Furnace tube and vapor deposition device
By adding fixings inside the furnace tube body to limit the movement of the lower auxiliary heat pipe, the problem of the lower auxiliary heat pipe shaking during the cleaning of silicon wafer fragments is solved, and the continuity of production and the safety of the equipment are guaranteed.
Patent Information
- Application Number
- CN202422660599.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-01
- Publication Date
- 2025-09-05
- Estimated Expiration
- 2034-11-01
AI Technical Summary
During the manual cleaning of silicon wafer fragments, the lower auxiliary heat pipe is prone to shaking, causing the silicon wafer fragments to be pushed downwards and raise the lower auxiliary heat pipe, which may cause the paddle and the lower auxiliary heat pipe to interfere with each other and explode, affecting production continuity and equipment safety.
A fixing is added inside the furnace tube body. The fixing is located above the lower auxiliary heating tube to limit its upward movement, prevent the silicon wafer fragments from being excessively raised, and avoid interference between the paddle and the lower auxiliary heating tube.
It effectively prevents the lower auxiliary heating pipe from being crushed and exploded, ensures production continuity and equipment safety, and reduces the risk of equipment damage.
Smart Images
Figure CN223304538U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of photovoltaic cell manufacturing, and in particular to a furnace tube and a vapor deposition device. Background Art
[0002] Coating is a critical step in the manufacturing process of photovoltaic cells. Silicon wafers are typically placed in a graphite boat, which is then placed into the furnace tube of a vapor deposition apparatus using slurry for coating. The furnace tube contains a lower auxiliary heating tube, located on the underside of the graphite boat, to provide heat. During the operation of the vapor deposition apparatus, a large amount of silicon wafer fragments accumulate in the lower part of the furnace tube. Excessive silicon wafer fragments can lead to frequent radio frequency emissions, necessitating regular cleaning of the furnace tube.
[0003] In the related art, the lower auxiliary heat pipe is inserted from the tail end of the furnace tube and directly placed in the furnace tube, and the silicon wafer fragments in the furnace tube are cleaned manually.
[0004] However, in the related art, the lower auxiliary heat tube and the silicon wafer fragments are piled together, and the lower auxiliary heat tube is very easy to shake. In the process of manually cleaning the silicon wafer fragments, it is very easy to push the silicon wafer fragments to the bottom of the lower auxiliary heat tube and raise the lower auxiliary heat tube. When the graphite boat is placed next time, the paddle may interfere with the lower auxiliary heat tube and crush the lower auxiliary heat tube, affecting production continuity and equipment safety.
[0005] Accordingly, this field requires a new technical solution to solve the above problems. Utility Model Content
[0006] In order to solve at least one of the above-mentioned problems in the prior art, that is, to solve the problem that the lower auxiliary heat tube in the related technology is extremely easy to shake, in the process of manually cleaning silicon wafer fragments, it is very easy to push the silicon wafer fragments to the bottom of the lower auxiliary heat tube and raise the lower auxiliary heat tube. When the graphite boat is placed next time, it may cause the paddle to interfere with the lower auxiliary heat tube and crush the lower auxiliary heat tube, affecting the production continuity and equipment safety.
[0007] In a first aspect, the present application provides a furnace tube, comprising: a furnace tube body, including a rear furnace door, the rear furnace door being configured with a first through hole; a lower auxiliary heat pipe, capable of extending into the interior of the furnace tube body through the first through hole; a fixing member, fixedly arranged in the interior of the furnace tube body, wherein when the lower auxiliary heat pipe is installed, the fixing member is located above the lower auxiliary heat pipe, and is used to limit the upward movement of the lower auxiliary heat pipe.
[0008] In some embodiments, the furnace tube further includes a first support rod and a second support rod, and both ends of the fixing member are fixed to the first support rod and the second support rod respectively.
[0009] In some embodiments, the fixing member includes a straight segment, and when the lower auxiliary heat pipe is installed, the lower auxiliary heat pipe is located below the straight segment.
[0010] In some embodiments, the fixing member further includes a first bending segment and a second bending segment respectively provided at both ends of the straight segment, the first bending segment being used to connect to the first support rod, and the second bending segment being used to connect to the second support rod.
[0011] In some embodiments, a first connecting ring is provided at one end of the first bending section away from the straight section, and the first connecting ring is used to be sleeved on the first support rod; and / or a second connecting ring is provided at one end of the second bending section away from the straight section, and the second connecting ring is used to be sleeved on the second support rod.
[0012] In some embodiments, the lower auxiliary heat tube includes a first heating section and a first limiting section, the first limiting section can extend into the interior of the furnace tube body through the first through hole, and the diameter of the first limiting section is larger than the diameter of the first through hole.
[0013] In some embodiments, the furnace tube further includes a sealing member, and the sealing member is disposed at a connection between the first limiting section and the first through hole.
[0014] In some embodiments, the furnace tube further includes an upper auxiliary heating tube, and the upper auxiliary heating tube is located above the lower auxiliary heating tube.
[0015] In some embodiments, the rear furnace door is also constructed with a second through hole, and the upper auxiliary heating tube can extend into the interior of the furnace tube body through the second through hole; the upper auxiliary heating tube includes a second heating section and a second limiting section, and the second limiting section can extend into the interior of the furnace tube body through the second through hole, and the diameter of the second limiting section is larger than the diameter of the second through hole.
[0016] In a second aspect, the present application provides a vapor deposition device, which includes the above-mentioned furnace tube.
[0017] On the premise of adopting the above technical solution, the furnace tube in this application includes a furnace tube body, a lower auxiliary heat tube and a fixing part. The lower auxiliary heat tube extends into the interior of the furnace tube body through the first through hole of the rear furnace door of the furnace tube body to provide heat for the graphite boat. This application adds a fixing part, which is fixedly installed inside the furnace tube body. When the lower auxiliary heat tube is installed, the fixing part is located above the lower auxiliary heat tube. The fixing part can limit the upward movement of the lower auxiliary heat tube to prevent the silicon wafer fragments from excessively raising the lower auxiliary heat tube during the manual cleaning process. This can avoid the interference between the paddle and the lower auxiliary heat tube during the next placement of the graphite boat, thereby preventing the lower auxiliary heat tube from being crushed by the interference, which is conducive to ensuring production continuity and equipment safety. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] The preferred embodiments of the present application are described below with reference to the accompanying drawings, in which:
[0019] Figure 1 It is a structural diagram of the furnace tube in this application;
[0020] Figure 2 yes Figure 1 A schematic structural diagram of the rear end of the middle furnace tube;
[0021] Figure 3 It is a structural diagram of the rear furnace door in this application;
[0022] Figure 4 yes Figure 1 Schematic diagram of the cross-sectional structure of the middle furnace tube;
[0023] Figure 5 yes Figure 1 A partial enlarged schematic diagram of the middle furnace tube.
[0024] Reference numerals:
[0025] 100. Furnace tube body; 101. Rear furnace door; 102. First through-hole; 103. First support rod; 104. Second support rod; 105. Second through-hole; 200. Lower auxiliary heat pipe; 201. First heating section; 202. First limiting section; 300. Fixing piece; 301. Straight section; 3011. First connecting ring; 302. First bending section; 303. Second bending section; 3031. Second connecting ring; 400. Upper auxiliary heat pipe. DETAILED DESCRIPTION
[0026] The preferred embodiments of the present application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present application and are not intended to limit the scope of protection of the present application. Those skilled in the art can make adjustments as needed to adapt to specific application scenarios. Such changes in application scenarios do not deviate from the basic principles of the present application and fall within the scope of protection of the present application.
[0027] In the embodiments of the present application, the terms "upper", "lower", "inner", "middle", "outer", "front", "back" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. These terms are primarily intended to better describe the embodiments of the present application and its embodiments, and are not intended to limit the indicated devices, elements or components to having a specific orientation, or to be constructed and operated in a specific orientation. Moreover, in addition to being used to indicate orientations or positional relationships, some of the above terms may also be used to indicate other meanings. For example, the term "upper" may also be used to indicate a certain dependency or connection relationship in certain circumstances. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood based on the specific circumstances.
[0028] It should be noted that, in the description of this preferred embodiment, unless otherwise expressly specified or limited, the terms "connected" and "connected" should be understood in a broad sense. For example, they can refer to mechanical or electrical connections, direct connections, indirect connections through an intermediate medium, or connections within two components. These are not to be construed as limitations on this application. In addition, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.
[0029] Currently, PERC (Passivated Emitter and Rear Cell) and Topcon (Tunnel Oxide Passivated Contact) cell coating is typically performed in a vapor deposition furnace. Silicon wafers are placed in a graphite boat, which is then placed into the furnace using slurry for coating.
[0030] The furnace tubes are equipped with support rods, upper and lower auxiliary heating tubes. The support rods secure and support the graphite boat, while the upper and lower auxiliary heating tubes, located on the upper and lower sides of the graphite boat, respectively, provide heat to the furnace tubes. During the operation of the vapor deposition device, a large amount of silicon wafer fragments are generated in the lower part of the furnace tubes. Excessive silicon wafer fragments can lead to frequent radio frequency emissions, so the furnace tubes must be regularly cleaned of silicon wafer fragments.
[0031] In the prior art, the lower auxiliary heat pipe is inserted from the rear end of the furnace tube and placed directly inside the tube, and the silicon wafer fragments in the tube are manually cleaned. However, in the prior art, the lower auxiliary heat pipe and the silicon wafer fragments accumulate together, and the lower auxiliary heat pipe is very easy to shake. During the manual cleaning process, the silicon wafer fragments can easily be pushed under the lower auxiliary heat pipe, causing it to be raised. When the graphite boat is placed again, the paddle may crush the lower auxiliary heat pipe, seriously affecting production continuity and equipment safety.
[0032] The present application provides a furnace tube and a vapor deposition device, which can limit the upward movement of the lower auxiliary heat tube, prevent silicon wafer fragments from excessively raising the lower auxiliary heat tube, thereby avoiding interference between the paddle and the lower auxiliary heat tube and crushing the lower auxiliary heat tube, which is beneficial to ensuring production continuity and equipment safety.
[0033] In a first aspect, the present application provides a furnace tube.
[0034] Combine Figure 1 、 Figure 2 and Figure 3 As shown, the furnace tube provided in this application includes a furnace tube body 100 , a lower auxiliary heat tube 200 and a fixing member 300 .
[0035] The furnace tube body 100 includes a rear furnace door 101 , and the rear furnace door 101 is configured with a first through hole 102 .
[0036] The lower auxiliary heat pipe 200 can extend into the interior of the furnace tube body 100 through the first through hole 102 .
[0037] The fixing member 300 is fixed inside the furnace tube body 100 . When the lower auxiliary heat pipe 200 is installed, the fixing member 300 is located above the lower auxiliary heat pipe 200 to limit the upward movement of the lower auxiliary heat pipe 200 .
[0038] Under the premise of adopting the above technical solution, the furnace tube in this application includes a furnace tube body 100, a lower auxiliary heat pipe 200 and a fixing member 300. The lower auxiliary heat pipe 200 extends into the interior of the furnace tube body 100 through the first through hole 102 of the rear furnace door 101 of the furnace tube body 100 to provide heat for the graphite boat. This application adds a fixing member 300, which is fixedly installed inside the furnace tube body 100. When the lower auxiliary heat pipe 200 is installed, the fixing member 300 is located above the lower auxiliary heat pipe 200. The fixing member 300 can limit the upward movement of the lower auxiliary heat pipe 200, preventing the silicon wafer fragments from excessively raising the lower auxiliary heat pipe 200 during the manual cleaning process. This can prevent the paddle from interfering with the lower auxiliary heat pipe 200 and causing the lower auxiliary heat pipe 200 to explode when the graphite boat is placed next time, which is beneficial to ensuring production continuity and equipment safety.
[0039] It is understandable that the furnace tube body 100 further includes a front furnace door (not shown in the figure). The front furnace door does not involve the improvement points of this solution and is not specifically limited here.
[0040] Optionally, the furnace tube body 100 is a cylinder with open ends, the rear furnace door 101 is detachably provided at the rear end of the furnace tube body 100 , and the front furnace door is detachably provided at the front end of the furnace tube body.
[0041] Optionally, combined Figure 1As shown, the furnace tube includes two lower auxiliary heat pipes 200, and the two lower auxiliary heat pipes 200 are symmetrically arranged below the fixing member 300. This is conducive to improving the uniformity of heating.
[0042] In some embodiments, combined Figure 1 and Figure 4 As shown, the furnace tube also includes a first support rod 103 and a second support rod 104, with the ends of the fixing member 300 respectively fixed to the first support rod 103 and the second support rod 104. The first support rod 103 and the second support rod 104 are inherent to the furnace tube structure and can support and secure the graphite boat, facilitating the coating process. By securing the ends of the fixing member 300 to the first support rod 103 and the second support rod 104, the fixing member 300 is effectively secured and structural changes to the furnace tube are reduced, eliminating the need for additional or subtracted furnace tube structure. This helps minimize the impact on the overall furnace tube structure and saves costs.
[0043] In addition, the fixing member 300 provided in the present application is arranged below the first support rod 103 and the second support rod 104, and will not occupy the radial space of the furnace tube and the space above the first support rod 103 and the second support rod 104, will not interfere with the installation of the graphite boat, and does not need to increase the inner diameter of the furnace tube.
[0044] Combine Figure 1 As shown, the first support rod 103 and the second support rod 104 are symmetrically arranged on both sides of the lower auxiliary heat pipe 200 and are located above the lower auxiliary heat pipe 200.
[0045] Regarding the fixing member 300.
[0046] In some embodiments, combined Figure 5 As shown, the fixing member 300 includes a straight section 301 . When the lower auxiliary heat pipe 200 is installed, the lower auxiliary heat pipe 200 is located below the straight section 301 .
[0047] By providing the straight section 301, the lower auxiliary heat pipe 200 is positioned below the straight section 301, effectively limiting the upward movement of the lower auxiliary heat pipe 200. If the fixing member 300 above the lower auxiliary heat pipe 200 were configured as an arcuate or inclined section, the accumulation of silicon wafer fragments and external forces would cause the lower auxiliary heat pipe 200 to move along the arcuate or inclined section, thus failing to limit the lower auxiliary heat pipe 200's vertical movement.
[0048] In some embodiments, the distance between the straight segment 301 and the lower auxiliary heat pipe 200 ranges from 5 mm to 2 cm. For example, the distance between the straight segment 301 and the lower auxiliary heat pipe 200 ranges from 5 mm to 2 cm.
[0049] By limiting the distance between the straight section 301 and the lower auxiliary heat pipe 200 to the above range, it is possible to ensure that the lower auxiliary heat pipe 200 can smoothly extend into the lower side of the straight section 301, and avoid the distance between the straight section 301 and the lower auxiliary heat pipe 200 being too large to interfere with the graphite boat.
[0050] In some embodiments, combined Figure 5 As shown, the fixing member 300 also includes a first bent section 302 and a second bent section 303, respectively provided at both ends of the straight section 301. The first bent section 302 is used to connect to the first support rod 103, and the second bent section 303 is used to connect to the second support rod 104. The straight section 301 serves to restrict the upward movement of the lower auxiliary heat pipe 200. The provision of the first bent section 302 and the second bent section 303 facilitates securing the straight section 301 to the first support rod 103 and the second support rod 104.
[0051] In some embodiments, combined Figure 5 As shown, the first curved section 302 and the second curved section 303 are both inclined strip plates. The first end of the first curved section 302 is connected to the first end of the straight section 301, and the second end of the first curved section 302 extends obliquely upward and is connected to the first support rod 103. The first end of the second curved section 303 is connected to the second end of the straight section 301, and the second end of the second curved section 303 is connected to the second support rod 104.
[0052] In some embodiments, combined Figure 5 As shown, a first connecting ring 3011 is provided at one end of the first bent section 302 away from the straight section 301. The first connecting ring 3011 is configured to be sleeved onto the first support rod 103. Sleeving the first connecting ring 3011 onto the first support rod 103 connects the first bent section 302 to the first support rod 103. This provides a simple structure, convenient installation, easy processing, and no interference with the graphite boat.
[0053] In some embodiments, combined Figure 5 As shown, a second connecting ring 3031 is provided at one end of the second bent section 303 away from the straight section 301. The second connecting ring 3031 is configured to be sleeved onto the second support rod 104. Sleeving the second connecting ring 3031 onto the second support rod 104 connects the second bent section 303 to the second support rod 104. This provides a simple structure, convenient installation, easy processing, and no interference with the graphite boat.
[0054] In the related art, the auxiliary heating tube (including the upper auxiliary heating tube and the lower auxiliary heating tube) is a cylindrical auxiliary heating tube, and the diameter of the auxiliary heating tube is a fixed value. Therefore, when manually replacing the auxiliary heating tube, the auxiliary heating tube and the rear furnace door of the furnace tube body must be firmly fixed with a clamping ring, otherwise the sealing between the auxiliary heating tube and the rear furnace door may be poor. During the process of evacuating the furnace tube for leak detection, the auxiliary heating tube may be sucked into the interior of the furnace tube body under the action of vacuum and damaged.
[0055] To address this problem, the present application sets the lower auxiliary heating tube 200 and the upper auxiliary heating tube 400 as variable diameter auxiliary heating tubes, thereby preventing the auxiliary heating tubes from being sucked into the interior of the furnace tube body and damaged under the action of vacuum.
[0056] In some embodiments, combined Figure 4 As shown, the lower auxiliary heat pipe 200 includes a first heating section 201 and a first limiting section 202. The first limiting section 202 can extend into the interior of the furnace tube body 100 through the first through hole 102. The diameter of the first limiting section 202 is larger than the diameter of the first through hole 102. In other words, the diameter of the first limiting section 202 is larger than the diameter of the first heating section 201.
[0057] With this arrangement, the diameter of the first limiting section 202 is larger than the diameter of the first through hole 102. Under the action of the negative pressure inside the furnace tube body 100, the first limiting section 202 abuts against the rear furnace door 101. Even if the lower auxiliary heat pipe 200 is not firmly fixed, the lower auxiliary heat pipe 200 will not be sucked into the furnace tube body 100, which can reduce the chance of damage to the lower auxiliary heat pipe 200.
[0058] In some embodiments, the furnace tube further includes a seal (not shown), which is provided at the connection between the first limiting section 202 and the first through hole 102. The provision of the seal helps ensure the sealing of the lower auxiliary heat pipe 200 and the first through hole 102.
[0059] In some embodiments, the furnace tube further includes an upper auxiliary heat pipe 400, which is located above the lower auxiliary heat pipe 200. The rear furnace door 101 is also configured with a second through-hole 105, through which the upper auxiliary heat pipe 400 can extend into the interior of the furnace tube body 100. The upper auxiliary heat pipe includes a second heating section and a second limiting section (not shown in the figure). The second limiting section can extend into the interior of the furnace tube body 100 through the second through-hole. The diameter of the second limiting section is larger than the diameter of the second through-hole. In other words, the diameter of the second limiting section is larger than the diameter of the second heating section.
[0060] With this arrangement, the diameter of the second limiting section is larger than the diameter of the second through hole 105. Under the action of the negative pressure inside the furnace tube body 100, the second limiting section abuts against the rear furnace door 101. Even if the upper auxiliary heat pipe 400 is not firmly fixed, the upper auxiliary heat pipe 400 will not be sucked into the interior of the furnace tube body 100, which can reduce the chance of damage to the upper auxiliary heat pipe 400.
[0061] During the installation of the furnace tube, the first connecting ring 3011 and the second connecting ring 3031 of the fixing member 300 are first sleeved onto the first support rod 103 and the second support rod 104, respectively. Then, the first limiting section 202 of the lower auxiliary heat pipe 200 is held and the first heating section 201 of the lower auxiliary heat pipe 200 is inserted under the fixing member 300. When the lower auxiliary heat pipe 200 is installed, a certain gap is left between the straight section 301 of the fixing member 300 and the lower auxiliary heat pipe 200, which facilitates the insertion of the lower auxiliary heat pipe 200 under the fixing member 300.
[0062] In a second aspect, the present application provides a vapor deposition device.
[0063] The vapor deposition device provided in the present application includes the above-mentioned furnace tube.
[0064] On the premise of adopting the above-mentioned technical solution, the furnace tube of the vapor deposition device in this application is additionally provided with a fixing part 300, which is fixedly installed inside the furnace tube body 100. When the lower auxiliary heat tube 200 is installed, the fixing part 300 is located above the lower auxiliary heat tube 200. The fixing part 300 can limit the upward movement of the lower auxiliary heat tube 200 to prevent the silicon wafer fragments from excessively raising the lower auxiliary heat tube 200 during the manual cleaning process. This can avoid the paddle and the lower auxiliary heat tube 200 interfering with each other and crushing the lower auxiliary heat tube 200 when the graphite boat is placed next time, which is beneficial to ensure the production continuity and equipment safety of the vapor deposition device.
[0065] Thus far, the technical solutions of the present application have been described in conjunction with the accompanying drawings. However, it is readily understood by those skilled in the art that the scope of protection of the present application is obviously not limited to these specific embodiments. Without departing from the principles of the present application, those skilled in the art may make equivalent changes or substitutions to the relevant technical features, and the technical solutions after such changes or substitutions will fall within the scope of protection of the present application.
Claims
1. A furnace tube, characterized in that: The furnace tube comprises: The furnace tube body includes a rear furnace door, wherein the rear furnace door is configured with a first through hole; a lower auxiliary heat pipe, capable of extending into the interior of the furnace tube body through the first through hole; The fixing part is fixed inside the furnace tube body. When the lower auxiliary heat pipe is installed, the fixing part is located above the lower auxiliary heat pipe to limit the upward movement of the lower auxiliary heat pipe.
2. The furnace tube according to claim 1, characterized in that The furnace tube further includes a first support rod and a second support rod, and both ends of the fixing member are fixed to the first support rod and the second support rod respectively.
3. The furnace tube according to claim 2, characterized in that The fixing member includes a straight section. When the lower auxiliary heat pipe is installed, the lower auxiliary heat pipe is located below the straight section.
4. The furnace tube according to claim 3, characterized in that The fixing member further includes a first bending section and a second bending section respectively provided at both ends of the straight section, the first bending section being used to connect with the first support rod, and the second bending section being used to connect with the second support rod.
5. The furnace tube according to claim 4, characterized in that A first connecting ring is provided at one end of the first bending section away from the straight section, and the first connecting ring is used to be sleeved on the first support rod; and / or a second connecting ring is provided at one end of the second bending section away from the straight section, and the second connecting ring is used to be sleeved on the second support rod.
6. The furnace tube according to claim 1, characterized in that The lower auxiliary heat pipe includes a first heating section and a first limiting section. The first limiting section can extend into the interior of the furnace tube body through the first through hole. The diameter of the first limiting section is larger than the diameter of the first through hole.
7. The furnace tube according to claim 6, characterized in that The furnace tube further includes a sealing member, which is arranged at the connection between the first limiting section and the first through hole.
8. The furnace tube according to any one of claims 1 to 7, characterized in that The furnace tube further includes an upper auxiliary heating tube, which is located above the lower auxiliary heating tube.
9. The furnace tube according to claim 8, characterized in that The rear furnace door is further configured with a second through hole, and the upper auxiliary heat pipe can extend into the interior of the furnace tube body through the second through hole; The upper auxiliary heat pipe includes a second heating section and a second limiting section. The second limiting section can extend into the interior of the furnace tube body through the second through hole. The diameter of the second limiting section is larger than the diameter of the second through hole.
10. A vapor deposition device, characterized in that: The vapor deposition device comprises the furnace tube according to any one of claims 1 to 9.