Multi-vibrator connected piezoelectric pump and application equipment
By setting up multiple pump chambers and piezoelectric vibrators in series or parallel in the piezoelectric pump, combined with the one-way valve design, the problem of insufficient output pressure and flow of the existing piezoelectric micropump is solved, and the pump volume is reduced and the fluid is stable.
Patent Information
- Application Number
- CN202422072880.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-26
- Publication Date
- 2025-09-02
- Estimated Expiration
- 2034-08-26
AI Technical Summary
Existing piezoelectric micropumps are difficult to increase the output pressure and flow rate at the same time, and the flow channel resistance is increased when connected in parallel or in series, affecting the pump's output capability.
A multi-vibrator-connected piezoelectric pump is designed. Multiple pump chambers are provided in series or parallel or series-parallel pump chambers. Each pump chamber is equipped with piezoelectric vibrators, and a one-way valve is installed at the input and output ends to ensure one-way transmission of fluid.
It achieves a significant reduction in pump volume with the same output capability, improves output flow and pressure, facilitates product miniaturization, and ensures stable one-way transmission of fluids.
Smart Images

Figure CN223293878U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of piezoelectric pumps, in particular to a multi-vibrator connected piezoelectric pump and application equipment thereof. Background Art
[0002] In fields such as medical devices, consumer electronics, and the pharmaceutical industry, products are trending towards miniaturization. In the field of gas transmission, pumps are key components, of which piezoelectric micropumps are a key branch. Through reciprocating motion, they compress and stretch the space within the pump chamber to create negative pressure, drawing fluid into the pump chamber and then discharging it through the outlet, thus achieving unidirectional fluid transmission.
[0003] However, existing piezoelectric micropumps are mostly used for pumping trace amounts of gases or liquids, and it is difficult to simultaneously increase the output pressure and flow rate. For example, electric breast pump products require the pump to simultaneously meet a negative pressure of more than 40 kp and a flow rate of 1 L / min. If the output capacity needs to be improved, the usual practice is to connect multiple micropumps in parallel or series to increase the output flow rate or pressure. However, connecting the pumps in series or parallel with pipes from the outside will inevitably increase the length of the pipes, thereby increasing the flow resistance and weakening the pump's output capacity. Utility Model Content
[0004] In order to solve the problems in the above-mentioned background technology, the utility model provides a multi-vibrator connected piezoelectric pump and a working method thereof, which increases the output capacity of the pump and greatly reduces the volume of the pump at the same output capacity, thereby facilitating the miniaturization design of the product.
[0005] The solution adopted by the utility model to solve its technical problems is: a multi-vibrator connected piezoelectric pump, including a pump body and a piezoelectric vibrator arranged in the pump body, the pump body is provided with at least two pump chambers connected in series or in parallel or in series and parallel, the piezoelectric vibrator is respectively arranged in each pump chamber, and a one-way valve arranged directly opposite the center of the piezoelectric vibrator is provided at the input end and the output end of the pump chamber.
[0006] Furthermore, the pump body includes an upper cover and a lower cover, and the end surfaces on one side where the upper cover and the lower cover are connected to each other are each provided with a plurality of cavity grooves. The upper cover and the lower cover are connected so that the cavity grooves are combined to form the pump chamber.
[0007] Furthermore, the pump body also includes a middle cover arranged between the upper cover and the lower cover, and the surfaces of the middle cover connected to the upper cover and the lower cover are provided with cavity grooves. The upper cover and the lower cover are respectively connected to the end surfaces on both sides of the middle cover so that the cavity grooves are combined inside the pump body to form a stacked pump cavity.
[0008] Furthermore, the upper cover and / or the lower cover are provided with a fluid channel connected to the pump chamber, and the fluid channel includes an input channel and an output channel; the middle cover is provided with a connecting port for connecting two stacked pump chambers, and the connecting port is provided at the center of the cavity groove.
[0009] Furthermore, at least two of the pump chambers are connected in series, and a connecting channel is connected between two adjacent pump chambers arranged in the same layer and connected in series, and the connecting channel is provided on the upper cover and / or the lower cover.
[0010] Furthermore, at least two of the pump chambers are connected in parallel, and each pump chamber is communicated with an input channel and an output channel respectively.
[0011] Furthermore, a plurality of the pump chambers are connected in series and in parallel, at least two of the pump chambers are respectively connected to the input channels, and the remaining pump chambers are respectively connected in series with the parallel pump chambers.
[0012] Furthermore, the piezoelectric vibrator includes a flexible circuit board and piezoelectric ceramics and metal sheets respectively connected to both side end surfaces of the flexible circuit board, and the piezoelectric ceramics are electrically connected to the positive and negative electrodes of the circuit.
[0013] Furthermore, an opening groove is provided at the input end and the output end of the pump chamber, and the one-way valve is provided at the position of the opening groove.
[0014] The utility model also provides an application device, which includes the above-mentioned multi-vibrator connected piezoelectric pump.
[0015] In summary, the beneficial effects of the present invention are as follows:
[0016] 1. The utility model provides multiple pump chambers in the pump body, and provides a piezoelectric vibrator in each pump chamber, so that multiple piezoelectric vibrators can be concentrated in one pump body. By connecting the pump chambers in series, in parallel, or in series and in parallel, the pump body can provide a large output flow and a greater output pressure, and greatly reduces the volume of the pump under the same output capacity, which is convenient for the miniaturization design of the product.
[0017] 2. The utility model sets one-way valves at the input and output ends of the pump body, and makes the one-way valves face the center position of the piezoelectric vibrator, which not only realizes the one-way transmission of the fluid, but also enables the one-way valve to be accurately opened when the piezoelectric vibrator vibrates, thereby realizing stable one-way transmission of the fluid.
[0018] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented in accordance with the contents of the specification. In addition, in order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the following preferred embodiments are specifically cited and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 This is a structural diagram of Example 1;
[0020] Figure 2 is a cross-sectional view of embodiment 1;
[0021] Figure 3 This is a structural diagram of Example 2;
[0022] Figure 4 This is an exploded view of Example 2;
[0023] Figure 5 This is a structural diagram of Example 3;
[0024] Figure 6 is a cross-sectional view of embodiment 3;
[0025] Figure 7 This is a schematic structural diagram of Example 4;
[0026] Figure 8 This is an exploded view of Example 4.
[0027] In the figure: 1. Pump body; 11. Upper cover; 12. Lower cover; 13. Middle cover; 131. Connecting port; 14. Cavity groove; 2. Piezoelectric vibrator; 21. Flexible circuit board; 22. Piezoelectric ceramic; 23. Metal sheet; 3. Pump chamber; 4. One-way valve; 5. Input channel; 6. Output channel; 7. Connecting channel. DETAILED DESCRIPTION
[0028] In order to make the content of the present invention more clearly understood, the present invention will be further described below based on specific embodiments in conjunction with the accompanying drawings.
[0029] It should be noted that the terms "center," "upper," "lower," "front," "back," "left," "right," "inner," and "outer" used herein to indicate positions or locations are based on the positions or locations shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Unless otherwise specified, "plurality" means two or more.
[0030] Unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be interpreted broadly. For example, they can refer to fixed, removable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediary; and internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in this utility model based on specific circumstances.
[0031] Example 1
[0032] like Figures 1 to 2 As shown, a multi-vibrator connected piezoelectric pump includes a pump body 1 and a piezoelectric vibrator 2 disposed in the pump body 1. The pump body 1 of this embodiment has multiple pump chambers 3 and piezoelectric vibrators 2. By connecting the pump chambers 3 in series, in parallel, or in series and parallel, the overall output flow rate and output pressure of the piezoelectric pump can be effectively improved, and the volume of the pump body 1 can be greatly reduced, which is convenient for realizing the miniaturization design of the product. Among them, the pump body 1 of this embodiment is provided with at least two pump chambers 3 connected in series, in parallel, or in series and parallel. The piezoelectric vibrator 2 is respectively disposed in each pump chamber 3, so that the piezoelectric pump of this embodiment can collect the fluid to the same outlet through the parallel pump chambers 3, thereby increasing the flow rate; the output fluid can also be transmitted multiple times through the multiple piezoelectric vibrators 2 through the series pump chambers 3, thereby increasing the output pressure of the fluid; at the same time, the pump chambers 3 can be connected in series into multiple groups and then connected in parallel, so that the output flow rate and output pressure of the pump body 1 of this embodiment can be increased at the same time.
[0033] like Figure 2 、 Figure 4 、 Figure 6 and Figure 8 As shown, the input end and the output end of each pump chamber 3 of the present embodiment are provided with an open groove, and a one-way valve 4 arranged opposite the center of the piezoelectric vibrator 2 is installed in the open groove, so that when the piezoelectric vibrator 2 vibrates, the space of the pump chamber 3 on both sides of the piezoelectric vibrator 2 can change, thereby causing the one-way valve 4 arranged at the input end to open in one direction to allow the fluid to enter the pump chamber 3, and at the same time, the one-way valve 4 installed at the output end of the pump chamber 3 is opened to realize the output of the fluid in the pump chamber 3, thereby realizing one-way transmission of the fluid.
[0034] Specifically, after the piezoelectric vibrator 2 is installed, the interior of the pump chamber 3 is divided into two chambers. For ease of understanding, the chamber connected to the input end of the pump chamber 3 will be referred to as the first chamber, and the chamber connected to the output end of the pump chamber 3 will be referred to as the second chamber. When the fluid is transmitted, the piezoelectric vibrator 2 moves toward one side of the second chamber, forming a negative pressure area in the first chamber and a positive pressure area in the second chamber, thereby driving the one-way valves 4 in the two chambers to open, allowing the fluid to enter from the one-way valve 4 in the first chamber and flow out from the one-way valve 4 in the second chamber. In this embodiment, the one-way valve 4 in the first chamber and the one-way valve 4 in the second chamber are both arranged directly opposite the center of the piezoelectric vibrator 2, so that when the piezoelectric vibrator 2 vibrates, the one-way valves 4 in the first chamber and the second chamber can both be accurately opened, thereby achieving rapid and accurate transmission of the fluid.
[0035] It should be noted that, in this embodiment, the spatial change between the first chamber and the second chamber does not directly generate pressure. When the piezoelectric vibrator 2 vibrates, the gas in the first chamber and the gas in the second chamber squeeze each other to form positive pressure and negative pressure.
[0036] like Figure 1 As shown, the pump body 1 of this embodiment includes an upper cover 11 and a lower cover 12, wherein the end faces on one side where the upper cover 11 and the lower cover 12 are connected to each other are provided with cavity grooves 14 with corresponding positions. After the upper cover 11 and the lower cover 12 are connected, the cavity grooves 14 can be combined to form a pump chamber 3, wherein the upper cover 11 and the lower cover 12 can be provided with multiple cavity grooves 14, so that after the upper cover 11 and the lower cover 12 are connected, multiple pump chambers 3 can be formed on the same plane, thereby facilitating series or parallel or series-parallel connection between the pump chambers 3.
[0037] The pump body 1 of this embodiment is provided with a fluid channel connected to the pump chamber 3, wherein the fluid channel includes an input channel 5 provided on the upper cover 11 or the lower cover 12 for inputting fluid into the pump chamber 3 and an output channel 6 for outputting fluid from the pump chamber 3. In this embodiment, the input channel 5 and the output channel 6 are respectively connected to the two pump chambers 3, so that the fluid input into the pump body 1 can be pressurized or merged through multiple pump chambers 3 connected in series or in parallel and then output through the output channel 6, which can effectively improve the output flow and output pressure of the pump body 1 of this embodiment.
[0038] In order to facilitate the series connection between two pump chambers 3 in the same plane, the upper cover 11 or the lower cover 12 of this embodiment is also provided with connecting channels 7 respectively connecting at least two pump chambers 3, so that the fluid can pass through multiple pump chambers 3 in sequence through the connection, thereby enhancing the output pressure under the action of each piezoelectric vibrator 2.
[0039] Specifically, such as Figure 1 and Figure 2As shown, the upper cover 11 and the lower cover 12 of this embodiment are both provided with two cavity grooves 14 on their surfaces. When the upper cover 11 and the lower cover 12 are combined, two pump chambers 3 are formed in the same plane within the pump body 1. The two pump chambers 3 of this embodiment are connected in series. The lower cover 12 of the pump body 1 is provided with a connecting channel 7 connecting the two pump chambers 3. When the pump body 1 of this embodiment is in operation, the piezoelectric vibrator 2 of the pump chamber 3 connected to the input channel 5 vibrates downward, thereby opening the one-way valve 4 installed at the input and output ends of the pump chamber 3, allowing the fluid in the input channel 5 to enter the first chamber through the one-way valve 4. At the same time, the fluid in the second chamber enters the connecting channel 7 through the one-way valve 4. The piezoelectric vibrator 2 of the pump chamber 3 connected to the output channel 6 vibrates upward, allowing the fluid in the connecting channel 7 to enter the pump chamber 3 through the one-way valve 4 and be output to the output channel 6 through the one-way valve 4. By connecting the two pump chambers 3 in series, the fluid can be transmitted through the two piezoelectric vibrators 2, thereby increasing the output pressure of the piezoelectric pump of this embodiment.
[0040] The inner wall of the connecting channel 7 of this embodiment is a smooth surface, the cross-sectional area of the connecting pipe is greater than 1.5 square millimeters and the length is less than 80 millimeters, which can reduce the pressure loss when the fluid passes through the connecting channel 7 and reduce the circulation resistance, thereby enhancing the overall output capacity of the pump body 1 of the pump embodiment.
[0041] Example 2
[0042] like Figure 3 and Figure 4 As shown, the difference from the first embodiment is that the pump body 1 of the second embodiment also includes a middle cover 13 arranged between the upper cover 11 and the lower cover 12. The surfaces on both sides of the middle cover 13 of this embodiment are provided with cavity grooves 14, so that when the upper cover 11 and the lower cover 12 are respectively connected to the end surfaces of the two sides of the middle cover 13, the cavity grooves 14 of the upper cover 11 and the cavity grooves 14 of the lower cover 12 can be respectively combined with the cavity grooves 14 on both sides of the middle cover 13 to form a stacked pump cavity 3, and a connecting port 131 connecting the two side surfaces is further provided at the center of the upper cover 11 of this embodiment, so that the stacked pump cavities 3 can be connected through the connecting port 131 to realize the series connection between the pump cavities 3.
[0043] Specifically, a cavity groove 14 is provided on the surfaces of the upper cover 11 and the lower cover 12 and on both sides of the middle cover 13 of the second embodiment. After the upper cover 11 and the lower cover 12 are connected to the middle cover 13, the interior of the pump body 1 is combined to form two double-layer stacked pump chambers 3. In this embodiment, the upper pump chamber 3 is connected to the input channel 5, and the lower pump chamber 3 is connected to the output channel 6. The upper pump chamber 3 and the lower pump chamber 3 are connected through the connecting port 131 at the center of the middle cover 13. When the fluid is transmitted, the piezoelectric vibrator 2 in the upper pump chamber 3 vibrates, causing the fluid in the input channel 5 to pass through the one-way valve 4 and enter the first chamber. At the same time, the piezoelectric vibrator 2 in the lower pump chamber 3 vibrates, causing the fluid in the second chamber of the upper pump chamber 3 to flow into the lower pump chamber 3 and be output from the lower pump chamber 3 to the output channel 6, thereby increasing the output pressure of the transmitted fluid.
[0044] Example 3
[0045] like Figure 5 and Figure 6 As shown, the difference from Example 1 and Example 2 is that Example 3, based on the stacked arrangement of pump chambers 3 in Example 2, further provides each layer with multiple pump chambers 3 arranged in a plane, wherein the pump chambers 3 of each layer are arranged in series, and the pump chambers 3 of the same layer are arranged in parallel, so that this embodiment can increase the output flow rate of the pump body 1 and increase the output pressure of the pump body 1.
[0046] Specifically, the pump body 1 of this embodiment includes an upper cover 11, a middle cover 13 and a lower cover 12, wherein two cavity grooves 14 are provided on the surface of the upper cover 11, the surface of the lower cover 12 and the two side surfaces of the middle cover 13, so that after the upper cover 11, the middle cover 13 and the lower cover 12 are connected, they can be combined inside the pump body 1 to form a double-layer arrangement and each layer is provided with two pump chambers 3 structure. In this embodiment, the two pump chambers 3 of the upper layer are respectively connected to the input channel 5, and the two pump chambers 3 of the lower layer are respectively connected to the output channel 6, and the pump chambers 3 of the two layers are connected through the corresponding connecting ports 131 on the middle cover 1313, that is, the pump chambers 33 of the two layers of this embodiment are connected in series to form a group of series chamber groups and then connected in parallel, so that the fluid entering the upper pump chamber 3 can increase the pressure after being output to the pump chamber 3 of the lower layer and finally merge in the output channel 6 to increase the output flow rate, thereby achieving the effect of simultaneously increasing the output flow rate and output pressure of the fluid in this embodiment. Specifically, after the piezoelectric vibrators 22 of the two upper pump chambers 33 in this embodiment vibrate, the fluid can be input into the pump chamber 33 through the input channel 55 respectively, and then enter the respective lower-layer pump chambers 33 connected in series through the connecting port 131 of the middle cover 1313 to be pressurized and then output to the output channel 66 at the same time, so that the transmitted fluid is pressurized twice through the series pump chambers 33 and then summarized and output to the output channel 66, thereby improving the output flow and output pressure of the piezoelectric pump of this embodiment.
[0047] Example 4
[0048] like Figures 7 and 8 As shown, the fourth embodiment is a structure in which each pump chamber 33 is connected in parallel, which can effectively increase the output flow rate of the pump body 11. Specifically, the pump body 11 of the fourth embodiment is provided with four pump chambers 33 arranged in a single layer, wherein each pump chamber 33 is respectively connected to the output channel 66, and the output end of each pump chamber 33 is respectively connected to the output channel 66. During fluid transmission, the piezoelectric vibrator 22 in each pump chamber 33 vibrates, causing the fluid in the input channel 55 to enter the first chamber 31 of each pump chamber 33 respectively, and then be output to the output channel 66 through the one-way valve 44 for merging, thereby increasing the overall output flow rate.
[0049] Example 5
[0050] This embodiment transmits fluid via a piezoelectric vibrator 2 within a pump chamber 3. The piezoelectric vibrator 2 comprises a flexible circuit board 21, and a piezoelectric ceramic 22 and a metal sheet 23 connected to the two end surfaces of the flexible circuit board 21. The metal sheet 23 in this embodiment can adjust the resonant frequency to ultrasonic frequencies above 20 kHz while also preventing the ceramic sheet from breaking. The piezoelectric ceramic 22 in this embodiment is provided with a positive electrode and a negative electrode disposed on the same surface. Either the positive electrode or the negative electrode in this embodiment is a flanged electrode, so that the positive and negative electrode terminals are located on the same surface of the piezoelectric ceramic 22, facilitating the extraction of the positive and negative terminals and ensuring reliable connection.
[0051] Specifically, the piezoelectric vibrator 2 of this embodiment is configured to vibrate periodically when driven by a periodic voltage signal of 20KHz or more, so that the first chamber and the second chamber in the pump chamber 3 form a positive pressure zone and a negative pressure zone respectively through the vibration of the piezoelectric vibrator 2, so that this embodiment can achieve a higher pressure and flow rate at the same time without relying on the change in the volume of the pump chamber 3. The piezoelectric vibrator 2 operates in the ultrasonic frequency band, and the human ear cannot hear the noise, which has the advantages of being quiet, small in size, and energy-saving. At the same time, the piezoelectric vibrators 2 in each pump chamber 3 of this embodiment are respectively equipped with independent resonance point tracking circuits and algorithms and independent power control circuits and algorithms, so that each piezoelectric vibrator 2 operates at its resonance point, effectively improving the overall output efficiency of the pump, and when a piezoelectric vibrator 2 among the multiple piezoelectric vibrators 2 fails, it will not cause the failure of the entire pump, effectively improving its safety.
[0052] Example 6
[0053] This embodiment provides an application device, including the piezoelectric pump of the above-mentioned embodiments 1 to 4. The application device of this embodiment can be, but is not limited to, an electric breast pump, a massager, a blood pressure monitor, a smart watch, etc.
[0054] To sum up, the beneficial effects of the present invention are as follows: this embodiment sets a plurality of pump chambers 3 in the pump body 1, and sets a piezoelectric vibrator 2 in each pump chamber 3, so that the plurality of piezoelectric vibrators 2 can be concentrated in one pump body 1, and the pump chambers 3 are connected in series or in parallel or in series and parallel, so that the pump body 1 can provide a large output flow and a greater output pressure, and greatly reduces the volume of the pump under the same output capacity, which is convenient for the miniaturization design of the product; and, this embodiment sets a one-way valve 4 at the input and output ends of the pump body 1, and makes the one-way valve 4 face the center position of the piezoelectric vibrator 2, which not only realizes the one-way transmission of the fluid, but also enables the one-way valve 4 to be accurately opened when the piezoelectric vibrator 2 vibrates, thereby realizing stable one-way transmission of the fluid.
[0055] The embodiments described above are only preferred implementations of the present invention and are not intended to limit the scope of protection of the present invention. Any non-substantial changes and modifications made by those skilled in the art on the basis of the invention fall within the scope of protection of the present invention.
Claims
1. A multi-vibrator connected piezoelectric pump, comprising a pump body (1) and a piezoelectric vibrator (2) arranged in the pump body (1), characterized in that: The pump body (1) is provided with at least two pump chambers (3) connected in series, in parallel, or in series and in parallel. The piezoelectric vibrator (2) is respectively provided in each pump chamber (3). A one-way valve (4) is provided at the input end and the output end of the pump chamber (3) and is arranged facing the center of the piezoelectric vibrator (2).
2. The multi-vibrator connected piezoelectric pump according to claim 1, characterized in that: The pump body (1) comprises an upper cover (11) and a lower cover (12); a plurality of cavity grooves (14) are provided on one end surface where the upper cover (11) and the lower cover (12) are connected to each other; the upper cover (11) and the lower cover (12) are connected so that the cavity grooves (14) are combined to form the pump chamber (3).
3. The multi-vibrator connected piezoelectric pump according to claim 2, characterized in that: The pump body (1) further comprises a middle cover (13) arranged between the upper cover (11) and the lower cover (12); the surfaces of the middle cover (13) connected to the upper cover (11) and the lower cover (12) are provided with cavity grooves (14); the upper cover (11) and the lower cover (12) are respectively connected to the end surfaces on both sides of the middle cover (13) so that the cavity grooves (14) are combined inside the pump body (1) to form a stacked arrangement of pump cavities (3).
4. The multi-vibrator connected piezoelectric pump according to claim 3, characterized in that: The upper cover (11) and / or the lower cover (12) are provided with a fluid channel communicating with the pump chamber (3), and the fluid channel includes an input channel (5) and an output channel (6); the middle cover (13) is provided with a communication port (131) for communicating with the two stacked pump chambers (3), and the communication port (131) is located at the center of the cavity groove (14).
5. The multi-vibrator connected piezoelectric pump according to claim 4, characterized in that: At least two of the pump chambers (3) are connected in series, and a connecting channel (7) is connected between two adjacent pump chambers (3) arranged in the same layer and connected in series. The connecting channel (7) is provided on the upper cover (11) and / or the lower cover (12).
6. The multi-vibrator connected piezoelectric pump according to claim 4, characterized in that: At least two of the pump chambers (3) are connected in parallel, and each of the pump chambers (3) is communicated with an input channel (5) and an output channel (6) respectively.
7. The multi-vibrator connected piezoelectric pump according to claim 4, characterized in that: The plurality of pump chambers (3) are connected in series and in parallel, at least two of the pump chambers (3) are respectively connected to the input channel (5), and the remaining pump chambers (3) are respectively connected in series to the parallel pump chambers (3).
8. The multi-vibrator connected piezoelectric pump according to claim 1, characterized in that: The piezoelectric vibrator (2) comprises a flexible circuit board (21) and piezoelectric ceramics (22) and metal sheets (23) respectively connected to the end surfaces on both sides of the flexible circuit board (21); the piezoelectric ceramics (22) are electrically connected to the positive and negative electrodes of the circuit.
9. The multi-vibrator connected piezoelectric pump according to claim 1, characterized in that: Open slots are provided at both the input end and the output end of the pump chamber (3), and the one-way valve (4) is provided at the position of the open slot.
10. An application device, characterized in that: It includes the multi-vibrator connected piezoelectric pump according to claim 1.