Automatic sampling device for high-purity electronic-grade chemicals

Abstract

The utility model relates to the field of material detection equipment, in particular to an automatic sampling device for high-purity electronic-grade chemicals, which comprises a pretreatment unit, an acid product sampling unit and an alkali product sampling unit, and the pretreatment unit can be used for automatically washing and air-drying sample bottles and automatically clamping, overturning and transferring the sample bottles; the acid product sampling unit and the alkali product sampling unit are respectively provided with an automatic filling component, a cap screwing component, a water washing component, an air drying component, a labeling component and an automatic clamping and transferring component, the respective filling component, the cap screwing component, the water washing component, the air drying component and the labeling component are respectively arranged on different stations, and the respective clamping and transferring component can automatically clamp and transfer sampling bottles to different stations. According to the utility model, the chemical sampling device is improved, so that the classified sampling of acid-base chemicals and the automation of the whole process can be realized; waste liquid and waste gas of chemicals with different attributes can be collected and treated separately; safety accidents caused by severe chemical reaction of residual acid and alkali and the risk of confusion of different samples can be avoided.

Description

Technical Field

[0001] The utility model relates to the field of material detection equipment, in particular to an automatic sampling device for high-purity electronic-grade chemicals. Background Art

[0002] Semiconductor manufacturing processes primarily include cleaning, coating, polishing, exposure, development, etching, and photoresist stripping. These processes require extensive use of high-purity, electronic-grade acidic and alkaline chemicals. Acidic chemicals primarily include HF, HCl, H2SO4, H3PO4, and HNO3; alkaline chemicals primarily include NaOH, NH4OH, KOH, and TMAH. Due to the ultra-high precision required of semiconductor products, the impurity content of these chemicals directly impacts final product quality. Therefore, throughout the semiconductor manufacturing process, all chemicals used on-site must be regularly sampled, sealed, and sent to a highly clean chemical laboratory for analysis and testing. Because most chemicals are liquid and highly corrosive or toxic, manual sampling and sealing on-site poses safety risks and can easily lead to secondary contamination, negatively impacting worker health, the environment, and test results. Therefore, to avoid these risks, many companies set up an independent, ultra-high-cleanliness sampling room outside the production site. The wet chemicals from the production site are piped into the sampling device in the sampling room for sampling. Although this method can be performed manually or mechanically in an independent space away from the production site, the current sampling device is relatively simple. It is impossible to automatically fill, seal, label and identify the acid and alkali products in the same sampling device, and clean the residual liquid on the bottle wall after sealing. As a result, the sampling facilities of the acid and alkali products are mixed during the sampling process. This is not conducive to strictly separating the collection and treatment of waste liquids and waste gases of the two chemicals with different properties. Some residual acid and alkali products may even easily undergo violent chemical reactions and cause safety accidents. In addition, if the samples are not automatically labeled immediately after filling, they are easy to be confused during the collection, inspection, or testing process. In view of this, it is necessary to improve the sampling device for high-purity electronic-grade chemicals. Utility Model Content

[0003] In order to overcome the deficiencies in the prior art, the utility model discloses an automatic sampling device for high-purity electronic-grade chemicals, comprising a pre-processing unit, an acid sampling unit and an alkali sampling unit, wherein the pre-processing unit is provided with a component capable of automatically washing and air-drying an empty sampling bottle and a component for automatically clamping, flipping and transferring the empty sampling bottle; the acid sampling unit and the alkali sampling unit are respectively provided with an automatic filling component, a capping component, a water-washing and air-drying component, a labeling component and an automatic clamping and transferring component, and the acid sampling unit and the alkali sampling unit are respectively provided with several There are three workstations and their respective filling components, capping components, water washing and air drying components, and labeling components are arranged at different workstations. Their respective clamping and transfer components can automatically clamp and transfer the sampling bottles to different workstations; the acid sampling unit and the alkali sampling unit are arranged side by side on one side of the pre-treatment unit, and the pre-treatment unit can send the empty sampling bottles to the first workstation of the acid sampling unit or the alkali sampling unit; the acid sampling unit and the alkali sampling unit can be installed in their respective independent areas in a cabinet or building with acid and alkali operation area separation. The utility model improves the sampling device for high-purity electronic-grade chemicals and utilizes the various execution components of a shared pre-processing unit and the various execution components of a parallel and independent acid sampling unit and alkali sampling unit, so that the sampling operations of the acid and alkali products can independently and automatically complete filling, sealing, labeling and identification, and cleaning of the residual liquid on the bottle wall after sealing in a set of sampling devices, thereby realizing classified sampling and full process automation; the acid sampling unit and the alkali sampling unit are isolated from each other, which is conducive to strictly separate collection and treatment of waste liquids and waste gases of the two chemicals with different properties, and avoids the risk of safety accidents caused by violent chemical reactions between residual acid and alkali and the risk of confusion of different samples.

[0004] In order to achieve the above purpose, the technical solution adopted by the present utility model is as follows:

[0005] An automatic sampling device for high-purity electronic-grade chemicals. This device can be installed in a cabinet or building with an ultra-high cleanliness environment of 100,000 levels and which can separate the acid and alkali operation areas. It is used to fill liquid electronic-grade chemicals provided by the acid sample delivery tube and the alkaline sample delivery tube at the production site into various sampling bottles for classified sampling. It is characterized in that it includes a pre-treatment unit, an acid sampling unit and an alkaline sampling unit. The pre-treatment unit is provided with a component that can automatically wash and air-dry the empty sampling bottles and a component that automatically clamps, flips and transfers them. The pre-treatment unit is provided with several workstations, and its clamping, flipping and transfer components can automatically clamp and transfer the empty sampling bottles to each workstation. The acid sampling unit and the alkaline sampling unit are respectively provided with automatic filling Filling components, screw cap components, water washing and air drying components, labeling components and automatic clamping and transfer components, the acid product sampling unit and the alkali product sampling unit are respectively provided with several workstations and their respective filling components, screw cap components, water washing and air drying components, and labeling components are placed at different workstations, and their respective clamping and transfer components can automatically clamp and transfer the sampling bottles to different workstations, the acid product sampling unit and the alkali product sampling unit are arranged side by side and symmetrically, the acid product sampling unit and the alkali product sampling unit are placed on one side of the pre-treatment unit, and the pre-treatment unit can send the empty sampling bottle to the first workstation of the acid product sampling unit or the alkali product sampling unit, and the acid product sampling unit and the alkali product sampling unit can be respectively installed in corresponding independent areas in a cabinet or building separated by acid and alkali operation areas.

[0006] The pre-processing unit includes a first manipulator, a second manipulator and a first conveyor. The second manipulator is two pieces and arranged in parallel. The first manipulator and the second manipulator are both placed on one side of the first conveyor. The first manipulator is a simple moving component that can automatically clamp, lift, flip and swing. The clamping claw of the first manipulator is set at the suspended end of the first manipulator. The first manipulator can clamp and flip the sampling bottle on the starting station of the pre-processing unit, and can also transfer the sampling bottle to the first conveyor after swinging. The second manipulator is a simple moving component that can automatically clamp, lift and retract. The clamping claw of the second manipulator is set at the suspended end of the second manipulator. The second manipulator can send the sampling bottle on the first conveyor to the first station of the acid sampling unit or the alkali sampling unit.

[0007] The pre-processing unit also includes a first flushing mechanism and a first air-drying mechanism, both of which are placed above the starting station of the pre-processing unit for cleaning and air-drying the inner cavity and outer wall of the sampling bottle on the starting station.

[0008] The acid sampling unit and the alkali sampling unit both include a third manipulator and a capping machine. The third manipulator is a simple moving component that can automatically clamp, lift and swing. The clamping claw of the third manipulator is set at the suspended end of the third manipulator. When the third manipulator swings, several workstations are dispersed on the arc where the center point of its clamping claw runs. The starting end is the first workstation and the ending end is the capping workstation. The capping machine is placed above the capping workstation.

[0009] The several workstations corresponding to the third manipulator of the acid sampling unit are respectively the first acid product workstation, the acid product filling workstation and the acid product capping workstation. There are one or several acid product filling workstations, and one or several filling nozzles are respectively provided above one or several acid product filling workstations. One or several filling nozzles are respectively connected to one or several acid sample delivery pipes at the production site.

[0010] The several workstations corresponding to the third manipulator of the alkali sampling unit are respectively the first alkali product workstation, the alkali product filling workstation and the alkali product capping workstation. There are one or several alkali product filling workstations, and one or several filling nozzles are respectively provided above one or several alkali product filling workstations. One or several filling nozzles are respectively connected to one or several alkaline sample delivery pipes at the production site.

[0011] The acid sampling unit and the alkali sampling unit both include a fourth manipulator, a second conveyor, a labeling machine, a second flushing mechanism and a second air-drying mechanism. The fourth manipulator is a simple moving component that can automatically clamp, lift and swing. The clamping claw of the fourth manipulator is arranged at the suspended end of the fourth manipulator. When the fourth manipulator swings, three workstations are provided on the arc where the running trajectory of the center point of its clamping claw is located. The starting end is a capping station shared with the third manipulator, and the ending end is a labeling station and the station is located on the second conveyor. The station between the capping station and the labeling station is a purification station. The second flushing mechanism and the second air-drying mechanism are both placed above the purification station for cleaning and air-drying the residual liquid on the outer wall of the sampling bottle on the station. The labeling machine is placed above the labeling station for labeling the sampling bottles on the station. The second conveyor is placed on one side of the fourth manipulator for transporting the labeled sampling bottles to an area where manual collection is possible.

[0012] The automatic sampling device for high-purity electronic-grade chemicals also includes a support platform, which is provided with an elastic ring that can elastically fix the lower part of the sampling bottle. The support platform consists of five parts, and the five support platforms are respectively fixed to the starting station, the first acid product station, the acid product capping station, the first alkali product station and the alkali product capping station of the pre-processing unit.

[0013] The first flushing mechanism and the second flushing mechanism both include a high-pressure water pump and a nozzle that can provide ultra-high purity water, and the first air-drying mechanism and the second air-drying mechanism both include a high-pressure air pump and an air nozzle that can provide ultra-high cleanliness air.

[0014] The automatic sampling device for high-purity electronic-grade chemicals also includes a control unit, which is electrically connected to the pre-processing unit, the acid sampling unit and the alkali sampling unit. The control unit can automatically control each execution action of the pre-processing unit, the acid sampling unit and the alkali sampling unit.

[0015] From the above description, it can be seen that the advantage of the automatic sampling device for high-purity electronic-grade chemicals provided by the utility model is that: an acid sampling unit and an alkali sampling unit are arranged side by side on one side of the pre-treatment unit, the acid sampling unit and the alkali sampling unit are respectively provided with several workstations and their respective filling components, screw cap components, water washing and air drying components, and labeling components are placed at different workstations, and their respective clamping and transfer components can automatically clamp and transfer the sampling bottle to each different workstation. First, by utilizing the various executive components of the shared pre-processing unit and the various executive components of the parallel and independent acid sampling unit and alkali sampling unit, empty sampling bottles can be centrally pre-cleaned, and the sampling operations of the acid and alkali products can be independently and automatically completed in a set of sampling devices, including filling, sealing, labeling and identification, as well as cleaning of the residual liquid on the bottle wall after sealing, thereby realizing centralized pre-processing and classified sampling and full process automation; second, the acid sampling unit and the alkali sampling unit are independent of each other and can be isolated in different cavities, which is conducive to strictly separate collection and treatment of waste liquids and waste gases of two chemicals with different properties, thereby reducing waste management and treatment costs, and avoiding the risk of safety accidents caused by violent chemical reactions between residual acid and alkali products and the risk of confusion between different samples. The utility model has a reasonable design, a simple structure, low cost, and is easy to promote. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a general schematic diagram of an automatic sampling device for high-purity electronic-grade chemicals according to the present invention;

[0017] Figure 2 for Figure 1 AA schematic diagram in;

[0018] Figure 3 for Figure 1 BB enlarged schematic diagram in;

[0019] Figure 4 It is an enlarged schematic diagram of the pre-processing unit;

[0020] Figure 5 This is an enlarged schematic diagram of the acid sampling unit;

[0021] Figure 6 This is an enlarged schematic diagram of the alkali sampling unit.

[0022] Reference numerals:

[0023] 1 Pre-treatment unit; 11 First manipulator; 12 Second manipulator; 13 First conveyor; 14 First flushing mechanism; 15 First air-drying mechanism; 2 Acid sampling unit; 21 Third manipulator; 22 Capping machine; 23 Fourth manipulator; 24 Second conveyor; 25 Labeling machine; 26 Second flushing mechanism; 27 Second air-drying mechanism; 3 Alkali sampling unit; 01 Support table; 700 Sampling bottle; 800 Alkali sample delivery tube; 900 Alkali sample delivery tube. DETAILED DESCRIPTION

[0024] The present invention is further described below through specific implementation methods.

[0025] like Figures 1 to 3 As shown, the utility model describes an automatic sampling device for high-purity electronic-grade chemicals. This device can be installed in a cabinet or building with an ultra-high cleanliness environment of 100,000 levels and which can separate the acid and alkali operation areas. It is used to fill the liquid electronic-grade chemicals provided by the acid sample delivery tube 800 and the alkaline sample delivery tube 900 at the production site into each sampling bottle 700 for classified sampling. The device includes a pre-processing unit 1, an acid sampling unit 2 and an alkali sampling unit 3. The pre-processing unit 1 is provided with a component that can automatically wash and air-dry the empty sampling bottle 700 and a component that automatically clamps, flips and transfers. The pre-processing unit 1 is provided with several workstations, and its clamping, flipping and transfer components can automatically clamp and transfer the empty sampling bottle 700 to each workstation. The acid sampling unit 2 and the alkali sampling unit 3 are respectively provided with an automatic filling component, a screw cap component, a water washing and air-drying component, a labeling component and an automatic clamping and transfer component. The acid sampling unit 2 and the alkali sampling unit 3 are respectively provided with several workstations and their respective filling components, screw cap components , water washing and air drying components, and labeling components are placed on different workstations, and their respective clamping and transfer components can automatically clamp and transfer the sampling bottle 700 to different workstations. The acid sampling unit 2 and the alkali sampling unit 3 are arranged side by side and symmetrically. The acid sampling unit 2 and the alkali sampling unit 3 are placed on one side of the pre-treatment unit 1. The pre-treatment unit 1 can send the empty sampling bottle 700 to the first workstation of the acid sampling unit 2 or the alkali sampling unit 3. The acid sampling unit 2 and the alkali sampling unit 3 can be installed in their respective corresponding independent areas in a cabinet or building with acid and alkali operation area separation. All components of this device are resistant to acid and alkali corrosion.

[0026] like Figures 1 to 4As shown, the pre-processing unit 1 described in the present invention includes a first manipulator 11, a second manipulator 12, a first conveyor 13, a first flushing mechanism 14 and a first air-drying mechanism 15. The second manipulator 12 is two pieces and arranged in parallel. The first manipulator 11 and the second manipulator 12 are both placed on one side of the first conveyor 13. The first manipulator 11 is a simple moving component that can automatically clamp, lift, flip and swing. The clamping claw of the first manipulator 11 is set at the suspended end of the first manipulator 11. The first manipulator 11 can clamp and flip the sampling bottle 700 on the starting station of the pre-processing unit 1, and can also transfer the sampling bottle 700 to the first conveyor 13 after swinging. The second manipulator 12 is a simple moving component that can automatically clamp, lift and retract. The clamping claw of the second manipulator 12 is set at the suspended end of the second manipulator 12. The second manipulator 12 can send the sampling bottle 700 on the first conveyor 13 to the first station of the acid sampling unit 2 or the alkali sampling unit 3. The first flushing mechanism 14 and the first air-drying mechanism 15 are both placed above the starting station of the pre-processing unit 1 for cleaning and air-drying the inner cavity and outer wall of the sampling bottle 700 at the starting station.

[0027] like Figures 1 to 6As shown, the acid sampling unit 2 and the alkaline sampling unit 3 described in the utility model both include a third manipulator 21, a capping machine 22, a fourth manipulator 23, a second conveyor 24, a labeling machine 25, a second flushing mechanism 26 and a second air-drying mechanism 27. The third manipulator 21 is a simple moving component that can automatically clamp, lift and swing. The clamping claw of the third manipulator 21 is set at the suspended end of the third manipulator 21. When the third manipulator 21 swings, a number of workstations are dispersed on the arc where the running trajectory of the center point of its clamping claw is located. The starting end is the first workstation and the ending end is the capping workstation. The capping machine 22 is placed above the capping workstation. The third manipulator 21 of the acid sampling unit 2 corresponds to the several workstations of the acid product first workstation, the acid product filling workstation, and the acid product capping workstation. There are one or more acid product filling workstations, each of which is provided with one or more filling nozzles above the one or more acid product filling workstations. The one or more filling nozzles are respectively connected to one or more acid sample delivery pipes 800 at the production site. In this embodiment, there are three acid product filling workstations. The third manipulator 21 of the alkali product sampling unit 3 corresponds to the several workstations of the alkali product first workstation, the alkali product filling workstation, and the alkali product capping workstation. There are one or more alkali product filling workstations, each of which is provided with one or more filling nozzles above the one or more alkali product filling workstations. The one or more filling nozzles are respectively connected to one or more alkali sample delivery pipes 900 at the production site. In this embodiment, there are three alkali product filling workstations. The fourth manipulator 23 is a simple moving component that can automatically clamp, lift and swing. The clamping claw of the fourth manipulator 23 is set at the suspended end of the fourth manipulator 23. When the fourth manipulator 23 swings, there are three workstations on the arc where the running trajectory of the center point of its clamping claw is located. Its starting end is the capping station shared with the third manipulator 21, and its ending end is the labeling station and the station is located on the second conveyor 24. The station between the capping station and the labeling station is the purification station. The second flushing mechanism 26 and the second air-drying mechanism 27 are both placed above the purification station for cleaning and air-drying the residual liquid on the outer wall of the sampling bottle 700 on the station. The labeling machine 25 is placed above the labeling station for labeling the sampling bottle 700 on the station. The second conveyor 24 is placed on one side of the fourth manipulator 23 for transporting the labeled sampling bottle 700 to the area where manual collection is possible. The first flushing mechanism 14 and the second flushing mechanism 26 both include a high-pressure water pump and nozzle that can provide ultra-high purity water. The first air-drying mechanism 15 and the second air-drying mechanism 27 both include a high-pressure air pump and nozzle that can provide ultra-high cleanliness air. The automatic sampling device also includes a support platform 01, which is equipped with an elastic ring that can elastically fix the lower portion of the sampling bottle 700. The support platform 01 is composed of five parts, and the five support platforms 01 are respectively fixed to the starting station, the first acid product station, the acid product capping station, the first alkaline product station, and the alkaline product capping station of the pre-treatment unit 1.

[0028] The automatic sampling device further includes a control unit, which is electrically connected to the pre-processing unit 1, the acid sampling unit 2 and the alkaline sampling unit 3. The control unit can automatically control each execution action of the pre-processing unit 1, the acid sampling unit 2 and the alkaline sampling unit 3.

[0029] The method of using the automatic sampling device for high-purity electronic-grade chemicals described in the present invention is as follows:

[0030] First, an unused, empty sampling bottle 700 is placed at the starting station of the pre-processing unit 1 and elastically secured by the support platform 01 at that station. The first manipulator 11 automatically clamps, lifts, and continuously flips the sampling bottle 700. The first flushing mechanism 14 is activated to automatically flush the inside and outside of the sampling bottle 700 with ultra-high purity water. The first air-drying mechanism 15 then automatically air-dries the sampling bottle 700 with ultra-high purity air. The first manipulator 11 swings and delivers the sampling bottle 700 to the first conveyor 13, which then intermittently moves forward once. A second empty sampling bottle 700 is then placed at the starting station of the pre-processing unit 1 and rinsed and air-dried using the same method. The second sampling bottle 700 is also transferred to the first conveyor 13, which intermittently moves, placing it a certain distance behind the first. This process continues in this manner until all empty sampling bottles 700 to be used are pre-processed and subsequently placed on the first conveyor 13.

[0031] If it is necessary to sample acidic chemicals, the first conveyor 13 can transport the first sampling bottle 700 to the second manipulator 12 corresponding to the front end of the acid sampling unit 2. The second manipulator 12 automatically clamps, lifts and pushes the sampling bottle 700 laterally, and sends the sampling bottle 700 to the first acid station of the acid sampling unit 2, and is elastically fixed by the support platform 01 of the station; the third manipulator 21 of the acid sampling unit 2 automatically clamps, lifts and swings the sampling bottle 700, and sends the sampling bottle 700 to the corresponding acid filling station for filling, and then the third manipulator 21 The sampling bottle 700 is delivered to the acid product capping station for capping and packaging. After packaging, the sampling bottle 700 is placed on the support platform 01 of the station for elastic fixation. The fourth robot 23 of the acid product sampling unit 2 then automatically clamps, raises, and swings the sampling bottle 700, and delivers it to the corresponding purification station to rinse the residual liquid on the bottle body wall and air-dry it. The fourth robot 23 then delivers the sampling bottle 700 to the corresponding labeling station for labeling. The bottle is then placed on the second conveyor 24 of the acid product sampling unit 2 and transported by the second conveyor 24 to an area where manual sampling is possible. This method can also be used to automatically sample alkaline chemicals.

[0032] The utility model improves the sampling device of high-purity electronic-grade chemicals, and an acid sampling unit 2 and an alkali sampling unit 3 are arranged in parallel on one side of the pre-processing unit 1. The acid sampling unit 2 and the alkali sampling unit 3 are respectively provided with a plurality of workstations, and their respective filling components, capping components, water washing and air drying components, and labeling components are respectively placed on different workstations. The respective clamping and transfer components can automatically clamp and transfer the sampling bottle 700 to each different workstation, and utilize the various execution components of the shared pre-processing unit 1 and the parallel and independent acid sampling units 2 and The various executive components of the alkali sampling unit 3 enable the sampling operations of the acid and alkali products to be independently and automatically completed in a set of sampling devices, including filling, sealing, labeling and identification, as well as cleaning of the residual liquid on the bottle wall after sealing, thereby realizing classified sampling and full process automation; the acid sampling unit 2 and the alkali sampling unit 3 are isolated from each other, which is conducive to the strict separate collection and treatment of waste liquids and waste gases of the two chemicals with different properties, and avoids the risk of safety accidents caused by violent chemical reactions between residual acid and alkali and the risk of confusion between different samples.

[0033] In the description of this utility model, the words "first" to "fourth" are used to define the names of objects. The use of "first" to "fourth" is only for the convenience of simplifying the description and has no specific meaning of order unless otherwise specified.

[0034] The above is only a specific embodiment of the present invention, but the design concept of the present invention is not limited to this. Any non-substantial changes to the present invention using this concept shall be deemed as an infringement of the protection scope of the present invention.

Claims

1. An automatic sampling device for high-purity electronic-grade chemicals, which can be installed in a cabinet or building with an ultra-high cleanliness environment and can separate acid and alkali operation areas, and is used to fill liquid electronic-grade chemicals provided by the production site through an acid sample delivery pipe (800) and an alkaline sample delivery pipe (900) into various sampling bottles (700) for classified sampling, characterized by: The invention comprises a pre-processing unit (1), an acid sampling unit (2) and an alkali sampling unit (3), wherein the pre-processing unit (1) is provided with a component capable of automatically washing and air-drying an empty sampling bottle (700) and a component capable of automatically clamping, flipping and transferring the empty sampling bottle (700), the pre-processing unit (1) is provided with a plurality of workstations, the clamping, flipping and transferring components of which can automatically clamp and transfer the empty sampling bottle (700) to each workstation, the acid sampling unit (2) and the alkali sampling unit (3) are respectively provided with an automatic filling component, a capping component, a water washing and air-drying component, a labeling component and an automatic clamping and transferring component, the acid sampling unit ( The acid sampling unit (2) and the alkali sampling unit (3) are respectively provided with a plurality of workstations, and their respective filling components, capping components, water washing and air drying components, and labeling components are respectively arranged at different workstations. Their respective clamping and transfer components can automatically clamp and transfer the sampling bottle (700) to each different workstation. The acid sampling unit (2) and the alkali sampling unit (3) are arranged in parallel and symmetrically. The acid sampling unit (2) and the alkali sampling unit (3) are placed on one side of the pre-processing unit (1). The pre-processing unit (1) can send the empty sampling bottle (700) to the first workstation of the acid sampling unit (2) or the alkali sampling unit (3).

2. The automatic sampling device for high-purity electronic-grade chemicals according to claim 1, characterized in that: The pre-processing unit (1) includes a first manipulator (11), a second manipulator (12) and a first conveyor (13). The second manipulator (12) is two pieces and arranged in parallel. The first manipulator (11) and the second manipulator (12) are both placed on one side of the first conveyor (13). The first manipulator (11) is a moving component that can automatically clamp, lift, flip and swing. The clamping claw of the first manipulator (11) is set at the hanging end of the first manipulator (11). The first manipulator (11) can The sampling bottle (700) on the starting station of the processing unit (1) is clamped and turned over, and the sampling bottle (700) can also be transferred to the first conveyor (13). The second manipulator (12) is a moving component that can automatically clamp, lift and retract. The clamping claw of the second manipulator (12) is set at the suspended end of the second manipulator (12). The second manipulator (12) can send the sampling bottle (700) on the first conveyor (13) to the first station of the acid sampling unit (2) or the alkali sampling unit (3).

3. The automatic sampling device for high-purity electronic-grade chemicals according to claim 2, characterized in that: The pre-treatment unit (1) further comprises a first flushing mechanism (14) and a first air-drying mechanism (15), and the first flushing mechanism (14) and the first air-drying mechanism (15) are both placed above the starting position of the pre-treatment unit (1).

4. The automatic sampling device for high-purity electronic-grade chemicals according to claim 3, characterized in that: The acid sampling unit (2) and the alkali sampling unit (3) both include a third manipulator (21) and a capping machine (22). The third manipulator (21) is a moving component that can automatically clamp, lift, and swing. The clamping claw of the third manipulator (21) is arranged at the suspension end of the third manipulator (21). When the third manipulator (21) swings, a plurality of workstations are dispersed on the arc where the running trajectory of the center point of the clamping claw is located. The starting end is the first workstation and the ending end is the capping workstation. The capping machine (22) is placed above the capping workstation.

5. The automatic sampling device for high-purity electronic-grade chemicals according to claim 4, characterized in that: The several workstations corresponding to the third manipulator (21) of the acid sampling unit (2) are respectively the first acid product workstation, the acid product filling workstation and the acid product capping workstation, wherein there are one or more acid product filling workstations, and one or more filling nozzles are respectively provided above the one or more acid product filling workstations, and the one or more filling nozzles are respectively connected to one or more acid sample delivery pipes (800) at the production site.

6. The automatic sampling device for high-purity electronic-grade chemicals according to claim 4, characterized in that: The third manipulator (21) of the alkali sampling unit (3) corresponds to a plurality of workstations, namely, a first alkali workstation, an alkali filling workstation, and an alkali capping workstation. There are one or more alkali filling workstations, and one or more filling nozzles are respectively provided above the one or more alkali filling workstations. The one or more filling nozzles are respectively connected to one or more alkaline sample delivery pipes (900) at the production site.

7. An automatic sampling device for high-purity electronic-grade chemicals according to claim 5 or 6, characterized in that: The acid sampling unit (2) and the alkali sampling unit (3) both further include a fourth manipulator (23), a second conveyor (24), a labeling machine (25), a second flushing mechanism (26) and a second air-drying mechanism (27). The fourth manipulator (23) is a moving component that can automatically clamp, lift and swing. The clamping claw of the fourth manipulator (23) is arranged at the suspension end of the fourth manipulator (23). When the fourth manipulator (23) swings, the running trajectory of the center point of the clamping claw is located in the circle where the running trajectory of the center point of the clamping claw is located. There are three workstations on the arc, the starting end of which is a capping workstation connected to and shared with the third manipulator (21), the ending end is a labeling workstation and the workstation is located on the second conveyor (24), the workstation between the capping workstation and the labeling workstation is a purification workstation, the second flushing mechanism (26) and the second air-drying mechanism (27) are both placed above the purification workstation, the labeling machine (25) is placed above the labeling workstation, and the second conveyor (24) is placed on one side of the fourth manipulator (23).

8. The automatic sampling device for high-purity electronic-grade chemicals according to claim 7, characterized in that: It also includes a support platform (01), wherein the support platform (01) is provided with an elastic ring that can elastically fix the lower part of the sampling bottle (700), and the support platform (01) is composed of five pieces, and the five support platforms (01) are respectively fixed to the starting station, the first acid product station, the acid product capping station, the first alkaline product station and the alkaline product capping station of the pre-treatment unit (1).

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