Clean workshop

Abstract

The utility model discloses a clean workshop, which is used for arranging production equipment for producing silicon single crystal rods, the clean workshop comprises a workshop body, a floor structure, a fan and an air return passageway, and the floor structure divides the workshop body into a first-layer space and a second-layer space which are adjacent to each other. A fan is arranged in the top area of the second-layer space, and an air outlet of the fan faces the second-layer space and communicates with the second-layer space. The floor structure comprises ventilation holes, and the second-layer space is communicated with the first-layer space through the ventilation holes. An air return opening of the air return passageway is located in the first-layer space and communicates with the first-layer space. According to the clean workshop provided by the utility model, the floor structure is provided with the ventilation holes, and the air return port of the air return passageway is positioned in the first-floor space, so that fresh air for purifying the second-floor space passes through the ventilation holes of the floor structure to flow to the first-floor space, and enters the air return passageway through the air return port positioned in the first-floor space; therefore, the fresh air can be blown to the nearby area of the floor structure, and the cleanliness of a clean workshop can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon production, in particular to a clean workshop. Background Art

[0002] The single crystal silicon growth production equipment is huge, with the main equipment nearly 10m high and the equipment base about 2.5m high. It includes the main body of the crystal growth furnace arranged in the vertical direction, the equipment base (i.e., a concrete structure with embedded rigid components) and ancillary equipment (power cabinet, main pump, auxiliary pump, dust removal device, uninterruptible power supply, compressor unit, etc.). Therefore, in order to meet the space requirements for the installation of production equipment, the clean workshop used to arrange the single crystal silicon growth production equipment is usually a two-story structure, wherein the first floor is a non-clean area, which is used to arrange the equipment base and ancillary equipment of the crystal growth furnace; the second floor is a clean area, which is used to arrange the main body of the crystal growth furnace. At present, the clean area is mainly cleaned by the fresh air system set on the top. It is understandable that the wider the range of the clean area that the fresh air can reach, the better the cleaning effect on the clean area, thereby improving the cleanliness of the clean area.

[0003] Therefore, how to improve the coverage of fresh air inside the clean room to improve the cleanliness of the clean area, especially the cleanliness of the area near the ground in the clean area, has become a difficult problem that needs to be solved urgently by those skilled in the art. Utility Model Content

[0004] The utility model provides a clean workshop, which is used to improve the cleanliness inside the clean workshop.

[0005] The utility model provides a clean workshop for arranging production equipment for producing monocrystalline silicon rods. The clean workshop includes a workshop body, a floor structure, a fan and a return air duct. The floor structure divides the workshop body into adjacent first-floor and second-floor spaces. The fan is arranged on the side of the second-floor space facing away from the first-floor space, and the air outlet of the fan faces the second-floor space and is connected to the second-floor space. The floor structure includes ventilation holes, and the second-floor space is connected to the first-floor space through the ventilation holes. The return air duct is located inside the workshop body, and the return air duct includes a return air outlet. The return air outlet is located on the first-floor space and is connected to the first-floor space.

[0006] The clean workshop provided by the utility model has ventilation holes provided in the floor structure, and the return air outlet of the return air duct is located in the first-floor space. In this way, the fresh air used to purify the second-floor space can pass through the ventilation holes of the floor structure to flow to the first-floor space, and enter the return air duct from the return air outlet of the return air duct located in the first-floor space, which is beneficial to improving the cleanliness of the clean workshop.

[0007] In one possible implementation of the present invention, the cleanroom includes multiple fans, each with adjustable power based on actual needs. The combined air output of these fans is significantly greater than that of a single fan. Furthermore, because the air outlets of these multiple fans all face and communicate with the second-floor space, this further increases the fresh air coverage area within the cleanroom while also improving the cleanliness of the facility.

[0008] In one possible implementation of the present invention, the projection of the air outlet of at least one of the multiple fans on the floor structure overlaps at least partially with the ventilation hole. This allows the airflow from the air outlet to pass directly vertically through the ventilation hole into the first floor space, effectively shortening the airflow circulation path and thereby increasing the airflow circulation rate. Furthermore, since the ventilation hole is located in the floor structure, this approach also allows the airflow from the air outlet to directly reach the surface of the floor structure and pass through it, thereby improving the cleanliness of the area near the floor structure.

[0009] In one possible implementation of the present invention, the floor structure includes multiple plate structures arranged in a matrix and interconnected. This allows the plate structures at corresponding locations within the crystal growth furnace to be quickly removed during production, allowing the furnace to penetrate the plate structures and enter the second-floor space. This facilitates easier installation of the production equipment and easier assembly and disassembly of the plate structures.

[0010] In addition, since at least one of the multiple plate structures includes ventilation holes, users can quickly adjust the setting position and ventilation effect of the ventilation holes by changing the arrangement and opening rate of the multiple plate structures according to the actual requirements of the cleanliness of the factory, thereby improving the matching degree between the ventilation holes and the fan outlet to improve ventilation efficiency.

[0011] In one possible implementation of the present invention, a plurality of continuous plate structures each include ventilation holes, which is beneficial for increasing the ventilation area of ​​the floor structure, thereby improving the flow efficiency of the airflow.

[0012] In one possible implementation of the present invention, the diameter D of the ventilation holes satisfies the following conditions: φ6mm ≤ D ≤ φ8mm, and the porosity of each of the multiple consecutively arranged panel structures is greater than or equal to 17%. This allows users to adjust the porosity of the multiple panel structures to improve the cleanliness of the factory building based on actual cleanliness requirements.

[0013] In one possible implementation of the present invention, the floor structure also includes multiple spaced-apart horizontal beams, each end of which is fixedly connected to the side walls of the factory building to enhance the overall strength of the building. Furthermore, along the direction from the second floor to the first floor, multiple slab structures cover the multiple horizontal beams and are detachably connected to the beams, which helps to improve the reliability of the connection between the slab structure and the factory building.

[0014] In one possible implementation of the present invention, the floor structure also includes multiple longitudinal beams spaced apart, with each transverse beam intersecting and fixedly connected to the multiple longitudinal beams, further enhancing the overall strength of the factory building. Furthermore, along the direction from the first floor to the second floor, the projection of the production equipment on the floor structure is located between two adjacent longitudinal beams and between two adjacent transverse beams. This allows the production equipment to be installed in the clean room by simply removing the plate structure corresponding to the crystal growth furnace from the floor structure, allowing the crystal growth furnace to enter the second floor. This improves the overall strength of the clean room while also facilitating the installation of the production equipment.

[0015] In one possible implementation of the present invention, multiple panel structures separate the main building into a first-floor space and a second-floor space. Along the path from the first floor to the second floor, gaps exist between the multiple panel structures and the horizontal and longitudinal beams, with the return air vents located in these gaps. In this way, during cleanroom operation, air from the fan's outlet, after passing through the vents in the panel structures, can flow directly into the return air vents of the return air duct through these gaps, shortening the airflow circulation path and improving circulation efficiency.

[0016] In one possible implementation of the present invention, the floor structure further includes a plurality of support columns, located in the gaps, with one end of each support column fixedly connected to the crossbeam. Each floor structure is removably connected to the end of at least one support column facing away from the crossbeam. This ensures the floor structure's removable nature while also improving the reliability of the connection between the floor structure and the crossbeam. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A structural schematic diagram of a clean workshop provided by the utility model;

[0018] Figure 2 for Figure 1 A partial enlarged view of location A of the clean workshop provided;

[0019] Figure 3 A structural schematic diagram of the floor structure provided by the utility model;

[0020] Figure 4 Another structural schematic diagram of the floor structure provided by the utility model;

[0021] Figure 5 for Figure 4 A partial enlarged view of location C of the floor structure is provided;

[0022] Figure 6 for Figure 1 A partial enlarged view of location B of the clean workshop is provided.

[0023] Figure markings: 01-gap; 1-factory building body; 2-floor structure; 21-ventilation hole; 22-plate structure; 221-perforated plate; 222-closed plate; 223-blank position; 23-crossbeam; 24-longitudinal beam; 25-support column; 3-fan; 4-return air duct; 41-return air outlet; 5-first floor space; 6-second floor space; 61-air circulation chamber; 7-column; 8-bridge crane; 9-maintenance net; 010-steel structure; 011-suspender. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings. However, the example embodiments can be implemented in various forms and should not be understood as being limited to the embodiments described herein. The same figure marks in the figures represent the same or similar structures, and thus their repeated descriptions will be omitted. The words expressing position and direction described in the embodiments of the present invention are all explained using the accompanying drawings as examples, but changes can be made as needed, and the changes made are all included in the scope of protection of the present invention. The drawings of the embodiments of the present invention are only used to illustrate the relative position relationship, and they do not represent the true proportions.

[0025] It should be noted that the following description sets forth specific details to facilitate understanding of the present invention. However, the present invention can be implemented in a variety of other ways than those described herein, and those skilled in the art may make similar generalizations without violating the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0026] The single crystal silicon crystal growth production equipment is huge, with the main body of the equipment nearly 10m high and the equipment base about 2.5m high. It includes the crystal growth furnace body, equipment base and auxiliary equipment arranged in the vertical direction.

[0027] It should be noted that the equipment base generally refers to a concrete structure with embedded rigid components; the auxiliary equipment generally includes power cabinets, main pumps, auxiliary pumps, dust removal devices, uninterruptible power supplies, compressor units, etc.

[0028] Therefore, to meet the space requirements for production equipment, cleanrooms used to house single-crystal silicon growth equipment are typically two-story structures. The first floor is a non-clean area, used to house the growth furnace's equipment base and ancillary equipment; the second floor is a clean area, used to house the growth furnace and operators. Currently, cleanrooms are primarily maintained through a roof-mounted fresh air system. It's understandable that the wider the fresh air's reach, the better its cleaning effect, thereby improving the cleanliness of the cleanroom.

[0029] In view of this, the clean room provided by the present invention is used to meet the cleanliness requirements of the clean room by increasing the flow range of the clean air entering the clean room. In order to make the purpose, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] refer to Figure 1 , Figure 1 This is a structural diagram of a clean room provided by the present invention. The clean room includes a room body 1, a floor structure 2, a fan 3 and a return air duct 4. The floor structure 2 divides the room body 1 into adjacent first-floor space 5 and second-floor space 6. Figure 1 The lower layer (i.e. the space between the bottom surface of the floor structure 2 and the bottom surface of the factory building 1) and the upper layer (i.e. the space between the top surface of the floor structure 2 and the top surface of the factory building 1) adjacent to each other along the Z-axis direction are shown.

[0031] In actual application, the first-floor space 5 is used to accommodate the equipment base and auxiliary equipment of the production equipment, while the crystal growth furnace body of the production equipment is arranged in the second-floor space 6.

[0032] like Figure 1 As shown, along the Z axis, the area inside the second-floor space 6 that is away from the first-floor space 5 is the top area. An air circulation chamber 61 is provided in the top area. Usually, a fresh air unit ( Figure 1 (not shown in the figure), the fresh air unit blows fresh air into the air circulation chamber 61 through the pipeline.

[0033] In addition, in the present invention, the fan 3 is located inside the air circulation chamber 61, and the air outlet of the fan 3 faces the second layer space 6 and is connected to the second layer space 6. In this way, the purified fresh air can be directly blown into the second layer space 6 after being sucked in by the fan 3.

[0034] refer to Figure 2 , Figure 2 for Figure 1A partial enlarged view of the clean room at point A is provided. The floor structure 2 includes ventilation holes 21, and the second-floor space 6 is connected to the first-floor space 5 through the ventilation holes 21, so that the fresh air blown out by the fan 3 enters the first-floor space 5 through the second-floor space 6.

[0035] like Figure 1 As shown, since the return air duct 4 is located inside the factory building 1, the return air outlet 41 of the return air duct 4 is located in and connected to the first-floor space 5, and the exhaust outlet of the return air duct 4 is connected to the fresh air unit. Therefore, the airflow entering the first-floor space 5 from the second-floor space 6 can flow back to the fresh air unit through the return air duct 4 and, after being treated, enter the air circulation chamber 61, thereby achieving air circulation within the clean factory building.

[0036] In the clean workshop provided by the present invention, since the floor structure 2 is provided with ventilation holes 21 and the return air outlet 41 of the return air duct 4 is located in the first-floor space 5, the fresh air used to purify the second-floor space 6 can pass through the ventilation holes 21 of the floor structure 2 to flow to the first-floor space 5, and enter the return air duct 4 from the return air outlet 41 of the return air duct 4 located in the first-floor space 5, which is beneficial to improving the cleanliness of the clean workshop.

[0037] In addition, it can be understood that the clean workshop is a confined space, and since the fresh air is blown from the second-floor space 6 to the first-floor space 5 through the fan 3, and the first-floor space 5 is provided with a return air port 41, therefore, combined with the air pressure principle, that is, the air pressure of the second-floor space 6 is greater than the air pressure of the first-floor space 5, the airflow in the first-floor space 5 will not be able to flow back into the second-floor space 6 through the ventilation hole 21.

[0038] It is worth noting that the fan 3 for the cleanroom provided by the present invention can be exemplarily a fan filter unit (FFU), a self-powered air supply and filtration device comprising a modular terminal air supply unit with filtering capabilities. The FFU draws in fresh air from the air circulation chamber 61 at the top of the second-floor space 6. After being filtered by the FFU's high-efficiency particulate air filter (HEPA), the air is evenly delivered to the second-floor space 6 of the cleanroom at a set wind speed.

[0039] Continue to refer Figure 1 The clean room can be equipped with multiple fans 3. The power of each fan 3 can be adjusted according to actual needs, and the total air output of multiple fans 3 is much greater than the air output of a single fan 3. In addition, since the air outlets of the multiple fans 3 are all facing the second-floor space 6 and connected to the second-floor space 6, this can further increase the coverage area of ​​fresh air in the clean room and also help improve the cleanliness of the room.

[0040] For reference Figure 1 and Figure 2 Along the direction from the second-floor space 6 to the first-floor space 5, that is, along the Z-axis, the projection of the air outlet of at least one of the multiple fans 3 on the floor structure 2 covers at least a portion of the ventilation hole 21, so that the airflow blown out of the air outlet directly passes through the ventilation hole 21 along the Z-axis direction and enters the first-floor space 5. This effectively shortens the airflow circulation path, allowing the airflow to quickly enter the return air outlet 41 located in the first-floor space 5 and then enter the return air duct 4, which is conducive to increasing the airflow circulation speed. In addition, because the ventilation hole 21 is located in the floor structure 2, the above solution also allows the airflow blown out of the air outlet to directly reach the surface of the floor structure 2 and pass through the floor structure 2, thereby improving the cleanliness of the area near the floor structure 2.

[0041] In a specific embodiment, reference Figure 3 , Figure 3 This is a schematic diagram of a floor structure provided by the present invention. Specifically, the floor structure 2 includes a plurality of plate structures 22 arranged in a matrix and spliced ​​together. It can be understood that the shape of the plate structure 22 is similar to that of floor tiles.

[0042] In actual application, the crystal growth furnace body of the production equipment penetrates along the Z axis. Figure 3 Therefore, the position corresponding to the crystal growth furnace body of the production equipment (for example Figure 3 The plate structure 22 in the blank position 223) is removed, or the plate structure 22 is not set to form a through hole in the floor structure 2, and the crystal growth furnace body can pass through the through hole from the first-floor space 5 to the second-floor space 6, which is beneficial to improving the installation convenience of the production equipment and improving the convenience of assembly and disassembly of the plate structure 22.

[0043] You can continue to refer to Figure 3 At least one of the multiple plate structures 22 includes ventilation holes 21. It is understandable that the size and number of the ventilation holes 21 can be adjusted according to actual needs. For example, the diameter D of the ventilation holes 21 satisfies φ6mm≤D≤φ8mm. In addition, the opening rate of the plate structure 22 is greater than or equal to 17%, such as 18% or 25% or 50%. Therefore, by adopting the floor structure 2 of the clean workshop provided by the utility model, the user can quickly adjust the setting position and ventilation effect of the ventilation holes 21 by changing the arrangement mode and opening rate of the multiple plate structures 22 according to the actual cleanliness requirements of the workshop, thereby improving the matching degree between the ventilation holes 21 and the air outlet of the fan 3 to improve the ventilation efficiency.

[0044] For ease of description, the present invention refers to the plate structure 22 provided with ventilation holes 21 as a perforated plate 221, and the plate structure 22 without ventilation holes 21 as a closed plate 222. The perforated plates 221 can be arranged at intervals or continuously.

[0045] In a specific embodiment, reference Figure 4 , Figure 4 This is another schematic diagram of the floor structure 2 provided by the present invention. Multiple continuously arranged plate structures 22 each include ventilation holes 21, i.e., multiple perforated plates 221 are arranged continuously. This increases the ventilation area of ​​the floor structure 2, thereby improving airflow efficiency. It is understood that, depending on actual production needs, the multiple plate structures 22 can all be perforated plates 221, or some can be perforated plates 221 and some closed plates 222.

[0046] It is worth mentioning that the projections of the air outlets of the multiple fans 3 arranged in the top area of ​​the second-floor space 6 can all fall into the following Figure 4 The area covered by the multiple perforated plates 221 shown in FIG. 2 is such that the airflow blown out of the air outlet can flow along the Figure 1 The Z-axis direction shown directly passes through the perforated plate 221 and enters the first-layer space 5, thereby further improving the cleanliness of the second-layer space 6.

[0047] In addition, in the actual application of the clean room provided by the present invention, for example, the occupancy ratio of the FFU in the top area of ​​the second floor space 6 can be 25%, and the circulating air volume is about 600,000 m 3 / h, the opening rate of the floor structure 2 can be 25%.

[0048] In a specific embodiment, reference is made to Figure 1 and Figure 4 The floor structure 2 may further include a plurality of crossbeams 23 spaced apart along the X-axis or along the Y-axis, with both ends of the crossbeams 23 fixedly connected to the side walls of the factory building 1, which helps to enhance the overall strength of the clean room. The present invention does not limit the specific structure of the crossbeams 23. For example, the crossbeams 23 may be concrete or steel to reduce the difficulty of machining the crossbeams 23.

[0049] In addition, along the direction from the second-floor space 6 to the first-floor space 5, multiple plate structures 22 cover multiple beams 23 and are detachably connected to the beams 23. This helps to improve the connection reliability between the plate structures 22 and the main body of the factory building.

[0050] Continue to refer Figure 4The floor structure 2 also includes multiple longitudinal beams 24 spaced apart. These beams 24 can be concrete or steel. Each crossbeam 23 intersects with multiple longitudinal beams 24. If both beams 23 and 24 are concrete, they can be fixedly connected by integral casting. If both beams 23 and 24 are steel, they can be fixedly connected by welding or riveting. This further enhances the overall strength of the cleanroom.

[0051] In addition, refer to Figure 1 and Figure 4 , along the direction from the first-floor space 5 to the second-floor space 6, the projection of the crystal growth furnace body of the production equipment on the floor structure 2 is located between two adjacent longitudinal beams 24 and between two adjacent transverse beams 23. In this way, when installing the production equipment in the clean workshop, it is only necessary to remove the plate structure 22 corresponding to the crystal growth furnace in the floor structure 2 to allow the crystal growth furnace to enter the second-floor space 6, thereby improving the overall strength of the clean workshop while improving the installation convenience of the production equipment.

[0052] It is worth mentioning that the plate structure 22 surrounding the crystal growth furnace body can be a perforated plate 221, which is beneficial to improving the cleanliness near the crystal growth furnace body.

[0053] It is understood that the gap between the crystal growth furnace and the plate structure 22 can be sealed by high-strength materials.

[0054] In addition, if Figure 1 As shown, a plurality of columns 7 are arranged at intervals in the first-floor space 5 to support the crossbeams 23 and the longitudinal beams 24. The spacing between two adjacent columns 7 can be adjusted according to actual needs, and can be 8m-12m, such as 8.4m or 9.5m. At least one column 7 passes through the floor structure 2 to support the top area of ​​the second-floor space 6, and the spacing between the columns 7 extending to the second-floor space 6 and the side walls of the factory building 1 is 15m-18m, such as 16.8m or 17.6m. The spacing between two adjacent columns 7 is 15m-18m, such as 16.8m or 17.6m, which can reduce the cost of the factory building while meeting the spacing requirements when installing the bridge crane 8 and the slide rail in the clean workshop.

[0055] It should be noted that the bridge crane 8 is typically used for hoisting the crystal growth furnace and producing single crystal silicon. Its rated load is generally 15 tons. The bridge crane 8 can be moved horizontally via a track beam. The track beam is fixed to the column 7 via a beam bracket, and the electric hoist on the bridge crane 8 can achieve vertical movement.

[0056] In a specific embodiment, reference is made to Figure 1 and Figure 4, multiple plate structures 22 separate the plant body 1 into a first-floor space 5 and a second-floor space 6, along the direction from the first-floor space 5 to the second-floor space 6, that is, the Z-axis direction, as shown Figure 4 As shown, there are gaps 01 between the plurality of plate structures 22 and the cross beams 23 and longitudinal beams 24 ( Figure 4 (not shown). Based on this, the return air port 41 of the return air duct 4 can be located within the gap 01. In this way, the airflow from the air outlet of the fan 3, after passing through the ventilation holes 21 of the plate structure 22, can directly enter the return air port 41 of the return air duct 4 through the gap 01, which helps shorten the airflow circulation path and improve the airflow circulation efficiency.

[0057] When specifically setting the above-mentioned plate structure 22, refer to Figure 5 , Figure 5 for Figure 4 A partial enlarged view of location C of the floor structure is provided. The floor structure 2 also includes multiple support columns 25 located in the aforementioned gap O1. Along the Z-axis, one end of each support column 25 is fixedly connected to the crossbeam 23. Each panel structure 22 is detachably connected to the end of at least one support column 25 facing away from the crossbeam 23. This ensures the panel structure 22 is detachable while also improving the connection reliability between the panel structure 22 and the crossbeam 23.

[0058] It is understood that the support columns 25 can be connected to the cross beams 23 or the longitudinal beams 24 according to their actual location. In addition, a plurality of connecting columns parallel to adjacent cross beams 23 or longitudinal beams 24 can be provided between adjacent cross beams 23 or longitudinal beams 24. The connecting columns can be, for example, H-shaped steel or channel steel. And, for example, when the plate structure 22 is rectangular, each rectangular plate structure 22 is connected to the corresponding connecting columns along the Z-axis direction via four support columns 25 (the four support columns 25 are distributed at the four corners of the rectangular plate structure 22). This can improve the connection convenience of the support columns 25 while improving the connection reliability of the plate structure 22.

[0059] The present invention does not limit the connection method between the support column 25 and the crossbeam or longitudinal beam. For example, when the beam is a concrete structure, the support column 25 can be fixedly connected to the crossbeam or longitudinal beam by pre-embedding. When the crossbeam or longitudinal beam is a steel structure, the support column 25 can be fixedly connected to the crossbeam or longitudinal beam by riveting.

[0060] When specifically configuring the floor structure 2, the plate structure 22 can be made of, for example, color-coated steel, aluminum alloy, magnesium-aluminum alloy, or cold-rolled steel. The overall height of the support columns 25 can be adjusted based on actual needs, and can be, for example, 250 mm or 260 mm. Furthermore, the support columns 25 and the plate structure 22 can be modularized to further enhance the ease of assembly of the floor structure 2.

[0061] In addition, the clean room also includes an air flow cooling device, exemplified by a dry cooling coil located at the return air inlet 41 of the return air duct 4, for cooling the hot air entering the return air duct 4 from the interior of the room body 1. During clean room operation, the air cooled by the dry cooling coil flows back through the return air duct 4 to the air storage box of the fresh air unit. There, it mixes with the fresh air blown out by the fresh air unit, adjusts its temperature and humidity, and is then blown into the air circulation chamber 61 through a pipeline for circulation.

[0062] It is worth mentioning that Figure 6 , Figure 6 for Figure 1 The clean room provided by the present invention also includes a maintenance net 9, a steel structure 010 and a suspension rod 011. The maintenance net is parallel to the Figure 4 The plane formed by the X-axis and Y-axis is parallel to the plate structure 22. The maintenance net 9 is fixedly connected to the crossbeam 23 or longitudinal beam 24 via a steel structure 010 and a suspension rod 011 arranged sequentially along the Z-axis. The maximum load of the steel structure 010 and suspension rod 011 is greater than the combined weight of the maintenance net 9 and the maintenance personnel. The maintenance net 9 can be, for example, wire mesh to extend its service life.

[0063] In addition, the height difference between the maintenance net 9 and the top of the equipment base can be adjusted according to actual needs. For example, the height of the two can be the same, and the distance between the maintenance net 9 and the crossbeam 23 or the longitudinal beam 24 is 3m-3.5m, which is used to meet the requirements of pipeline layout and personnel passage. It is understood that the maintenance net 9 is arranged around the production equipment.

[0064] In summary, the clean workshop provided by the present invention has ventilation holes 21 provided in the floor structure 2, and the return air outlet 41 of the return air duct 4 is located in the first-floor space 5. In this way, the fresh air used to purify the second-floor space 6 can pass through the ventilation holes 21 of the floor structure 2 to flow to the first-floor space 5, and enter the return air duct 4 from the return air outlet 41 of the return air duct 4 located in the first-floor space 5, so that the fresh air can be blown to the vicinity of the floor structure 2 of the second-floor space 6, and is beneficial to improving the cleanliness of the clean workshop.

[0065] Obviously, those skilled in the art may make various modifications and variations to the present invention without departing from the spirit and scope of the present invention. Thus, if such modifications and variations fall within the scope of the claims of the present invention and their equivalents, the present invention is intended to include such modifications and variations.

Claims

1. A clean workshop for arranging production equipment for producing single crystal silicon rods, characterized in that: The clean workshop includes a workshop body, a floor structure, a fan and a return air duct. The floor structure divides the workshop body into adjacent first-floor and second-floor spaces, wherein: The fan is arranged on a side of the second-floor space away from the first-floor space; the air outlet of the fan faces the second-floor space and is in communication with the second-floor space; The floor structure includes ventilation holes, and the second-floor space is connected to the first-floor space through the ventilation holes; The return air duct is located inside the factory building body, and the return air duct includes a return air outlet. The return air outlet is located in the first floor space and communicates with the first floor space.

2. The clean workshop according to claim 1, characterized in that: The clean workshop includes a plurality of the fans, and the air outlets of the plurality of fans are all oriented toward the second-floor space and are in communication with the second-floor space.

3. The clean workshop according to claim 2, characterized in that: A projection of an air outlet of at least one of the plurality of fans on the floor structure covers at least a portion of the ventilation hole.

4. The clean room according to claim 3, characterized in that: The floor structure includes a plurality of plate structures, and the plurality of plate structures are arranged in a matrix and spliced ​​with each other; At least one of the plurality of plate structures includes the ventilation hole.

5. The clean workshop according to claim 4, characterized in that: The plurality of plate structures arranged continuously each include the ventilation holes.

6. The clean workshop according to claim 5, characterized in that: The diameter D of the ventilation hole satisfies: φ6mm≤D≤φ8mm, and the opening rate of each of the plurality of continuously arranged plate structures is greater than or equal to 17%.

7. The clean workshop according to claim 4, characterized in that: The floor structure also includes a plurality of cross beams arranged at intervals, both ends of the cross beams being fixedly connected to the side walls of the factory building body; along the direction from the second-floor space to the first-floor space, a plurality of the plate structures cover the plurality of cross beams and are detachably connected to the cross beams.

8. The clean workshop according to claim 7, characterized in that: The floor structure also includes a plurality of longitudinal beams arranged at intervals, and any of the transverse beams intersects with and is fixedly connected to the plurality of longitudinal beams; along the direction from the first floor space to the second floor space, the projection of the production equipment on the floor structure is located between two adjacent longitudinal beams and between two adjacent transverse beams.

9. The clean workshop according to claim 8, characterized in that: The plurality of plate structures divide the factory building into a first-floor space and a second-floor space; along the direction from the first-floor space to the second-floor space, there are gaps between the plurality of plate structures and the cross beams and the longitudinal beams; the return air outlet is located in the gap.

10. The clean workshop according to claim 9, characterized in that: The floor structure further includes a plurality of support columns, wherein the plurality of support columns are located in the gap, and one end of each of the support columns is fixedly connected to the beam; Any of the plate structures is detachably connected to an end of at least one of the support columns that is away from the crossbeam.

Images