Horizontal LPCVD furnace door adjusting tool

Abstract

The utility model relates to a horizontal LPCVD furnace door adjusting tool which comprises a furnace door, a supporting beam, a vertical plate arranged at the front end of the supporting beam, a corrugated pipe arranged between the furnace door and the vertical plate, an adjusting bolt and a connecting seat arranged on the furnace door, a guide sleeve is horizontally arranged on the supporting beam in a penetrating mode, and the adjusting bolt is provided with a head part and a screw rod part. The rear portion of the vertical plate is connected with a limiting plate through a connecting piece, the screw part penetrates through the limiting plate, and the head of the screw part abuts against the limiting plate. The furnace door can be kept in the vertical state all the time, so that it is guaranteed that the furnace door can be tightly attached to the flange when the furnace door is closed, and the product quality can be guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor material production, in particular to a horizontal LPCVD furnace door adjustment tool. Background Art

[0002] A key process in the production of semiconductor silicon polished wafers is the back-sealing process. This process primarily uses low-pressure chemical vapor deposition to grow a thin layer of silicon dioxide or polysilicon on the back of the wafer. The mainstream equipment used for this process is a low-pressure horizontal back-sealing furnace. This process involves placing the silicon wafer into a quartz tube, tightening the furnace door to create a sealed chamber, and then using a vacuum pump to evacuate the tube to create a vacuum environment. TEOS gas is then introduced, and the pressure within the tube is controlled by the opening and closing angle of a butterfly valve.

[0003] Currently, if Figure 3 As shown, it includes a linear module 1, a table 11 arranged on the linear module, a support beam 2 arranged on the table, and a vertical plate 3 arranged at the front end of the support beam. The vertical plate 3 is connected to the furnace door 5 through a bellows 4. After the wafer to be processed is sent into the quartz tube 6, the linear module 1 drives the support beam 2 to move linearly, and the furnace door 5 moves toward the quartz tube 6 to realize the closing of the furnace door 5. In the process of closing the furnace door 5, there is an important requirement that the furnace door 5 is pressed onto the furnace door flange in a vertical state without any gap. The process of pressing the furnace door 5 requires a section of bellows 4 for buffering. The existing bellows 4 is relatively soft, which makes the furnace door 5 easy to deflect. Once deflected, the furnace door 5 cannot fit tightly with the flange and a gap will be formed. When vacuuming, a large amount of outside air will enter the quartz tube 6 and contaminate the silicon wafers. Utility Model Content

[0004] In view of the problems existing in the prior art, the utility model provides a horizontal LPCVD furnace door adjustment tool.

[0005] The technical solution adopted by the present invention to solve the above-mentioned technical problems is: a horizontal LPCVD furnace door adjustment tooling, including a furnace door, a support beam, a vertical plate arranged at the front end of the support beam, a bellows is provided between the furnace door and the vertical plate, and also includes an adjusting bolt and a connecting seat provided on the furnace door, a guide sleeve is horizontally penetrated on the vertical plate, the adjusting bolt has a head and a screw portion, the screw portion threadedly penetrates the guide sleeve and the end portion is rotatably connected to the connecting seat, the rear of the vertical plate is connected to a limiting plate through a connecting piece, the screw portion penetrates the limiting plate, and the head is against the limiting plate.

[0006] As a preferred solution, the screw portion has an external thread, and the guide sleeve is provided with an internal thread that matches the external thread.

[0007] As a preferred solution, the bellows is a stainless steel bellows.

[0008] As a preferred solution, the two ends of the bellows are provided with flanges, and the two flanges are fixedly connected to the furnace door and the vertical plate respectively through fixing bolts.

[0009] As a preferred solution, the vertical plate is located between the limiting plate and the furnace door.

[0010] As a preferred solution, the adjusting bolt also has an optical axis portion, which is located between the head and the screw portion. The optical axis portion and the screw portion are coaxially arranged, and the limiting plate is provided with a mounting through hole for the optical axis portion and the screw portion to pass through.

[0011] As a preferred solution, the connecting member includes two limit screws, which are respectively located on both sides of the screw part, and one end of the limit screw passes through the limit plate and the vertical plate in sequence. Two first locking nuts and two second locking nuts are provided on the thread of the limit screw. The two first locking nuts are respectively located on both sides of the limit plate, and the two second locking nuts are respectively located on both sides of the vertical plate.

[0012] As a preferred solution, the limiting plate is provided with a first mounting hole for the limiting screw to pass through, and the vertical plate is provided with a second mounting hole for the limiting screw to pass through, and the first mounting hole and the second mounting hole are coaxially arranged.

[0013] The beneficial effects of this application are as follows: 1. This application plays a role in supporting and adjusting the furnace door by providing an adjustment bolt and a guide sleeve. When the furnace door tilts forward, the adjustment bolt is rotated so that the head of the adjustment bolt is away from the vertical plate, thereby moving the furnace door backward. When the furnace door remains vertical, the adjustment bolt can be stopped from rotating. When the furnace door tilts backward, the adjustment bolt is rotated so that the head of the adjustment bolt is close to the vertical plate, thereby moving the furnace door forward. When the furnace door remains vertical, the adjustment bolt can be stopped from rotating. After the adjustment is completed, the furnace door always remains in a vertical state, thereby ensuring that the furnace door can fit tightly with the flange when closing the furnace door, thereby ensuring product quality. 2. The bellows is a stainless steel bellows with high strength and high corrosion resistance. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural diagram of the utility model;

[0015] Figure 2 It is a side view of the utility model;

[0016] Figure 3 It is a structural diagram of the prior art.

[0017] Markings in the figure: 1. Linear module, 11. Table, 2. Support beam, 3. Vertical plate, 31. Guide sleeve, 4. Bellows, 5. Furnace door, 6. Quartz tube, 7. Adjusting bolt, 71. Screw part, 72. Optical axis part, 8. Limit plate, 9. Limit screw, 91. First locking nut, 92. Second locking nut. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that in the description of the present invention, unless otherwise specified, the meaning of "multiple" is two or more; the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0019] See also Figure 1-2 The embodiment of the present invention provides a furnace door adjustment tooling for a horizontal LPCVD furnace, comprising a furnace door 5, a support beam 2, a vertical plate 3 arranged at the front end of the support beam 2, a bellows 4 being provided between the furnace door 5 and the vertical plate 3, an adjusting bolt 7 and a connecting seat 51 provided on the furnace door 5, a guide sleeve 31 being horizontally penetrated on the vertical plate 3, the guide sleeve 31 being welded to the vertical plate 3, the guide sleeve 31 being located above the bellows 4, the adjusting bolt 7 having a head and a screw portion 71, the screw portion 71 being threadedly penetrated through the guide sleeve 31 and the end portion being rotatably connected to the connecting seat 51, the rear of the vertical plate 3 being connected to a limiting plate 8 through a connecting piece, the screw portion 71 being penetrated through the limiting plate 8, and the head thereof being abutted against the limiting plate 8.

[0020] The screw portion 71 has external threads, and the guide sleeve 31 is internally threaded to mate with the external threads. The bellows 4 is made of stainless steel. It has flanges at both ends, which are fixedly connected to the furnace door 5 and the riser 3, respectively, via fixing bolts. The connecting base 51 is fixedly connected to the furnace door 5 via bolts.

[0021] Specifically, the vertical plate 3 is located between the stop plate 8 and the furnace door 5. The adjustment bolt 7 further includes an optical axis portion 72, which is located between the head portion and the screw portion 71. The optical axis portion 72 and the screw portion 71 are coaxially arranged. The stop plate 8 is provided with a mounting hole for the optical axis portion 72 and the screw portion 71 to pass through. The head portion, optical axis portion 72, and screw portion 71 are integrally formed.

[0022] In addition, the connecting member includes two limiting screws 9, which are located on either side of the screw portion 71. One end of each limiting screw 9 passes through the limiting plate 8 and the vertical plate 3 in sequence. Two first locking nuts 91 and two second locking nuts 92 are threaded onto the limiting screws 9. The two first locking nuts 91 are located on either side of the limiting plate 8, and the two second locking nuts 92 are located on either side of the vertical plate 3. The limiting plate 8 is provided with a first mounting hole for the limiting screw 9 to pass through, and the vertical plate 3 is provided with a second mounting hole for the limiting screw 9 to pass through. The first mounting hole and the second mounting hole are coaxially arranged.

[0023] After rotating the adjusting bolt 7 to keep the furnace door 5 vertical, loosen the first locking nut 91.

[0024] The limit plate 8 is made to abut against the head of the adjusting bolt 7, and then the first locking nut 91 is tightened. By setting the limit plate 8, a limiting function is played to prevent the adjusting bolt 7 from being damaged when it is accidentally touched and subjected to axial force.

[0025] When the furnace door tilts forward, rotate the adjusting bolt 7 so that the head of the adjusting bolt 7 is away from the vertical plate 3, thereby moving the furnace door 5 backward. When the furnace door 5 remains vertical, stop rotating the adjusting bolt 7. When the furnace door 5 tilts backward, rotate the adjusting bolt 7 so that the head of the adjusting bolt 7 is close to the vertical plate 3, thereby moving the furnace door forward. When the furnace door 5 remains vertical, stop rotating the adjusting bolt 7. After the adjustment is completed, the furnace door 5 always remains in a vertical state, thereby ensuring that the furnace door 5 can fit tightly with the flange when closing the furnace door, thereby ensuring product quality.

[0026] Of course, the present invention is not limited to the above-described embodiments. Several other embodiments based on the design concept of the present invention are provided below.

[0027] For example, in other embodiments, different from the embodiments described above, a groove is provided on the side of the connecting seat 51 facing the screw portion 71, a bearing is installed in the groove, the end of the screw portion 71 facing the connecting seat 51 is fixedly connected to the inner ring of the bearing, and the outer ring of the bearing is fixedly connected to the connecting seat 51.

[0028] It should be noted that the above embodiments are only used to illustrate the present invention, but the present invention is not limited to the above embodiments. Any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention fall within the scope of protection of the present invention.

Claims

1. A horizontal LPCVD furnace door adjustment tool, comprising a furnace door (5), a support beam (2), a vertical plate (3) arranged at the front end of the support beam (2), a bellows (4) arranged between the furnace door (5) and the vertical plate (3), characterized in that: The utility model also includes an adjusting bolt (7) and a connecting seat (51) arranged on the furnace door (5); a guide sleeve (31) is horizontally penetrated on the vertical plate (3); the adjusting bolt (7) has a head and a screw portion (71); the screw portion (71) is threadedly penetrated through the guide sleeve (31) and the end portion is rotatably connected to the connecting seat (51); the rear of the vertical plate (3) is connected to a limit plate (8) through a connecting piece; the screw portion (71) penetrates the limit plate (8) and the head portion abuts against the limit plate (8).

2. The horizontal LPCVD furnace door adjustment tool according to claim 1, characterized in that: The screw portion (71) has an external thread, and the guide sleeve (31) is provided with an internal thread that matches the external thread.

3. The horizontal LPCVD furnace door adjustment tool according to claim 1, characterized in that: The bellows (4) is a stainless steel bellows (4).

4. The horizontal LPCVD furnace door adjustment tool according to claim 1, characterized in that: The bellows (4) has flanges at both ends, and the two flanges are fixedly connected to the furnace door (5) and the vertical plate (3) respectively through fixing bolts.

5. The horizontal LPCVD furnace door adjustment tool according to claim 1, characterized in that: The vertical plate (3) is located between the limiting plate (8) and the furnace door (5).

6. The horizontal LPCVD furnace door adjustment tool according to claim 1, characterized in that: The adjusting bolt (7) further comprises an optical axis portion (72), the optical axis portion (72) being located between the head portion and the screw portion (71), the optical axis portion (72) and the screw portion (71) being coaxially arranged, and a mounting through hole for the optical axis portion (72) and the screw portion (71) to pass through is provided on the limiting plate (8).

7. The horizontal LPCVD furnace door adjustment tool according to claim 1, characterized in that: The connecting member includes two limiting screws (9), the two limiting screws (9) are respectively located on both sides of the screw portion (71), one end of the limiting screw (9) passes through the limiting plate (8) and the vertical plate (3) in sequence, and two first locking nuts (91) and two second locking nuts (92) are provided on the threads of the limiting screw (9), the two first locking nuts (91) are respectively located on both sides of the limiting plate (8), and the two second locking nuts (92) are respectively located on both sides of the vertical plate (3).

8. The horizontal LPCVD furnace door adjustment tool according to claim 7, characterized in that: The limiting plate (8) is provided with a first mounting hole for the limiting screw (9) to pass through, and the vertical plate (3) is provided with a second mounting hole for the limiting screw (9) to pass through, and the first mounting hole and the second mounting hole are coaxially arranged.

Images