Ultraviolet lithography lens and lithography machine

Abstract

The utility model discloses an ultraviolet lithography lens and a lithography machine, and relates to the technical field of optics, and the ultraviolet lithography lens comprises a plurality of lenses which are sequentially arranged from an object side to an image side; the focal power of the first lens, the fourth lens, the fifth lens, the sixth lens, the twelfth lens, the thirteenth lens, the nineteenth lens, the twentieth lens, the twenty-first lens and the twenty-fourth lens is negative. The focal power of the second lens, the third lens, the seventh lens, the eighth lens, the ninth lens, the tenth lens, the eleventh lens, the fourteenth lens, the fifteenth lens, the sixteenth lens, the seventeenth lens, the eighteenth lens, the twenty-second lens and the twenty-third lens is positive, and the lenses are all spherical lenses. According to the technical scheme provided by the utility model, the installation and adjustment difficulty and cost of the ultraviolet lithography lens can be greatly reduced while the precision is maintained.

Description

Technical Field

[0001] The utility model relates to the technical field of optics, in particular to an ultraviolet lithography lens and a lithography machine. Background Art

[0002] In recent years, with the further development of UV lithography lenses, the semiconductor industry's demand for them has become increasingly high. However, to ensure high resolution, current UV lithography lenses often use aspheric lenses. Due to the irregular shape of aspheric lenses, they cannot be used with other UV lithography lenses, making assembly and adjustment difficult and costly.

[0003] Therefore, how to reduce the difficulty and cost of assembling and adjusting the UV lithography lens while maintaining accuracy has become an urgent problem to be solved in this field. Utility Model Content

[0004] The main purpose of the utility model is to provide an ultraviolet lithography lens and a lithography machine, aiming to reduce the difficulty and cost of assembling and adjusting the ultraviolet lithography lens while maintaining accuracy.

[0005] To achieve the above-mentioned object, the ultraviolet lithography lens proposed in the present invention has an object side and an image side that are oppositely arranged along the optical axis. The ultraviolet lithography lens includes a plurality of lenses arranged in sequence from the object side to the image side, the plurality of lenses including a first lens with negative optical power, a second lens with positive optical power, a third lens with positive optical power, a fourth lens with negative optical power, a fifth lens with negative optical power, a sixth lens with negative optical power, a seventh lens with positive optical power, an eighth lens with positive optical power, a ninth lens with positive optical power, a tenth lens with positive optical power, and a ninth lens with positive optical power. The optical power of the lens is a positive eleventh lens, a negative twelfth lens, a negative thirteenth lens, a positive fourteenth lens, a positive fifteenth lens, a positive sixteenth lens, a positive seventeenth lens, a positive eighteenth lens, a negative nineteenth lens, a negative twentieth lens, a negative twenty-first lens, a positive twenty-second lens, a positive twenty-third lens, and a negative twenty-fourth lens; wherein the plurality of lenses are configured as spherical lenses.

[0006] In one embodiment, the first lens is a biconcave lens, the second lens is a biconvex lens, the third lens is a biconvex lens, the fourth lens is a meniscus lens, and the object-side surface of the fourth lens is concave, the fifth lens is a biconcave lens, the sixth lens is a meniscus lens, and the object-side surface of the sixth lens is concave, the seventh lens is a meniscus lens, and the object-side surface of the seventh lens is concave, the eighth lens is a meniscus lens, and the object-side surface of the eighth lens is concave, the ninth lens is a biconvex lens, the tenth lens is a biconvex lens, the eleventh lens is a meniscus lens, and the object-side surface of the eleventh lens is convex, the twelfth lens is a biconcave lens, and the thirteenth lens The first lens is a biconcave lens, the fourth lens is a meniscus lens, the object side surface of the fourth lens is concave, the fifteenth lens is a biconvex lens, the sixteenth lens is a biconvex lens, the seventeenth lens is a meniscus lens, the object side surface of the seventeenth lens is convex, the eighteenth lens is a meniscus lens, the object side surface of the eighteenth lens is convex, the nineteenth lens is a meniscus lens, the object side surface of the nineteenth lens is convex, the twentieth lens is a biconcave lens, the twenty-first lens is a meniscus lens, the object side surface of the twenty-first lens is convex, the twenty-second lens is a biconvex lens, the twenty-third lens is a biconvex lens, and the twenty-fourth lens is a biconcave lens.

[0007] In one embodiment, a refractive index of the first lens is n1, a refractive index of the second lens is n2, a refractive index of the third lens is n3, a refractive index of the fourth lens is n4, a refractive index of the fifth lens is n5, a refractive index of the sixth lens is n6, a refractive index of the seventh lens is n7, a refractive index of the eighth lens is n8, a refractive index of the ninth lens is n9, a refractive index of the tenth lens is n10, a refractive index of the eleventh lens is n11, a refractive index of the twelfth lens is n12, a refractive index of the thirteenth lens is n13, a refractive index of the fourteenth lens is n14, a refractive index of the fifteenth lens is n15, a refractive index of the sixteenth lens is n16, a refractive index of the seventeenth lens is n17, a refractive index of the eighteenth lens is n18, a refractive index of the nineteenth lens is n19, a refractive index of the twentieth lens is n20, a refractive index of the twenty-first lens is n21, a refractive index of the twenty-second lens is n22, a refractive index of the twenty-third lens is n23, and a refractive index of the twenty-fourth lens is n24. Among them: 1.45≤n1≤1.47, 1.51≤n2≤1.53, 1.51≤n3≤1.53, 1.45≤n4≤1.53, 1.57≤n5≤1.59, 1.57≤n6≤1.59, 1.48≤n7≤1.50, 1.45≤n8≤1.47, 1.48≤n9≤1.50, 1.49≤n10≤1.51, 1.49≤n11≤1.51, 1.45≤n12≤1.47, 1.4 5≤n13≤1.47,1.49≤n14≤1.51,1.49≤n15≤1.51,1.49≤n16≤1.51,1.48≤n17≤1.50,1.45≤n18≤1.47,1.48≤n19≤1.50,1.57≤n20≤1.59,1.57≤n21≤1.59,1.57≤n22≤1.59,1.51≤n23≤1.53,1.48≤n24≤1.50。

[0008] In one embodiment, the Abbe constant of the first lens is v1, the Abbe constant of the second lens is v2, the Abbe constant of the third lens is v3, the focal Abbe constant of the fourth lens is v4, the Abbe constant of the fifth lens is v5, the Abbe constant of the sixth lens is v6, the Abbe constant of the seventh lens is v7, the Abbe constant of the eighth lens is v8, the Abbe constant of the ninth lens is v9, the Abbe constant of the tenth lens is v10, the Abbe constant of the eleventh lens is v11, and the Abbe constant of the twelfth lens is v12 The Abbe constant of the thirteenth lens is v13, the Abbe constant of the fourteenth lens is v14, the Abbe constant of the fifteenth lens is v15, the Abbe constant of the sixteenth lens is v16, the Abbe constant of the seventeenth lens is v17, the Abbe constant of the eighteenth lens is v18, the Abbe constant of the nineteenth lens is v19, the Abbe constant of the twentieth lens is v20, the Abbe constant of the twenty-first lens is v21, the Abbe constant of the twenty-second lens is v22, and the Abbe constant of the twenty-third lens is v23. The Abbe constant of the twenty-fourth lens is v24, where: 67.7≤v1≤67.9, 63.2≤v2≤63.4, 63.2≤v3≤63.4, 40.8≤v4≤41, 40.8≤v5≤41, 70.3≤v6≤70.5, 67.7≤v7≤67.9, 70.3≤v8≤70.5, 81.5≤v9≤81.7, 81.5≤v10≤81.7, 81.5≤v11≤81.7, 67.7≤v12≤ 67.9, 67.7≤v13≤67.9, 81.5≤v14≤81.7, 81.5≤v15≤81.7, 81.5≤v16≤81.7, 70.3≤v17≤70.5, 67.7≤v18≤67.9, 70.3≤v19≤70.5, 40.8≤v20≤41, 40.8≤v21≤41, 63.2≤v22≤63.4, 63.2≤v23≤63.4, 67.7≤v24≤67.9.

[0009] In one embodiment, the thickness of the first lens is d1, the thickness of the second lens is d2, the thickness of the third lens is d3, the thickness of the fourth lens is d4, the thickness of the fifth lens is d5, the thickness of the sixth lens is d6, the thickness of the seventh lens is d7, the thickness of the eighth lens is d8, the thickness of the ninth lens is d9, the thickness of the tenth lens is d10, the thickness of the eleventh lens is d11, the thickness of the twelfth lens is d12, the thickness of the thirteenth lens is d13, the thickness of the fourteenth lens is d14, the thickness of the fifteenth lens is d15, the thickness of the sixteenth lens is d16, the thickness of the seventeenth lens is d17, the thickness of the eighteenth lens is d18, the thickness of the nineteenth lens is d19, the thickness of the twentieth lens is d20, the thickness of the twenty-first lens is d21, the thickness of the twenty-second lens is d22, the thickness of the twenty-third lens is d23, and the thickness of the twenty-fourth lens is d24, wherein: 7.43≤d1≤8.4 3, 19.08≤d2≤20.08, 19.5≤d3≤20.5, 6.65≤d4≤7.65, 6.5≤d5≤7.5, 6.5≤d6≤7.5, 16.22≤d7≤17.22, 11.97≤d8≤12.97, 18≤d9≤19, 13.02≤d10≤14.02, 14.16≤d11≤15.16, 6.5≤d12≤7.5, 6.5≤d13≤7.5, 14.16≤d14≤15.16,13.02≤d15≤14.02,18≤d16≤19,11.97≤d17≤12.97,16.22≤d18≤17.22,6.5≤d19≤7.5,6.49≤d20≤7.49,6.65≤d21≤7.65,19.49≤d22≤20.49,19.08≤d23≤20.08,7.43≤d24≤8.43。

[0010] In one embodiment, the distance between the first lens and the second lens is L1, the distance between the second lens and the third lens is L2, the distance between the third lens and the fourth lens is L3, the distance between the fourth lens and the fifth lens is L4, the distance between the fifth lens and the sixth lens is L5, the distance between the sixth lens and the seventh lens is L6, the distance between the seventh lens and the eighth lens is L7, the distance between the eighth lens and the ninth lens is L8, the distance between the ninth lens and the tenth lens is L9, the distance between the tenth lens and the eleventh lens is L10, and the distance between the eleventh lens and the twelfth lens is L11. The distance between the 12th and 13th lenses is L11, the distance between the 13th and 14th lenses is L12, the distance between the 13th and 14th lenses is L13, the distance between the 14th and 15th lenses is L14, the distance between the 15th and 16th lenses is L15, the distance between the 16th and 17th lenses is L16, the distance between the 17th and 18th lenses is L17, the distance between the 18th and 19th lenses is L18, the distance between the 19th and 20th lenses is L19, and the distance between the 20th and 21st lenses is L20. , the distance between the twenty-first lens and the twenty-second lens is L21, the distance between the twenty-second lens and the twenty-third lens is L22, and the distance between the twenty-third lens and the twenty-fourth lens is L23, wherein: 26.61≤L1≤27.61, 1.13≤L2≤2.13, 103.34≤L3≤113.34, 15≤L4≤16, 10.68≤L5≤11.68, 0.44≤L6≤0.54, 0.44≤L7≤0.54, 0.44≤L8≤0.54, 0.44≤L9≤0.54, 0.45≤L 10≤0.55, 34.97≤L11≤35.97, 11.98≤L12≤12.98, 34.97≤L13≤35.97, 0.45≤L14≤0.55, 0.44≤L15≤0.54, 0.44≤L16≤0.54, 0.44≤L17≤0.54, 0.44≤L18≤0.54, 10.68≤L19≤11.68, 15≤L20≤16, 103.34≤L21≤113.34, 1.13≤L22≤2.13, 26.61≤L23≤27.61.

[0011] In one embodiment, the UV lithography lens system further includes a stop, which is disposed between the twelfth lens and the thirteenth lens.

[0012] In one embodiment, the first lens, the second lens, the third lens, the fourth lens, the fifth lens, the sixth lens, the seventh lens, the eighth lens, the ninth lens, the tenth lens, the eleventh lens, and the twelfth lens together constitute a first lens group, and the thirteenth lens, the fourteenth lens, the fifteenth lens, the sixteenth lens, the seventeenth lens, the eighteenth lens, the nineteenth lens, the twentieth lens, the twenty-first lens, the twenty-second lens, the twenty-third lens, and the twenty-fourth lens together constitute a second lens group, and the first lens group and the second lens group are symmetrically arranged relative to the aperture stop.

[0013] In one embodiment, the object-side numerical aperture of the UV lithography lens is NA, NA=0.13.

[0014] The utility model also provides a photolithography machine, which includes a workbench, a mask, an ultraviolet photolithography lens as described above, and an ultraviolet light source. The workbench is used to place a substrate to be processed; the mask is arranged above the workbench; the ultraviolet photolithography lens is arranged between the mask and the workbench; the ultraviolet light source is used to emit ultraviolet light toward the substrate, and the ultraviolet light passes through the mask and the ultraviolet photolithography lens in sequence to reach the substrate.

[0015] The technical solution of the present invention changes the propagation direction of the light beam by comprehensively setting the optical focal length and shape of each lens, which is more conducive to the imaging of the light beam on the image plane, and all lenses are set to be spherical lenses. The manufacturing process of spherical lenses is relatively simple, the production cost is low, and the tools and technical requirements required for installation are low. While maintaining accuracy, the difficulty and cost of assembling and adjusting ultraviolet lithography lenses are greatly reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0017] Figure 1 This is a structural diagram of an embodiment of the ultraviolet lithography lens provided by the present utility model;

[0018] Figure 2 for Figure 1 MTF curve of mid-UV lithography lens;

[0019] Figure 3 for Figure 1 Spot diagram of a mid-UV lithography lens;

[0020] Figure 4 for Figure 1Schematic diagram of the distortion curve of the mid-UV lithography lens.

[0021] Description of Figure Numbers:

[0022] 1000, UV lithography lens; 101, first lens; 102, second lens; 103, third lens; 104, fourth lens; 105, fifth lens; 106, sixth lens; 107, seventh lens; 108, eighth lens; 109, ninth lens; 110, tenth lens; 111, eleventh lens; 112, twelfth lens; 113, thirteenth lens; 114, fourteenth lens; 115, fifteenth lens; 116, sixteenth lens; 117, seventeenth lens; 118, eighteenth lens; 119, nineteenth lens; 120, twentieth lens; 121, twenty-first lens; 122, twenty-second lens; 123, twenty-third lens; 124, twenty-fourth lens; 201, aperture stop;

[0023] 2000, mask; 3000, substrate to be processed.

[0024] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0026] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0027] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of such features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0028] In order to ensure high resolution, current UV lithography lenses use a large number of aspheric lenses. However, due to the irregular shape of aspheric lenses, they cannot be shared with other UV lithography lenses, making installation and adjustment difficult and costly.

[0029] Based on this, the present invention proposes a UV lithography lens 1000. Figure 1 In one embodiment of the present invention, the UV lithography lens 1000 has an object side and an image side that are oppositely arranged along the optical axis. The UV lithography lens 1000 includes a plurality of lenses arranged in sequence from the object side to the image side. The plurality of lenses include a first lens 101 with negative optical power, a second lens 102 with positive optical power, a third lens 103 with positive optical power, a fourth lens 104 with negative optical power, a fifth lens 105 with negative optical power, a sixth lens 106 with negative optical power, a seventh lens 107 with positive optical power, an eighth lens 108 with positive optical power, a ninth lens 109 with positive optical power, a tenth lens 110 with positive optical power, and a An eleventh lens 111, a twelfth lens 112 with negative optical power, a thirteenth lens 113 with negative optical power, a fourteenth lens 114 with positive optical power, a fifteenth lens 115 with positive optical power, a sixteenth lens 116 with positive optical power, a seventeenth lens 117 with positive optical power, an eighteenth lens 118 with positive optical power, a nineteenth lens 119 with negative optical power, a twentieth lens 120 with negative optical power, a twenty-first lens 121 with negative optical power, a twenty-second lens 122 with positive optical power, a twenty-third lens 123 with positive optical power, and a twenty-fourth lens 124 with negative optical power; wherein, the plurality of lenses are configured as spherical lenses.

[0030] The technical solution of the present invention changes the propagation direction of the light beam by comprehensively setting the optical focal length and shape coordination of each lens, which is more conducive to the imaging of the light beam on the image plane, and all lenses are set to be spherical lenses. The manufacturing process of spherical lenses is relatively simple, the production cost is low, and the tools and technical requirements required for installation are low. While maintaining accuracy, the difficulty and cost of assembling and adjusting the ultraviolet lithography lens 1000 are greatly reduced.

[0031] In one embodiment of the present invention, the first lens 101 is a biconcave lens, the second lens 102 is a biconvex lens, the third lens 103 is a biconvex lens, the fourth lens 104 is a meniscus lens, and the object-side surface of the fourth lens 104 is concave, the fifth lens 105 is a biconcave lens, the sixth lens 106 is a meniscus lens, and the object-side surface of the sixth lens 106 is concave, the seventh lens 107 is a meniscus lens, and the object-side surface of the seventh lens 107 is concave, the eighth lens 108 is a meniscus lens, and the object-side surface of the eighth lens 108 is concave, the ninth lens 109 is a biconvex lens, the tenth lens 110 is a biconvex lens, the eleventh lens 111 is a meniscus lens, and the object-side surface of the eleventh lens 111 is convex, the twelfth lens 112 is a biconcave lens, and the thirteenth lens 113 is a biconcave lens. Lens 113 is a biconcave lens, the fourteenth lens 114 is a meniscus lens, the object-side surface of the fourteenth lens 114 is concave, the fifteenth lens 115 is a biconvex lens, the sixteenth lens 116 is a biconvex lens, the seventeenth lens 117 is a meniscus lens, the object-side surface of the seventeenth lens 117 is convex, the eighteenth lens 118 is a meniscus lens, the object-side surface of the eighteenth lens 118 is convex, the nineteenth lens 119 is a meniscus lens, the object-side surface of the nineteenth lens 119 is convex, the twentieth lens 120 is a biconcave lens, the twenty-first lens 121 is a meniscus lens, the object-side surface of the twenty-first lens 121 is convex, the twenty-second lens 122 is a biconvex lens, the twenty-third lens 123 is a biconvex lens, and the twenty-fourth lens 124 is a biconcave lens. By combining the different lenses and coordinating the shapes of the different lenses, the resolution of the UV lithography lens 1000 is improved, and the lithography effect is optimized.

[0032] In one embodiment of the present invention, the refractive index of the first lens 101 is n1, the refractive index of the second lens 102 is n2, the refractive index of the third lens 103 is n3, the refractive index of the fourth lens 104 is n4, the refractive index of the fifth lens 105 is n5, the refractive index of the sixth lens 106 is n6, the refractive index of the seventh lens 107 is n7, the refractive index of the eighth lens 108 is n8, the refractive index of the ninth lens 109 is n9, the refractive index of the tenth lens 110 is n10, the refractive index of the eleventh lens 111 is n11, and the refractive index of the twelfth lens 112 is n13. The refractive index of the lens 112 is n12, the refractive index of the thirteenth lens 113 is n13, the refractive index of the fourteenth lens 114 is n14, the refractive index of the fifteenth lens 115 is n15, the refractive index of the sixteenth lens 116 is n16, the refractive index of the seventeenth lens 117 is n17, the refractive index of the eighteenth lens 118 is n18, the refractive index of the nineteenth lens 119 is n19, the refractive index of the twentieth lens 120 is n20, the refractive index of the twenty-first lens 121 is n21, and the refractive index of the twenty-second lens 122 is n2 2. The refractive index of the twenty-third lens 123 is n23, and the refractive index of the twenty-fourth lens 124 is n24, wherein: 1.45≤n1≤1.47, 1.51≤n2≤1.53, 1.51≤n3≤1.53, 1.45≤n4≤1.53, 1.57≤n5≤1.59, 1.57≤n6≤1.59, 1.48≤n7≤1.50, 1.45≤n8≤1.47, 1.48≤n9≤1.50, 1.49≤n10≤1.51, and 1.49≤n11≤1.5 1, 1.45≤n12≤1.47, 1.45≤n13≤1.47, 1.49≤n14≤1.51, 1.49≤n15≤1.51, 1.49≤n16≤1.51, 1.48≤n17≤1.50, 1.45≤n18≤1.47, 1.48≤n19≤1.50, 1.57≤n20≤1.59, 1.57≤n21≤1.59, 1.57≤n22≤1.59, 1.51≤n23≤1.53, 1.48≤n24≤1.50. The reasonable setting and selection of the refractive index of the lens material significantly improves the performance of the UV lithography lens 1000.

[0033] In one embodiment of the present invention, the Abbe constant of the first lens 101 is v1, the Abbe constant of the second lens 102 is v2, the Abbe constant of the third lens 103 is v3, the Abbe constant of the fourth lens 104 is v4, the Abbe constant of the fifth lens 105 is v5, the Abbe constant of the sixth lens 106 is v6, the Abbe constant of the seventh lens 107 is v7, the Abbe constant of the eighth lens 108 is v8, the Abbe constant of the ninth lens 109 is v9, the Abbe constant of the tenth lens 110 is v10, and the Abbe constant of the eleventh lens 111 is v11. The Abbe constant of the twelfth lens 112 is v12, the Abbe constant of the thirteenth lens 113 is v13, the Abbe constant of the fourteenth lens 114 is v14, the Abbe constant of the fifteenth lens 115 is v15, the Abbe constant of the sixteenth lens 116 is v16, the Abbe constant of the seventeenth lens 117 is v17, the Abbe constant of the eighteenth lens 118 is v18, the Abbe constant of the nineteenth lens 119 is v19, the Abbe constant of the twentieth lens 120 is v20, the Abbe constant of the twenty-first lens 121 is v21, and the Abbe constant of the twenty-first lens 122 is v23. The Abbe constant of the second lens 122 is v22, the Abbe constant of the twenty-third lens 123 is v23, and the Abbe constant of the twenty-fourth lens 124 is v24, where: 67.7≤v1≤67.9, 63.2≤v2≤63.4, 63.2≤v3≤63.4, 40.8≤v4≤41, 40.8≤v5≤41, 70.3≤v6≤70.5, 67.7≤v7≤67.9, 70.3≤v8≤70.5, 81.5≤v9≤81.7, 81.5≤v10≤81.7, 81.5 ≤v11≤81.7, 67.7≤v12≤67.9, 67.7≤v13≤67.9, 81.5≤v14≤81.7, 81.5≤v15≤81.7, 81.5≤v16≤81.7, 70.3≤v17≤70.5, 67.7≤v18≤67.9, 70.3≤v19≤70.5, 40.8≤v20≤41, 40.8≤v21≤41, 63.2≤v22≤63.4, 63.2≤v23≤63.4, 67.7≤v24≤67.9. This setting can significantly reduce chromatic aberration and improve image quality.

[0034] In one embodiment of the present invention, the thickness of the first lens 101 is d1, the thickness of the second lens 102 is d2, the thickness of the third lens 103 is d3, the thickness of the fourth lens 104 is d4, the thickness of the fifth lens 105 is d5, the thickness of the sixth lens 106 is d6, the thickness of the seventh lens 107 is d7, the thickness of the eighth lens 108 is d8, the thickness of the ninth lens 109 is d9, the thickness of the tenth lens 110 is d10, the thickness of the eleventh lens 111 is d11, the thickness of the twelfth lens 112 is d12, the thickness of the thirteenth lens 113 is d13, and the thickness of the thirteenth lens 114 is d15. The thickness of the fourteenth lens 114 is d14, the thickness of the fifteenth lens 115 is d15, the thickness of the sixteenth lens 116 is d16, the thickness of the seventeenth lens 117 is d17, the thickness of the eighteenth lens 118 is d18, the thickness of the nineteenth lens 119 is d19, the thickness of the twentieth lens 120 is d20, the thickness of the twenty-first lens 121 is d21, the thickness of the twenty-second lens 122 is d22, the thickness of the twenty-third lens 123 is d23, and the thickness of the twenty-fourth lens 124 is d24, wherein: 7.43 mm ≤ d1 ≤ 8.43 mm, 19.0 8mm≤d2≤20.08mm, 19.5mm≤d3≤20.5mm, 6.65mm≤d4≤7.65mm, 6.5mm≤d5≤7.5mm, 6.5mm≤d6≤7.5mm, 16.22mm≤d7≤17.22mm, 11. 97mm≤d8≤12.97mm, 18mm≤d9≤19mm, 13.02mm≤d10≤14.02mm, 14.16mm≤d11≤15.16mm, 6.5mm≤d12≤7.5mm, 6.5mm≤d13≤7.5mm, 1 4.16mm≤d14≤15.16mm, 13.02mm≤d15≤14.02mm, 18mm≤d16≤19mm, 11.97mm≤d17≤12.97mm, 16.22mm≤d18≤17.22mm, 6.5mm≤d1 9≤7.5mm, 6.49mm≤d20≤7.49mm, 6.65mm≤d21≤7.65mm, 19.49mm≤d22≤20.49mm, 19.08mm≤d23≤20.08mm, 7.43mm≤d24≤8.43mm.

[0035] In one embodiment of the present invention, the distance between the first lens 101 and the second lens 102 is L1, the distance between the second lens 102 and the third lens 103 is L2, the distance between the third lens 103 and the fourth lens 104 is L3, the distance between the fourth lens 104 and the fifth lens 105 is L4, the distance between the fifth lens 105 and the sixth lens 106 is L5, the distance between the sixth lens 106 and the seventh lens 107 is L6, the distance between the seventh lens 107 and the eighth lens 108 is L7, the distance between the eighth lens 108 and the ninth lens 109 is L8, the distance between the ninth lens 109 and the tenth lens 110 is L9, and the distance between the tenth lens 110 and the eleventh lens 111 is L10. The distance between the first lens 111 and the second lens 112 is L10, the distance between the first lens 111 and the second lens 112 is L11, the distance between the first lens 112 and the second lens 113 is L12, the distance between the first lens 113 and the second lens 114 is L13, the distance between the first lens 114 and the second lens 115 is L14, the distance between the first lens 115 and the second lens 116 is L15, the distance between the first lens 116 and the second lens 117 is L16, the distance between the first lens 117 and the second lens 118 is L17, the distance between the first lens 118 and the second lens 119 is L18, the distance between the first lens 119 and the second lens 120 is L19, and the distance between the second lens 119 and the second lens 121 is L20. The distance between the tenth lens 120 and the twenty-first lens 121 is L20, the distance between the twenty-first lens 121 and the twenty-second lens 122 is L21, the distance between the twenty-second lens 122 and the twenty-third lens 123 is L22, and the distance between the twenty-third lens 123 and the twenty-fourth lens 124 is L23, wherein: 26.61 mm ≤ L1 ≤ 27.61 mm, 1.13 mm ≤ L2 ≤ 2.13 mm, 103.34 mm ≤ L3 ≤ 113.34 mm, 15 mm ≤ L4 ≤ 16 mm, 10.68 mm ≤ L5 ≤ 11.68 mm, 0.44 mm ≤ L6 ≤ 0.54 mm, 0.44 mm ≤ L7 ≤ 0.54 mm, 0.44 mm ≤ L8 ≤ 0.54mm, 0.44mm≤L9≤0.54mm, 0.45mm≤L10≤0.55mm, 34.97mm≤L11≤35.97mm, 11.98mm≤L12≤12.98mm, 34.97mm≤L13≤35.97mm, 0.45mm≤L14≤0.55mm, 0.44m m≤L15≤0.54mm, 0.44mm≤L16≤0.54mm, 0.44mm≤L17≤0.54mm, 0.44mm≤L18≤0.54mm, 10.68mm≤L19≤11.68mm, 15mm≤L20≤16mm, 103.34mm≤L21≤113.34mm, 1.13mm≤L22≤2.13mm, 26.61mm≤L23≤27.61. This configuration keeps the total optical length of the UV lithography lens 1000 within 900mm, making the entire system more compact, easier to install and maintain, and reducing the impact of the external environment on the system, thereby improving the stability and reliability of the UV lithography lens 1000.

[0036] In one embodiment of the present invention, the UV lithography lens 1000 further includes an aperture 201, which is disposed between the twelfth lens 112 and the thirteenth lens 113. This arrangement can control the amount of light entering the lens and effectively control the propagation path of the UV light.

[0037] See also Figure 1 In one embodiment of the present invention, the first lens 101, the second lens 102, the third lens 103, the fourth lens 104, the fifth lens 105, the sixth lens 106, the seventh lens 107, the eighth lens 108, the ninth lens 109, the tenth lens 110, the eleventh lens 111, and the twelfth lens 112 collectively constitute a first lens group, and the thirteenth lens 113, the fourteenth lens 114, the fifteenth lens 115, the sixteenth lens 116, the seventeenth lens 117, the eighteenth lens 118, the nineteenth lens 119, the twentieth lens 120, the twenty-first lens 121, the twenty-second lens 122, the twenty-third lens 123, and the twenty-fourth lens 124 collectively constitute a second lens group. The first lens group and the second lens group are symmetrically arranged relative to the aperture 201. This arrangement simplifies the structure and reduces costs while helping to better correct aberrations and achieving a more uniform light intensity distribution, thereby ensuring the uniformity of photoresist exposure and the quality of the final circuit pattern.

[0038] In one embodiment of the present invention, the object-side numerical aperture of the UV lithography lens 1000 is NA, NA = 0.13. With this configuration, the UV lithography lens 1000 has a higher resolution and can capture details with higher precision.

[0039] The present invention also provides a photolithography machine, comprising a workbench, a reticle, the aforementioned UV photolithography lens 1000, and a UV light source. Because the photolithography machine utilizes all of the technical solutions of all of the aforementioned embodiments, it possesses at least all of the beneficial effects provided by the technical solutions of the aforementioned embodiments, which will not be detailed here. The workbench is used to place a substrate 3000 to be processed; the reticle 2000 is positioned above the workbench; the UV photolithography lens 1000 is positioned between the reticle 2000 and the workbench; and the UV light source is used to emit UV light toward the substrate, with the UV light sequentially passing through the reticle 2000 and the UV photolithography lens 1000 before reaching the substrate.

[0040] In one embodiment of the present invention, the basic parameters of the UV lithography lens 1000 are as follows:

[0041]

[0042]

[0043]

[0044] In this embodiment, the total optical length of the photolithography lens is no more than 800 mm; the magnification is 1X; the object-side numerical aperture NA is 0.13; the distortion is less than 100 nm; the telecentricity is less than 0.3°; the observation area is 45 mm × 45 mm; the ultraviolet light wavelength is 365±2.5 nm; and the lens operating temperature is 20±1°C.

[0045] See also Figure 2 , Figure 2 This is the MTF curve of the UV lithography lens of this embodiment. The different lines in the figure represent the light rays in each field of view. From the figure, it can be seen that the curve is relatively smooth and compact. The MTF value represented by the curve is very high, basically reaching above 0.5, indicating that the lens aberrations are well corrected.

[0046] See also Figure 3 , Figure 3 This is a point diagram of the UV lithography lens of this embodiment, showing the distribution of the intersection points of different light rays and the image plane in several given fields of view. Figure 3 It can be seen that the ultraviolet lithography lens provided in this embodiment can achieve good imaging quality.

[0047] See also Figure 4 , Figure 4 is a schematic diagram of the distortion curve of the ultraviolet lithography lens of this embodiment, Figure 4 It can be seen that the field curvature values ​​of the embodiments are all within the range of ±14 μm, and the distortion is within the range of 0.4 μm. Both the field curvature and astigmatism are well corrected.

[0048] The above description is merely an exemplary embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made using the contents of the present invention specification and drawings under the technical concept of the present invention, or direct / indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A UV lithography lens, characterized in that: The ultraviolet lithography lens has an object side and an image side that are oppositely arranged along the optical axis. The ultraviolet lithography lens includes a plurality of lenses arranged in sequence from the object side to the image side, wherein the plurality of lenses include a first lens with negative optical power, a second lens with positive optical power, a third lens with positive optical power, a fourth lens with negative optical power, a fifth lens with negative optical power, a sixth lens with negative optical power, a seventh lens with positive optical power, an eighth lens with positive optical power, a ninth lens with positive optical power, a tenth lens with positive optical power, and an eleventh lens with positive optical power. lens, a twelfth lens with negative optical focal power, a thirteenth lens with negative optical focal power, a fourteenth lens with positive optical focal power, a fifteenth lens with positive optical focal power, a sixteenth lens with positive optical focal power, a seventeenth lens with positive optical focal power, an eighteenth lens with positive optical focal power, a nineteenth lens with negative optical focal power, a twentieth lens with negative optical focal power, a twenty-first lens with negative optical focal power, a twenty-second lens with positive optical focal power, a twenty-third lens with positive optical focal power, and a twenty-fourth lens with negative optical focal power; wherein the multiple lenses are all configured as spherical lenses.

2. The ultraviolet lithography lens according to claim 1, wherein: The first lens is a biconcave lens, the second lens is a biconvex lens, the third lens is a biconvex lens, the fourth lens is a meniscus lens, and the object side surface of the fourth lens is concave, the fifth lens is a biconcave lens, the sixth lens is a meniscus lens, and the object side surface of the sixth lens is concave, the seventh lens is a meniscus lens, and the object side surface of the seventh lens is concave, the eighth lens is a meniscus lens, and the object side surface of the eighth lens is concave, the ninth lens is a biconvex lens, the tenth lens is a biconvex lens, the eleventh lens is a meniscus lens, and the object side surface of the eleventh lens is convex, the twelfth lens is a biconcave lens, and the thirteenth lens is a biconvex lens. concave lens, the fourteenth lens is a meniscus lens, the object-side surface of the fourteenth lens is concave, the fifteenth lens is a biconvex lens, the sixteenth lens is a biconvex lens, the seventeenth lens is a meniscus lens, the object-side surface of the seventeenth lens is convex, the eighteenth lens is a meniscus lens, the object-side surface of the eighteenth lens is convex, the nineteenth lens is a meniscus lens, the object-side surface of the nineteenth lens is convex, the twentieth lens is a biconcave lens, the twenty-first lens is a meniscus lens, the object-side surface of the twenty-first lens is convex, the twenty-second lens is a biconvex lens, the twenty-third lens is a biconvex lens, and the twenty-fourth lens is a biconcave lens.

3. The ultraviolet lithography lens according to claim 1, wherein: The refractive index of the first lens is n1, the refractive index of the second lens is n2, the refractive index of the third lens is n3, the refractive index of the fourth lens is n4, the refractive index of the fifth lens is n5, the refractive index of the sixth lens is n6, the refractive index of the seventh lens is n7, the refractive index of the eighth lens is n8, the refractive index of the ninth lens is n9, the refractive index of the tenth lens is n10, the refractive index of the eleventh lens is n11, the refractive index of the twelfth lens is n12, the refractive index of the thirteenth lens is n13, the refractive index of the fourteenth lens is n14, the refractive index of the fifteenth lens is n15, the refractive index of the sixteenth lens is n16, the refractive index of the seventeenth lens is n17, the refractive index of the eighteenth lens is n18, the refractive index of the nineteenth lens is n19, the refractive index of the twentieth lens is n20, the refractive index of the twenty-first lens is n21, the refractive index of the twenty-second lens is n22, and the refractive index of the twenty-third lens is n 23, the refractive index of the twenty-fourth lens is n24, wherein: 1.45≤n1≤1.47, 1.51≤n2≤1.53, 1.51≤n3≤1.53, 1.45≤n4≤1.53, 1.57≤n5≤1.59, 1.57≤n6≤1.59, 1.48≤n7≤1.50, 1.45≤n8≤1.47, 1.48≤n9≤1.50, 1.49≤n10≤1.51, 1.49≤n11≤1.51, 1.45≤n1 1.57≤n20≤1.59, 1.57≤n21≤1.59, 1.57≤n22≤1.59, 1.51≤n23≤1.53, 1.48≤n24≤1.

50.

4. The ultraviolet lithography lens according to claim 3, wherein: The Abbe constant of the first lens is v1, the Abbe constant of the second lens is v2, the Abbe constant of the third lens is v3, the Abbe constant of the fourth lens is v4, the Abbe constant of the fifth lens is v5, the Abbe constant of the sixth lens is v6, the Abbe constant of the seventh lens is v7, the Abbe constant of the eighth lens is v8, the Abbe constant of the ninth lens is v9, the Abbe constant of the tenth lens is v10, the Abbe constant of the eleventh lens is v11, and the Abbe constant of the twelfth lens is v13. The Abbe constant of the 13th lens is v13, the Abbe constant of the 14th lens is v14, the Abbe constant of the 15th lens is v15, the Abbe constant of the 16th lens is v16, the Abbe constant of the 17th lens is v17, the Abbe constant of the 18th lens is v18, the Abbe constant of the 19th lens is v19, the Abbe constant of the 20th lens is v20, the Abbe constant of the 21st lens is v21, and the Abbe constant of the 22nd lens is v22. The Abbe constant of the twenty-third lens is v23, and the Abbe constant of the twenty-fourth lens is v24, wherein: 67.7≤v1≤67.9, 63.2≤v2≤63.4, 63.2≤v3≤63.4, 40.8≤v4≤41, 40.8≤v5≤41, 70.3≤v6≤70.5, 67.7≤v7≤67.9, 70.3≤v8≤70.5, 81.5≤v9≤81.7, 81.5≤v10≤81.7, 81.5≤v11≤81.7 , 67.7≤v12≤67.9, 67.7≤v13≤67.9, 81.5≤v14≤81.7, 81.5≤v15≤81.7, 81.5≤v16≤81.7, 70.3≤v17≤70.5, 67.7≤v18≤67.9, 70.3≤v19≤70.5, 40.8≤v20≤41, 40.8≤v21≤41, 63.2≤v22≤63.4, 63.2≤v23≤63.4, 67.7≤v24≤67.

9.

5. The ultraviolet lithography lens according to claim 1, wherein: The thickness of the first lens is d1, the thickness of the second lens is d2, the thickness of the third lens is d3, the thickness of the fourth lens is d4, the thickness of the fifth lens is d5, the thickness of the sixth lens is d6, the thickness of the seventh lens is d7, the thickness of the eighth lens is d8, the thickness of the ninth lens is d9, the thickness of the tenth lens is d10, the thickness of the eleventh lens is d11, the thickness of the twelfth lens is d12, the thickness of the thirteenth lens is d13, the thickness of the fourteenth lens is d14, and the thickness of the The thickness of the fifteenth lens is d15, the thickness of the sixteenth lens is d16, the thickness of the seventeenth lens is d17, the thickness of the eighteenth lens is d18, the thickness of the nineteenth lens is d19, the thickness of the twentieth lens is d20, the thickness of the twenty-first lens is d21, the thickness of the twenty-second lens is d22, the thickness of the twenty-third lens is d23, and the thickness of the twenty-fourth lens is d24, wherein: 7.43 mm ≤ d1 ≤ 8.43 mm, 19.08 mm ≤ d2 ≤ 20.08 mm, 19. 5mm≤d3≤20.5mm, 6.65mm≤d4≤7.65mm, 6.5mm≤d5≤7.5mm, 6.5mm≤d6≤7.5mm, 16.22mm≤d7≤17.22mm, 11.97mm≤d8≤12.97m m, 18mm≤d9≤19mm, 13.02mm≤d10≤14.02mm, 14.16mm≤d11≤15.16mm, 6.5mm≤d12≤7.5mm, 6.5mm≤d13≤7.5mm, 14.16mm≤d1 4≤15.16mm, 13.02mm≤d15≤14.02mm, 18mm≤d16≤19mm, 11.97mm≤d17≤12.97mm, 16.22mm≤d18≤17.22mm, 6.5mm≤d19≤7.5 mm, 6.49mm≤d20≤7.49mm, 6.65mm≤d21≤7.65mm, 19.49mm≤d22≤20.49mm, 19.08mm≤d23≤20.08mm, 7.43mm≤d24≤8.43mm.

6. The ultraviolet lithography lens according to claim 5, characterized in that: The distance between the first lens and the second lens is L1, the distance between the second lens and the third lens is L2, the distance between the third lens and the fourth lens is L3, the distance between the fourth lens and the fifth lens is L4, the distance between the fifth lens and the sixth lens is L5, the distance between the sixth lens and the seventh lens is L6, the distance between the seventh lens and the eighth lens is L7, the distance between the eighth lens and the ninth lens is L8, the distance between the ninth lens and the tenth lens is L9, the distance between the tenth lens and the eleventh lens is L10, and the distance between the eleventh lens and the twelfth lens is L11. The distance between the twelfth lens and the thirteenth lens is L12, the distance between the thirteenth lens and the fourteenth lens is L13, the distance between the fourteenth lens and the fifteenth lens is L14, the distance between the fifteenth lens and the sixteenth lens is L15, the distance between the sixteenth lens and the seventeenth lens is L16, the distance between the seventeenth lens and the eighteenth lens is L17, the distance between the eighteenth lens and the nineteenth lens is L18, the distance between the nineteenth lens and the twentieth lens is L19, the distance between the twentieth lens and the twenty-first lens is L20, and the distance between the twenty-first lens and the twenty-first lens is L21. The distance between the 22nd lens and the 23rd lens is L21, the distance between the 22nd lens and the 23rd lens is L22, and the distance between the 23rd lens and the 24th lens is L23, wherein: 26.61mm≤L1≤27.61mm, 1.13mm≤L2≤2.13mm, 103.34mm≤L3≤113.34mm, 15mm≤L4≤16mm, 10.68mm≤L5≤11.68mm, 0.44mm≤L6≤0.54mm, 0.44mm≤L7≤0.54mm, 0.44mm≤L8≤0.54mm, 0.44mm≤L9≤0.54mm, 0.45mm≤L10≤0.55m m, 34.97mm≤L11≤35.97mm, 11.98mm≤L12≤12.98mm, 34.97mm≤L13≤35.97mm, 0.45mm≤L14≤0.55mm, 0.44mm≤L15≤0.54mm, 0.44mm≤L16≤0.54mm, 0.44mm ≤L17≤0.54mm, 0.44mm≤L18≤0.54mm, 10.68mm≤L19≤11.68mm, 15mm≤L20≤16mm, 103.34mm≤L21≤113.34mm, 1.13mm≤L22≤2.13mm, 26.61mm≤L23≤27.

61.

7. The ultraviolet lithography lens according to claim 1, wherein: The ultraviolet lithography lens further includes an aperture, and the aperture is arranged between the twelfth lens and the thirteenth lens.

8. The ultraviolet lithography lens according to claim 7, wherein: The first lens, the second lens, the third lens, the fourth lens, the fifth lens, the sixth lens, the seventh lens, the eighth lens, the ninth lens, the tenth lens, the eleventh lens, and the twelfth lens together constitute a first lens group, and the thirteenth lens, the fourteenth lens, the fifteenth lens, the sixteenth lens, the seventeenth lens, the eighteenth lens, the nineteenth lens, the twentieth lens, the twenty-first lens, the twenty-second lens, the twenty-third lens, and the twenty-fourth lens together constitute a second lens group, and the first lens group and the second lens group are symmetrically arranged relative to the aperture stop.

9. The ultraviolet lithography lens according to claim 1, wherein: The object side numerical aperture of the ultraviolet lithography lens is NA, NA=0.

13.

10. A photolithography machine, characterized in that: The lithography machine comprises: A workbench for placing the substrate to be processed; A mask plate is arranged above the workbench; The UV lithography lens according to any one of claims 1 to 9, wherein the UV lithography lens is disposed between the mask and the workbench; and The ultraviolet light source is used to emit ultraviolet light toward the substrate, and the ultraviolet light passes through the mask and the ultraviolet photolithography lens in sequence to reach the substrate.

Images