Flow control pipeline with micro pressure relief pipeline and flow control system

Abstract

The utility model provides a flow control pipeline with a micro pressure relief pipeline and a flow control system, the flow control pipeline comprises a stock solution tank, a supply tank and a micro pressure relief pipeline, the stock solution tank is provided with a stock solution tank air inlet and a stock solution tank liquid outlet, a supply tank liquid inlet, a supply tank liquid outlet and a supply tank air inlet and outlet are formed in the supply tank, one end of the micro pressure relief pipeline is communicated with the supply tank air inlet and outlet, the other end of the micro pressure relief pipeline is communicated with the air outlet, a pressure relief section is arranged on the micro pressure relief pipeline, and a fifth control valve and a sixth control valve are arranged at the two ends of the pressure relief section respectively. And the fifth control valve is close to the air inlet / outlet of the supply tank. The pressure relief device has the beneficial effects that by adopting the micro pressure relief pipeline, quick and accurate pressure relief can be realized under the control of the electromagnetic valve, so that the pressure of the tank body is kept stable.

Description

Technical Field

[0001] The utility model relates to the technical field of mechanical equipment, in particular to a flow control pipeline with a micro-pressure relief pipeline and a flow control system. Background Art

[0002] In semiconductor production, material flow requires precise control. This is typically achieved by pressurizing cylinders with inert gas. However, existing flow control equipment is prone to pressure fluctuations, which can lead to excessive pressure supply. This requires pressure relief, but precise control is often impossible.

[0003] The current solution typically uses a solenoid valve to control the opening and closing speed of its corresponding pneumatic valve to achieve pressure relief. While solenoid valves can achieve millisecond-level switching, the mechanical structure of pneumatic valves is practically incapable of this, with the upper limit being around 0.8 seconds. This fluctuation can lead to inaccurate pressure relief. Therefore, using a single valve to control pressure relief is subject to significant instability, and precise pressure relief control is particularly ineffective.

[0004] Therefore, the present invention proposes a flow control pipeline and a flow control system with a micro-pressure relief pipeline to solve the problem that the pressure cannot be accurately controlled in the prior art. Utility Model Content

[0005] In view of the deficiencies in the prior art, the utility model provides a flow control pipeline with a micro-pressure relief pipeline and a flow control system.

[0006] To achieve the above objectives, the present invention provides the following technical solutions:

[0007] A flow control pipeline with a micro-pressure relief pipeline, comprising:

[0008] A raw liquid tank, wherein the raw liquid tank is provided with a raw liquid tank air inlet and a raw liquid tank liquid outlet, the raw liquid tank air inlet is connected to the compressed gas inlet through a first pipeline, and a first control valve is provided on the first pipeline;

[0009] A supply tank, wherein the supply tank is provided with a supply tank liquid inlet, a supply tank liquid outlet, and a supply tank air inlet and outlet. The raw liquid tank liquid outlet is connected to the supply tank liquid inlet via a second pipeline. A second control valve and a third control valve are respectively provided at both ends of the second pipeline. The second control valve is located near the raw liquid tank liquid outlet, and the third control valve is located near the supply tank liquid inlet. The supply tank liquid outlet is connected to the fluid outlet via a third pipeline, and a fourth control valve is provided on the third pipeline.

[0010] A micro-pressure relief pipeline, one end of which is connected to the inlet and exhaust ports of the supply tank, and the other end is connected to the exhaust port. A pressure relief section is provided on the micro-pressure relief pipeline, and a fifth control valve and a sixth control valve are respectively provided at both ends of the pressure relief section. The fifth control valve is located close to the inlet and exhaust ports of the supply tank.

[0011] As a preferred technical solution, the gas storage space of the pressure relief section is 5ml-10ml.

[0012] As a preferred technical solution, the diameter of the pipe of the pressure relief section is 4mm-10mm, and the length is 300mm-500mm.

[0013] As a preferred technical solution, a fourth pipeline connected to the compressed gas inlet is provided in the micro-pressure relief pipeline, and the liquid supply of the supply tank is achieved through pressure control.

[0014] As a preferred technical solution, a second exhaust pipeline is provided on the first pipeline, the end of the second exhaust pipeline is connected to the exhaust port, and a second exhaust control valve is provided at the connection between the first pipeline and the second exhaust pipeline to control the discharge of gas.

[0015] As a preferred technical solution, the first control valve, the second control valve, the third control valve, the fourth control valve, the fifth control valve, the sixth control valve and the second exhaust control valve are all solenoid valves.

[0016] A flow control system comprises the aforementioned flow control pipeline with a micro-pressure relief pipeline.

[0017] Beneficial effects: Compared with the existing technology, the utility model provides a flow control pipeline and a flow control system with a micro-pressure relief pipeline. The micro-pressure relief pipeline is used, and under the control of the solenoid valve, it can achieve fast and accurate pressure relief, so that the tank body maintains stable pressure. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the implementation scheme of the present invention or the technical scheme in the prior art, the drawings required for use in the implementation scheme or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some implementation schemes of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0019] Figure 1 This is a structural schematic diagram of the utility model: a flow control pipeline with a micro-pressure relief pipeline.

[0020] in:

[0021] 100-raw liquid tank, 200-supply tank, 300-micro-pressure relief pipeline, 11-raw liquid tank air inlet, 12-raw liquid tank liquid outlet, 13-first pipeline, 14-first control valve, 15-supply tank liquid inlet, 16-supply tank liquid outlet, 17-supply tank inlet and exhaust port, 18-second pipeline, 19-second control valve, 20-third control valve, 21-fourth control valve, 22-third pipeline, 23-pressure relief section, 24-fifth control valve, 25-sixth control valve, 26-fourth pipeline, 29-second exhaust pipeline, 30-second exhaust control valve. DETAILED DESCRIPTION

[0022] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below with reference to specific illustrations.

[0023] Example 1

[0024] refer to Figure 1 As shown, a flow control pipeline with a micro-pressure relief pipeline includes: a raw liquid tank 100, a supply tank 200, and a micro-pressure relief pipeline 300. The raw liquid tank 100 is provided with a raw liquid tank air inlet 11 and a raw liquid tank liquid outlet 12. The raw liquid tank air inlet 11 is connected to the compressed gas inlet through a first pipeline 13, and a first control valve 14 is provided on the first pipeline 13; the supply tank 200 is provided with a supply tank liquid inlet 15, a supply tank liquid outlet 16, and a supply tank air inlet and air outlet 17. The raw liquid tank liquid outlet 12 is connected to the supply tank liquid inlet 15 through a second pipeline 18; a second control valve 19 and a third control valve 20 are provided at both ends of the second pipeline 18, respectively, and the second control valve 19 is close to the raw liquid tank. The liquid outlet 12 of the liquid tank, the third control valve 20 is located close to the liquid inlet 15 of the supply tank; the liquid outlet 16 of the supply tank is connected to the fluid outlet through the third pipeline 22, and the fourth control valve 21 is provided on the third pipeline 22; one end of the micro-pressure relief pipeline 300 is connected to the supply tank inlet and exhaust port 17, and the other end is connected to the exhaust port, a pressure relief section 23 is provided on the micro-pressure relief pipeline 300, and a fifth control valve 24 and a sixth control valve 25 are respectively provided at both ends of the pressure relief section 23, and the fifth control valve 24 is located close to the supply tank inlet and exhaust port 17.

[0025] In order to achieve precise pressure relief control, the gas storage space of the pressure relief section 23 is 5ml-10ml. The diameter of the pipe of the pressure relief section 23 is 4mm-10mm and the length is 300mm-500mm.

[0026] In the present invention, a fourth pipeline 26 connected to the compressed gas inlet is provided in the micro-pressure relief pipeline 300, and liquid supply to the supply tank 200 is achieved through pressure control.

[0027] A second exhaust pipe 29 is provided on the first pipe 13 of the present invention. The end of the second exhaust pipe 29 is connected to the exhaust port. A second exhaust control valve 30 is provided at the connection between the first pipe 13 and the second exhaust pipe 29 to control the discharge of gas.

[0028] The first control valve 14, second control valve 19, third control valve 20, fourth control valve 21, fifth control valve 24, sixth control valve 25, and second exhaust control valve 30 of the present invention are all solenoid valves. Solenoid valves are controlled by electrical signals and have a short response time, as short as a few milliseconds, for precise control of the pipeline. They have the advantages of long service life and high reliability.

[0029] The specific usage is as follows:

[0030] Under normal use, compressed gas enters the fourth pipeline 26 and enters the supply tank 200. Under the action of pressure, the liquid is discharged from the third pipeline 22 and transported to the downstream process equipment. Therefore, the material in the supply tank 200 will be continuously consumed. When it is consumed to a certain amount, the raw liquid tank 100 replenishes the liquid to the supply tank 200.

[0031] The specific replenishment principle is as follows: the pressure in the raw liquid tank 100 is increased by compressed gas, and is greater than the pressure in the supply tank 200. The liquid in the raw liquid tank 100 is replenished into the supply tank 200 through the pressure difference. At this time, during the supply process, large pressure fluctuations will be generated, causing the liquid flow provided by the supply tank 200 to be unstable, affecting subsequent processes.

[0032] In the present invention, when the pressure in the supply tank 200 is too high, the sixth control valve 25 remains closed, and the fifth control valve 24 opens immediately. At this time, the supply tank 200 will release a certain amount of pressure to the pressure relief section 23. For example, the dimensions of the pressure relief section 23 in this embodiment are: the pipeline diameter is 4.57 mm and the length is 420 mm.

[0033] The volume that can be accommodated is:

[0034] L*ΠR 2 =L*π(D / 2) 2 =420*3.14(4.57 / 2)=6885.75mm 3 =6.9ml.

[0035] According to relevant calculations, the pressure is approximately 0.1 psig or 0.69 kPa. At this point, closing the fifth control valve 25 and opening the sixth control valve 24 completes a pressure relief operation. This operation is repeated until the pressure in the supply tank 200 is within a safe range. This achieves precise control and avoids the unstable pressure relief that can occur with a single solenoid valve.

[0036] Since the pressure relief section 23 in the present invention can accommodate very little gas, rapid and accurate pressure relief is achieved under the action of the solenoid valve, so that the pressure of the tank body remains stable.

[0037] In the present invention, when the raw liquid tank 100 has an abnormal pressure, the second exhaust control valve 30 is controlled to release the pressure of the raw liquid tank 100 through the second exhaust line 29. In addition, the pressure monitoring and solenoid valve control in the present invention belong to the prior art and will not be described in detail here.

[0038] Example 2

[0039] The utility model also provides a flow control system, which includes the aforementioned flow control pipeline with a micro-pressure relief pipeline.

[0040] The above is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the present invention can make equivalent replacements or changes based on the technical solution and utility model concept of the present invention, which should be covered by the protection scope of the present invention.

[0041] In the description of the present invention, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inside", "front", "center", "two ends", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0042] In the present invention, unless otherwise clearly stipulated and limited, the terms "install", "set", "connect", "fix", "screw" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the present invention according to the specific circumstances.

[0043] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A flow control pipeline with a micro-pressure relief pipeline, characterized in that: include: A raw liquid tank, wherein the raw liquid tank is provided with a raw liquid tank air inlet and a raw liquid tank liquid outlet, the raw liquid tank air inlet is connected to the compressed gas inlet through a first pipeline, and a first control valve is provided on the first pipeline; A supply tank, wherein the supply tank is provided with a supply tank liquid inlet, a supply tank liquid outlet, and a supply tank air inlet and outlet. The raw liquid tank liquid outlet is connected to the supply tank liquid inlet via a second pipeline. A second control valve and a third control valve are respectively provided at both ends of the second pipeline. The second control valve is located near the raw liquid tank liquid outlet, and the third control valve is located near the supply tank liquid inlet. The supply tank liquid outlet is connected to the fluid outlet via a third pipeline, and a fourth control valve is provided on the third pipeline. A micro-pressure relief pipeline, one end of which is connected to the inlet and exhaust ports of the supply tank, and the other end is connected to the exhaust port. A pressure relief section is provided on the micro-pressure relief pipeline, and a fifth control valve and a sixth control valve are respectively provided at both ends of the pressure relief section. The fifth control valve is located close to the inlet and exhaust ports of the supply tank.

2. A flow control pipeline with a micro-pressure relief pipeline according to claim 1, characterized in that: The gas storage space of the pressure relief section is 5ml-10ml.

3. A flow control pipeline with a micro-pressure relief pipeline according to claim 2, characterized in that: The pipe diameter of the pressure relief section is 4mm-10mm, and the length is 300mm-500mm.

4. The flow control pipeline with a micro-pressure relief pipeline according to claim 1, characterized in that: The first control valve, the second control valve, the third control valve, the fourth control valve, the fifth control valve, and the sixth control valve are all solenoid valves.

5. The flow control pipeline with a micro-pressure relief pipeline according to claim 1, characterized in that: The micro-pressure relief pipeline is provided with a fourth pipeline connected to the compressed gas inlet, and the liquid supply of the supply tank is controlled by pressure.

6. The flow control pipeline with a micro-pressure relief pipeline according to claim 1, characterized in that: A second exhaust pipeline is provided on the first pipeline, the end of the second exhaust pipeline is connected to the exhaust port, and a second exhaust control valve is provided at the connection between the first pipeline and the second exhaust pipeline to control the discharge of gas.

7. The flow control pipeline with a micro-pressure relief pipeline according to claim 6, characterized in that: The second exhaust control valve is a solenoid valve.

8. A flow control system, characterized in that: It comprises a flow control pipeline with a micro-pressure relief pipeline as claimed in any one of claims 1 to 7.

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