Intelligent re-feeding device for single crystal furnace
Through the automated control of the intelligent re-injection device, the problems of low efficiency and high manual participation of single crystal furnace re-injection are solved, and efficient re-injection and resource utilization are achieved.
Patent Information
- Application Number
- CN202422693370.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-05
- Publication Date
- 2025-09-02
- Estimated Expiration
- 2034-11-05
AI Technical Summary
The existing single-crystal furnace re-injection equipment is inefficient and has high manual participation, resulting in low equipment utilization and waste of resources.
The intelligent re-injection device is adopted, and the rotation adjustment mechanism is controlled by weighing discs, proximity switches and controllers to realize the automatic rotation and positioning of the barrel and automatically complete the re-injection process.
It improves the efficiency of re-investment, reduces the labor intensity of staff, and improves the utilization rate of equipment and resource utilization rate.
Smart Images

Figure CN223292701U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of single crystal furnace charging devices, and in particular to an intelligent re-charging device for a single crystal furnace. Background Art
[0002] When pulling single crystal silicon ingots in a single crystal furnace, multiple re-feeding is required within each furnace production cycle to expand production capacity and reduce costs. Currently, this re-feeding process often involves manually re-feeding a single barrel. This involves repeatedly opening the auxiliary furnace chamber and manually attaching the re-feeding barrel to the chamber. The furnace then automatically closes the chamber and re-feeds the ingots. This single barrel re-feeding process is inefficient and requires high manual effort, resulting in low equipment utilization.
[0003] When pulling a single crystal silicon rod, the block polysilicon raw material is loaded into the quartz crucible in the single crystal furnace at one time. Since there are gaps between the blocks and the density of solid silicon is lower than that of liquid silicon, when the solid silicon material melts into liquid, the volume of molten silicon is much smaller than the volume of the quartz crucible. The quartz crucible is a disposable consumable and cannot fully utilize the remaining space of the quartz crucible, resulting in a waste of resources. Furthermore, in order to make full use of the life of the quartz crucible, the material is re-added many times during the production process, that is, after consuming part of the polysilicon raw material, the material is re-filled. Therefore, it is necessary to re-feed the single crystal furnace to improve equipment utilization and reduce resource waste. However, the existing re-feeding device requires manual control to carry out multiple feedings, which results in low re-feeding efficiency and high labor intensity.
[0004] In view of the above-mentioned related technologies, the inventors believe that the existing re-feeding devices have the problems of high labor intensity and low re-feeding efficiency. Utility Model Content
[0005] In order to solve the above technical problems, the present application provides an intelligent re-feeding device for a single crystal furnace.
[0006] This application provides an intelligent re-feeding device for a single crystal furnace, which adopts the following technical solutions:
[0007] An intelligent re-feeding device for a single crystal furnace comprises a transport assembly, a rotation adjustment mechanism arranged above the transport assembly, a plurality of barrels, a placement mechanism for placing the barrels, and a control mechanism for driving the rotation adjustment mechanism; the rotation adjustment mechanism is used to drive the placement mechanism and the barrels to rotate, the control mechanism comprises a weighing plate for weighing the barrels, a controller connected to the weighing plate signal, and a positioning assembly connected to the controller signal, the controller is electrically connected to the rotation adjustment mechanism, and the positioning assembly and the controller are used to control the rotation angle of the rotation adjustment mechanism.
[0008] By adopting the above technical solution, multiple barrels are filled with solid silicon raw material. The transport assembly transports the rotation adjustment mechanism, placement mechanism, and multiple barrels to the docking position of the single crystal furnace that requires re-feeding. The single crystal furnace control system recognizes that the intelligent re-feeding device is in place, opens the auxiliary chamber, and hoists the barrels for feeding. After the solid silicon raw material in the barrel is added to the single crystal furnace, the weighing plate detects the decrease in the weight of the barrel, and the weighing plate transmits a signal to the controller. The controller and the positioning assembly control the rotation adjustment mechanism to rotate the placement mechanism and barrel, thereby moving the barrel containing the solid silicon raw material to the hoisting position, thereby realizing intelligent re-feeding, improving re-feeding efficiency, and reducing the labor intensity of staff.
[0009] Preferably, the positioning assembly includes a proximity switch and a plurality of limit blocks, the plurality of limit blocks are respectively and correspondingly arranged below the barrel, and the proximity switch is arranged on the rotation adjustment mechanism.
[0010] By adopting the above technical solution, when the limit block under the barrel is facing the proximity switch, the proximity switch transmits a signal to the controller, and the controller controls the rotation adjustment mechanism to stop rotating, so that the barrel containing solid silicon raw material stops at the hoisting position, which is convenient for re-feeding into the single crystal furnace.
[0011] Preferably, the transport component includes an artificial intelligence transport vehicle.
[0012] By adopting the above technical solution, the artificial intelligence transport vehicle transports the barrel containing solid silicon raw materials to the lifting position, thereby realizing re-feeding.
[0013] Preferably, the rotation adjustment mechanism includes a base plate arranged above the transport component, a rotation drive device arranged above the base plate, the rotation drive device is used to drive the placement mechanism to rotate, and the proximity switch is arranged on the base plate.
[0014] By adopting the above technical solution, the rotary drive device drives the placement mechanism and the barrel to rotate, the proximity switch is fixed in one position, and the limit block rotates with the placement mechanism. When the limit block aligns with the proximity switch, the rotary drive device stops running.
[0015] Preferably, the placement mechanism includes a rotating chassis transmission-connected to the rotating drive device and a plurality of barrel frames arranged on the side of the rotating chassis away from the rotating drive device, the barrel is placed in the barrel frame, the weighing disc is arranged on the side of the rotating chassis away from the rotating drive device, and the barrel frame is arranged above the weighing disc.
[0016] By adopting this technical solution, the barrels are placed in the barrel frame, and the rotary drive device drives the rotating chassis and the barrels on it to rotate, thereby sequentially placing the barrels containing solid silicon raw material in the hanging position, thereby achieving re-feeding. The weighing plate detects the weight of the barrels in the barrel frame, and then rotates the barrels containing solid silicon raw material to the hanging position.
[0017] Preferably, the end of the barrel frame away from the rotating chassis is provided with a guiding slope for facilitating the placement of the barrel.
[0018] By adopting the above technical solution, the guide bevel guides the barrel, thereby reducing the wear of the barrel when it is placed in the barrel frame, improving the installation efficiency of the barrel and increasing the service life of the barrel.
[0019] Preferably, a fixing frame is provided between the plurality of barrel frames, and the fixing frame is used to connect adjacent barrel frames.
[0020] By adopting the above technical solution, the fixing frame connects the adjacent barrel frames, thereby improving the structural stability of the barrel frames, thereby improving the placement stability of the barrels, and further improving the smoothness of the re-feeding process.
[0021] Preferably, a protective cover is provided on a side of the rotating chassis close to the base plate, and the protective cover is used to protect the control mechanism and the rotary drive device.
[0022] By adopting the above technical solution, the protective cover protects the control mechanism and the rotary drive device, thereby increasing the service life of the control mechanism and the rotary drive device.
[0023] In summary, this application has the following beneficial technical effects:
[0024] 1. This application uses a weighing plate to detect whether there is solid silicon raw material in the barrel, and uses a limit block, proximity switch and controller to control the start and stop of the rotary drive device, thereby placing the barrel containing solid silicon raw material in the hoisting position, thereby realizing automatic re-feeding, reducing the labor intensity of the staff and improving the re-feeding efficiency;
[0025] 2. The fixing frame improves the stability of the barrel frame, thereby improving the stability of the barrel and further improving the stability of the re-feeding process. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] Figure 1 This is a partial structural diagram of the intelligent re-feeding device for a single crystal furnace provided in an embodiment of the present application;
[0027] Figure 2 This is a partial structural diagram of the intelligent re-feeding device for a single crystal furnace provided in an embodiment of the present application.
[0028] Explanation of the accompanying drawings: 1. Transport component; 11. Artificial intelligence transport vehicle; 2. Rotation adjustment mechanism; 21. Base plate; 22. Rotation drive device; 3. Barrel; 4. Placement mechanism; 41. Rotating chassis; 42. Barrel frame; 421. Vertical rod; 422. Connecting ring; 423. Guide ramp; 43. Fixed frame; 5. Control mechanism; 51. Weighing plate; 52. Controller; 53. Positioning component; 531. Limit block; 532. Proximity switch; 6. Protective cover. DETAILED DESCRIPTION
[0029] The following is combined with Figure 1-2 This application is described in further detail.
[0030] The embodiment of the present application discloses an intelligent re-feeding device for a single crystal furnace.
[0031] Reference Figure 1 and Figure 2 An intelligent recharging device for a single crystal furnace includes a transport assembly 1, a rotation adjustment mechanism 2 disposed above the transport assembly 1, four barrels 3, a placement mechanism 4 for placing the barrels 3, and a control mechanism 5 for driving the rotation adjustment mechanism 2. The rotation adjustment mechanism 2 is used to drive the placement mechanism 4 and the barrels 3 to rotate.
[0032] The control mechanism 5 includes a weighing plate 51 for weighing the weight of the barrel 3, a controller 52 connected to the weighing plate 51 by signal, and a positioning component 53 connected to the controller 52 by signal. The controller 52 is electrically connected to the rotation adjustment mechanism 2. The positioning component 53 and the controller 52 are used to control the rotation angle of the rotation adjustment mechanism 2.
[0033] The positioning assembly 53 includes a proximity switch 532 and four limit blocks 531 . The four limit blocks 531 are respectively arranged below the barrel 3 , and the proximity switch 532 is arranged on the rotation adjustment mechanism 2 .
[0034] The transport component 1 includes an artificial intelligence transport vehicle 11 .
[0035] The rotation adjustment mechanism 2 includes a base plate 21 arranged above the artificial intelligence transport vehicle 11 and a rotation drive device 22 arranged above the base plate 21. The rotation drive device 22 is used to drive the placement mechanism 4 to rotate, and the proximity switch 532 is fixedly set on the base plate 21.
[0036] The placement mechanism 4 includes a rotating chassis 41 in transmission connection with the rotary drive device 22 and four barrel frames 42 disposed on the side of the rotating chassis 41 away from the rotary drive device 22. The barrel 3 is placed in the barrel frame 42. A weighing plate 51 is disposed on the side of the rotating chassis 41 away from the rotary drive device 22, and the barrel frame 42 is disposed above the weighing plate 51. The barrel frame 42 includes vertical rods 421 and connecting rings 422. The vertical rods 421 are arranged in a circular array. The connecting rings 422 are used to connect the vertical rods 421. The connecting rings 422 are arranged vertically and fixedly connected to the vertical rods 421. The end of the barrel frame 42 away from the rotating chassis 41 is provided with a guide slope 423 to facilitate the placement of the barrel 3. A fixing frame 43 is disposed between the four barrel frames 42 to connect adjacent barrel frames 42. The fixing frame 43 is a circular ring structure. Two fixing frames 43 are arranged vertically. The fixing frames 43 are fixedly connected to the vertical rod 421 .
[0037] The limiting block 531 is fixedly arranged on a side of the rotating chassis 41 away from the barrel frame 42 , and the limiting block 531 is correspondingly arranged below the barrel 3 .
[0038] A protective cover 6 is provided on one side of the rotating chassis 41 close to the bottom plate 21 , and the protective cover 6 is used to protect the control mechanism 5 and the rotating drive device 22 .
[0039] The implementation principle of an intelligent re-feeding device for a single crystal furnace in an embodiment of the present application is as follows: an artificial intelligence transport vehicle 11 transports the intelligent re-feeding device for a single crystal furnace to a hoisting position, hoists a barrel 3 containing solid silicon raw material into the single crystal furnace to realize feeding, and after one feeding is completed, the barrel 3 is placed back into the barrel frame 42, and the weighing plate 51 detects that the weight of the barrel 3 has dropped, and transmits the information to the controller 52, which controls the rotary drive device 22 to drive the rotating chassis 41 to rotate. When the limit block 531 below the barrel 3 containing solid silicon raw material is facing the proximity switch 532, the controller 52 controls the rotary drive device 22 to stop running, so that the barrel 3 containing solid silicon raw material is located in the hoisting position, thereby realizing re-feeding. The process of automatically realizing re-feeding improves the efficiency of re-feeding and reduces the labor intensity of the staff.
[0040] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.
Claims
1. An intelligent re-feeding device for a single crystal furnace, characterized by: The invention comprises a transport component (1), a rotation adjustment mechanism (2) arranged above the transport component (1), a plurality of barrels (3), a placement mechanism (4) for placing the barrels (3), and a control mechanism (5) for driving the rotation adjustment mechanism (2); the rotation adjustment mechanism (2) is used to drive the placement mechanism (4) and the barrels (3) to rotate, the control mechanism (5) comprises a weighing plate (51) for weighing the barrels (3), a controller (52) connected to the weighing plate (51) by signal, and a positioning component (53) connected to the controller (52) by signal, the controller (52) being electrically connected to the rotation adjustment mechanism (2), and the positioning component (53) and the controller (52) being used to control the rotation angle of the rotation adjustment mechanism (2).
2. The intelligent re-feeding device for a single crystal furnace according to claim 1, characterized in that: The positioning assembly (53) comprises a proximity switch (532) and a plurality of limit blocks (531), wherein the plurality of limit blocks (531) are respectively and correspondingly arranged below the barrel (3), and the proximity switch (532) is arranged on the rotation adjustment mechanism (2).
3. The intelligent re-feeding device for a single crystal furnace according to claim 1, characterized in that: The transport component (1) includes an artificial intelligence transport vehicle (11).
4. The intelligent re-feeding device for a single crystal furnace according to claim 2, characterized in that: The rotation adjustment mechanism (2) comprises a base plate (21) arranged above the transport component (1), and a rotation drive device (22) arranged above the base plate (21). The rotation drive device (22) is used to drive the placement mechanism (4) to rotate. The proximity switch (532) is arranged on the base plate (21).
5. The intelligent re-feeding device for a single crystal furnace according to claim 4, characterized in that: The placement mechanism (4) includes a rotating chassis (41) transmission-connected to the rotating drive device (22) and a plurality of barrel frames (42) arranged on a side of the rotating chassis (41) away from the rotating drive device (22); the barrel (3) is placed in the barrel frame (42); the weighing disc (51) is arranged on a side of the rotating chassis (41) away from the rotating drive device (22), and the barrel frame (42) is arranged above the weighing disc (51).
6. The intelligent re-feeding device for a single crystal furnace according to claim 5, characterized in that: An end of the barrel frame (42) away from the rotating chassis (41) is provided with a guide slope (423) for facilitating the placement of the barrel (3).
7. The intelligent re-feeding device for a single crystal furnace according to claim 5, characterized in that: A fixing frame (43) is provided between the plurality of barrel frames (42), and the fixing frame (43) is used to connect adjacent barrel frames (42).
8. The intelligent re-feeding device for a single crystal furnace according to claim 5, characterized in that: A protective cover (6) is provided on one side of the rotating chassis (41) close to the bottom plate (21), and the protective cover (6) is used to protect the control mechanism (5) and the rotating drive device (22).