet loading device 10 includes a first conveying mechanism 11 and a second conveying mechanism 12 arranged in parallel, a transfer conveying mechanism 13 and a rotating mechanism 14.

[0074] The first conveying mechanism 11 is located on a first side of the second conveying mechanism 12 , and the first conveying mechanism 11 and the second conveying mechanism 12 are respectively configured to convey the sheet 100 along a first direction 101 ;

[0075] The transfer conveying mechanism 13 spans above the first conveying mechanism 11 and the second conveying mechanism 12 , and the transfer conveying mechanism 13 partially overlaps with the first conveying mechanism 11 and the second conveying mechanism 12 in vertical projection. The rotating mechanism 14 is located below the transfer conveying mechanism 13 ;

[0076] The transfer conveying mechanism 13 is configured to pick up the sheet 100 on the first conveying mechanism 11 and convey the sheet 100 laterally to the rotating mechanism 14; the rotating mechanism 14 is configured to rotate the sheet 100 by a predetermined angle in a horizontal plane; the transfer conveying mechanism 13 is further configured to convey the sheet 100 rotated by the predetermined angle on the rotating mechanism 14 laterally to the second conveying mechanism 12;

[0077] The second conveying mechanism 12 is further configured to convey the sheet 100 to a subsequent workstation.

[0078] The present application uses the first conveying mechanism 11 to convey the sheet 100 before turning, and uses the transfer conveying mechanism 13 to transport the sheet 100 before turning to the rotating mechanism 14 for turning, and transports the turned sheet 100 from the rotating mechanism 14 to the second conveying mechanism 12, and transports the turned sheet 100 through the second conveying mechanism 12, thereby realizing the turning and loading of the sheet 100; and the transfer conveying mechanism 13 only completes the transporting function, and the rotating mechanism 14 only completes the steering function. When the rotating mechanism 14 is turning, the transfer conveying mechanism 13 can carry, and when the transfer conveying mechanism 13 is transporting, the rotating mechanism 14 can turn. The transfer conveying mechanism 13 and the rotating mechanism 14 work independently and do not interfere with each other, which can fully save the waiting time for transportation and rotation, improve the working rhythm, and improve the loading efficiency of the sheet loading device 10.

[0079] In one embodiment, optionally, the line marks of the sheet 100 conveyed by the first conveying mechanism 11 are parallel to the first direction 101 , and the line marks of the sheet 100 conveyed by the second conveying mechanism 12 are perpendicular to the first direction 101 .

[0080] By rotating the rotating mechanism 14 , the line marks of the sheet 100 conveyed to the second conveying mechanism 12 are made perpendicular to the conveying direction of the second conveying mechanism 12 , so as to meet the inspection requirements of the subsequent process.

[0081] As an optional embodiment, the transfer conveyor mechanism 13 includes an adsorption unit and a transfer conveyor belt arranged in parallel along the second direction 102. The adsorption unit is arranged between the parallel arranged transfer conveyor belts or corresponding to each transfer conveyor belt. The adsorption unit is configured to adsorb and suspend the sheet 100 on the transfer conveyor belt. The transfer conveyor belt is configured to convey the sheet 100 along the second direction 102, and the second direction 102 is perpendicular to the first direction 101.

[0082] The sheet 100 is sucked by the suction unit and transported by the transfer conveyor belt, thereby realizing the suspended transfer of the sheet 100. The suspended transfer method can better cooperate with the rotating mechanism 14 below the transfer conveyor mechanism 13 to complete the picking up and conveying of the sheet 100. Compared with setting up a transverse suction cup between the first conveyor mechanism 11 and the second conveyor mechanism 12, there is no need for reciprocating movement. The transfer conveyor mechanism 13 only needs to transport in one direction, which can effectively improve the transfer efficiency.

[0083] In this embodiment, optionally, Figure 5 、 Figure 6 As shown, the transfer conveyor belt includes two first transfer conveyor belts 311 and two second transfer conveyor belts 321 arranged in parallel, and the adsorption unit includes a first adsorption unit 312 and a second adsorption unit 322;

[0084] The two second transfer conveyor belts 321 are arranged in parallel between the two first transfer conveyor belts 311 , and the two second transfer conveyor belts 321 and the two first transfer conveyor belts 311 partially overlap along the second direction 102 to form an overlapping area 331 . The rotating mechanism 14 is arranged below the overlapping area 331 .

[0085] The first adsorption unit 312 is arranged between two first transfer conveyor belts 311 arranged in parallel or corresponding to each first transfer conveyor belt 311 ; the second adsorption unit 322 is arranged between two second transfer conveyor belts 321 arranged in parallel or corresponding to each second transfer conveyor belt 321 .

[0086] First, the first transfer conveyor belt 311 is used to suck up the sheet 100 on the first conveying mechanism 11 and release the sheet to the rotating mechanism 14 after conveying it to the overlapping area 331. After the sheet 100 is turned by the rotating mechanism 14, the second transfer conveyor belt 321 is used to suck up the turned sheet 100 on the rotating mechanism 14 and convey it to the top of the second conveying mechanism 12 and release the sheet 100 to the second conveying mechanism 12. The two transfer conveyor belts work independently and do not interfere with each other. Before the sheet 100 rotated on the rotating mechanism 14 is sucked up, it is sufficient to ensure that the first transfer conveyor belt 311 does not drop a sheet 100 to be transported to the overlapping area 331 (that is, before the second transfer conveyor belt 321 sucks up the sheet 100 on the rotating mechanism 14, the first transfer conveyor belt 311 can pick up the next sheet 100 on the first conveying mechanism 11 in advance), so that the sheet 100 can be quickly turned and transferred from the first conveying mechanism 11 to the second conveying mechanism 12, thereby improving the loading efficiency of the sheet loading device 10.

[0087] Optional such as Figures 2 to 4 As shown, the rotating mechanism 14 can have various structures. Optionally, the rotating mechanism 14 includes a rotating platform and a rotating assembly, and the rotating platform is installed at the driving end of the rotating assembly. The rotating platform and the rotating assembly both adopt any available structure in the prior art.

[0088] The rotating mechanism 14 adopts a solution combining a rotating platform and a rotating assembly, which has a simple structure and low cost.

[0089] like Figure 7 、 Figure 8 As shown, another optional embodiment of the rotating mechanism 14 includes a first conveyor belt 141 and a second conveyor belt 142 arranged in parallel, a first motor 143 that drives the first conveyor belt 141 to operate, and a second motor 144 that drives the second conveyor belt 142 to operate. The first conveyor belt 141 and the second conveyor belt 142 are configured to rotate at different speeds to drive the sheet 100 to rotate in a horizontal plane.

[0090] The rotating mechanism 14 adopts a solution combining two conveyor belts and two motors, which is flexible in operation and high in precision.

[0091] Further, such as Figure 7 、 8 As shown, in order to further improve the smoothness of the rotation of the rotating mechanism 14 , an adsorption component 145 may be provided to adsorb and press the sheet 100 onto the first conveyor belt 141 and the second conveyor belt 142 when the sheet 100 rotates.

[0092] As photovoltaic panels face increasing demands for cell luminous efficiency, more and more processes are opting to string together half-cells (i.e., half of a full cell) to create photovoltaic panels. These half-cells can be cut into half-cells, or they can be directly obtained from the silicon wafer during slicing, and then processed to create half-cells.

[0093] Half silicon wafers are currently usually stored in half wafer baskets, such as Figure 1 、 2 As shown, based on the full-flower basket, the half-flower basket has two rows of storage compartments side by side. This also means that when taking half a flower from the half-flower basket, it is equivalent to taking twice the number of flowers from the full-flower basket. The following embodiment is particularly suitable for taking and loading flowers from the half-flower basket:

[0094] See also Figures 2 to 4 Optionally, there are two transfer conveying mechanisms 13 and two rotating mechanisms 14; the two transfer conveying mechanisms 13 are arranged at intervals along the first direction 101 and both span above the first conveying mechanism 11 and the second conveying mechanism 12, and a rotating mechanism 14 is arranged below each transfer conveying mechanism 13.

[0095] By configuring the first conveying mechanism 11 with two transfer conveying mechanisms 13, the efficiency of loading sheets can be further increased and the production capacity can be improved. In addition, by controlling the action time, speed and other parameters of the first conveying mechanism 11 and the transfer conveying mechanism 13, the two transfer conveying mechanisms 13 can synchronously release the sheets 100 they transfer to the second conveying mechanism 12, so that the sheets 100 on the second conveying mechanism 12 can maintain a relatively consistent sheet spacing.

[0096] Optionally, the sheet loading device 10 further includes a sheet taking mechanism 15 , which is installed at a front station of the first conveying mechanism 11 and is configured to convey the sheet 100 to the first conveying mechanism 11 .

[0097] By configuring the sheet taking mechanism 15 , the sheet 100 can be automatically conveyed to the first conveying mechanism 11 , thereby improving the loading efficiency.

[0098] Optionally, there are two film-taking mechanisms 15 and two first conveying mechanisms 11 ; another first conveying mechanism 11 is installed on a second side of the second conveying mechanism 12 opposite to the first side.

[0099] Two wafer removal mechanisms 15 and two first conveyor mechanisms 11 are used in conjunction with a second conveyor mechanism 12 to alternately load wafers from both sides of the second conveyor mechanism 12, further improving the loading efficiency of the wafer loading device 10. The wafers 100 (e.g., silicon wafers) in this application can be whole wafers or half wafers. Whole wafers are stored in whole wafer baskets, typically in a single row. Half wafers are stored in half wafer baskets, typically in two parallel rows.

[0100] Optionally, the sheet taking mechanism 15 is used to pick up and transport the whole sheets stored in the whole sheet basket, or the half sheets stored in two parallel rows in the half sheet basket 151 . Figures 2 to 4 The sheet picking mechanism 15 can dock with the whole sheet basket to pick up the whole sheet, and can also dock with the half sheet basket 151 to pick up the half sheet, thereby expanding the application range of the sheet feeding device 10.

[0101] When the sheet picking mechanism 15 is used to pick up and transport the half-sheets in the half-sheet flower basket 151, the sheet loading device 10 further includes a translation mechanism 30, and the sheet picking mechanism 15 is mounted on the translation mechanism 30; the translation mechanism 30 is configured to drive the sheet picking mechanism 15 to translate along the second direction 102, so that the sheet picking mechanism 15 alternately docks with the two rows of half-sheets in the half-sheet flower basket 151.

[0102] By configuring the translation mechanism 30 , the sheet picking mechanism 15 can pick up the two rows of half-sheets in the half-sheet basket 151 in turn, thereby improving the sheet picking efficiency.

[0103] In one embodiment, the sheet feeding device 10 optionally further includes a tidying mechanism 16 , which is installed on the conveying path of the sheet taking mechanism 15 and is located in front of the first conveying mechanism 11 ;

[0104] and / or, the tidying mechanism 16 is installed on the conveying path of the first conveying mechanism 11 and is located in front of the transfer conveying mechanism 13;

[0105] and / or, the tidying mechanism 16 is installed on the conveying path of the second conveying mechanism 12 and is located after the transfer conveying mechanism 13;

[0106] The aligning mechanism 16 is configured to align the sheet 100 at corresponding positions.

[0107] The tidying mechanism 16 can adopt any available structure in the prior art. In the present application, the setting position of the tidying mechanism 16 can be any one of the above methods, or a combination of any two or more methods.

[0108] By configuring the aligning mechanism 16 , the sheet 100 at the corresponding position is aligned, thereby preventing the loading efficiency from being affected by the skew of the sheet 100 .

[0109] In one embodiment, optionally, the sheet feeding device 10 further includes an appearance detection mechanism and / or a hidden crack detection mechanism;

[0110] The appearance detection mechanism and / or the hidden crack detection mechanism are installed after the regularization mechanism 16 to detect the sheet 100 .

[0111] By configuring an appearance inspection mechanism and / or a hidden crack inspection mechanism to inspect the sheet 100 , unqualified sheets 100 can be screened out, thereby preventing unqualified sheets 100 from flowing into subsequent processes and affecting production efficiency.

[0112] like Figures 2 to 4 As shown, optionally, the sheet loading device 10 further includes a receiving box 18 , which is installed at the discharge end of the first conveying mechanism 11 and is used to collect unqualified sheets 100 after inspection or sheets 100 that the transfer conveying mechanism 13 fails to transfer in time.

[0113] The receiving box 18 is configured to centrally collect unqualified sheets 100 or sheets 100 that cannot be transferred in time, so as to facilitate subsequent centralized processing.

[0114] In one embodiment, the sheet feeding device 10 optionally further includes a rejection mechanism, which is installed after the appearance inspection mechanism and / or the hidden crack inspection mechanism, and is used to reject unqualified sheets 100 after inspection.

[0115] By configuring a rejection mechanism to reject unqualified sheets 100 , it is convenient to subsequently carry out centralized processing of the unqualified sheets 100 .

[0116] like Figures 1 to 4 As shown, the present application configures a sheet loading device 10 including a transfer conveying mechanism 13 and a rotating mechanism 14 in the sheet detection equipment 1. The transfer conveying mechanism 13 only performs the transporting function, and the rotating mechanism 14 only performs the steering function. When the rotating mechanism 14 turns, the transfer conveying mechanism 13 can transport, and when the transfer conveying mechanism 13 transports, the rotating mechanism 14 can turn. The transfer conveying mechanism 13 and the rotating mechanism 14 work independently and do not interfere with each other, which can fully save the waiting time for transport and rotation, improve the working rhythm, improve the loading efficiency of the sheet loading device 10, and thereby improve the production efficiency of the sheet detection equipment 1.

[0117] It should be noted that the sheet loading device 10 disclosed in the present application is not limited to any one of the above optional embodiments, but can also be a combination of any one or more of the above optional embodiments, or a simple variation of any one of the above optional embodiments or the combined embodiments.

[0118] The present application has been described above in sufficient detail with certain specificity. Those skilled in the art will understand that the descriptions in the examples are merely illustrative, and that all modifications made without departing from the true spirit and scope of the present application are intended to be within the scope of protection of the present application. The scope of protection claimed in the present application is defined by the claims, not by the description in the examples.

Claims

1. A sheet feeding device, characterized in that: The sheet loading device includes a first conveying mechanism and a second conveying mechanism, a transfer conveying mechanism and a rotating mechanism arranged in parallel; wherein: The first conveying mechanism is located on a first side of the second conveying mechanism, and the first conveying mechanism and the second conveying mechanism are respectively configured to convey the sheet along a first direction; The transfer conveying mechanism spans above the first conveying mechanism and the second conveying mechanism, and the transfer conveying mechanism partially overlaps with the first conveying mechanism and the second conveying mechanism in vertical projection, and the rotating mechanism is located below the transfer conveying mechanism; The transfer conveying mechanism is configured to pick up the sheet on the first conveying mechanism and convey the sheet laterally to the rotating mechanism; the rotating mechanism is configured to rotate the sheet by a predetermined angle in a horizontal plane; the transfer conveying mechanism is further configured to convey the sheet rotated by the predetermined angle on the rotating mechanism laterally to the second conveying mechanism; The second conveying mechanism is further configured to convey the sheet to a subsequent workstation.

2. The sheet feeding device according to claim 1, characterized in that: The line marks of the sheet conveyed by the first conveying mechanism are parallel to the first direction, and the line marks of the sheet conveyed by the second conveying mechanism are perpendicular to the first direction.

3. The sheet feeding device according to claim 1, characterized in that: The transfer conveyor mechanism includes an adsorption unit and a transfer conveyor belt arranged in parallel along a second direction. The adsorption unit is arranged between the transfer conveyor belts arranged in parallel or corresponding to each transfer conveyor belt. The adsorption unit is configured to adsorb the sheet and suspend it on the transfer conveyor belt. The transfer conveyor belt is configured to transport the sheet along the second direction, which is perpendicular to the first direction.

4. The sheet feeding device according to claim 3, characterized in that: The transfer conveyor belt includes two first transfer conveyor belts arranged in parallel and two second transfer conveyor belts arranged in parallel, and the adsorption unit includes a first adsorption unit and a second adsorption unit; The two second transfer conveyor belts are arranged in parallel between the two first transfer conveyor belts, and the two second transfer conveyor belts and the two first transfer conveyor belts partially overlap along the second direction to form an overlapping area, and the rotating mechanism is arranged below the overlapping area; The first adsorption unit is arranged between two first transfer conveyor belts arranged in parallel or corresponding to each first transfer conveyor belt; the second adsorption unit is arranged between two second transfer conveyor belts arranged in parallel or corresponding to each second transfer conveyor belt.

5. The sheet feeding device according to claim 1, characterized in that: The rotating mechanism includes a rotating platform and a rotating assembly, wherein the rotating platform is installed at the driving end of the rotating assembly; Alternatively, the rotating mechanism includes a first conveyor belt and a second conveyor belt arranged in parallel, a first motor driving the first conveyor belt and a second motor driving the second conveyor belt, and the first conveyor belt and the second conveyor belt are configured to rotate at different speeds to drive the sheet to rotate in a horizontal plane.

6. The sheet feeding device according to claim 1, characterized in that: There are two transfer and conveying mechanisms and two rotating mechanisms; The two transfer conveying mechanisms are arranged at intervals along the first direction and both span above the first conveying mechanism and the second conveying mechanism. One rotation mechanism is arranged below each of the transfer conveying mechanisms.

7. The sheet feeding device according to claim 1, characterized in that: The sheet loading device further includes a sheet picking mechanism, which is installed at a front station of the first conveying mechanism and is configured to convey the sheet to the first conveying mechanism.

8. The sheet feeding device according to claim 7, characterized in that: There are two of the film taking mechanism and the first conveying mechanism; Another first conveying mechanism is mounted on a second side of the second conveying mechanism opposite to the first side.

9. The sheet feeding device according to claim 7, characterized in that: The sheet taking mechanism is used to pick up and transport the whole sheets stored in the whole sheet basket, or the half sheets stored in two rows in parallel in the half sheet basket; When the sheet picking mechanism is used to pick up and transport the half-sheets in the half-sheet flower basket, the sheet loading device also includes a translation mechanism, and the sheet picking mechanism is installed on the translation mechanism; the translation mechanism is configured to drive the sheet picking mechanism to translate along the second direction, so that the sheet picking mechanism alternately docks with the two rows of half-sheets in the half-sheet flower basket.

10. The sheet feeding device according to claim 7, characterized in that: The sheet feeding device further comprises a tidying mechanism, which is installed on the conveying path of the sheet taking mechanism and is located in front of the first conveying mechanism; And / or, the tidying mechanism is installed on the conveying path of the first conveying mechanism and is located in the front path of the transfer conveying mechanism; And / or, the tidying mechanism is installed on the conveying path of the second conveying mechanism and is located after the transfer conveying mechanism; The aligning mechanism is configured to align the sheet at corresponding positions.

11. The sheet feeding device according to claim 10, characterized in that: The sheet feeding device further includes an appearance detection mechanism and / or a hidden crack detection mechanism; The appearance detection mechanism and / or the hidden crack detection mechanism are installed after the regularization mechanism to detect the sheet.

12. The sheet feeding device according to claim 11, characterized in that: The sheet loading device further includes a material receiving box, which is installed at the discharge end of the first conveying mechanism and is used to collect unqualified sheets after inspection or sheets that the transfer conveying mechanism has not had time to transfer.

13. The sheet feeding device according to claim 11, characterized in that: The sheet feeding device further comprises a rejecting mechanism, which is installed after the appearance inspection mechanism and / or the hidden crack inspection mechanism and is used to reject unqualified sheets after inspection.

14. A sheet detection device, characterized in that: The sheet detection device comprises a sheet loading device and a detection device according to any one of claims 1 to 13; wherein: The detection device is installed at the subsequent workstation of the sheet feeding device; The sheet loading device is configured to load the sheet to be inspected onto the inspection device; The detection device is configured to receive the sheet to be detected conveyed by the second conveying mechanism and detect the sheet.