Furnace body cooling structure of CVD (Chemical Vapor Deposition) reaction furnace

Abstract

The utility model provides a CVD (chemical vapor deposition) reaction furnace body cooling structure, and particularly relates to the technical field of CVD reaction furnaces, the CVD reaction furnace body cooling structure comprises a reaction furnace lower furnace body and a reaction furnace upper furnace body, when the CVD reaction furnace body cooling structure is used, a cooling liquid pipeline is connected with a water inlet valve, and then the water inlet valve is opened, so that cooling liquid flows into a cooling pipe; the shell is cooled through the cooling pipe, and then the drain valve is opened, so that the heated cooling liquid is discharged, the reaction furnace lower furnace body and the reaction furnace upper furnace body can be better cooled, the motor is started, the motor rotates forwards, the gear at one end of the motor is driven to rotate, and the gear is connected with the rack in a meshed mode, so that the cooling efficiency is improved. When the upper furnace body of the reaction furnace is lifted, the limiting block is connected with the sliding plate in a sliding and penetrating mode, it can be guaranteed that the upper furnace body of the reaction furnace ascends and descends stably, the limiting effect is achieved, and the upper furnace body of the reaction furnace can be closed when the motor rotates reversely.

Description

Technical Field

[0001] The utility model relates to the technical field of CVD reactors, in particular to a furnace body cooling structure of a CVD reactor. Background Art

[0002] A CVD reactor is a high-temperature tubular furnace used for chemical vapor deposition experiments. It can be heated under vacuum or protective atmosphere and is widely used in fields such as material preparation and thin film coating. However, the shell of a CVD reactor can become overheated during use, which can easily cause injury to workers when manually opening and closing the shell, while allowing the reactor to cool down can affect work efficiency. Utility Model Content

[0003] The purpose of the present utility model is to provide a CVD reactor body cooling structure to solve the problem raised in the above-mentioned background technology that the shell temperature of the CVD reactor will become high after use, which may easily cause harm to the staff when manually opening and closing the shell, and the static cooling will affect the work efficiency.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a CVD reactor furnace body cooling structure, comprising a reactor lower furnace body and a reactor upper furnace body, the reactor upper furnace body being arranged on the top of the reactor lower furnace body, the inner sides of the reactor lower furnace body and the reactor upper furnace body are both provided with fixed grooves, the inner sides of the fixed grooves of the reactor lower furnace body and the reactor upper furnace body are both provided with cooling structures, the cooling structure comprising a cooling pipe, a connecting pipe, a first connecting pipe, a water inlet valve, a second connecting pipe and a drain valve, the cooling pipe being arranged in the inner cavity of the fixed groove, a plurality of cooling pipes are provided, one end of the plurality of cooling pipes are connected by a connecting pipe, one end of the connecting pipe is connected to the first connecting pipe, one end of the first connecting pipe is connected to the water inlet valve, the outer side of the cooling pipe on the far right is connected to the second connecting pipe, one end of the second connecting pipe is connected to the drain valve, and a switch mechanism is provided on the outer sides of the reactor lower furnace body and the reactor upper furnace body.

[0005] Preferably, the cooling pipes are arranged in a U-shaped structure, and the cooling pipes are distributed at equal intervals on the inner wall of the fixing groove.

[0006] Preferably, the switching mechanism includes a support plate, a motor, a gear, a rack, a limit frame, a limit block and a slide plate. The outer side of the lower furnace body of the reactor is fixedly connected with a support plate, the motor is fixedly connected to the top of the support plate, one end of the output shaft of the motor is connected to the gear, the outer side of the upper furnace body of the reactor is fixedly connected with a rack, the outer side of the lower furnace body of the reactor is fixedly connected with a limit frame, the back of the lower furnace body of the reactor is fixedly connected with a limit block, and the back of the upper furnace body of the reactor is fixedly connected with a slide plate.

[0007] Preferably, the gear is meshed with the rack, and the outer wall of the rack is in contact with the inner wall of the limiting frame.

[0008] Preferably, two racks are provided, and the two racks are fixedly connected to both sides of the upper furnace body of the reaction furnace respectively.

[0009] Preferably, the limit block is slidably connected to the slide plate.

[0010] Compared with the prior art, the beneficial effects of the present invention are as follows: when using the CVD reactor furnace body cooling structure, the coolant pipe is connected to the water inlet valve, and then the water inlet valve is opened to allow the coolant to flow into the cooling pipe, and the shell is cooled and cooled through the cooling pipe, and then the drain valve is opened to discharge the heated coolant, so that the lower furnace body and the upper furnace body of the reactor can be better cooled. By starting the motor, the motor rotates forward, driving the gear at one end of the motor to rotate, and the gear is meshed with the rack, so that the transmission rack slides in the limit frame, so that the upper furnace body of the reactor can be lifted. When the upper furnace body of the reactor is lifted, the limit block and the slide plate are slid through and connected, so that the upper furnace body of the reactor can be ensured to be lifted and lowered stably, and a limiting effect can be achieved. When the motor is reversed, the upper furnace body of the reactor can be closed. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 This is a schematic diagram of the appearance structure of the utility model;

[0012] Figure 2 This is a schematic diagram of the cooling structure of the utility model;

[0013] Figure 3 This is a schematic diagram of the structure of the rack and the limit frame in cooperation with each other in the utility model;

[0014] Figure 4 This is a schematic diagram of the limit block and slide structure of the utility model.

[0015] In the figure: 1. lower furnace body of the reactor; 2. upper furnace body of the reactor; 3. fixing groove; 4. cooling structure; 401. cooling pipe; 402. connecting pipe; 403. first connecting pipe; 404. water inlet valve; 405. second connecting pipe; 406. drain valve; 5. switching mechanism; 501. supporting plate; 502. motor; 503. gear; 504. rack; 505. limit frame; 506. limit block; 507. slide plate. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0017] It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the conditions under which this application can be implemented. Therefore, they have no substantive technical significance. Any structural modification, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed in this application without affecting the efficacy and purpose that can be achieved by this application.

[0018] Example

[0019] See also Figure 1-4 The utility model discloses a CVD reactor body cooling structure: it includes a reactor lower body 1 and a reactor upper body 2, the reactor upper body 2 is arranged on the top of the reactor lower body 1, the reactor lower body 1 and the reactor upper body 2 are both provided with a fixed groove 3 on the inner side, the reactor lower body 1 and the reactor upper body 2 are both provided with a cooling structure 4 on the inner side of the fixed groove 3, the cooling structure 4 includes a cooling pipe 401, a connecting pipe 402, a first connecting pipe 403, a water inlet valve 404, a second connecting pipe 405 and a drain valve 406, the cooling pipe 401 is arranged in the inner cavity of the fixed groove 3, a plurality of cooling pipes 401 are provided, one end of the plurality of cooling pipes 401 is connected through the connecting pipe 402, and the connecting pipe 403 is provided with a cooling structure 4. 2 is connected to a first connecting pipe 403, one end of the first connecting pipe 403 is connected to a water inlet valve 404, the outer side of the rightmost cooling pipe 401 is connected to a second connecting pipe 405, one end of the second connecting pipe 405 is connected to a drain valve 406, and a switch mechanism 5 is provided on the outer side of the lower furnace body 1 of the reactor and the upper furnace body 2 of the reactor. When in use, the coolant pipeline is connected to the water inlet valve 404, and then the water inlet valve 404 is opened to allow the coolant to flow into the cooling pipe 401, and the shell is cooled and lowered through the cooling pipe 401, and then the drain valve 406 is opened to discharge the heated coolant, so that the lower furnace body 1 of the reactor and the upper furnace body 2 of the reactor can be better cooled.

[0020] In order to facilitate cooling of the lower furnace body 1 and the upper furnace body 2 of the reaction furnace, the cooling pipes 401 are arranged in a U-shaped structure, and the cooling pipes 401 are distributed at equal intervals on the inner wall of the fixing groove 3 .

[0021] In order to facilitate opening the upper furnace body 2 of the reactor, the switch mechanism 5 includes a support plate 501, a motor 502, a gear 503, a rack 504, a limit frame 505, a limit block 506 and a slide plate 507. The outer side of the lower furnace body 1 of the reactor is fixedly connected with the support plate 501, the motor 502 is fixedly connected to the top of the support plate 501, one end of the output shaft of the motor 502 is connected to the gear 503, the outer side of the upper furnace body 2 of the reactor is fixedly connected to the rack 504, the outer side of the lower furnace body 1 of the reactor is fixedly connected to the limit frame 505, the back of the lower furnace body 1 of the reactor is fixedly connected to the limit block 506, and the upper furnace body 2 of the reactor is fixedly connected to the rack 504. The back of the upper furnace body 2 of the reactor is fixedly connected to the slide plate 507. By starting the motor 502, the motor 502 rotates forward, driving the gear 503 at one end of the motor 502 to rotate, and the gear 503 is engaged with the rack 504, so that the transmission rack 504 slides in the limit frame 505, so that the upper furnace body 2 of the reactor can be raised. When the upper furnace body 2 of the reactor is raised, the limit block 506 is slidably connected with the slide plate 507, which can ensure the stable lifting and lowering of the upper furnace body 2 of the reactor and play a limiting effect. When the motor 502 is reversed, the upper furnace body 2 of the reactor can be closed.

[0022] In order to facilitate opening of the upper furnace body 2 of the reactor, the gear 503 is meshed and connected with the rack 504 , and the outer wall of the rack 504 is in contact with the inner wall of the limiting frame 505 .

[0023] In order to facilitate opening of the upper furnace body 2 of the reaction furnace, two racks 504 are provided, and the two racks 504 are fixedly connected to both sides of the upper furnace body 2 of the reaction furnace respectively.

[0024] In order to facilitate opening of the upper furnace body 2 of the reactor and ensure stability, the limiting block 506 and the slide plate 507 are slidably connected.

[0025] Working principle: When in use, connect the coolant pipeline to the water inlet valve 404, then open the water inlet valve 404, so that the coolant flows into the cooling pipe 401, and cools the shell through the cooling pipe 401, and then open the drain valve 406 to discharge the heated coolant, so that the lower furnace body 1 and the upper furnace body 2 of the reactor can be better cooled. By starting the motor 502, the motor 502 rotates forward, driving the gear 503 at one end of the motor 502 to rotate, and the gear 503 is meshed with the rack 504, so that the transmission rack 504 slides in the limit frame 505, so that the upper furnace body 2 of the reactor can be raised. When the upper furnace body 2 of the reactor is raised, the limit block 506 and the slide plate 507 are slid through and connected, so that the upper furnace body 2 of the reactor can be ensured to be lifted and lowered stably, and a limiting effect is achieved. When the motor 502 is reversed, the upper furnace body 2 of the reactor can be closed.

[0026] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these implementation rules without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A CVD reactor body cooling structure, comprising a reactor lower body (1) and a reactor upper body (2), characterized in that: The upper furnace body (2) of the reaction furnace is arranged on the top of the lower furnace body (1) of the reaction furnace. The inner sides of the lower furnace body (1) and the upper furnace body (2) of the reaction furnace are both provided with a fixing groove (3). The inner sides of the fixing groove (3) of the lower furnace body (1) and the upper furnace body (2) of the reaction furnace are both provided with a cooling structure (4). The cooling structure (4) includes a cooling pipe (401), a connecting pipe (402), a first connecting pipe (403), a water inlet valve (404), a second connecting pipe (405) and a drain valve (406). The cooling pipe (401) is arranged inside the fixing groove (3). The cooling tube (401) is provided with a plurality of cooling tubes (401), one end of each of the plurality of cooling tubes (401) is connected via a connecting tube (402), one end of the connecting tube (402) is connected to a first connecting tube (403), one end of the first connecting tube (403) is connected to a water inlet valve (404), the outer side of the rightmost cooling tube (401) is connected to a second connecting tube (405), one end of the second connecting tube (405) is connected to a drain valve (406), and a switch mechanism (5) is provided on the outer side of the lower furnace body (1) and the upper furnace body (2) of the reaction furnace.

2. The CVD reactor body cooling structure according to claim 1, characterized in that: The cooling pipes (401) are arranged in a U-shaped structure, and the cooling pipes (401) are distributed at equal intervals on the inner wall of the fixing groove (3).

3. The CVD reactor body cooling structure according to claim 1, characterized in that: The switch mechanism (5) comprises a supporting plate (501), a motor (502), a gear (503), a rack (504), a limiting frame (505), a limiting block (506) and a slide plate (507); the outer side of the lower furnace body (1) of the reaction furnace is fixedly connected to the supporting plate (501); the motor (502) is fixedly connected to the top of the supporting plate (501); one end of the output shaft of the motor (502) is connected to the gear (503); the outer side of the upper furnace body (2) of the reaction furnace is fixedly connected to the rack (504); the outer side of the lower furnace body (1) of the reaction furnace is fixedly connected to the limiting frame (505); the back of the lower furnace body (1) of the reaction furnace is fixedly connected to the limiting block (506); and the back of the upper furnace body (2) of the reaction furnace is fixedly connected to the slide plate (507).

4. The CVD reactor body cooling structure according to claim 3, characterized in that: The gear (503) is meshedly connected with the rack (504), and the outer wall of the rack (504) is in contact with the inner wall of the limiting frame (505).

5. The CVD reactor body cooling structure according to claim 3, characterized in that: Two racks (504) are provided, and the two racks (504) are respectively fixedly connected to both sides of the upper furnace body (2) of the reaction furnace.

6. The CVD reactor body cooling structure according to claim 3, characterized in that: The limiting block (506) is slidably connected to the slide plate (507).

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