Exhaust device

Abstract

The exhaust device comprises an exhaust hood assembly, a magnetic rotating assembly, a purification assembly and a negative pressure fan, the exhaust hood assembly comprises an exhaust hood body, a bottom opening plate and a flow guide pipe, the bottom opening plate is arranged at the bottom of the exhaust hood body, a plurality of evenly-distributed threaded through holes are formed in the bottom opening plate, and the flow guide pipe is arranged on the bottom opening plate. The bottom opening plate is connected with the flow guide pipe through a threaded through hole, the purification assembly comprises a purification tank body and an adsorption filter element, the exhaust hood body and the purification tank body are connected through an air inducing pipe, the adsorption filter element is arranged in the purification tank body, a magnetic rotating assembly is arranged in the air inducing pipe, and the magnetic rotating assembly is used for promoting flowing of airflow in the air inducing pipe. The exhaust pipe is arranged at the top of the purification tank, the negative pressure fan is arranged at the end, away from the purification tank, of the exhaust pipe, the negative pressure fan directly acts on to-be-treated gas through the flow guide pipe and can also enter the exhaust hood body from the threaded through hole and then enter the air inducing pipe, and harm to the atmosphere is reduced by arranging the purification tank.

Description

Technical Field

[0001] The utility model relates to the technical field of waste gas treatment, in particular to an exhaust device. Background Art

[0002] A plasma etcher is a micro-nano processing device based on the principles of plasma physics. It is widely used in semiconductor device manufacturing, nanotechnology, biomedicine and other fields. It uses high-energy electrons to bombard gas to generate plasma, and through the interaction between plasma and the material surface, it achieves etching and processing of the material surface.

[0003] Plasma etchers require exhaust when in use to discharge the corrosive gases generated. The current exhaust method is mostly to drill holes on the wall of the etching space, then install exhaust pipes, and exhaust through negative pressure suction from a fan. The gas first passively diffuses in the space and is then sucked away by the negative pressure, which does not have a diversion and exhaust effect. Utility Model Content

[0004] In view of the above situation, it is necessary to provide an exhaust device to address the problem in the prior art that exhaust air is usually first diffused in the space and then processed.

[0005] The vents are connected to the fan by means of a filter, and the filter is connected to the fan by means of a filter.

[0006] Beneficial effects of the utility model:

[0007] 1. By arranging the guide pipe and the exhaust hood body, when exhausting, not only can the gas directly enter the exhaust hood body from the threaded through hole on the bottom plate for negative pressure suction and exhaust, but the guide pipe can also be used to extend the suction point to a position close to the gas generation position, so that the gas can be quickly sucked and discharged. By using the magnetic rotating component in conjunction with the negative pressure fan, it can be more conducive to the flow of air in the duct, thereby increasing the gas processing efficiency.

[0008] 2. By setting up a purification tank and using an adsorption filter element to adsorb corrosive components, the purpose of purification can be achieved and the harm to the atmosphere can be reduced.

[0009] Furthermore, the area of ​​the top of the exhaust hood body is smaller than the area of ​​the bottom of the exhaust hood body.

[0010] Furthermore, the diversion pipe is a gooseneck pipe.

[0011] Furthermore, the magnetic rotating assembly includes a connecting shaft, a rotating part, a plurality of fan blades, a plurality of permanent magnets and a plurality of electromagnets. The tube wall of the induced draft duct is concave to form a plurality of first accommodating grooves distributed at intervals. The first accommodating grooves are provided with the electromagnets. One end of the connecting shaft is connected to the inner wall of the induced draft duct, and the other end of the connecting shaft is movably connected to the rotating part. The outer edge of the rotating part is provided with a plurality of fan blades distributed at intervals. The fan blades form a gap with the inner wall of the induced draft duct. The end of the fan blade away from the rotating part is concave to form a second accommodating groove. The permanent magnets are provided in the second accommodating groove, and the polarity distribution of the plurality of permanent magnets is the same.

[0012] The utility model utilizes the principle that similar magnetism repels each other and different magnetism attracts each other, and the electromagnet and the permanent magnet cooperate to drive the fan blade to rotate. Preferably, a magnetic rotating component is provided at the front section of the entire passage, which promotes the flow of air in the induced draft duct, thereby strengthening the negative pressure attraction at the exhaust hood and the guide duct, ensuring the suction and exhaust effect, and utilizing the magnetic field drive method to avoid easily corroded metal objects or wires from being exposed to the gas, thereby ensuring safe use.

[0013] Furthermore, the number of the electromagnets is 6, and the number of the permanent magnets is 4.

[0014] Furthermore, activated carbon or glass fiber is arranged in the adsorption filter element.

[0015] Furthermore, the height of the bottom of the exhaust duct is higher than the height of the top of the air induction duct. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic structural diagram of the first embodiment of the present utility model;

[0017] Figure 2 A cross-sectional view of a magnetic rotating assembly according to a first embodiment of the present invention;

[0018] Figure 3 This is a cross-sectional view of the purification component of the first embodiment of the present invention.

[0019] Figure numerals: 1. Exhaust hood assembly; 11. Exhaust hood body; 12. Bottom plate; 121. Threaded through hole; 13. Draft tube; 2. Magnetic rotating assembly; 21. Electromagnet; 22. Rotating part; 23. Fan blade; 24. Permanent magnet; 3. Purification assembly; 31. Purification tank; 32. Adsorption filter element; 4. Negative pressure fan; 5. Air duct; 6. Exhaust duct. DETAILED DESCRIPTION

[0020] To facilitate understanding of the present invention, a more comprehensive description of the present invention will be provided below with reference to the accompanying drawings. The drawings illustrate embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, the embodiments are provided to provide a more thorough and comprehensive understanding of the present invention.

[0021] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only.

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used herein in the specification of this invention are for the purpose of describing specific embodiments only and are not intended to limit this invention. The term "and / or" as used herein includes any and all combinations of one or more of the related listed items. Furthermore, the various embodiments of this invention, the features within the embodiments, and the features between the embodiments may be freely combined, provided there are no obvious conflicts or contradictions.

[0023] An exhaust device, such as Figure 1 As shown, it includes an exhaust hood assembly 1, a magnetic rotation assembly 2, a purification assembly 3 and a negative pressure fan 4.

[0024] The top of the hood body 11 is smaller than the bottom of the hood body 11 , and the bottom of the hood body 11 is provided with a bottom plate 12 covering the hood body 11 . The bottom plate 12 is provided with a plurality of evenly distributed threaded through holes 121 , and the bottom plate 12 is connected to the guide pipe 13 through the threaded through holes 121 . The guide pipe 13 is a gooseneck tube. The hood body 11 has a trapezoidal shape, and the guide pipe 13 can be selectively installed on the bottom plate 12 . By setting the guide pipe 13 and the hood body 11 , when exhausting, not only can the gas to be treated be directly allowed to enter the bottom position of the hood body 11 from the threaded through holes 121 on the bottom plate 12 for negative pressure suction and exhaust, but the guide pipe 13 can also be used to extend the suction point to a position close to the gas generation position, so that the gas can be quickly sucked and discharged.

[0025] Specifically, a purification component 3 is provided on the top of the exhaust hood body 11, such as Figure 1 and Figure 3 As shown, the purification component 3 includes a purification tank body 31 and an adsorption filter element 32. The adsorption filter element 32 is arranged in the purification tank body 31. By setting the purification tank body 31, the adsorption filter element 32 is used to adsorb corrosive components. Since the components of the gas to be treated are acidic, activated carbon or glass fiber is arranged in the adsorption filter element 32 to achieve the purpose of purification and reduce the harm to the atmosphere. The exhaust hood body 11 and the purification tank body 31 are connected by the air duct 5.

[0026] Specifically, such as Figure 1 and Figure 2As shown, a magnetic rotating assembly 2 is provided in the air duct 5. Preferably, the magnetic rotating assembly 2 is adjacent to the exhaust cover body 11. The magnetic rotating assembly 2 can promote the flow of air in the air duct 5. The magnetic rotating assembly 2 includes a connecting shaft (not shown), a rotating portion 22, a plurality of fan blades 23, a plurality of permanent magnets 24 and a plurality of electromagnets 21. The inner wall of the air duct is concave to form a plurality of first receiving grooves (not shown) distributed at intervals. The first receiving grooves are provided with electromagnets 21. The number of electromagnets 21 is 6, namely a1, a2, a3, a4, a5 and a6. One end of the connecting shaft is connected to the inner wall of the air duct 5, and the other end of the connecting shaft is rotatably connected to the rotating part 22. The outer edge of the rotating part 22 is provided with a plurality of fan blades 23 distributed at intervals. The fan blades 23 form a gap with the inner wall of the air duct 5. The end of the fan blade 23 away from the rotating part is concave to form a second receiving groove (not shown). The second receiving groove is provided with the permanent magnet 24. The number of the permanent magnets 24 is 4, namely b1, b2, b3 and b4. The polarity distribution of the four permanent magnets is the same. The principle of repulsion between the same magnetism and attraction between different magnetism is used. b1, a4 and b3 are aligned with the center line and powered on, thereby generating a repulsive force, pushing b1 and b3 to drive the fan blade 23 to rotate. At this time, a6 and b4, a3 and b2 just enter the suction range, and a3 and a6 are not powered on. Use b2 and b4 to do work, so that the electromagnet 21 and the permanent magnet 24 cooperate with each other to drive the rotating part 22 to rotate around the connecting axis, thereby realizing the rotation of the fan blade 23 on the rotating part 22. Similarly, a6 and b4, a3 and b2 are aligned with the center line and powered on, thereby generating a repulsive force, pushing b2 and b4 to drive the fan blade 23 rotates. At this time, a1 and b1 as well as a4 and b3 just enter the suction range, while a1 and a4 are not powered on. B1 and b3 are used to do work. A magnetic rotating component 2 is set at the front section of the entire passage. By intermittently energizing some electromagnets 21, electric energy can be saved and the flow of air in the air duct 5 can be promoted, thereby strengthening the negative pressure attraction at the exhaust hood body 11 and the guide pipe 13, ensuring the suction and exhaust effect. The magnetic field drive method is used to avoid the exposure of easily corroded metal objects or wires to the gas, ensuring safe use.

[0027] Specifically, an exhaust duct 6 is provided on the top of the purification tank body 3, and the height of the bottom of the exhaust duct 6 is higher than the height of the top of the induced draft duct 5. Since the density of the acidic gas is greater than that of the air, the height difference between the exhaust duct 6 and the induced draft duct 5 makes it easier to form a negative pressure airflow path. A negative pressure fan 4 is provided at the end of the exhaust duct 6 away from the purification tank body 3. The negative pressure fan 4 generates negative pressure in the exhaust duct 6 and discharges the inhaled gas to the outside.

[0028] In summary, the utility model can directly act on the emission area of ​​the gas to be treated through the guide tube 13, or it can allow the gas to be treated to enter the bottom position of the exhaust hood body 11 from the threaded through hole 121 on the bottom plate 12 and then enter the air duct 5. Of course, these two methods can also be used at the same time. By intermittently energizing some electromagnets 21, electric energy can be saved, and the flow of air in the air duct 5 is promoted, thereby strengthening the negative pressure attraction at the position of the exhaust hood body 11 and the guide tube 13, ensuring the suction and exhaust effect. At the same time, the magnetic field drive method avoids the exposure of easily corroded metal objects or wires to the gas, ensuring safe use. Because the composition of the gas to be treated is acidic, activated carbon or glass fiber is set in the adsorption filter element 32 to achieve the purpose of purification and reduce harm to the atmosphere.

[0029] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0030] The above-described embodiments merely represent implementation methods of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. An exhaust device, characterized in that: The hood assembly comprises an exhaust hood assembly, a magnetic rotating assembly, a purification assembly and a negative pressure fan, wherein the exhaust hood assembly comprises an exhaust hood body, a bottom plate and a guide pipe, the bottom of the exhaust hood body is provided with the bottom plate, a number of evenly distributed threaded through holes are provided on the bottom plate, the bottom plate is connected to the guide pipe through the threaded through holes, the purification assembly comprises a purification tank body and an adsorption filter element, the exhaust hood body and the purification tank body are connected through an induced air pipe, the adsorption filter element is provided in the purification tank body, the induced air pipe is provided with the magnetic rotating assembly, the magnetic rotating assembly is used to promote the flow of air in the induced air pipe, the top of the purification tank body is provided with an exhaust pipe, the exhaust pipe is provided with the negative pressure fan at one end away from the purification tank body, the negative pressure fan is used to generate negative pressure in the exhaust pipe and discharge the inhaled gas to the outside.

2. The exhaust device according to claim 1, characterized in that: The area of ​​the top of the exhaust hood body is smaller than the area of ​​the bottom of the exhaust hood body.

3. The exhaust device according to claim 1, characterized in that: The diversion pipe is a gooseneck pipe.

4. The exhaust device according to claim 1, characterized in that: The magnetic rotating assembly includes a connecting shaft, a rotating part, a plurality of fan blades, a plurality of permanent magnets and a plurality of electromagnets. The tube wall of the induced draft duct is concave to form a plurality of first accommodating grooves distributed at intervals. The first accommodating grooves are provided with the electromagnets. One end of the connecting shaft is connected to the inner wall of the induced draft duct, and the other end of the connecting shaft is movably connected to the rotating part. The outer edge of the rotating part is provided with a plurality of fan blades distributed at intervals. The fan blades form a gap with the inner wall of the induced draft duct. The end of the fan blade away from the rotating part is concave to form a second accommodating groove. The permanent magnets are provided in the second accommodating groove, and the polarity distribution of the plurality of permanent magnets is the same.

5. The exhaust device according to claim 4, characterized in that: The number of the electromagnets is 6, and the number of the permanent magnets is 4.

6. The exhaust device according to claim 1, characterized in that: Activated carbon or glass fiber is arranged in the adsorption filter element.

7. The exhaust device according to claim 1, characterized in that: The bottom of the exhaust duct is higher than the top of the induction duct.

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