Dust extraction device and laser processing equipment

Abstract

The utility model discloses a dust extraction device and laser processing equipment, the dust extraction device comprises a dust extraction piece, a mounting seat, a cutting nozzle and a locking mechanism, a dust extraction channel is arranged in the dust extraction piece, a dust extraction inlet is formed in one side of the dust extraction piece, and a first mounting hole is formed in the other side of the dust extraction piece. And a second mounting hole corresponding to the first mounting hole is formed in the mounting seat, so that a light path channel for laser to pass through can be formed. And the locking mechanism is used for locking the mounting seat and the dust extraction piece. In the unlocking state, the dust extraction piece can rotate relative to the installation base, the end, attached to the dust extraction piece, of the installation base is exposed, the optical element in the installation base can be maintained, and the installation base and the dust extraction piece are attached and locked after maintenance is completed. The dust extraction piece and the mounting base do not need to be completely disassembled, and disassembly, assembly and maintenance are simpler and more efficient.

Description

Technical Field

[0001] The present application relates to the field of laser processing equipment, and in particular to a dust extraction device and laser processing equipment. Background Art

[0002] When using a laser to process a workpiece such as a wafer, the material will be instantly vaporized, and the vaporized material will form dust and smoke after solidification. If the dust and smoke are not cleaned up in time, it will affect the stability of the laser beam and affect the grooving effect of the wafer. In addition, it will also pollute the on-site environment. Therefore, it is necessary to equip an effective dust extraction device. The dust extraction device in the related art includes a dust extraction part fixedly connected to the cutting head. When the equipment needs to be maintained, the dust extraction part needs to be completely removed, and the disassembly and assembly process is very cumbersome. Utility Model Content

[0003] The present application proposes a dust extraction device and laser processing equipment, which can easily and efficiently disassemble and assemble the dust extraction parts when maintaining the equipment.

[0004] The present application proposes a dust extraction device, comprising:

[0005] A dust extraction member having a dust extraction channel internally structured therein, wherein a dust extraction inlet is provided on one side of the dust extraction member, and a first mounting hole corresponding to the dust extraction inlet is provided on the other side of the dust extraction member, wherein the dust extraction inlet and the first mounting hole are respectively connected to the dust extraction channel;

[0006] A mounting base is located on a side of the dust extraction member where the first mounting hole is provided, and the mounting base is hinged to the dust extraction member; the mounting base is also provided with a second mounting hole, and the second mounting hole is used to install the optical element;

[0007] A cutting nozzle is provided in the first mounting hole and is located in the dust extraction channel, wherein a light outlet is provided at the end of the cutting nozzle and the light outlet faces the dust extraction inlet;

[0008] The locking mechanism is used to lock the mounting seat and the dust extraction member; in the locked state, the mounting seat and the dust extraction member cooperate with each other, the first mounting hole is connected to the second mounting hole, and an optical path is formed.

[0009] In some embodiments, the locking mechanism includes a hasp lock, which includes a hook provided on the dust extraction piece, a handle hinged to the mounting base, and a hasp hinged to the handle, wherein the hasp is used to dock with the hook.

[0010] In some embodiments, the mounting seat is close to a countersunk hole on one side of the dust extraction member, the optical element is arranged in the countersunk hole, and the dust extraction device further includes a sealing ring arranged on the outer periphery of the countersunk hole.

[0011] In some embodiments, the dust extraction device further includes an adjustment member disposed through a side wall of the countersunk hole, and the adjustment member is used to adjust the position of the optical element in the mounting position.

[0012] In some embodiments, the dust extraction device further includes an air knife provided on the dust extraction member, wherein the air outlet of the air knife faces the cutting nozzle and is connected to the dust extraction channel.

[0013] In some embodiments, the mounting base is provided with two second mounting holes arranged side by side, the dust extractor is provided with two first mounting holes, and the second mounting holes are arranged in a one-to-one correspondence with the first mounting holes.

[0014] In some embodiments, a flow guide is provided in the dust extraction channel, and the flow guide is arranged along the air outlet direction of the wind knife; the flow guide is located on one side of the dust extraction inlet, used to separate the two first mounting holes, and the cutting nozzle is arranged on both sides of the flow guide.

[0015] In some embodiments, the dust extraction part includes a first section and a second section connected to each other, and the first section and the second section are arranged at a certain angle; the first mounting hole and the dust extraction inlet are arranged in the first section, the first section is located on the lower side of the mounting seat, and the second section is located on the peripheral side of the mounting seat, and the second section is also provided with a dust extraction outlet connected to the dust extraction channel.

[0016] The present application also proposes a laser processing device, comprising the above-mentioned dust extraction device.

[0017] In some embodiments, the laser processing equipment further includes a frame for mounting the mounting seat, and a driving mechanism drivingly connected to the frame.

[0018] This application proposes a dust extraction device and laser processing equipment. The dust extraction device includes a dust extraction member, a mounting seat cutting nozzle, and a locking mechanism. The dust extraction member is provided with a dust extraction channel inside, a dust extraction inlet is provided on one side of the dust extraction member, and a first mounting hole is provided on the other side. A second mounting hole corresponding to the first mounting hole is provided on the mounting seat, thereby forming an optical path for the laser to pass through. The mounting seat is hinged to the dust extraction member, and the locking mechanism is used to lock the two. In the unlocked state, the dust extraction member can be rotated relative to the mounting seat, and the end of the mounting seat that is in contact with the dust extraction member is exposed, so that the optical elements therein can be maintained. After maintenance is completed, the two are locked together. There is no need to completely remove the dust extraction member and the mounting seat, making disassembly and maintenance simpler and more efficient. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a structural diagram of a dust extraction device in one embodiment of the present application;

[0020] Figure 2 for Figure 1A schematic structural diagram of the dust extraction device from another perspective in the embodiment;

[0021] Figure 3 for Figure 1 A schematic structural diagram of the dust extraction device from another perspective in the embodiment;

[0022] Figure 4 This is a schematic structural diagram of a dust extraction component in one embodiment of the present application;

[0023] Figure 5 This is a structural diagram of a mounting base in one embodiment of the present application;

[0024] Figure 6 This is a structural diagram of a laser processing device in one embodiment of the present application.

[0025] Description of labels:

[0026] 10. Dust extraction member; 11. First section; 12. Dust extraction inlet; 13. First mounting hole; 14. Second section; 15. Dust extraction outlet; 16. Cutting nozzle; 17. Flow guide; 20. Mounting seat; 21. Second mounting hole; 22. Mounting position; 23. Adjustment member; 24. Optical element; 30. Locking mechanism; 31. Hook; 32. Lock; 33. Hinge; 40. Air knife; 50. Mounting block; 61. Frame; 62. Drive mechanism;

[0027] The purpose, features and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the schemes in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments in this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0029] It should be noted that all directional indications such as up, down, left, right, front, back, etc. in the embodiments of the present application are only used to explain the relative position relationship, movement status, etc. between the various components in a certain specific posture as shown in the accompanying drawings. If the specific posture changes, the directional indication will also change accordingly.

[0030] It should also be noted that when an element is referred to as being "fixed on" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element.

[0031] In addition, the descriptions of "first", "second", etc. in this application are for descriptive purposes only and should not be understood as indicating or implying their relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between the various embodiments can be combined with each other, but this must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0032] This application proposes a dust extraction device, referring to Figures 1 to 6 The dust extraction device includes: a dust extraction member 10 having a dust extraction passage configured therein; a dust extraction inlet 12 communicating with the dust extraction passage on one side of the dust extraction member 10; and a first mounting hole 13 facing the dust extraction inlet 12 on the other side; a mounting base 20 located on the side of the dust extraction member 10 where the first mounting hole 13 is located and hingedly connected to the dust extraction member 10; a second mounting hole 21 provided on the mounting base 20 for mounting an optical element 24; a cutting nozzle 16 located on the first mounting hole 13 and in the dust extraction passage; a light outlet provided at the end of the cutting nozzle 16, the light outlet facing the dust extraction inlet 12. A locking mechanism 30 is used to lock the mounting base 20 with the dust extraction member 10. In the locked state, the mounting base 20 and the dust extraction member 10 cooperate with each other, the first mounting hole 13 communicates with the second mounting hole 21, and forms an optical path.

[0033] In this embodiment, the mounting base 20 is hinged to one end of the dust extraction member 10 through a hinge 33, and the two can rotate relative to the hinge axis to move closer to each other or move away from each other. When the two are in contact, they are in a mating state, and the first mounting hole 13 is docked and connected with the second mounting hole 21, thereby forming an optical path for the laser to pass through. When the two are separated, the first mounting hole 13 and the second mounting hole 12 are away from each other. The cutting nozzle 16 is installed on the first mounting hole 13, and is in an inverted cone shape. The lower end face has a light outlet, which can shrink the light path. In the above-mentioned mating state, the laser beam is focused by the optical element 24 and then emitted through the light outlet and the dust extraction inlet 12 in sequence. The cutting nozzle 16 can protect the optical element 24 from dust contamination and reduce the maintenance frequency of the focusing mirror.

[0034] The second mounting hole 21 is also provided with a mounting position 22 for mounting an optical element 24. The mounting base 20 is hinged to the dust extractor 10, and the locking mechanism 30 is used to lock the two. In the unlocked state, the dust extractor 10 can be rotated relative to the mounting base 20, and the mounting base 20 is exposed on the side of the dust extractor 10, so that the optical element 24 therein can be maintained, and the two can be locked together after the maintenance is completed. There is no need to completely remove the dust extractor 10 and the mounting base 20, and disassembly and maintenance are simpler and more efficient. It is worth noting that the above-mentioned bonding can be a direct bonding between the two, or an indirect bonding, such as providing a gasket on any bonding surface of the two to form an indirect bonding.

[0035] In some embodiments, reference Figures 1 to 6 The locking mechanism 30 includes a hasp lock, which includes a hook 31 provided on the dust extraction member 10, a handle hinged to the mounting base 20, and a hasp hinged to the handle, and the hasp can be docked with the hook 31. In this embodiment, in the locked state, the hook 31 is connected to the hasp, and the handle is in the locked position. By rotating the handle forward, the hasp and the hook 31 are unlocked, and the hasp and the hook 31 can be loosened for subsequent maintenance work. After the maintenance is completed, the hasp is docked with the hook 31 again, and the handle is turned back to the locked position to re-enter the locked state. This locking structure is simple and reliable and can be opened and locked quickly. It is worth noting that the above-mentioned locking mechanism 30 is not limited to the hasp lock structure, and a knob locking solution can also be adopted. A knob can be rotatably set on the mounting base 20, and a hook is set at one end of the knob. A lock slot corresponding to the hook is set on the dust extraction member 10, and the hook can be entered or exited from the lock slot by rotating the knob.

[0036] In some embodiments, reference Figures 1 to 6 The mounting position 22 includes a countersunk hole on the side of the mounting base 20 near the dust extraction element 10. The dust extraction device also includes a sealing ring disposed on the outer periphery of the countersunk hole. The dust extraction device also includes an adjustment member 23 disposed through the sidewall of the countersunk hole. The adjustment member 23 is used to adjust the position of the optical element 24 within the mounting position 22. In this embodiment, the optical element 24 may be a focusing lens, which is disposed within the countersunk hole to focus the passing laser beam and simultaneously seal the optical path. An annular groove is provided on the outer periphery of the countersunk hole for mounting the sealing ring, which further provides a sealing effect. The sidewall of the mounting base 20 is also provided with an adjustment hole connected to the countersunk hole. The adjustment member 23 may be a set screw disposed in the adjustment hole. The end of the set screw extends from the sidewall of the countersunk hole into the countersunk hole. The set screws are arranged along the circumference of the countersunk hole. At least three set screws may be provided. The set screws abut against the sidewall of the optical element 24, acting as a position limiter. Adjusting the position of the optical element 24 ensures that the laser beam passes through its center. Of course, the optical element 24 is not limited to a focusing lens; it may also be a flat lens, etc.

[0037] In some embodiments, reference Figures 1 to 6The dust extraction device further includes an air knife 40 mounted on the dust extraction member 10. The air outlet of the air knife 40 faces the cutting nozzle 16 and is connected to the dust extraction passage. In this embodiment, when the air flow rate of the air knife 40 and the dust extraction flow rate form a countercurrent, the dust extraction effect can be improved, preventing dust from entering the cutting nozzle and contaminating the lens and affecting the cutting effect.

[0038] Furthermore, the mounting base 20 is provided with two second mounting holes 21 arranged side by side, and the dust extraction member 10 is provided with two first mounting holes 13, with the second mounting holes 21 being arranged in a one-to-one correspondence with the first mounting holes 13. In this embodiment, a mounting block 50 is provided at the upper end of the mounting base 20 away from the dust extraction member 10, and the mounting block 50 is provided with two third mounting holes, which are in a one-to-one correspondence with the second mounting holes 21 and can be used to install two sets of optical path protection members. Two cutting nozzles 16 can be provided in the dust extraction member 10. Thus, the two cutting nozzles 16 can output laser beams simultaneously for synchronous cutting, and of course, they can also output laser beams of the same or different energy levels alternately to meet different processing requirements.

[0039] In some embodiments, reference Figures 1 to 6 , a flow guide 17 is provided in the dust extraction channel, and the flow guide 17 is arranged along the air outlet direction of the wind knife 40; the flow guide 17 is located on one side of the dust extraction inlet 12, facing the dust extraction inlet 12, and can be used to separate the two first mounting holes 13, and the two cutting nozzles 16 are arranged on both sides of the flow guide 17. The flow guide 17 can be a partition. The setting of the flow guide 17 can further guide the airflow in the dust extraction channel, reduce turbulence, and speed up the absorption efficiency of processing smoke. Of course, the setting of the flow guide 17 can also isolate the two cutting nozzles 16 to a certain extent to avoid mutual influence. Due to the setting of the flow guide 17, two air guide grooves are arranged side by side at the separation of the dust extraction channel, and the wind knife 40 is arranged at the end of the air guide groove. A wind knife 40 can be set separately in each air guide groove, which can also reduce the mutual interference of the airflow in the air guide groove.

[0040] In some embodiments, reference Figures 1 to 6 The dust extraction member 10 also includes a first section 11 and a second section 14 connected to each other, arranged at a predetermined angle. A first mounting hole 13 and a dust extraction inlet 12 are provided in the first section 11. The first section 11 is located below the mounting base 20, while the second section 14 is located around the mounting base 20. The second section 14 is provided with a dust extraction outlet 15 connected to the dust extraction channel. The dust extraction device also includes a fan connected to the dust extraction outlet 15. In this embodiment, the dust extraction member 10 can be configured in an L-shape, with the second section 14 extending upward. This ensures that the external pipeline connected to the second section 14 is arranged upward to avoid interference with the cutting table or workpiece below.

[0041] This application also proposes a laser processing device, referring to Figures 1 to 6The laser processing equipment includes the aforementioned dust extraction device. The laser processing equipment also includes a frame 61 for mounting the aforementioned mounting base 20, and a drive mechanism 62 drivingly connected to the frame 61. The drive mechanism 62 can be a linear drive module for driving the dust extraction device to move in a set direction, specifically along the Z-axis. The aforementioned optical path shield can also be located within the frame 61 to provide protection for the optical path shield.

[0042] The dust extraction device and laser processing equipment in the embodiments of the present application operate as follows: The dust extraction device comprises a dust extraction member 10, a mounting base 20, a cutting nozzle 16, and a locking mechanism 30. The dust extraction member 10 is internally provided with a dust extraction passage, a dust extraction inlet 12 on one side, and a first mounting hole 13 on the other side. The mounting base 20 is provided with a second mounting hole 21 corresponding to the first mounting hole 13, thereby forming an optical path for the laser to pass through. The cutting nozzle 16, located at the lower end of the first mounting hole 13, narrows the optical path. The second mounting hole 21 also has a mounting position 22 for mounting an optical element 24. The mounting base 20 is hingedly connected to the dust extraction member 10, and the locking mechanism 30 is used to lock the two together. In the unlocked state, the dust extraction member 10 can rotate relative to the mounting base 20, exposing the end of the mounting base 20 that contacts the dust extraction member 10, allowing maintenance of the optical element 24 therein. After maintenance is completed, the two members are locked together. This eliminates the need to completely disassemble the dust extraction member 10 and the mounting base 20, making assembly and disassembly simpler and more efficient.

[0043] The above are only partial or preferred embodiments of the present application. Neither the text nor the drawings can limit the scope of protection of the present application. All equivalent structural transformations made using the contents of the present application specification and drawings under the overall concept of the present application, or direct / indirect application in other related technical fields are included in the scope of protection of the present application.

Claims

1. A dust extraction device, characterized in that: include: A dust extraction member having a dust extraction channel internally structured therein, wherein a dust extraction inlet is provided on one side of the dust extraction member, and a first mounting hole corresponding to the dust extraction inlet is provided on the other side of the dust extraction member, wherein the dust extraction inlet and the first mounting hole are respectively connected to the dust extraction channel; A mounting base is located on a side of the dust extraction member where the first mounting hole is provided, and the mounting base is hinged to the dust extraction member; the mounting base is also provided with a second mounting hole, and the second mounting hole is used to install the optical element; A cutting nozzle is provided in the first mounting hole and is located in the dust extraction channel, wherein a light outlet is provided at the end of the cutting nozzle and the light outlet faces the dust extraction inlet; A locking mechanism, used for locking the mounting seat and the dust extractor; In the locked state, the mounting seat and the dust extractor cooperate with each other, the first mounting hole and the second mounting hole are communicated with each other, and form an optical path channel.

2. The dust extraction device according to claim 1, characterized in that: The locking mechanism includes a buckle lock, which includes a hook provided on the dust extraction member, a handle hinged to the mounting seat, and a buckle hinged to the handle, wherein the buckle is used to dock with the hook.

3. The dust extraction device according to claim 1, characterized in that: The mounting seat is close to a countersunk hole on one side of the dust extracting member, the optical element is arranged in the countersunk hole, and the dust extracting device further includes a sealing ring arranged on the outer periphery of the countersunk hole.

4. The dust extraction device according to claim 3, characterized in that: The dust extraction device further comprises an adjusting member disposed through the side wall of the countersunk hole, and the adjusting member is used to adjust the position of the optical element in the mounting seat.

5. The dust extraction device according to any one of claims 1 to 4, characterized in that: The dust extraction device further comprises an air knife provided on the dust extraction member, wherein the air outlet of the air knife faces the cutting nozzle and is communicated with the dust extraction channel.

6. The dust extraction device according to claim 5, characterized in that: The mounting seat is provided with two second mounting holes arranged side by side, the dust extractor is provided with two first mounting holes, and the second mounting holes are arranged in a one-to-one correspondence with the first mounting holes.

7. The dust extraction device according to claim 6, characterized in that: A flow guide is provided in the dust extraction channel, and the flow guide is arranged along the air outlet direction of the wind knife; the flow guide is located on one side of the dust extraction inlet and is used to separate the two first mounting holes, and the cutting nozzles are arranged on both sides of the flow guide.

8. The dust extraction device according to claim 1, characterized in that: The dust extraction member includes a first section and a second section connected to each other, wherein the first section and the second section are arranged at a certain angle; The first mounting hole and the dust extraction inlet are provided in the first section. The first section is located at the lower side of the mounting seat. The second section is located at the peripheral side of the mounting seat. The second section is also provided with a dust extraction outlet connected to the dust extraction channel.

9. A laser processing device, characterized in that: The dust extraction device comprises the dust extraction device according to any one of claims 1 to 8.

10. The laser processing equipment according to claim 9, characterized in that The laser processing equipment further includes a frame for mounting the mounting seat, and a driving mechanism drivingly connected to the frame.

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