Manipulator device for storing and taking semiconductor wafer storage box

Abstract

The utility model provides a manipulator device for storing and taking a semiconductor wafer storage box, which is stable in structure and accurate in operation. The device comprises a base, a double-arm manipulator, a rotating shaft, a hollow rotating platform, a front-back moving assembly, a linear guide rail and a tooth fork. The base is of a horizontal long-strip-shaped structure, is kept stable through the supporting legs and has a damping function. And the double-arm manipulator is vertically arranged on the base and has a height difference design so as to meet the operation requirements of wafer storage boxes with different heights. And the rotating shaft penetrates through the hollow rotating platform, so that the double-arm manipulator has a flexible rotating function. The front-back moving assembly is matched with the linear guide rail, and smoothness of horizontal sliding is ensured. The tooth forks are installed on the front-back moving assembly, protrusions are designed to be matched with positioning holes in the bottoms of the wafer boxes, and it is guaranteed that the wafer boxes are stably and accurately positioned in the transferring process. The device is suitable for efficient access operation of semiconductor wafers and has the advantages of being compact in structure, accurate in positioning and efficient in operation.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a manipulator structure for a semiconductor wafer box, which is suitable for stably grasping and efficiently moving the wafer box during storage, transportation and processing of the semiconductor wafer box. Background Art

[0002] In the semiconductor manufacturing process, wafers are core materials, and their processing, storage, and transportation require extremely high precision and stability from equipment. To protect wafers from vibration, collisions, and other impacts during storage, access, and transportation, robotic devices are typically used to transfer wafer cassettes from the storage area to the processing area and return them to the storage area after processing. This operation requires the robotic device to possess high-precision grasping, positioning, and movement capabilities.

[0003] Existing semiconductor wafer storage and retrieval manipulators typically use single-arm or multi-arm structures, but there are still some problems in practical applications. First, single-arm manipulators often require additional mechanical movement and time when performing multiple tasks (such as accessing multiple wafer storage boxes simultaneously), which leads to reduced operational efficiency. While multi-arm manipulators can improve operational efficiency to a certain extent, their structure is complex, difficult to control, and they are prone to mutual interference during operation, affecting the stability and safety of the entire system.

[0004] Furthermore, existing robotic arms are cumbersome to adjust and position when handling wafers due to the varying heights and angles of wafer cassettes. This increases the complexity of the control system and reduces operational flexibility. Some robotic arms employ height-difference structures to accommodate cassettes of varying heights, but these structures often lack precise positioning control, easily causing slight displacement of the cassettes during the pick-up or placement process, potentially compromising the safety of the wafers.

[0005] In terms of structural design, many manipulators lack a stable support mechanism during rotation and movement, causing the manipulator's rotation axis to wear or loosen after prolonged operation, affecting rotational accuracy. Furthermore, existing manipulator bases often lack effective vibration damping measures, especially on uneven surfaces. This can easily cause minor vibrations during operation, compromising the manipulator's grip stability and positioning accuracy.

[0006] To address these issues, existing technologies have attempted to introduce rolling bearings and hollow rotating platforms to provide additional support. However, these designs often only enhance rotational stability and fail to effectively address the flexibility required for multi-directional operation. Furthermore, the structural design of the forward and backward moving components in existing technologies also has certain flaws. Some manipulators achieve horizontal sliding through guide rails and sliders, but these lack sufficient sliding precision and are prone to drift or jamming, affecting the efficiency and stability of wafer transfer.

[0007] Against this backdrop, the present invention proposes a new robotic arm device that ensures precise horizontal positioning and smooth movement of the arm by providing linear guide rails and slider structures on the forward and backward moving components. At the same time, a tooth fork structure is added, and protrusions are provided on the tooth forks to fit the positioning holes of the wafer storage box to ensure the stability and precise positioning of the wafer box during transportation. The present invention aims to provide an efficient and stable wafer storage and retrieval robotic arm device that can adapt to multi-height and multi-directional operation requirements, thereby overcoming the shortcomings of existing technologies and improving the safety and efficiency of wafer storage, retrieval, and transportation during semiconductor manufacturing. Utility Model Content

[0008] The purpose of this utility model is to provide a robot device for storing and accessing semiconductor wafer storage boxes. Through reasonable structural design, the robot can adapt to the operating requirements of wafer storage boxes of different heights and angles, while ensuring the stability and safety of the wafers during transportation.

[0009] To achieve the above objectives, the present invention provides the following technical solutions:

[0010] It includes a manipulator base, a fixed bracket, a rotating shaft, a hollow rotating platform, a forward and backward moving component, mounting screws, a linear guide rail and a tooth fork;

[0011] The manipulator base is a horizontal long strip structure with a number of supporting legs at the bottom for supporting the entire manipulator structure.

[0012] The fixing bracket is vertically mounted on the upper surface of the manipulator base and includes two arms arranged in parallel, and the axes of the two arms are symmetrically arranged in the horizontal direction;

[0013] The arms of the fixing bracket form height differences when installed to accommodate the operating requirements of wafer storage boxes of different heights;

[0014] The hollow rotating platform surrounds the rotating shaft in a ring shape and is connected to the fixed bracket through a connecting piece;

[0015] The forward and backward moving assembly is arranged on a linear guide rail and slides in a horizontal direction through the linear guide rail. The mounting screw passes vertically through the forward and backward moving assembly and fixes it on the tooth fork.

[0016] The tooth fork is fixedly connected to the front-rear moving assembly.

[0017] Furthermore, the two arms are arranged on the same horizontal line, the axes of rotation are parallel, and each arm is mounted on the manipulator base through an independent fixed bracket.

[0018] Furthermore, the annular structure of the hollow rotating platform extends along the axial direction of the rotating shaft and is provided with a plurality of mounting holes on its outer circumference.

[0019] Furthermore, the linear guide rail is fixedly installed on the upper surface of the hollow rotating platform, and the slider can slide horizontally along the linear guide rail.

[0020] Furthermore, the tine is provided with a plurality of independent protrusions, and the shapes and positions of the protrusions correspond to the positioning holes at the bottom of the wafer box.

[0021] The robotic arm device for storing and accessing semiconductor wafer storage boxes provided by the present invention achieves high efficiency, stability, and safety in the process of storing and accessing wafer boxes through an innovative structural design. Compared with the existing technology, the present invention has the following significant beneficial effects:

[0022] First, the device's two arms are symmetrically arranged horizontally, achieving height differences and ensuring the robot's balance and stability during operation. The combined support structure of the rotating axis and the hollow rotating platform effectively prevents jitter when the robot grasps or deposits wafer cassettes, ensuring operational stability and precision and reducing grasping errors caused by mechanical vibration or offset.

[0023] By incorporating a hollow rotating platform and a rotation axis, this robot can flexibly rotate in multiple directions to accommodate wafer cassette handling at various angles and positions. Its dual arms can operate simultaneously at varying heights, enhancing its adaptability in complex environments. This structure not only simplifies operation but also reduces the time required for frequent position adjustments, significantly improving production efficiency. It is suitable for high-volume storage and frequent access, enhancing the overall efficiency of the wafer storage and access process. It avoids interference with other equipment or robots, ensuring safety and continuity in compact storage environments.

[0024] The modular design of each component allows each functional unit to be independently disassembled and maintained, significantly reducing maintenance difficulty and improving maintenance efficiency. In particular, the modular design of the forward and backward moving components and rotating platform allows for rapid replacement of equipment failures or worn parts, reducing downtime and improving equipment availability.

[0025] The utility model discloses a manipulator device for accessing a semiconductor wafer storage box, which effectively solves the problems of insufficient stability, efficiency and avoidance in the prior art through an innovative combination of dual arms, multiple axes and a height difference structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 : A side view of the robotic arm device of the semiconductor wafer storage box in the present invention;

[0027] Figure 2 : A front view of the manipulator device of the semiconductor wafer storage box in the utility model;

[0028] Figure 3 : Side view and partial enlarged view of the manipulator device of the semiconductor wafer storage box in the utility model;

[0029] Figure 4 : Schematic diagram of the cooperation between the manipulator device of the semiconductor wafer storage box and the wafer storage box in the present invention. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0031] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0032] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, features defined as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "several" means two or more, unless otherwise specifically defined.

[0033] See also Figures 1-4As shown, this embodiment provides a robot device specifically for storing and accessing semiconductor wafer storage boxes. Its design integrates a series of innovative structural features to enable the robot to adapt to multi-level and complex storage environments while ensuring high efficiency and stability of operation.

[0034] The structural basis of the manipulator device is the base 2, which is a horizontal long strip. Its design purpose is to provide a maximum support surface within a limited space to ensure the stability of the entire device. A number of support legs 3 are evenly distributed and installed at the bottom of the base 2. The support legs 3 are designed with an adjustment function, which can fine-tune the height according to the actual ground conditions, so that the base 2 can always remain horizontal under different ground conditions. This adjustment function effectively improves the adaptability of the device. A shock-absorbing pad is provided at the bottom of the support leg 3. By absorbing vibrations, the shock-absorbing pad can effectively prevent the manipulator from shaking when grabbing and moving storage boxes, thereby improving the stability and accuracy of the operation. The support leg 3 is connected to the base 2 by an adjusting screw, which is convenient for adjustment and installation. Especially under uneven ground conditions, by fine-tuning the height of the support leg, the device can run smoothly on various types of ground.

[0035] The fixed bracket 1 is vertically mounted on the upper surface of the base 2. The fixed bracket 1 is provided with two arms arranged in parallel and symmetrically in the horizontal direction. This symmetrical design provides balance during the operation of the robot, thereby avoiding the problem of tilting or offset when operating storage boxes in different positions. The special feature of the arm is its height difference design, that is, the top of the arm bracket has different heights. This structural design allows the two arms to operate wafer storage boxes of different heights simultaneously, reducing the need for frequent height adjustments of the arms during operation and significantly improving work efficiency.

[0036] The rotating shaft 4 serves as the rotating fulcrum of the hollow rotating platform 5, and its end passes through the hollow rotating platform 5 to achieve flexible adjustment of the arm's rotation angle. The hollow rotating platform 5 is annular and arranged around the outer circumference of the rotating shaft 4. The annular structure not only reduces the platform's own weight but also increases its supporting force, making the rotating shaft 4 more stable when performing multi-angle operations. In addition, the hollow rotating platform 5 is made of lightweight, high-strength materials, which not only maintains the structural strength but also reduces its own weight, thereby increasing the flexibility of the rotating shaft 4. This design can also effectively reduce the wear caused by rotation during long-term operation, further extending the life of the device.

[0037] The forward and backward moving component 6 is installed on the hollow rotating platform 5 and realizes horizontal sliding through the linear guide rail 7. The linear guide rail 7 is fixed on the upper surface of the hollow rotating platform 5, and the forward and backward moving component 6 is connected to the linear guide rail 7 through the slider 8. The design of the slider 8 ensures the smooth sliding of the forward and backward moving component 6, and there will be no jamming or offset even in long-term high-frequency operation. The smoothness of this sliding effectively improves the position accuracy of the wafer storage box during the storage and retrieval process, avoiding errors caused by the jamming of the slider. The forward and backward moving component 6 is equipped with a screw 9 to fix the forward and backward moving component 6 with the tooth fork 10, so that the tooth fork 10 can slide synchronously with the forward and backward moving component 6. The fixing method of the screw 9 ensures that the movement trajectory of the tooth fork 10 is consistent with the forward and backward moving component 6, thereby providing a guarantee for the accurate placement and transportation of the wafer storage box.

[0038] The tooth fork 10 is a component in the manipulator device specifically used to grab and transport the wafer box 11. In order to ensure that the wafer box does not shift or slide during the transportation process, a number of protrusions 12 are designed on the tooth fork 10. The positions and shapes of these protrusions correspond to the positioning holes 12 at the bottom of the wafer box 11. When the tooth fork 10 grabs the wafer box, the protrusions can accurately dock with the positioning holes 12, so that the wafer box remains stable on the tooth fork 10. This design not only prevents the wafer box from accidentally shifting during movement, but also ensures the safety and stability of the operation. Through the precise positioning function of the protrusions, the tooth fork 10 can effectively maintain the position of the wafer box during rapid transportation, reducing the possibility of misoperation and improving the overall accuracy of the access operation. This structure is particularly suitable for the needs of fast and efficient operations in high-density wafer storage environments.

[0039] The structural design and functions of the entire robotic arm device complement each other, and the coordination between the various components is tight and efficient. The base 2 provides a solid foundation, and the support legs 3 further enhance the overall stability through shock absorption and adjustment functions. The combination of the rotating shaft 4 and the hollow rotating platform 5 ensures the smoothness of the rotation process and reduces the wear caused by rotation. The coordination of the front and rear moving components 6 and the linear guide 7 provides smooth horizontal sliding, allowing the device to always maintain precise positioning during the storage and retrieval process. The tooth fork 10 provides stable grasping and transfer support for the wafer storage box through the raised positioning function.

[0040] This integrated design enables the manipulator device in this embodiment to meet the high-precision requirements of semiconductor manufacturing. The high adaptability and stability of the device not only improves operational efficiency, but also reduces the risk of errors caused by position offset or vibration. The structural design simplifies the operation and maintenance process while ensuring functionality, so that the device maintains excellent stability and reliability during long-term high-frequency use. Through the coordinated cooperation of the base 2, the fixed bracket 1, the rotating shaft 4, the hollow rotating platform 5, the front and rear moving components 6, the linear guide 7 and the tooth fork 10, the manipulator device can efficiently meet the wafer access requirements in the modern semiconductor manufacturing process. Whether it is the precise positioning of the device or the rapid pick-and-place capability, the mutual cooperation between the components meets the requirements of efficient and stable work while ensuring the overall performance.

[0041] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely preferred examples of the present invention and are not intended to limit the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and improvements fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A robotic device for accessing a semiconductor wafer storage box, characterized in that: It includes a manipulator base, a fixed bracket, a rotating shaft, a hollow rotating platform, a forward and backward moving component, mounting screws, a linear guide rail and a tooth fork; The manipulator base is a horizontal long strip structure with a number of supporting legs at the bottom for supporting the entire manipulator structure. The fixing bracket is vertically mounted on the upper surface of the manipulator base and includes two arms arranged in parallel, and the axes of the two arms are symmetrically arranged in the horizontal direction; The arms of the fixing bracket form height differences when installed to accommodate the operating requirements of wafer storage boxes of different heights; The hollow rotating platform surrounds the rotating shaft in a ring shape and is connected to the fixed bracket through a connecting piece; The forward and backward moving assembly is arranged on a linear guide rail and slides in a horizontal direction through the linear guide rail. The mounting screw passes vertically through the forward and backward moving assembly and fixes it on the tooth fork. The tooth fork is fixedly connected to the front-rear moving assembly.

2. The robotic arm device for accessing a semiconductor wafer storage box according to claim 1, characterized in that: The two arms are arranged on the same horizontal line, the rotation axes are parallel, and each arm is mounted on the manipulator base through an independent fixed bracket.

3. The robot device for accessing a semiconductor wafer storage box according to claim 1, characterized in that: The annular structure of the hollow rotating platform extends along the axial direction of the rotating shaft and is provided with a plurality of mounting holes on its outer circumference.

4. The robot device for accessing a semiconductor wafer storage box according to claim 1, characterized in that: The linear guide rail is fixedly installed on the upper surface of the hollow rotating platform, and the slider can slide horizontally along the linear guide rail.

5. The robot device for accessing a semiconductor wafer storage box according to claim 1, characterized in that: The tine is provided with a plurality of independent protrusions, and the shapes and positions of the protrusions correspond to the positioning holes at the bottom of the wafer box.

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