Cover plate opening and closing device

Abstract

Disclosed is a cover plate opening and closing device. The cover plate opening and closing device comprises: at least one opening and closing operation part which is hinged to the open side of the chamber, is hinged to a cover plate which opens and closes the open side of the chamber, and is used for guiding the opening and closing action of the cover plate relative to the chamber; an opening / closing drive unit that transmits a driving force to the opening / closing operation unit so as to guide one side of the opening / closing operation unit to rotate; and at least one auxiliary opening and closing guide part which is hinged to one side of the chamber and one side of the cover plate and is used for supporting the cover plate which rotates in linkage with the opening and closing action of the cover plate.

Description

Technical Field

[0001] The utility model relates to a cover opening and closing device, more specifically, a device that automatically opens and closes the open side of a chamber via a cover. The device comprises an opening and closing operating unit hinged to one side of the chamber and to the other side of the cover to support the opening and closing of the cover, and an auxiliary opening and closing guide unit hinged to one side of the chamber and the other side of the cover to support the opening and closing of the cover. Through these components, the device can stably guide the opening and closing operation of the cover and enhance the sealing performance of the open side of the chamber. Background Art

[0002] Typically, to manufacture semiconductor devices and display OLEDs, the required processes include deposition, photolithography, etching, cleaning, and other processes, many of which are completed in a chamber.

[0003] There are various types of chambers used for semiconductor and display manufacturing, depending on their application. However, plasma chambers, which utilize plasma for deposition and etching, have been increasingly used in recent years.

[0004] Furthermore, in the semiconductor and display manufacturing processes, wafers are processed within process chambers by maintaining a proper relationship between internal and external pressures. The external pressure is derived from the atmospheric pressure surrounding the semiconductor manufacturing equipment, while the internal pressure is derived from the controlled vacuum environment within the equipment.

[0005] To maintain internal pressure, semiconductor manufacturing equipment is typically equipped with a load lock chamber and a transfer chamber. The load lock chamber and the transfer chamber maintain internal pressure during the semiconductor manufacturing process to protect the process chamber.

[0006] Wafer transfer channels are set between these chambers to transfer wafers between the chambers, and the channels are sealed according to process requirements to maintain the internal pressure of each chamber.

[0007] In the related art, Korean Patent Publication No. 10-2008-0082211 (Title of Invention: Cover Plate of Processing Chamber Used in Substrate Processing Apparatus) is disclosed.

[0008] The above technical configuration is intended to help understand the background technology of the present invention and does not represent the known technology in the technical field to which the present invention belongs. Utility Model Content

[0009] Existing door devices used in semiconductor manufacturing equipment require the use of equipment such as cranes to lift and open heavy doors, making it difficult to maintain pressure inside the chamber and unable to stably maintain the open state.

[0010] Therefore, there is a need for improvement.

[0011] This utility model aims to address the aforementioned issues by providing a device that automatically opens and closes the open side of a chamber via a cover. The device includes an opening and closing operating unit hinged to one side of the chamber and to the other side of the cover to support the opening and closing of the cover, and an auxiliary opening and closing guide unit hinged to one side of the chamber and the other side of the cover to support the opening and closing of the cover. These components stably guide the opening and closing operation of the cover and enhance the sealing of the open side of the chamber. The opening and closing operating unit and auxiliary opening and closing guide unit are configured to suit the shape of the cover.

[0012] The cover opening and closing device of the present invention includes: at least one opening and closing operating part, which is hinged on the open side of the chamber and hinged on the cover that opens and closes the open side of the chamber, and is used to guide the opening and closing action of the cover relative to the chamber; an opening and closing driving part, which transmits driving force to the opening and closing operating part to guide one side of the opening and closing operating part to rotate; at least one auxiliary opening and closing guide part, which is hinged on one side of the chamber and hinged on one side of the cover, and is used to support the cover that rotates in conjunction with the opening and closing action of the cover.

[0013] The cover plate is formed with an arc-shaped reinforcement component on the upper side except for at least one side edge and the other side edge to strengthen the cover plate, and the other end of the opening and closing operation part is hinged to the other side edge of the reinforcement component.

[0014] A main support member is provided on one side of the chamber, and one side of the opening and closing operation portion is hinged to the main support member.

[0015] A first auxiliary support is provided on one side of the chamber, a second auxiliary support corresponding to the first auxiliary support is provided on one side of the cover, and the auxiliary opening and closing guide is supported on the corresponding first and second auxiliary support.

[0016] The opening and closing operating part includes: a main hinge bracket on one side, which is arranged on one side of the chamber; a shell, which is hinged on the main hinge bracket on one side and rotates along the opening and closing trajectory of the cover; a shaft, which can move in and out of the shell axially, and naturally moves axially or is forced to move axially through the opening and closing of the cover, so as to guide the opening and closing of the cover; and the main hinge bracket on the other side, which is axially connected to the other end of the shaft and fixed to the cover.

[0017] The opening and closing operating part also includes: a first hinge pin, axially hinged to the other end of the shaft; one or more connecting rods, one end of which is connected to the first hinge pin; a second hinge pin, connected to the other end of the connecting rod and hinged to the main hinge bracket on the other side.

[0018] The opening and closing drive part includes: a gear module, which receives the driving force of the driving motor and rotates; a rotating rod, which is axially inserted into the housing, receives the rotational force of the gear module and rotates circumferentially in one direction or the other, and has an external thread formed on the outer circumferential surface; and a joint, which is fixed to one end of the shaft and has an internal thread formed on the inner surface to engage with the external thread, guiding the shaft to move axially according to the rotation direction of the rotating rod.

[0019] The rotating rod is supported on the housing through a bearing inside the housing.

[0020] The auxiliary opening and closing guide portion includes: a fixed block, which is arranged on one side of the chamber; a movable block, which is arranged on one side edge of the cover plate corresponding to the fixed block, moves along the arc track with the cover plate, and is formed with a sliding groove open toward the fixed block; and a support beam, one end of which is hinged to the fixed block and the other end is inserted into the sliding groove, and when the cover plate and the movable block move, the support beam moves axially and supports the cover plate.

[0021] The support beam is equipped with a first limiting member, and the moving block is equipped with a second limiting member to limit the axial insertion distance of the support beam.

[0022] The opening and closing operating part also includes: a telescopic push rod, which is connected to the cover plate and moves in a telescopic manner to rotate the cover plate; a front pivot portion, which is pivotally connected to the cover plate and the telescopic push rod, and interacts when the telescopic push rod moves to rotate the cover plate; and a rear pivot portion, which is arranged on the opposite side of the front pivot portion with the telescopic push rod as a reference, is connected to the telescopic push rod, and is used to rotatably support the telescopic push rod in the rear end area of ​​the cover plate.

[0023] The front pivot portion includes: a pivot unit, which includes a base plate, a pair of pivot ribs and a through hole formed in the pair of pivot ribs; a lower plate, which is a plate-like structure fixed to the cover plate; an upper plate, which is combined with the lower plate in a stacked manner, and is used to support the pivot unit, and has an allowable movement space portion formed therein to enable the base plate to move along the plate surface direction of the cover plate; and a unit rod connecting portion, which is relatively rotatably connected to the telescopic push rod, and the telescopic push rod is connected to the pivot unit and the cover plate, and is extended or contracted in a stacked manner to rotate the cover plate.

[0024] The telescopic push rod is connected to a push rod driving portion and is driven. The push rod driving portion provides a driving force for extending or shortening the length of the telescopic push rod.

[0025] As described above, the lid opening and closing device of the present invention differs from existing technologies in that it automatically opens and closes the open side of a chamber using a lid. This device includes an opening and closing operating unit hinged to one side of the chamber and to the other side of the lid to support the opening and closing of the lid, and an auxiliary opening and closing guide unit hinged to one side of the chamber and the other side of the lid to support the opening and closing of the lid. These components stably guide the opening and closing operation of the lid and enhance the sealing performance of the open side of the chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a three-dimensional diagram of a cover opening and closing device in a closed state according to an embodiment of the present invention.

[0027] Figure 2 It is a three-dimensional diagram of a cover opening and closing device in an open state according to an embodiment of the present invention.

[0028] Figure 3 It is an enlarged three-dimensional view of the main parts of the cover opening and closing device according to one embodiment of the present utility model.

[0029] Figure 4 It is an exploded perspective view of the main parts of the cover opening and closing device according to one embodiment of the present invention.

[0030] Figure 5 It is a three-dimensional diagram of the opening and closing drive unit of the cover opening and closing device according to one embodiment of the present invention.

[0031] Figure 6 It is a longitudinal sectional view of the opening and closing operating portion of the cover opening and closing device according to one embodiment of the present invention.

[0032] Figure 7 It is an exploded perspective view of the auxiliary opening and closing guide portion of the cover opening and closing device according to one embodiment of the present invention.

[0033] Figure 8 It is a longitudinal sectional view of an auxiliary opening and closing guide portion of a cover opening and closing device according to one embodiment of the present invention.

[0034] Figure 9 It is a side sectional view of the cover opening and closing device in operation according to one embodiment of the present invention.

[0035] Figure 10 It is an enlarged three-dimensional view of the main parts of the cover opening and closing device according to another embodiment of the utility model.

[0036] Figure 11 yes Figure 10 A partially exploded perspective view of the main hinge bracket area on the other side.

[0037] Description of Reference Numerals

[0038] 10: Chamber 12: Main support

[0039] 14: First auxiliary support 20: Cover

[0040] 22: Reinforcement component 24: Second auxiliary support member

[0041] 100: Opening and closing device 200, 500: Opening and closing operation unit

[0042] 210: Main hinge bracket on one side 212: Main hinge pin

[0043] 220: Housing 230: Shaft

[0044] 240: First hinge pin 250: Connecting rod

[0045] 260: Second hinge pin 270: Main hinge bracket on the other side

[0046] 300: Opening and closing drive unit 310: Gear module

[0047] 312: Drive motor 314: Gear box

[0048] 320: Rotating rod 330: Joint

[0049] 340: Bearing 400: Auxiliary opening and closing guide

[0050] 410: Fixed block 420: Moving block

[0051] 422: Slide 424: Second limiter

[0052] 430: Support beam 436: Pivot pin

[0053] 434: First stopper 438: Spherical surface

[0054] 520: front pivot portion 521: lower plate

[0055] 522: Upper plate 524: Pivot unit

[0056] 530: Unit rod connection portion 540: Rear pivot portion

[0057] 580: Telescopic push rod 590: Push rod drive unit DETAILED DESCRIPTION

[0058] The cover opening and closing device of the utility model comprises:

[0059] an opening and closing operating portion hinged to the open side of the chamber and hinged to the cover plate that opens and closes the open side of the chamber;

[0060] an opening and closing drive portion for transmitting a driving force to guide rotation of one side of the opening and closing operation portion; and

[0061] One or more auxiliary opening and closing guide parts are hinged to one side of the chamber and one side of the cover plate, and are linked to rotate and support the opening and closing action of the cover plate.

[0062] The auxiliary opening and closing guide portion includes:

[0063] a fixed block provided on one side of the chamber;

[0064] A moving block corresponding to the fixed block, which is arranged on one side edge of the cover plate and moves along the arc track with the cover plate and opens towards the fixed block; and

[0065] One end is hinged to the fixed block, and the other end is inserted into the slide slot. When the cover plate and the moving block move, the support beam moves axially and supports the cover plate.

[0066] The opening and closing operation unit includes:

[0067] A telescopic push rod is connected to the cover plate and moves in a telescopic manner to rotate the cover plate;

[0068] a front pivot portion pivotally connected to the cover plate and the telescopic push rod, interacting when the telescopic push rod is actuated to rotate the cover plate; and

[0069] The rear pivot portion is arranged on the opposite side of the front pivot portion with the telescopic push rod as a reference, is connected to the telescopic push rod, and is used to rotatably support the telescopic push rod at the rear end area of ​​the cover plate.

[0070] The front pivot portion comprises:

[0071] a pivot unit comprising a base plate, a pair of pivot ribs, and through holes formed in the pair of pivot ribs;

[0072] fixed to the lower plate of the cover;

[0073] an upper plate, coupled to the lower plate in a stacked manner, for supporting the pivot unit, and having a movement-allowing space formed therein for enabling the base plate to move along the plate surface direction of the cover plate; and

[0074] The unit rod connecting portion is relatively rotatably connected to the telescopic push rod, and the telescopic push rod is connected to the pivot unit and the cover plate, and extends or contracts in a telescopic manner to rotate the cover plate.

[0075] Best Practice

[0076] The following describes embodiments of the cover opening and closing device of the present invention with reference to the accompanying drawings. The thickness of lines and the dimensions of components shown in the drawings may be exaggerated for clarity and convenience. Furthermore, the terms described below are defined based on the functions of the present invention and may vary depending on the user's or operator's intent or customary practices. Therefore, the definitions of these terms should be interpreted based on the overall context of this specification.

[0077] Figure 1 This is a three-dimensional diagram of the cover opening and closing device in one embodiment of the present invention in a closed state. Figure 2 This is a perspective view of the device in the open state.

[0078] Figure 3 This is an enlarged perspective view of the main parts of the cover opening and closing device in one embodiment of the present invention. Figure 4 It is an exploded perspective view of the main parts of the device.

[0079] Figure 5 This is a perspective view of the opening and closing drive unit of the cover opening and closing device in one embodiment of the present invention. Figure 6 It is a longitudinal sectional view of the opening and closing operation part of the device.

[0080] Figure 7 This is an exploded perspective view of the auxiliary opening and closing guide portion of the cover opening and closing device in one embodiment of the present invention. Figure 8 It is a longitudinal sectional view of the auxiliary opening and closing guide portion of the device.

[0081] Figure 9 It is a side sectional view of the cover opening and closing device in an embodiment of the present invention in an operating state.

[0082] Reference Figures 1 to 9 According to an embodiment of the present invention, the cover plate 20 opening and closing device 100 includes an opening and closing operation portion 200 , an opening and closing driving portion 300 and an auxiliary opening and closing guide portion 400 .

[0083] In particular, the opening and closing device 100 of the present invention opens and closes the open side of the chamber 10 by rotating the cover plate 20 along an arc trajectory.

[0084] At this time, the chamber 10 can be widely used in semiconductor vacuum chambers, high-pressure gas chambers, and the like.

[0085] The opening and closing operation unit 200 is hinged to the cover 20 at one side of the chamber 10 and performs the opening and closing operation of the cover 20. Depending on the size and weight of the cover 20 and the pressure inside the chamber 10, the opening and closing operation unit 200 may include one or more components.

[0086] Of course, the cover plate 20 can be made of various materials.

[0087] In particular, the opening and closing operation portion 200 is hinged to one side edge of the open side of the chamber 10 or the periphery of the chamber 10 , and is hinged to the other side of the cover 20 .

[0088] The opening and closing driving portion 300 transmits a driving force to one side hinged to the chamber 10 and the opening and closing operating portion 200 to realize a rotation operation.

[0089] Furthermore, the auxiliary opening and closing guide 400 is hinged to one side of the chamber 10 and to one side of the cover 20, supporting the rotation of the cover 20 during the opening and closing operation. Depending on the size (weight) of the cover 20 and the internal pressure of the chamber 10, the auxiliary opening and closing guide 400 may include one or more components.

[0090] To resist the internal pressure of chamber 10 and prevent deformation, the cover plate 20 has an arc-shaped reinforcement member 22 formed on its upper side. This member is located on the upper side, excluding the two end edges. For ease of illustration, the reinforcement member 22 is schematically formed on the inner side of the upper side of the cover plate 20, extending in an arc from one edge to the other. The lower side of the cover plate 20 can have a variety of different configurations.

[0091] In addition, the other end of the opening and closing operation portion 200 is hinged to the other side edge of the reinforcing component 22 , and directly applies force to lift the other side edge of the cover plate 20 .

[0092] The reinforcing member 22 is an arc-shaped structure with the highest portion in the center along the axial direction. The opening and closing operating portion 200 should avoid interference with the arc-shaped reinforcing member 22 during operation.

[0093] To this end, a main support member 12 is provided on one edge or periphery of the open side of the chamber 10. The height of the main support member 12 is higher than that of the reinforcing member 22. The main support member 12 can be designed into various shapes as needed and can be provided in a one-to-one correspondence with one or more opening and closing operating parts 200.

[0094] Furthermore, one side of the opening and closing operation portion 200 is hinged to the main support member 12. Therefore, the opening and closing operation portion 200 does not interfere with the reinforcing member 22 during operation.

[0095] Furthermore, a first auxiliary support member 14 is provided on the edge or periphery of the open side of the chamber 10. The height of the first auxiliary support member 14 can be higher than the reinforcing member 22, or can be similar in height to the reinforcing member 22, or lower than the reinforcing member 22. The first auxiliary support member 14 can be designed in various shapes and can correspond one to one with one of the auxiliary opening and closing guides 400.

[0096] In addition, a second secondary support member 24 corresponding to the first secondary support member 14 is provided on one side of the cover plate 20 . The second secondary support member 24 can also be designed into various shapes.

[0097] In particular, the main support 12 and the first auxiliary support 14 can be integrally provided on the chamber 10 or can be separated and detachably coupled to the chamber 10. The second auxiliary support 24 can be integrally provided on the cover 20 or can be separated and detachably coupled to the cover 20.

[0098] In addition, the auxiliary opening and closing guide portion 400 is supported between the corresponding first auxiliary support member 14 and the second auxiliary support member 24 to support one side edge of the cover plate 20 when opening and closing.

[0099] Therefore, one side of the opening and closing operation part 200 is hinged to the main support member 12, and one side of the auxiliary opening and closing guide part 400 is hinged to the first sub-support member 14, so that the cover plate 20 can open the open side of the chamber 10 in a manner of forming an obtuse angle.

[0100] In addition, the opening and closing operation unit 200 includes a main hinge bracket 210 on one side, a housing 220 , a shaft 230 , and a main hinge bracket 270 on the other side.

[0101] One side main hinge bracket 210 is arranged on one side of the chamber 10 , and in particular, the one side main hinge bracket 210 can be detachably connected and fixed to each main support member 12 .

[0102] The housing 220 is hinged to one side of the main hinge bracket 210. Specifically, the housing 220 opens axially, and one side of the housing is hinged to one side of the main hinge bracket 210 via the main hinge pin 212. One side of the housing 220 can be directly or indirectly hinged to one side of the main hinge bracket 210 along the axial direction.

[0103] In addition, the housing 220 is guided to rotate by the main hinge pin 212 along the opening and closing trajectory of the cover 20 .

[0104] The shaft 230 can axially move in and out of the housing 220. One side of the shaft 230 is hinged to the other side of the cover plate 20 along the axial direction.

[0105] Therefore, when the cover 20 is opened or closed, the shaft 230 naturally moves along the axial direction of the insertion housing 220 , or is forced to move axially while being inserted into the housing 220 , thereby guiding the opening and closing operation of the cover 20 .

[0106] The other main hinge bracket 270 is axially connected to the other side of the shaft 230 and fixed to the cover plate 20 .

[0107] Therefore, the housing 220 and the shaft 230 rotate bidirectionally via the main hinge pin 212 , guiding the opening and closing operations of the cover 20 .

[0108] In particular, the housing 220 and the shaft 230 are arranged in a straight line along the axial direction and seal the open side of the chamber 10 by pressing the cover plate 20 .

[0109] At this time, when the cover plate 20 applies pressure to the chamber 10 in the vertical direction, the sealing performance is maximized. However, the housing 220 and the shaft 230 apply an oblique force along the upper surface of the cover plate 20 or the tangential direction of the reinforcing member 22.

[0110] Therefore, ideally, the pressure applied by shaft 230 should be as close to vertical as possible.

[0111] To this end, the opening and closing operation part 200 includes a first hinge pin 240 , a link 250 , and a second hinge pin 260 .

[0112] The first hinge pin 240 is hinged to the other end of the shaft 230 along the axial direction.

[0113] One end of the connecting rod 250 is hinged to the first hinge pin 240. In particular, the connecting rod 250 can be a single one or a plurality of connected rods.

[0114] The second hinge pin 260 is hinged to the other end of the connecting rod 250 along the axial direction, and is hinged to the other side main hinge bracket 270.

[0115] In other words, one end of the connecting rod 250 is hinged to the first hinge pin 240 along the axial direction, and the other end is hinged to the second hinge pin 260. At this time, because the shaft 230 is located above the arc-shaped reinforcement member 22, when the cover 20 closes the open side of the chamber 10, the connecting rod 250 remains in a downwardly inclined state, thereby guiding the cover 20 to apply a greater pressing force.

[0116] That is, when the cover 20 is in the closed state, the connecting rod 250 is tilted downward relative to the axial direction of the shaft 230, thereby increasing the pressing force during closing.

[0117] In addition, the opening and closing driving part 300 includes a gear module 310 , a rotating rod 320 , and a joint 330 .

[0118] Gear module 310 is composed of a gear assembly and rotates upon receiving the driving force from drive motor 312. Gear module 310 can employ a variety of gear types, such as bevel gears, external gears, helical gears, and reduction gears. Drive motor 312 can be mounted within a gear housing 314 within gear module 310 to protect the gears within the gear module.

[0119] The rotating rod 320 is inserted into the housing 220, receiving the rotational force from the gear module 310 and rotating in both circumferential directions. The rotating rod 320 is connected to the gear module 310, and one axial end of the rotating rod 320 is surrounded and supported by the gear box 314 to ensure its rotation. Therefore, one axial end of the housing 220 can be connected to the gear box 314 in either an integral or detachable manner.

[0120] In particular, an external thread 322 is formed partially or entirely on the outer side surface of the rotating rod 320 along the axial direction.

[0121] A connector 330 is axially fixed to one end of the shaft 230 and has internal threads 332 formed on its inner surface. Therefore, when the rotating rod 320 is inserted into the connector 330, the external threads 322 and the internal threads 332 engage. The shaft 230 is axially retracted by the rotation of the rotating rod 320, pulling the other end of the cover 20 toward opening. When the rotating rod 320 is rotated, the shaft 230 is axially retracted, pulling the other end of the cover 20 toward opening. When the rotating rod 320 is rotated, the shaft 230 is pushed toward closing.

[0122] At this time, since the shaft 230 is connected to the other main hinge bracket 270 , the shaft 230 does not rotate in the circumferential direction.

[0123] Of course, the joint 330 can be designed in various shapes and fixedly connected to the shaft 230 in various ways.

[0124] In particular, the connector 330 is initially easily inserted into the interior of the housing 220 and prevented from being completely removed from the other end of the housing 220 .

[0125] For this purpose, the housing 220 is provided with an openable and closable cover 350 at the other end thereof. At this time, the shaft 230 is inserted along the cover 350 and performs a linear reciprocating motion.

[0126] Furthermore, to ensure that the rotating rod 320 can stably rotate in the circumferential direction within the housing 220, a bearing 340 is provided on the outer circumference of the rotating rod 320, and the bearing 340 contacts the inner side surface of the housing 220. Therefore, the bearing 340 supports the rotating rod 320 without shaking when rotating within the housing 220.

[0127] In addition, the auxiliary opening and closing guide portion 400 includes a fixed block 410 , a moving block 420 , and a support beam 430 .

[0128] The fixing block 410 is fixed to one end edge or periphery of the open side of the chamber 10. At this time, the fixing block 410 can correspond to the first secondary support member 14 one by one, and the fixing block 410 can be the first secondary support member 14 itself or can be detachably connected to the first secondary support member 14.

[0129] The moving block 420 is disposed at one end edge of the cover plate 20 , corresponding to the fixed block 410 , and moves along an arc track together with the cover plate 20 .

[0130] The moving block 420 may correspond to the second secondary support member 24 on a one-to-one basis. The moving block 420 may be the second secondary support member 24 itself, or may be detachably connected to the second secondary support member 24 .

[0131] In addition, the movable block 420 forms an open slot 422 facing the fixed block 410. At this time, the slot 422 can be open only to one end of the movable block 420, or to one end of the movable block 420 and both sides thereof.

[0132] One end of the support beam 430 is hinged axially to the fixed block 410, and the other end is inserted into the slide slot 422. In other words, one end of the support beam 430 is hinged to the fixed block 410 via the pivot pin 436 and rotates with the opening and closing direction of the cover 20. The other end of the support beam 430 is inserted into the slide slot 422 of the movable block 420, supporting one side edge of the cover 20, thereby providing stable support for the cover 20 when it is opened.

[0133] When the cover plate 20 and the moving block 420 move in the opening and closing direction of the cover plate 20 , the support beam 430 moves in the axial direction to support the cover plate 20 .

[0134] Therefore, when the opening and closing drive unit 300 is started and the cover 20 opens the open side of the chamber 10, the other end of the cover 20 is connected to and supported by the opening and closing drive unit 300 through at least one other side main hinge bracket 270, and one end is connected to and supported by the support beam 430 through at least one moving block 420.

[0135] In particular, the timing at which the connecting rod 250 lifts the other side main hinge bracket 270 of the other end of the cover plate 20 and the supporting beam 430 lifts the moving block 420 of one end of the cover plate 20 is different. In this case, when the cover plate 20 rotates toward the opening direction, shaking may occur.

[0136] To prevent this, a slot 272 is formed in the other main hinge bracket 270, into which the circular second hinge pin 260 is inserted. At least one of the shaft 230 and the connecting rod 250 has a positive hole 232 formed at its other end or edge, into which the circular first hinge pin 240 is inserted. Therefore, when the shaft 230 rotates about the main hinge pin 212, the range of motion of the second hinge pin 260 within the slot 272 is expanded.

[0137] At this time, the long diameter of the slot hole 272 is in an arc shape or a straight line shape along the moving track of the other end of the shaft 230 .

[0138] Therefore, when the cover 20 covers the open side of the chamber 10, the second hinge pin 260 is located below the slot 272. To open the cover 20, the shaft 230 initially lifts the link 250 (upward), and the second hinge pin 260 moves to the upper side of the slot 272. Subsequently, the cover 20 rotates in the opening and closing direction. Simultaneously, one end of the support beam 430 gradually moves upward.

[0139] Conversely, when the cover 20 is moved toward the open side of the chamber 10, the shaft 230 initially rotates the link 250 downward, causing the second hinge pin 260 to move to the lower side of the slot 272. Subsequently, the cover 20 rotates in the closing direction. Simultaneously, one end of the support beam 430 gradually moves downward.

[0140] Therefore, when one side edge of the cover plate 20 moves along the rotation trajectory of the other side edge, their movement timings are different.

[0141] In addition, when the cover plate 20 moves toward the closing direction, the support beam 430 firmly supports one side edge of the cover plate 20 to prevent it from suddenly moving downward.

[0142] At this time, when the end of the support beam 430 is pressed against the inner side surface of the sliding groove 422 of the moving block 420 , the moving block 420 may be damaged.

[0143] Therefore, a first stopper 434 is provided on the circumference of the support beam 430, and a second stopper 424 corresponding to the first stopper 434 is provided on the movable block 420 to limit the axial insertion distance of the support beam 430. In other words, when the cover plate 20 is about to completely close the open side of the chamber 10, the first stopper 434 gradually contacts the corresponding second stopper 424, thereby preventing one side of the cover plate 20 from suddenly closing the open side of the chamber 10. Of course, the first stopper 434 and the second stopper 424 can be designed in a variety of shapes.

[0144] Furthermore, as support beam 430 rotates while in contact with the inner bottom surface of chute 422, a spherical surface 438 may be formed at the portion of support beam 430 that contacts the inner bottom surface of chute 422. The rolling contact of spherical surface 438 with the inner bottom surface of chute 422 reduces frictional resistance between support beam 430 and moving block 420. At this point, chute 422 may be recessed to form a curved groove corresponding to spherical surface 438 of support beam 430.

[0145] Figure 10 This is an enlarged perspective view of the main parts of the cover opening and closing device according to another embodiment of the utility model. Figure 11 yes Figure 10 A partially exploded perspective view of the main hinge bracket area on the other side.

[0146] Reference Figure 10 and Figure 11 The opening and closing operating portion 500 of this embodiment may include a front pivot portion 520 , a rear pivot portion 540 and a telescopic push rod 580 .

[0147] The telescopic push rod 580 is connected to the cover plate 20 and operates in a telescopic manner, thereby driving the cover plate 20 to rotate. The telescopic push rod 580 is driven by a push rod driving unit 590.

[0148] In this embodiment, the telescopic push rod 580 is connected to the cover plate 20, but it can also be connected to a reinforcement member (not shown). In addition, in this embodiment, a six-section telescopic push rod 580 is used, but the number of sections can be changed. Therefore, the scope of rights of the present invention is not limited to Figure 10 Since the cover opening and closing device of this embodiment adopts a telescopic push rod 580 that is extended or shortened in a stacking manner, the opening angle of the cover 20 can be larger. The specific structure of the telescopic push rod 580 belongs to the known technology.

[0149] The cross-sectional area of ​​the telescopic push rod 580 gradually decreases from the rear pivot portion 540 to the front pivot portion 520, thereby ensuring the stability of the operation. As shown in this embodiment, after adopting the telescopic push rod 580, the opening angle of the cover 20 can be larger.

[0150] The push rod drive unit 590 is connected to the telescopic push rod 580 and provides driving force to extend or shorten the length of the telescopic push rod 580. Although a pneumatic cylinder can be used as the push rod drive unit 590, in this embodiment, a drive motor 591 is used. The push rod drive unit 590 includes a drive motor 591 for generating power, a reducer 592 connected to the drive motor 591 to reduce speed and increase torque, and a gear box 593 that transmits the power from the reducer 592 to the telescopic push rod 580 via a gear mechanism. The gear box 593 can be composed of a combination of a worm gear, a worm, a bevel gear, etc., and transmits the rotational energy input from the drive motor 591 and the reducer 592 to the telescopic push rod 580, causing it to extend or shorten.

[0151] When the cover 20 is opened or closed, the operation of the telescopic push rod 580 is assisted by the front pivot portion 520 and the rear pivot portion 540 .

[0152] The rear pivot portion 540 rotatably supports the telescopic push rod 580. A pair of main hinge pins forming a pivot center are inserted into the pivot module 543, and the main hinge pins are inserted into the through holes of the rear pivot portion 540, so that the telescopic push rod 580 can rotate around the main hinge pins.

[0153] The rear pivot portion 540 is located at the other end of the telescopic push rod 580 and is connected to the push rod driving portion 590 to support the rotation of the telescopic push rod 580 in the rear area of ​​the cover plate 20.

[0154] The rear pivot portion 540 may be disposed on a separate bracket 541. Of course, the bracket 541 may be disposed on the chamber.

[0155] The bracket 541 can support the cover support plate 560 fixed to the outer structure of the cover 20. The cover support plate 560 is a structure extending to the side of the cover 20.

[0156] The front pivot portion 520 may include a lower plate 521 , an upper plate 522 , a pivot unit 524 , and a unit rod connection portion 530 .

[0157] The lower plate 521 is a plate-shaped structure fixed to the cover plate 20. The lower plate 521 is fixed to the cover plate 20 by screws. In this embodiment, the lower plate 521 is combined with the cover plate 20, but it can also be combined with a reinforcement member (not shown).

[0158] The upper plate 522 is superimposed on and coupled to the lower plate 521, supporting the pivot unit 524. Unlike the enclosed lower plate 521, the upper plate 522 has a permissible movement space 523 within it, allowing the pivot unit 524 to move slightly. When the cover 20 is opened or closed, the pivot unit 524, and particularly the base plate 525 of the pivot unit 524, can move slightly in the plane of the cover 20. Because the base plate 525 can move within the permissible movement space 523, even when the cover 20 is closed and a vacuum pressure is formed within the chamber, unexpected movement of the cover 20 can be accommodated. This prevents structural damage to the telescopic push rod 580 or the front pivot unit 520.

[0159] The pivot unit 524 is disposed within the movement-permitting space 523 of the upper plate 522 and is supported by the upper plate 522. The pivot unit 524 includes a base plate 525, one side of which is fixed to the base plate 525, and a pair of pivot ribs 526, the other side of which passes through the movement-permitting space 523 and is disposed on the outer side of the upper plate 522. The pivot ribs 526 have through-holes 526a formed in them.

[0160] The unit rod connecting portion 530 is used to connect the pivot unit 524 and the telescopic push rod 580 to each other in a relatively rotatable manner. When the cover 20 is opened or closed, the length of the telescopic push rod 580 is shortened or extended, and the application of the unit rod connecting portion 530 allows the end of the telescopic push rod 580 to rotate relative to the pivot unit 524.

[0161] The unit rod connection portion 530 includes a rotating ring 531 disposed between a pair of pivot ribs 526; a rotating shaft portion 532 connected to the rotating ring 531 and extending to both sides. The rotating shaft portion 532 is rotatably connected to the rotating ring 531 via through-holes 526a formed in the pair of pivot ribs 526; and a connecting rod 533, one end of which is connected to the rotating ring 531 and the other end is connected to the telescopic push rod 580. The unit rod connection portion 530 connects the pivot unit 524 and the telescopic push rod 580 so that they can rotate relative to each other, which not only makes assembly of the components easier but also facilitates maintenance.

[0162] In addition, the front pivot portion 520 proposed in this embodiment can be Figures 1 to 9 The first hinge pin 240, the connecting rod 250, the second hinge pin 260 and the other side main hinge bracket 270 proposed in the embodiment are replaced with each other.

[0163] Based on the above structure and principle, this embodiment includes a telescopic push rod 580, which can further increase the opening angle of the cover 20. In other words, by adopting a stacking structure of the telescopic push rod 580 to implement the cover opening and closing device, the opening angle of the cover 20 can be increased to a greater extent than the traditional method. Increasing the opening angle of the cover 20 can meet the diverse needs of customers. In addition, increasing the opening angle of the cover 20 also has the effect of facilitating cleaning of the interior of the chamber. The maximum opening angle of the traditional cover is 110°, but by applying the stacking structure of the present invention, the maximum opening angle of the cover 20 can reach 150°.

[0164] The present invention has been described with reference to the embodiments shown in the figures, but these are merely exemplary. Those skilled in the art may make various modifications and other equivalent embodiments based on the contents of the present invention. Therefore, the true technical protection scope of the present invention should be determined by the following claims.

[0165] The cover opening and closing device of the utility model can be used in various chambers of semiconductor manufacturing equipment.

Claims

1. A cover opening and closing device, characterized in that: include: At least one opening and closing operating portion, which is hinged to the open side of the chamber and hinged to the cover plate for opening and closing the open side of the chamber, and is used to guide the opening and closing movement of the cover plate relative to the chamber; an opening and closing driving portion, which transmits a driving force to the opening and closing operating portion to guide one side of the opening and closing operating portion to rotate; as well as At least one auxiliary opening and closing guide portion is hinged to one side of the chamber and to one side of the cover plate, and is used to support the cover plate that rotates in conjunction with the opening and closing action of the cover plate. Wherein, the auxiliary opening and closing guide part includes: a fixed block, disposed on one side of the chamber; a movable block, which is arranged on one side edge of the cover plate corresponding to the fixed block, moves along an arc track with the cover plate, and is formed with a sliding groove open toward the fixed block; and The support beam has one end hinged to the fixed block and the other end inserted into the sliding groove. When the cover plate and the movable block move, the support beam moves axially and supports the cover plate.

2. The cover opening and closing device according to claim 1, characterized in that: The cover plate is formed with an arc-shaped reinforcement component on the upper side except for at least one side edge and the other side edge to strengthen the cover plate. The other end of the opening and closing operation portion is hinged to the other side edge of the reinforcement component.

3. The cover opening and closing device according to claim 1, characterized in that: The chamber is provided with a main support on one side, One side of the opening and closing operation portion is hinged to the main support member.

4. The cover opening and closing device according to claim 2 or 3, characterized in that: The chamber is provided with a first secondary support member on one side, The cover plate is provided with a second secondary support member on one side corresponding to the first secondary support member. The auxiliary opening and closing guide portion is supported by the corresponding first sub-support member and the second sub-support member.

5. The cover opening and closing device according to any one of claims 1 to 3, characterized in that: The opening and closing operation unit includes: a main hinge bracket on one side, arranged on one side of the chamber; The housing is hinged to the main hinge bracket on one side and rotates along the opening and closing trajectory of the cover; a shaft capable of axially moving in and out of the housing, and naturally or forcibly moving in the axial direction by the opening and closing of the cover plate, for guiding the opening and closing of the cover plate; and The main hinge bracket on the other side is axially connected to the other end of the shaft and fixed to the cover plate.

6. The cover opening and closing device according to claim 5, characterized in that: The opening and closing operation unit includes: a first hinge pin, axially hinged to the other end of the shaft; one or more connecting rods, one end of which is connected to the first hinge pin; The second hinge pin is connected to the other end of the connecting rod and is hinged to the main hinge bracket on the other side. When the cover is in a closed state, the axial direction of the connecting rod is tilted downward relative to the axial direction of the shaft, so as to increase the pressing force during closing.

7. The cover opening and closing device according to claim 6, characterized in that: The opening and closing drive unit includes: The gear module receives the driving force of the driving motor and rotates; a rotating rod, axially inserted into the housing, receiving the rotational force of the gear module and rotating in one direction or the other along the circumferential direction, and having an external thread formed on the outer circumferential surface; and The joint is fixed to one end of the shaft and has an internal thread formed on its inner surface to engage with the external thread. The joint guides the shaft to move axially according to the rotation direction of the rotating rod.

8. The cover opening and closing device according to claim 7, characterized in that: The rotating rod is supported on the housing through a bearing inside the housing.

9. The cover opening and closing device according to claim 1, characterized in that: The support beam has a first limiting member, The moving block has a second limiting member, which corresponds to the first limiting member and is used to limit the axial insertion distance of the support beam.

10. The cover opening and closing device according to claim 1, wherein: The opening and closing operation unit includes: a telescopic push rod connected to the cover plate and moving in a telescopic manner to rotate the cover plate; a front pivot portion pivotally connected to the cover plate and the telescopic push rod, interacting when the telescopic push rod is actuated to rotate the cover plate; and The rear pivot portion is arranged on the opposite side of the front pivot portion with the telescopic push rod as the reference, is connected to the telescopic push rod, and is used to rotatably support the telescopic push rod at the rear end area of ​​the cover plate. The front pivot portion comprises: a pivot unit comprising a base plate, a pair of pivot ribs, and through holes formed in the pair of pivot ribs; a lower plate, which is a plate-shaped structure fixed to the cover plate; an upper plate, coupled to the lower plate in a stacked manner, for supporting the pivot unit, and having a movement-allowing space formed therein for enabling the base plate to move along the plate surface direction of the cover plate; and The unit rod connecting portion is relatively rotatably connected to the telescopic push rod, and the telescopic push rod is connected to the pivot unit and the cover plate, and extends or contracts in a telescopic manner to rotate the cover plate.

11. The cover opening and closing device according to claim 10, characterized in that: The telescopic push rod is connected to a push rod driving portion and is driven. The push rod driving portion provides a driving force for extending or shortening the length of the telescopic push rod.

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