Auxiliary tool for cleaning and drying and processing system

Abstract

The utility model discloses an auxiliary tool for cleaning and drying. The auxiliary tool comprises a bearing seat, a bearing part and a supporting assembly. The bearing part is used for bearing workpieces; the supporting assembly is connected to the bearing seat and the bearing part, the supporting assembly comprises a supporting state and a storage state, and the supporting assembly can be switched between the supporting state and the storage state under the action of external force; when the supporting assembly is in the supporting state, the supporting assembly can support one end of the bearing piece, and the other end of the bearing piece abuts against the bearing base. When the supporting assembly is in the storage state, the bearing piece retracts back to the bearing seat. The quartz tube is firstly cleaned, the supporting assembly is switched to the supporting state, the bearing piece is made to incline, the quartz tube is placed on the bearing piece and kept inclined, drying is conducted after cleaning is completed, and in the drying process, the supporting assembly is switched to the containing state, and the quartz tube is kept in the horizontal state. Therefore, a plurality of tools for bearing the quartz tube are not needed, and the cost is effectively reduced. The utility model further discloses a processing system.

Description

Technical Field

[0001] The present application belongs to the technical field of quartz tube cleaning and drying, and specifically relates to an auxiliary tooling and processing system for cleaning and drying. Background Art

[0002] In the semiconductor production process, high-purity quartz tubes are often used as containers for the outer coating, diffusion, and oxidation stages, making them crucial for the production of semiconductor materials and device manufacturing. Quartz tubes may need to be cleaned and dried before use, and different steps require different placement requirements for the tubes. For example, the tubes must be tilted during cleaning and horizontal during drying. Currently, different tooling is often required to support the tubes during the cleaning and drying steps, resulting in high costs. Utility Model Content

[0003] The technical problem to be solved by this application is that different tooling is required for the existing quartz tube cleaning and drying steps, which is very costly. In order to solve the above technical problem, a low-cost auxiliary tooling and processing system for cleaning and drying is provided.

[0004] The technical solutions proposed in this application are:

[0005] An auxiliary tool for cleaning and drying, comprising:

[0006] bearing seat;

[0007] A carrier, used for carrying a workpiece;

[0008] a support assembly connected to the bearing seat and the bearing member, wherein the support assembly includes a supporting state and a storage state, and the support assembly can switch between the supporting state and the storage state under the action of an external force;

[0009] When the support assembly is in the supporting state, the support assembly can prop up one end of the bearing member, and the other end of the bearing member abuts against the bearing seat; when the support assembly is in the retracted state, the bearing member retracts the bearing seat.

[0010] Furthermore, the bearing member includes a bearing rod and a limit block, the limit block is provided at one end of the bearing rod and is located on a side of the bearing rod away from the bearing seat, and the support assembly is connected to the bearing rod;

[0011] When the supporting assembly is in the supporting state, one end of the supporting rod provided with the limiting block abuts against the supporting seat.

[0012] Furthermore, a limiting groove is provided on a side of the bearing rod facing away from the bearing seat.

[0013] Furthermore, the limiting groove is an arc-shaped groove.

[0014] Furthermore, the bearing seat is provided with a bearing groove and a leakage hole, the support assembly and the bearing member are both arranged in the bearing groove, one end of the leakage hole passes through the side of the bearing seat away from the bearing groove, and the other end passes through the bottom of the bearing groove.

[0015] Furthermore, the bearing seat includes a main body and two positioning parts, the main body is provided with the bearing groove and the leakage hole, and the two positioning parts are located at both ends of the main body along the length direction of the bearing groove.

[0016] Furthermore, the support assembly includes a first support rod and a second support rod, the first support rod is hinged to the bearing seat, the second support rod is hinged to an end of the first support rod away from the bearing seat, and the bearing member is hinged to an end of the second support rod away from the first support rod.

[0017] Furthermore, the support assembly further includes a friction structure, which is provided at a connection between the first support rod and the second support rod to increase the friction force between the first support rod and the second support rod.

[0018] Furthermore, there are a plurality of the carriers, a plurality of the supporting assemblies, and each group of the supporting assemblies is connected to a corresponding carrier.

[0019] A processing system comprises the auxiliary tooling for cleaning and drying as described above.

[0020] Using the aforementioned auxiliary fixture, the quartz tube is first cleaned, the support assembly is switched to the supporting position, tilting the carrier, and the quartz tube is placed on the carrier to maintain its tilt. After cleaning, it is dried. During the drying process, the support assembly is switched to the storage position, maintaining the quartz tube in a horizontal position. This eliminates the need for multiple fixtures to support the quartz tube, effectively reducing costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings are used to provide further understanding of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application.

[0022] Figure 1 A schematic structural diagram of the auxiliary tooling for cleaning and drying provided in one embodiment of the present application when the support assembly is in a supporting state;

[0023] Figure 2 for Figure 1 The schematic diagram of the structure of the auxiliary tooling shown is when the support assembly is in the storage state;

[0024] Figure 3 for Figure 2 A schematic structural diagram of the auxiliary tooling when applied to an oven.

[0025] Description of labels:

[0026] 100. Auxiliary tooling; 200. Oven; 110. Support seat; 111. Support slot; 112. Leakage hole; 113. Main body; 114. Positioning portion; 120. Support member; 121. Support rod; 122. Limit block; 123. Limit slot; 130. Support assembly; 131. First support rod; 132. Second support rod. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0028] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on this application.

[0029] In one aspect, the present application provides a cleaning and drying auxiliary tooling for assisting in cleaning and drying a workpiece. In this embodiment, the workpiece is a quartz tube. In other embodiments, the workpiece can also be other products. The following description uses a quartz tube as an example.

[0030] like Figure 1 and Figure 2 As shown, the auxiliary tooling 100 includes a bearing seat 110, a bearing member 120 and a support assembly 130. The bearing member 120 is used to bear the quartz tube.

[0031] The support assembly 130 is connected to the support base 110 and the support member 120 , and includes a supporting state and a storage state. The support assembly 130 can switch between the supporting state and the storage state under the action of an external force.

[0032] When the support assembly 130 is in the supporting state, the support assembly 130 can prop up one end of the carrier 120 to move away from the carrier seat 110, and the other end of the carrier 120 abuts against the carrier seat 110; when the support assembly 130 is in the storage state, the carrier 120 is retracted into the carrier seat 110.

[0033] Before explaining the cleaning and drying process of the quartz tube, it is necessary to explain that the support base 110 is kept horizontal during the application process. The cleaning and drying process of the quartz tube is as follows:

[0034] First, the quartz tube is pickled. The support assembly 130 is switched to the support state, the carrier 120 is tilted, and the quartz tube is placed on the carrier 120 with the acid reagent inside, so as to be immersed in the pickling. After the pickling is completed, the acid reagent is discharged, and then the quartz tube is placed on the tilted carrier 120 and continued to be cleaned with deionized water. During the cleaning process, the support assembly 130 can be switched to the storage state, so that the carrier 120 is retracted to the carrier seat 110, that is, the quartz tube is switched to a horizontal state. After the deionized water cleaning is completed, the auxiliary tooling 100 is placed in the oven 200 (see Figure 3 ) is dried in the container. During the drying process, the carrier 120 and the quartz tube on the carrier 120 are kept in a horizontal state.

[0035] Using the auxiliary tooling 100, the quartz tube is first cleaned. The support assembly 130 is then switched to the supporting state, tilting the carrier 120. The quartz tube is placed on the carrier 120 and maintained tilted. After cleaning, it is dried. During the drying process, the support assembly 130 is switched to the storage state, maintaining the quartz tube in a horizontal position. This eliminates the need for multiple tooling pieces to support the quartz tube, effectively reducing costs.

[0036] Furthermore, the support base 110 defines a support slot 111, in which the support assembly 130 and the support member 120 are both disposed. Thus, when the support assembly 130 is in the supporting state, one end of the support member 120 abuts against the bottom of the support slot 111; when the support assembly 130 is in the retracted state, the support member 120 is retracted into the support slot 111.

[0037] In one embodiment, the auxiliary tooling 100 includes a plurality of carriers 120 and a plurality of support assemblies 130, and each support assembly 130 is connected to a corresponding carrier 120. In order to further improve the stability of the support, specifically Figure 1 In the illustrated embodiment, each carrier 120 may be connected to two sets of support components 130 , and the two sets of support components 130 are connected to two opposite surfaces of the carrier 120 .

[0038] As an example, the support base 110 is provided with a plurality of support slots 111, and the plurality of support members 120 are arranged in a one-to-one correspondence with the plurality of support slots 111. Of course, in other embodiments, the support base 110 may also be provided with a single larger support slot 111, and the plurality of support assemblies 130 and the plurality of support members 120 may be disposed in the support slot 111.

[0039] In one embodiment, the support base 110 is further provided with a leakage hole 112. One end of the leakage hole 112 passes through the side of the support base 110 away from the support tank 111, and the other end passes through the bottom of the support tank 111, thereby draining the liquid in the support tank 111. It is understandable that during the cleaning process, the support tank 111 can receive liquid and then discharge the liquid to a preset position through the leakage hole 112. Similarly, if there are multiple support tanks 111, each support tank 111 is provided with a corresponding leakage hole 112. At the same time, in order to ensure that the liquid in the support tank 111 is emptied, the number of leakage holes 112 can be multiple.

[0040] In one embodiment, the support base 110 includes a main body 113 and two positioning parts 114. The main body 113 is provided with a supporting groove 111 and a leakage hole 112. The two positioning parts 114 are located at both ends of the main body 113 along the length direction of the supporting groove 111. Figure 3 As shown, when the support base 110 is placed in the oven 200 , the positioning portions 114 at both ends cooperate with the protrusions on the inner wall of the oven 200 to support the support base 110 .

[0041] Furthermore, in the depth direction of the bearing slot 111, that is, in the vertical direction in actual application, the positioning portion 114 and the surface of the main body 113 facing away from the bearing slot 111 are spaced apart, that is, the positioning portion 114 and the main body 113 are spaced apart at the ground surface. Preferably, the upper surface of the positioning portion 114 is flush with the upper surface of the main body 113.

[0042] In one embodiment, the support assembly 130 includes a first support rod 131 and a second support rod 132, the first support rod 131 is hinged to the bearing seat 110, the second support rod 132 is hinged to an end of the first support rod 131 away from the bearing seat 110, and the bearing member 120 is hinged to an end of the second support rod 132 away from the first support rod.

[0043] It can be understood that in this embodiment, the first support rod 131 and the second support rod 132 constitute a connecting rod structure, and when the support assembly 130 is in a supporting state, the first support rod 131 and the second support rod 132 are both arranged in the vertical direction, that is, located at the dead point of the connecting structure. At the same time, combined with the friction force between the first support rod 131 and the second support rod 132, the first support rod 131 and the second support rod 132 can be maintained in the current position without being subjected to external force.

[0044] Furthermore, the support assembly 130 also includes a friction structure, which is arranged at the connection between the first support rod 131 and the second support rod 132 to increase the friction between the first support rod 131 and the second support rod 132, thereby further increasing the stability of the connection structure when it is at the dead point. Similarly, it can be seen that the friction structure can also be arranged at the connection between the first support rod 131 and the bearing seat 110 and the second support rod 132 and the bearing member 120. Optionally, the friction structure can be a rubber structure, which is arranged at the connection between the two to increase the friction between the two. Of course, in other embodiments, a locking structure, such as a buckle structure, can also be provided at the connection between the first support rod 131 and the second support rod 132 to limit the relative rotation of the first support rod 131 and the second support rod 132, so that the support assembly 130 remains in a supported state.

[0045] In one embodiment, the support member 120 includes a support rod 121 and a stopper 122. The stopper 122 is disposed at one end of the support rod 121 and is located on the side of the support rod 121 facing away from the support seat 110, i.e., on the upper surface of the support rod 121. The support assembly 130 is connected to the support rod 121. When the support assembly 130 is in a supporting state, one end of the support rod 121 provided with the stopper 122 abuts against the bottom of the support slot 111, while the other end is supported by the support assembly 130.

[0046] It can be understood that, assuming that the load-bearing rod 121 is divided into two parts along its length, the limit block 122 is set at the end of one of the parts, and the support assembly 130 is connected to the other part, that is, the connection between the support assembly 130 and the load-bearing rod 121 is preferably on the side of the center of the load-bearing rod 121 away from the limit block 122, to ensure that when the support assembly 130 supports the load-bearing rod 121, the end of the load-bearing rod 121 with the limit block 122 is located at the bottom.

[0047] Furthermore, a limiting groove 123 is provided on the side of the support rod 121 facing away from the support seat 110. The limiting groove 123 is used to place the quartz tube and limit the quartz tube to prevent it from falling off. Preferably, the limiting groove 123 is an arc-shaped groove. It is understood that in order to ensure that the support assembly 130 is in a horizontal state when the support assembly 130 is in the storage state, the support assembly 130 can be connected to the side of the support rod 121 adjacent to the limiting groove 123.

[0048] In summary, the auxiliary tool 100 for cleaning and drying provided in this application has at least the following advantages:

[0049] 1. The carrier 120 can carry the quartz tube at an angle or horizontally, so that the cleaning and drying of the quartz tube does not require multiple tooling, thus reducing costs;

[0050] 2. Each auxiliary tooling 100 can carry multiple quartz tubes, thereby achieving simultaneous cleaning and drying of multiple quartz tubes, thereby improving processing efficiency;

[0051] Regarding the auxiliary tooling 100 for cleaning and drying, it should also be noted that when used for cleaning and drying quartz tubes, the material of the auxiliary tooling 100 is polytetrafluoroethylene.

[0052] On the other hand, the present application also provides a processing system, which includes the auxiliary tooling 100 for cleaning and drying in the above embodiment.

[0053] Furthermore, the processing system further includes a processing device, which is used to process the workpiece on the auxiliary tooling 100. Optionally, the processing device is a cleaning device or an oven 200, which is not limited here.

[0054] Although the embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. An auxiliary tool for cleaning and drying, characterized in that: include: bearing seat; A carrier, used for carrying a workpiece; a support assembly connected to the bearing seat and the bearing member, wherein the support assembly includes a supporting state and a storage state, and the support assembly can switch between the supporting state and the storage state under the action of an external force; When the support assembly is in the supporting state, the support assembly can prop up one end of the bearing member, and the other end of the bearing member abuts against the bearing seat; when the support assembly is in the retracted state, the bearing member retracts the bearing seat.

2. The auxiliary tool for cleaning and drying according to claim 1, characterized in that: The bearing member includes a bearing rod and a limit block, wherein the limit block is provided at one end of the bearing rod and is located on a side of the bearing rod away from the bearing seat, and the support assembly is connected to the bearing rod; When the supporting assembly is in the supporting state, one end of the supporting rod provided with the limiting block abuts against the supporting seat.

3. The auxiliary tool for cleaning and drying according to claim 2, characterized in that: A limiting groove is provided on one side of the bearing rod away from the bearing seat.

4. The auxiliary tool for cleaning and drying according to claim 3, characterized in that: The limiting groove is an arc-shaped groove.

5. The auxiliary tool for cleaning and drying according to claim 1, characterized in that: The bearing seat is provided with a bearing groove and a leakage hole. The support assembly and the bearing member are both arranged in the bearing groove. One end of the leakage hole passes through the side of the bearing seat away from the bearing groove, and the other end passes through the bottom of the bearing groove.

6. The auxiliary tool for cleaning and drying according to claim 5, characterized in that: The bearing seat includes a main body and two positioning parts. The main body is provided with the bearing groove and the liquid leakage hole. The two positioning parts are located at two ends of the main body along the length direction of the bearing groove.

7. The auxiliary tool for cleaning and drying according to claim 1, characterized in that: The support assembly includes a first support rod and a second support rod, the first support rod is hinged to the bearing seat, the second support rod is hinged to an end of the first support rod away from the bearing seat, and the bearing member is hinged to an end of the second support rod away from the first support rod.

8. The auxiliary tool for cleaning and drying according to claim 7, characterized in that: The support assembly further includes a friction structure, which is provided at a connection between the first support rod and the second support rod to increase friction between the first support rod and the second support rod.

9. The auxiliary tool for cleaning and drying according to claim 1, characterized in that: There are multiple carriers, and there are multiple groups of support assemblies. Each group of support assemblies is connected to a corresponding carrier.

10. A processing system, characterized in that The invention comprises the auxiliary tooling for cleaning and drying according to any one of claims 1 to 9.

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