Boron trichloride production and storage device

Abstract

The utility model discloses a boron trichloride production and storage device, which relates to the technical field of boron trichloride production and comprises a storage tank, an air inlet is arranged at the top of the storage tank, an air outlet is arranged at the bottom of the storage tank, two fixing frames are symmetrically arranged at the bottom of the storage tank, and sealing mechanisms are arranged at the upper end of an air inlet pipe and the lower end of an air outlet pipe. The sealing mechanism comprises a mounting pipe; the two fixing frames are arranged at the bottom of the storage tank, so that the storage tank can be placed on the ground more stably, the storage tank is prevented from making direct contact with the ground, the arc-shaped connecting plate is arranged at the contact position of the supporting frame and the storage tank, and the fixing frames are attached to the storage tank more tightly. And meanwhile, sealing mechanisms are arranged at the gas inlet pipe and the gas outlet pipe, and a mounting pipe, a first sealing gasket, a second sealing gasket, a sealing convex strip, a locking sleeve, a rubber ring and a rubber sealing column are matched for use, so that the gas inlet pipe and the gas outlet pipe are sealed, and the boron trichloride gas in the storage tank is prevented from overflowing from the gas inlet pipe and the gas outlet pipe.

Description

Technical Field

[0001] The utility model relates to the technical field of boron trichloride production, in particular to a boron trichloride production and storage device. Background Art

[0002] Boron trichloride is a hazardous chemical, mainly used as a doping source for semiconductor silicon or an organic synthesis catalyst, and is also used to produce high-purity boron or organoboron. Inhalation, oral administration or absorption through the skin is harmful to the human body and can cause chemical burns. In addition, it is also harmful to the environment, so it is necessary to properly store the boron trichloride gas produced by production. Boron trichloride is generally stored in a storage tank, but some existing storage tanks are horizontal structures and cannot be directly placed on the ground for use. In addition, when there is no need to pass boron trichloride gas into the storage tank through the air inlet pipe and when there is no need to discharge the boron trichloride gas in the storage tank through the air outlet pipe, the boron trichloride gas easily overflows from the air inlet and exhaust ports, causing impact and harm to the external environment and staff. Utility Model Content

[0003] In order to solve the problems of the prior art, the utility model provides a boron trichloride production and storage device, comprising a storage tank for storing boron trichloride gas, wherein the top of the storage tank is provided with an air inlet, the air inlet is connected to an air inlet pipe, and the bottom of the storage tank is provided with an air outlet, the air outlet is connected to an air outlet pipe;

[0004] Two fixing frames for supporting the storage tank are symmetrically provided at the bottom of the storage tank, and the tops of the two fixing frames are fixedly connected with arc-shaped connecting plates that can adapt to the outer surface of the storage tank;

[0005] The upper end of the air inlet pipe and the lower end of the air outlet pipe are both provided with a sealing mechanism; the sealing mechanism includes a mounting tube, and the mounting tube is fixedly sleeved on the outer surface of the air inlet pipe and the outer surface of the air outlet pipe;

[0006] A first sealing gasket is provided on the upper surface of the mounting tube, a sealing groove is opened on the upper surface of the first sealing gasket, the upper surface of the first sealing gasket is in contact with a second sealing gasket, a sealing ridge is fixedly connected to the bottom of the second sealing gasket, one end of the sealing ridge is in contact with the inside of the sealing groove, a locking sleeve is provided at one end of the second sealing gasket, and one end of the locking sleeve is threadedly sleeved on the outer surface of the mounting tube.

[0007] A further solution is that the bottom of the arc-shaped connecting plate is fixedly connected to the upper ends of several support plates, and the lower ends of several support plates are fixedly connected to the bottom upper surface of the fixing frame.

[0008] A further solution is that a buffer pad is bonded to the upper surface of the arc-shaped portion of the arc-shaped connecting plate, and the shape of the buffer pad is adapted to the shape of the arc-shaped portion of the arc-shaped connecting plate.

[0009] A further solution is that grooves are provided on the upper surface of the mounting tube and the inner wall of the locking sleeve, rubber rings are interference fit inside the two grooves, and one end of the two rubber rings is fixedly connected to the first sealing gasket and the second sealing gasket respectively.

[0010] A further solution is that the inner walls of the air inlet pipe and the air outlet pipe are fixedly connected with sealing rings, the bottom end of the second sealing gasket is fixedly connected with a rubber sealing column, and the bottom end of the rubber sealing column contacts the surface of the sealing ring.

[0011] A further solution is that both side surfaces of the sealing ridge are fixedly connected to limiting blocks, two limiting grooves are provided inside the sealing groove, and one end of the limiting block is arranged inside the limiting groove.

[0012] A further solution is that the cross-sections of the groove and the rubber ring are both T-shaped.

[0013] Beneficial effects of the utility model:

[0014] The utility model provides two fixing frames at the bottom of the storage tank, so that the storage tank can be placed on the ground more stably and avoids direct contact between the storage tank and the ground. Since the storage tank of the utility model is a horizontal structure and cylindrical, an arc-shaped connecting plate is used at the contact point between the support frame and the storage tank, so that the fixing frame and the storage tank fit more closely, so that the storage tank can be better placed on the two fixing frames.

[0015] The utility model provides sealing mechanisms at the air inlet pipe and the air outlet pipe, and seals the air inlet pipe and the air outlet pipe by using a mounting pipe, a first sealing gasket, a second sealing gasket, a sealing ridge, a locking sleeve, a rubber ring and a rubber sealing column to prevent the boron trichloride gas inside the storage tank from overflowing from the air inlet pipe and the air outlet pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic structural diagram of a storage tank provided by an embodiment of the present utility model placed on a fixed frame from a front view;

[0017] Figure 2 A schematic diagram of the three-dimensional structure of a fixing frame provided in an embodiment of the present utility model;

[0018] Figure 3 A schematic structural diagram of the explosion of the sealing mechanism provided in an embodiment of the present utility model;

[0019] Figure 4 A schematic diagram of the structure of a fixing frame provided in a front view according to an embodiment of the present utility model;

[0020] Figure 5 for Figure 3 The schematic diagram of the structure after enlarging at A in the middle;

[0021] The accompanying drawings are marked as follows: 1-storage tank; 10-inlet pipe; 11-outlet pipe; 2-fixing frame; 20-arc-shaped connecting plate; 21-support plate; 22-buffer pad; 30-mounting tube; 31-first sealing pad; 32-sealing groove; 33-second sealing groove; 34-sealing ridge; 35-locking sleeve; 36-limiting block; 37-limiting groove; 40-groove; 41-rubber ring; 42-sealing ring; 43-rubber sealing column. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present invention.

[0023] like Figure 1-5 As shown, one embodiment of the present invention discloses a boron trichloride production and storage device, comprising a storage tank 1 for storing boron trichloride gas, wherein the top of the storage tank 1 is provided with an air inlet connected to an air inlet pipe 10, and the bottom of the storage tank 1 is provided with an air outlet connected to an air outlet pipe 11;

[0024] The above arrangement in this embodiment allows the gas pipeline for conveying boron trichloride to be connected to the gas inlet pipe, and the exhaust pipeline for outputting boron trichloride to be connected to the gas outlet pipe. This allows the boron trichloride gas generated during production to be sequentially conveyed through the gas pipeline and the gas inlet pipe into the storage tank for storage. When the boron trichloride gas is needed, it is discharged from the storage tank through the gas outlet pipe and the exhaust pipeline and conveyed to the required equipment.

[0025] Two fixing frames 2 for supporting the storage tank 1 are symmetrically provided at the bottom of the storage tank 1. The tops of the two fixing frames 2 are fixedly connected with arc-shaped connecting plates 20 that can adapt to the outer surface of the storage tank 1.

[0026] This embodiment utilizes the above-described arrangement to position and support a horizontal storage tank using two mounting brackets, allowing the tank to rest more stably on the ground and preventing direct contact with the ground. Since the storage tank is cylindrical, the provision of a curved connecting plate allows the tank to fit more tightly against the mounting brackets, facilitating better placement of the tank on the two mounting brackets.

[0027] In this embodiment, the bottom of the arc-shaped connecting plate 20 is fixedly connected to the upper ends of the plurality of support plates 21 , and the lower ends of the plurality of support plates 21 are fixedly connected to the bottom upper surface of the fixing frame 2 .

[0028] Through the above arrangement, this embodiment can improve the structural strength of the entire fixing frame and ensure stable support for the storage tank.

[0029] In this embodiment, a buffer pad 22 is bonded to the upper surface of the arc-shaped portion of the arc-shaped connecting plate 20 , and the shape of the buffer pad 22 matches the shape of the arc-shaped portion of the arc-shaped connecting plate 20 .

[0030] The above arrangement of this embodiment can achieve that when the storage tank is subjected to an impact force from the vertical direction, a portion of the impact energy can be buffered by providing a buffer pad, thereby ensuring that the fixing frame stably supports the storage tank.

[0031] Since boron trichloride gas is toxic, when there is no need to introduce boron trichloride gas into the storage tank through the air inlet pipe and there is no need to discharge boron trichloride gas in the storage tank through the air outlet pipe, boron trichloride gas is likely to overflow from the air inlet and exhaust ports, causing impacts and harm to the external environment and workers.

[0032] Therefore, the present embodiment is improved as follows: the upper end of the air inlet pipe 10 and the lower end of the air outlet pipe 11 are both provided with a sealing mechanism; the sealing mechanism includes a mounting tube 30, which is fixedly sleeved on the outer surface of the air inlet pipe 10 and the outer surface of the air outlet pipe 11;

[0033] A first sealing gasket 31 is provided on the top surface of the mounting tube 30. A sealing groove 32 is defined in the top surface of the first sealing gasket 31. A second sealing gasket 33 abuts against the top surface of the first sealing gasket 31. A sealing ridge 34 is fixedly connected to the bottom of the second sealing gasket 33. One end of the sealing ridge 34 abuts against the interior of the sealing groove 32. A locking sleeve 35 is provided at one end of the second sealing gasket 33. One end of the locking sleeve 35 is threadedly sleeved onto the outer surface of the mounting tube 30. The first and second sealing gaskets 31, 33 are made of rubber.

[0034] Through the above-mentioned arrangement, this embodiment can achieve the goal of making one end of the second sealing gasket contact the surface of the first sealing gasket, making one end of the sealing ridge contact the inside of the sealing groove, and then rotating the locking sleeve to be threadedly connected to the surface of the mounting tube under the action of the thread, while making one end of the rubber sealing column contact the upper surface of the sealing ring, which is used to seal the air inlet pipe and the air outlet pipe, thereby preventing the boron trichloride gas inside the storage tank from overflowing from the air inlet pipe and the air outlet pipe.

[0035] In this embodiment, grooves 40 are defined on the upper surface of the mounting tube 30 and the inner wall of the locking sleeve 35. Rubber rings 41 are interference-fitted within the grooves 40, with one end of each rubber ring 41 fixedly connected to the first and second sealing gaskets 31 and 33, respectively. Sealing rings 42 are fixedly connected to the inner walls of the inlet pipe 10 and outlet pipe 11. A rubber sealing column 43 is fixedly connected to the bottom end of the second sealing gasket 33, with the bottom end of the rubber sealing column 43 contacting the surface of the sealing ring 42. Limiting blocks 36 are fixedly connected to both sides of the sealing ridge 34. Two limiting grooves 37 are defined within the sealing groove 32, with one end of the limiting block 36 positioned within the limiting groove 37. The grooves 40 and rubber rings 41 both have T-shaped cross-sections.

[0036] Through the above-mentioned arrangement, this embodiment can realize the function of quickly installing and replacing the first sealing gasket and the second sealing gasket by arranging one end of the rubber ring inside the groove, and then making one end of the sealing ridge abut against the inside of the sealing groove, and then making one end of the limiting block abut against the inside of the limiting groove, so as to facilitate position limiting of the first sealing gasket and the second sealing gasket, thereby facilitating abutment between the first sealing gasket and the second sealing gasket, and improving the sealing performance at the intake pipe and the exhaust pipe.

[0037] Finally, it should be noted that the above description only describes specific embodiments of the present invention. However, the present invention is not limited to the specific embodiments described above. Equivalent modifications and substitutions made by those skilled in the art to the present invention are also within the scope of the present invention. Therefore, equivalent changes and modifications made without departing from the spirit and scope of the present invention are encompassed by the scope of the present invention.

Claims

1. A boron trichloride production and storage device, comprising a storage tank (1) for storing boron trichloride gas, wherein the top of the storage tank (1) is provided with an air inlet, the air inlet is connected to an air inlet pipe (10), and the bottom of the storage tank (1) is provided with an air outlet, the air outlet is connected to an air outlet pipe (11), and the device is characterized in that: Two fixing frames (2) for supporting the storage tank (1) are symmetrically provided at the bottom of the storage tank (1), and the tops of the two fixing frames (2) are fixedly connected with arc-shaped connecting plates (20) that can adapt to the outer surface of the storage tank (1); The upper end of the air inlet pipe (10) and the lower end of the air outlet pipe (11) are both provided with a sealing mechanism; the sealing mechanism comprises a mounting pipe (30), and the mounting pipe (30) is fixedly sleeved on the outer surface of the air inlet pipe (10) and the outer surface of the air outlet pipe (11); The upper surface of the mounting tube (30) is provided with a first sealing gasket (31), the upper surface of the first sealing gasket (31) is provided with a sealing groove (32), the upper surface of the first sealing gasket (31) is in contact with a second sealing gasket (33), the bottom of the second sealing gasket (33) is fixedly connected with a sealing ridge (34), one end of the sealing ridge (34) is in contact with the inside of the sealing groove (32), one end of the second sealing gasket (33) is provided with a locking sleeve (35), and one end of the locking sleeve (35) is threadedly sleeved on the outer surface of the mounting tube (30).

2. A boron trichloride production and storage device according to claim 1, characterized in that: The bottom of the arc-shaped connecting plate (20) is fixedly connected to the upper ends of the plurality of support plates (21), and the lower ends of the plurality of support plates (21) are fixedly connected to the bottom upper surface of the fixing frame (2).

3. A boron trichloride production and storage device according to claim 2, characterized in that: A buffer pad (22) is bonded to the upper surface of the arc-shaped portion of the arc-shaped connecting plate (20), and the shape of the buffer pad (22) is adapted to the shape of the arc-shaped portion of the arc-shaped connecting plate (20).

4. A boron trichloride production and storage device according to claim 1, characterized in that: Grooves (40) are provided on the upper surface of the mounting tube (30) and the inner wall of the locking sleeve (35). Rubber rings (41) are interference-fitted inside the two grooves (40). One end of the two rubber rings (41) is fixedly connected to the first sealing gasket (31) and the second sealing gasket (33), respectively.

5. A boron trichloride production and storage device according to claim 1, characterized in that: The inner walls of the air inlet pipe (10) and the air outlet pipe (11) are fixedly connected with a sealing ring (42), the bottom end of the second sealing gasket (33) is fixedly connected with a rubber sealing column (43), and the bottom end of the rubber sealing column (43) contacts the surface of the sealing ring (42).

6. A boron trichloride production and storage device according to claim 1, characterized in that: Both side surfaces of the sealing ridge (34) are fixedly connected to limiting blocks (36), two limiting grooves (37) are provided inside the sealing groove (32), and one end of the limiting block (36) is arranged inside the limiting groove (37).

7. A boron trichloride production and storage device according to claim 4, characterized in that: The cross-sectional shapes of the groove (40) and the rubber ring (41) are both T-shaped.

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