Fixing device suitable for SIMS test piece

Abstract

The utility model relates to a fixing device suitable for an SIMS test piece, and relates to the technical field of test equipment. The device comprises a carrying table, the carrying table is provided with a containing groove, and the bottom of the containing groove is provided with a grounding hole; the bearing disc is arranged in the containing groove corresponding to the grounding hole, the bearing disc is filled with conductive material glue, the test piece is fixed in the conductive material glue, and the test piece abuts against the bottom of the containing groove; the cover plate is detachably installed on the carrying table, and the side, close to the containing groove, of the cover plate is provided with an abutting piece used for abutting against the bearing disc. The test piece has the effect of improving the test piece detection effect.

Description

Technical Field

[0001] The present application relates to the technical field of testing equipment, and in particular to a fixing device suitable for SIMS test pieces. Background Art

[0002] In SIMS (Secondary Ion Mass Spectrometry) testing, to accurately analyze the sample's surface composition and structural characteristics, the specimen must remain stable throughout the entire testing process. With the widespread application of SIMS in fields such as materials science, semiconductor processing, surface chemistry, and nanotechnology, the demand for specimen fixation devices is increasing, driving the research and development and improvement of related technologies in this field.

[0003] To address the issue of loosely fixed test pieces during SIMS testing, the industry typically uses a placement table to secure the test piece. This method typically uses a metal spring to press against the back of the test piece. The spring pressure forces the test piece to fit within an opening on the placement table, ensuring grounding. While these conventional methods can meet the test piece's needs to a certain extent, they still have certain limitations in practical applications.

[0004] While these traditional fixing methods can secure the test piece, they can easily cause slight displacement during testing, affecting the accuracy and reliability of the test data. This grounding method is particularly ineffective for samples with poor conductivity. Furthermore, due to variations in thickness or size, these fixing methods can easily cause the test piece's analysis position to shift, making it difficult to guarantee satisfactory test results. Utility Model Content

[0005] In order to improve the detection effect of the test piece, the present application provides a fixing device suitable for SIMS test piece.

[0006] The present application provides a fixing device for SIMS specimens using the following technical solution:

[0007] A fixing device suitable for SIMS test pieces, comprising: a carrier, a receiving groove is provided on the carrier, and a grounding hole is provided at the bottom of the receiving groove; a carrying plate is provided in the receiving groove corresponding to the grounding hole, the carrying plate is filled with conductive material glue, and the test piece is fixed in the conductive material glue, and the test piece abuts against the bottom of the receiving groove; a cover plate is detachably mounted on the carrier, and a fastening member for abutting the carrying plate is provided on the side of the cover plate close to the receiving groove.

[0008] By adopting the above technical solution, when testing a test piece, the test piece is first fixed in the carrier plate, and then the carrier plate with the test piece is placed in the corresponding grounding hole in the receiving slot. Then, the cover is closed and the carrier plate is pressed against the bottom of the receiving slot using the clamping member, so that the test piece is pressed against the carrier. By providing the conductive material glue to improve the overall conductivity of the test piece, the test effect of the test piece with poor conductivity can be improved.

[0009] Preferably, the pressing member is configured as an elastic member, one end of which is fixedly connected to the cover plate, and the other end of the elastic member is used to press the supporting plate to the bottom of the accommodating groove; when the cover plate is mounted on the carrier, the elastic member is in a compressed state.

[0010] By adopting the above technical solution, the elastic part can provide continuous pressing force in the compressed state to ensure that the supporting plate fits tightly to the bottom of the accommodating groove; since the elastic part has a certain elasticity, it can adapt to supporting plates of different sizes or slight deformations to ensure a stable fixing effect.

[0011] Preferably, a plurality of grounding holes are provided, and the number of the carrying plates corresponds to the number of the grounding holes.

[0012] By adopting the above technical solution and providing a plurality of grounding holes, a plurality of test pieces can be tested simultaneously, thereby improving the testing efficiency of the test pieces.

[0013] Preferably, a plurality of the grounding holes are evenly arranged at the bottom of the accommodating groove.

[0014] By adopting the above technical solution, collisions between adjacent carrying plates can be avoided as much as possible.

[0015] Preferably, a threaded hole is provided on the carrier, and a threaded groove is provided on the cover plate corresponding to the threaded hole, a bolt is threaded through the threaded hole, and the bolt includes a threaded rod and a bolt head that are fixedly connected, and one end of the threaded rod away from the bolt head passes through the threaded hole and is threadedly fixed in the threaded groove.

[0016] By adopting the above technical solution, the cover plate and the carrier are detachably connected through the threaded rod, the threaded hole and the threaded groove that are threaded together.

[0017] Preferably, a plurality of thread grooves are symmetrically arranged on the carrier along the circumference of the cover plate.

[0018] By adopting the above technical solution and providing a plurality of thread grooves, the stability of the cover plate installed on the carrier can be increased.

[0019] Preferably, a plurality of through holes are provided on the bottom of the carrying plate.

[0020] By adopting the above technical solution and providing through holes, it is possible to facilitate the flow of excess conductive material through the through holes to the outside of the carrier disk.

[0021] In summary, this application includes at least one of the following beneficial technical effects:

[0022] 1. By filling the carrier plate with conductive material glue and fixing the test piece, the overall conductivity of the test piece is improved, solving the problem of poor conductivity during testing of sample pieces with poor conductivity;

[0023] 2. The combination of the cover plate and the elastic member allows the elastic force of the elastic member to press the carrier plate against the bottom of the receiving slot after the cover plate is installed, preventing the test piece from shifting during testing and improving the accuracy and reliability of the test results.

[0024] 3. By setting up multiple grounding holes on the carrier and placing multiple carrier plates accordingly, multiple test pieces can be tested simultaneously, improving the test efficiency and ensuring that multiple test pieces obtain consistent and repeatable test results under the same conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present application;

[0026] Figure 2 This is a schematic diagram of the explosion structure of an embodiment of the present application;

[0027] Figure 3 It is a cross-sectional schematic diagram of the carrier plate in an embodiment of the present application.

[0028] Figure numerals: 100, test piece; 1, carrier; 11, receiving groove; 12, grounding hole; 13, threaded hole; 2, carrying plate; 21, through hole; 3, conductive material glue; 4, cover plate; 41, threaded groove; 5, fastening member; 6, bolt. DETAILED DESCRIPTION

[0029] The following is combined with Figure 1-3 This application is described in further detail.

[0030] The embodiment of the present application discloses a fixing device suitable for a SIMS test piece.

[0031] Reference Figure 1 、 Figure 2 and Figure 3A fixing device suitable for SIMS test pieces includes a carrier 1, which is surrounded by a receiving groove 11, and a plurality of carrier plates 2 are placed in the receiving groove 11. A plurality of grounding holes 12 are provided at the bottom of the receiving groove 11, and a plurality of carrier plates 2 are placed at the bottom of the receiving groove 11 corresponding to the grounding holes 12. The test piece 100 is fixedly set in the carrier plate 2, and the carrier plate 2 is filled with a conductive material. A cover plate 4 is detachably installed on the side of the carrier 1 away from the grounding hole 12, and a plurality of fastening members 5 are fixedly installed on the side of the cover plate 4 close to the grounding hole 12, and the fastening members 5 are arranged corresponding to the grounding holes 12. When the cover plate 4 is installed on the carrier 1, the carrier plate can be fastened to the bottom of the receiving groove 11 by the fastening members 5.

[0032] The carrier 1 is generally rectangular, and the receiving slot 11 is generally cylindrical and extends along the length of the carrier 1. The grounding holes 12 are generally rectangular. In this embodiment, there are seven grounding holes 12, one of which is located at the center of the bottom of the receiving slot 11. The remaining six grounding holes 12 are equidistantly spaced along the circumference of the bottom of the receiving slot 11. This allows for the simultaneous loading of multiple carrier plates 2 and, consequently, the simultaneous testing of multiple test pieces 100.

[0033] The cover plate 4 is generally circular, with its diameter matching that of the receiving slot 11, and the cover plate 4 is positioned within the receiving slot 11. Four threaded holes 13 are formed uniformly along the circumference of the receiving slot 11 on the side of the carrier 1, distal from the bottom of the receiving slot 11. The cover plate 4 also has threaded grooves 41 corresponding to the four threaded holes 13. Bolts 6 are threadedly threaded through the threaded holes 13. Bolts 6 consist of a fixedly connected threaded rod and a bolt head. The end of the threaded rod, distal from the bolt head, passes through the threaded holes 13 from the outside of the carrier 1 and is threadedly mounted within the threaded grooves 41, allowing the cover plate 4 to be removably mounted on the carrier 1.

[0034] The abutment member 5 can be configured as a fixed-length column, such as a clamping post. Preferably, in this embodiment, the abutment member 5 is configured as an elastic member, with seven elastic members provided corresponding to the number of grounding holes 12. One end of the elastic member is fixedly connected to the side of the cover plate 4 near the bottom of the receiving slot 11, and the other end of the elastic member is configured to abut the side of the carrier plate 2 away from the bottom of the receiving slot 11. When the cover plate 4 is installed on the carrier 1, the elastic member transitions from its normal state to a compressed state, thereby utilizing the elastic force of the elastic member to abut the carrier plate 2 against the bottom of the receiving slot 11.

[0035] The carrier plate 2 is in the shape of a cylindrical tray. The carrier plate 2 is filled with a conductive material glue 3, and a plurality of through holes 21 are provided at the bottom of the carrier plate 2. The test piece 100 is placed in the conductive material glue 3, thereby improving the overall conductive performance. In this embodiment, the conductive material glue 3 is solid at room temperature and is converted into a liquid after being heated to a certain temperature. The manufacturing process of the carrier plate 2 is as follows: first, an appropriate amount of solid conductive material glue 3 is placed in the carrier plate 2 at room temperature, and then the test piece 100 is placed on the conductive material glue 3; then, the carrier plate 2 with the test piece 100 is transferred to an external heating device, and the conductive material glue 3 is heated and converted into a liquid by heating the heating plate; after the conductive material glue 3 is liquefied, the carrier plate 2 is removed from the heating device and placed on a table. A lower pressing plate is provided at the output end of the external pressing device, and the lower pressing plate presses the test piece 100 downward and abuts against the four sides of the carrier plate 2 to complete the press-fitting. The excess conductive material glue 3 is diverted to the outside of the carrier plate 2 through the plurality of through holes 21. After press-fitting is complete, the external pressing device is removed and the conductive material glue 3 is allowed to cool, allowing the test piece 100 to be stably fixed within the carrier plate 2. When the test piece 100 is fixed within the carrier plate 2, it is positioned on the side away from the bottom of the plate. When the carrier plate 2 is placed within the carrier 1, the open surface of the carrier plate 2 is placed toward the bottom of the receiving groove 11, allowing the test piece 100 to abut the bottom of the receiving groove 11.

[0036] The implementation principle of a fixing device suitable for SIMS test pieces in an embodiment of the present application is as follows: first, the test piece 100 is fixedly set in the carrier plate 2, so that the overall conductivity of the test piece 100 can be improved by setting the conductive material glue 3; then multiple carrier plates 2 are placed in the carrier 1 corresponding to the grounding holes 12 one by one, and then the cover plate 4 is installed to fix the carrier plates 2 through the elastic force of the elastic member. In addition, by setting the carrier plate 2, the force application surface of the fastening member 5 can be increased, so that the test piece 100 is not easily displaced.

[0037] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A fixture for a SIMS specimen, characterized by: include: A carrier (1), wherein a receiving groove (11) is provided on the carrier (1), and a grounding hole (12) is provided at the bottom of the receiving groove (11); A carrier plate (2) is provided in the receiving groove (11) corresponding to the grounding hole (12); the carrier plate (2) is filled with conductive material glue (3); and the test piece (100) is fixed in the conductive material glue (3); the test piece (100) abuts against the bottom of the receiving groove (11); A cover plate (4) is detachably mounted on the carrier (1), and a pressing member (5) for pressing against the carrier plate (2) is provided on a side of the cover plate (4) close to the accommodating groove (11).

2. A fixing device for a SIMS specimen according to claim 1, characterized in that: The pressing member (5) is configured as an elastic member, one end of which is fixedly connected to the cover plate (4), and the other end of which is used to press the carrier plate (2) against the bottom of the accommodating groove (11); when the cover plate (4) is mounted on the carrier (1), the elastic member is in a compressed state.

3. A fixing device for a SIMS specimen according to claim 1, characterized in that: A plurality of grounding holes (12) are provided, and the number of the carrying plates (2) corresponds to the number of the grounding holes (12).

4. A fixing device for a SIMS specimen according to claim 3, characterized in that: The plurality of grounding holes (12) are evenly arranged at the bottom of the accommodating groove (11).

5. The fixing device for SIMS test piece according to claim 1, characterized in that: A threaded hole (13) is provided on the carrier (1), and a threaded groove (41) is provided on the cover plate (4) corresponding to the threaded hole (13). A bolt (6) is threadedly passed through the threaded hole (13). The bolt (6) comprises a threaded rod and a bolt (6) head that are fixedly connected. An end of the threaded rod away from the bolt (6) head passes through the threaded hole (13) and is threadedly fixed in the threaded groove (41).

6. The fixing device for a SIMS specimen according to claim 5, characterized in that: A plurality of thread grooves (41) are symmetrically arranged on the carrier (1) along the circumference of the cover plate (4).

7. The fixing device for a SIMS specimen according to claim 1, characterized in that: The bottom of the carrier plate (2) is provided with a plurality of through holes (21).

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