Flower basket sheet taking and placing mechanism
The multi-arm cross-reciprocating transmission form of the flower basket wafer picking and placing mechanism solves the problems of low wafer picking and placing efficiency and production capacity bottleneck in the existing technology, realizes efficient and stable silicon wafer picking and placing, and reduces the fragmentation rate and maintenance cost.
Patent Information
- Application Number
- CN202422627730.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-30
- Publication Date
- 2025-09-09
- Estimated Expiration
- 2034-10-30
AI Technical Summary
The existing flower basket placement mechanism has low placement efficiency, high fragmentation rate, and high maintenance cost. In addition, it is difficult to further improve production capacity without increasing equipment space or cost with traditional methods.
The flower basket wafer placement mechanism adopts a multi-arm cross-reciprocating transmission form. Through the cross-reciprocating motion of multiple force arms, the mechanical structure and control strategy are optimized to achieve efficient silicon wafer placement.
Without increasing equipment space and costs, the cycle time of taking and placing wafers is significantly reduced, production efficiency is improved, the fragmentation rate is reduced, and production capacity is increased.
Smart Images
Figure CN223321247U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of CVD / PVD automatic loading and unloading equipment, in particular to a flower basket taking and placing mechanism. Background Art
[0002] Existing basket-based wafer placement mechanisms often suffer from low efficiency, high fragmentation rates, high maintenance costs, and limited production efficiency. The basket-based mechanisms of mainstream CVD and PVD automated loading and unloading equipment typically utilize a single lever arm for forward and backward movement, driven by a motor, electric cylinder, or other power source to remove and insert wafers from the basket. The single-cycle cycle of similar mechanisms on the market is limited to approximately 1.5 to 2 seconds. Production lines can only increase throughput by increasing the lever arm's movement speed to reduce loading and unloading cycles or by increasing the number of structural units.
[0003] The above two methods of "increasing production" have certain limitations:
[0004] 1. According to the original structural characteristics, the rhythm of the extracting and inserting mechanism has reached its upper limit. Continuing to increase the arm transfer speed will significantly reduce the operational stability of the entire structure. The uncontrollable factors caused by vibration during operation and environmental wind resistance will increase, resulting in more abnormal situations such as more fragments and sheet jumping.
[0005] 2. Although increasing the number of structural units can ensure the stability of a single structure, it will inevitably increase the space occupied by the entire automation equipment, thereby increasing the cost pressure on the client and being detrimental to the future technology promotion of the industry.
[0006] In order to overcome these limitations, a new form of flower basket picking and placing is designed, which achieves a higher degree of automation and production efficiency through optimized mechanical structure design and advanced control strategy. Utility Model Content
[0007] In view of the above problems, the present invention provides a flower basket taking and placing mechanism adopting a multi-arm cross reciprocating transmission form.
[0008] In order to solve the above technical problems, the technical solution adopted by the present invention is: a flower basket chip loading and unloading mechanism, comprising a first chip loading mechanism, a second chip loading mechanism, a base assembly, and a silicon chip, wherein the first chip loading mechanism and the second chip loading mechanism are mounted on the base assembly;
[0009] The first sheet-carrying mechanism includes a first force arm, a first supporting tooth, a first extension plate, a first lifting motor, a first base plate, a first vertical guide rail, a first slide seat, and a first slider. The first supporting tooth is regularly distributed on the first force arm. The first force arm is connected to the first base plate through the first extension plate. The first base plate and the first slide seat are connected through the first vertical guide rail. The first base plate is also relatively fixed to the moving block of the first lifting motor. The moving block is driven by the first lifting motor to drive the first base plate to move vertically up and down on the first vertical guide rail. The first slide seat is equipped with a first slider.
[0010] The second sheet-carrying mechanism includes a second force arm, a second supporting tooth, a second extension plate, a second vertical guide rail, a second slide, a second slider, and a second lifting motor. The second supporting tooth is regularly distributed on the second force arm, the second force arm is fixed to the second extension plate, the second extension plate and the second slide are connected via the second vertical guide rail, the second extension plate is fixed relative to the moving block of the second lifting motor, and the moving block is driven by the second lifting motor to drive the second extension plate to move vertically up and down on the second vertical guide rail. The second slider is installed on the second slide.
[0011] The base assembly includes side seat plates, a middle seat plate, support legs, front and rear drive motors, a base plate, a drive wheel, a drive belt, a second clamping block, a first slide rail, a first clamping block, a driven wheel, and a second slide rail. The base assembly fixes the side seat plates and the middle seat plate to the same plane through the support legs. The front and rear drive motors are installed on the base plate, and the shaft ends are connected to the drive wheels. A driven wheel is installed at the other end of the base plate, and the drive wheel and the driven wheel are driven by a drive belt. The first clamping block and the second clamping block are respectively fixed on the symmetrical planes of the drive belt and are respectively connected to the first sheet-carrying mechanism and the second sheet-carrying mechanism. The first slide rail and the second slide rail are installed on the base plate.
[0012] Furthermore, the first supporting teeth and the second supporting teeth are arranged in groups of two, the spacing between each group of supporting teeth is set according to the specifications of the silicon wafer, and adjacent groups are arranged with equal spacing.
[0013] Furthermore, the base plate is provided with corresponding guide grooves corresponding to the first extension plate and the second extension plate.
[0014] Furthermore, the movable distance of the first slide rail and the second slide rail is a conveying distance of the length of a silicon wafer.
[0015] Furthermore, the first slide rail and the second slide rail are arranged parallel to each other and are respectively adapted to the first slider and the second slider of the first sheet-carrying mechanism and the second sheet-carrying mechanism.
[0016] From the above description of the utility model, it can be seen that compared with the prior art, the utility model has the following advantages:
[0017] The utility model can adjust the original single force arm to a multi-force arm without changing the original design space, and adopt a single or multiple power sources to drive the multiple force arms to perform cross reciprocating motion, thereby doubling the efficiency of digging and inserting the pieces, effectively reducing the rhythm of taking and placing the pieces, improving the industry's production capacity bottleneck, and playing a positive role in promoting the future development of the industry. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] The accompanying drawings, which constitute part of this application, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an improper limitation of the present invention. In the accompanying drawings:
[0019] Figure 1 This is a schematic diagram of the overall front view structure of the utility model;
[0020] Figure 2 This is an isometric view of the first sheet-carrying mechanism of the present invention;
[0021] Figure 3 This is an isometric view of the second sheet-carrying mechanism of the present invention;
[0022] Figure 4 This is an axonometric view of the initial working state of the embodiment of the utility model;
[0023] Figure 5 This is a working state diagram of the silicon wafer being transferred to the first placement position according to an embodiment of the utility model;
[0024] Figure 6 This is a working state diagram of the silicon wafer being transferred to the second placement position according to an embodiment of the present utility model;
[0025] Figure 7 This is a working state diagram of the silicon wafer being transferred to the wafer placement position according to an embodiment of the utility model. DETAILED DESCRIPTION
[0026] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.
[0027] Example
[0028] refer to Figure 1-Figure 4 A flower basket pick-and-place mechanism includes a first chip loading mechanism 100, a second chip loading mechanism 200, a base assembly 300, and a silicon chip 001. The first chip loading mechanism 100 and the second chip loading mechanism 200 are mounted on the base assembly 300.
[0029] The first sheet loading mechanism 100 includes a first force arm 101, a first supporting tooth 102, a first extension plate 103, a first lifting motor 104, a first base plate 105, a first vertical guide rail 106, a first slide 107, and a first slider 108. The first supporting teeth 102 are regularly distributed on the first force arm 101. The first force arm 101 is connected to the first base plate 105 through the first extension plate 103. The first base plate 105 and the first slide 107 are connected through the first vertical guide rail 106. The first base plate 105 is also relatively fixed to the moving block of the first lifting motor 104. The moving block is driven by the first lifting motor 104 to drive the first base plate 105 to move vertically up and down on the first vertical guide rail 106. The first slide 108 is installed on the first slide 107.
[0030] The second sheet-carrying mechanism 200 includes a second force arm 201, a second supporting tooth 202, a second extension plate 203, a second vertical guide rail 204, a second slide 205, a second slider 206, and a second lifting motor 207. The second supporting teeth 202 are regularly distributed on the second force arm 201. The second force arm 201 is fixed to the second extension plate 203. The second extension plate 203 and the second slider 205 are connected via the second vertical guide rail 204. The second extension plate 203 is also relatively fixed to the moving block of the second lifting motor 207. The moving block is driven by the second lifting motor 207 to drive the second extension plate 203 to move vertically up and down on the second vertical guide rail 204. The second slider 206 is installed on the second slide 205.
[0031] The base assembly 300 includes a side seat plate 301, a middle seat plate 302, a support leg 303, a front and rear drive motor 304, a base plate 305, a drive wheel 306, a drive belt 307, a second clamping block 308, a first slide rail 309, a first clamping block 310, a driven wheel 311, and a second slide rail 312. The base assembly 300 fixes the side seat plate 301 and the middle seat plate 302 to the same plane through the support leg 303, and the front and rear drive motor 304 is installed on the base. On the plate 305, the shaft end is connected to the driving wheel 306, and a driven wheel 311 is installed at the other end of the base plate 305. The driving wheel 306 and the driven wheel 311 are transmitted through a driving belt 307. The first clamping block 310 and the second clamping block 308 are respectively fixed on the symmetrical planes of the driving belt 307, and are respectively connected to the first sheet-carrying mechanism 100 and the second sheet-carrying mechanism 200. The first slide rail 309 and the second slide rail 312 are installed on the base plate 305.
[0032] The first supporting teeth 102 and the second supporting teeth 202 are grouped in two. The spacing between each group of supporting teeth is set according to the specifications of the silicon wafer, and adjacent groups are arranged with equal spacing.
[0033] The base plate 305 is provided with corresponding guide grooves 313 corresponding to the first extension plate 103 and the second extension plate 203 .
[0034] The movable distance of the first slide rail 309 and the second slide rail 312 is the conveying distance of a silicon wafer length. The first slide rail 309 and the second slide rail 312 are arranged parallel to each other and are respectively adapted to the first slider 108 and the second slider 206 of the first wafer loading mechanism 100 and the second wafer loading mechanism 200.
[0035] like Figure 4 As shown, during operation, the first wafer loading mechanism 100 is first placed in the front conveying position, wherein the first supporting teeth 102 are lower than the upper working surfaces of the side seat plates 301 and the middle seat plates 302; the second wafer loading mechanism 200 is placed in the rear conveying position separated by a silicon wafer length, wherein the second supporting teeth 202 are lower than the upper working surfaces of the side seat plates 301 and the middle seat plates 302.
[0036] The first lifting motor 104 drives the moving block, causing the first base plate 105 to move vertically upward on the first vertical guide rail 106. The first extension plate 103 and the first lever 101 are lifted to a certain height, lifting the first silicon wafer 001 in the device basket. At this time, the first supporting teeth 102 are higher than the upper working surfaces of the side base plate 301 and the middle base plate 302.
[0037] like Figure 5 As shown, the front and rear drive motors 304 operate, driving the belt 307 via the drive pulley 306 and driven pulley 311, moving the first wafer carrier 100 to a rear transport position one wafer length away. Simultaneously, the second wafer carrier 200 is moved to a front transport position one wafer length away. The first support teeth 102 on the first lever arm 101 transfer the first wafer 001 to the first placement position 002 on the working surfaces of the side and center base plates 301 and 302.
[0038] The first lifting motor 104 drives the moving block, driving the first base plate 105 to move vertically downward on the first vertical guide rail 106. The first extension plate 103 and the first lever arm 101 are lowered to a certain height as a whole, and the first silicon wafer 001 in the equipment basket is dropped and placed on the first placement position 002 on the working surface of the side seat plate 301 and the middle seat plate 302.
[0039] At the same time, the second lifting motor 207 drives the moving block, driving the second extension plate 203 to move vertically upward on the second vertical guide rail 204. The second extension plate 203 and the second lever arm 201 are lifted to a certain height as a whole, lifting the second silicon wafer 001 in the equipment basket and the first silicon wafer 001 on the first placement position 002; at this time, the second supporting teeth 202 are higher than the upper working surfaces of the side seat plate 301 and the middle seat plate 302.
[0040] like Figure 6 As shown, the front and rear drive motors 304 operate, driving the belt 307 via the drive wheel 306 and the driven wheel 311, moving the second wafer carrier 200 to a rear transport position one wafer length away. Simultaneously, the first wafer carrier 100 is moved to a front transport position one wafer length away. The second support teeth 202 on the second lever arm 201 transfer the second wafer 001 to the first placement position 002 on the working surfaces of the side and center base plates 301 and 302. Simultaneously, the first wafer 001, previously located above the first placement position 002, is transferred to the second placement position 003.
[0041] The second lifting motor 207 drives the moving block, driving the second extension plate 203 to move vertically downward on the second vertical guide rail 204. The second extension plate 203 and the second force arm 201 are lowered to a certain height as a whole, and the first silicon wafer 001 is dropped and placed on the second placement position 003 of the working surface of the side seat plate 301 and the middle seat plate 302; at the same time, the second silicon wafer 001 is dropped and placed on the first placement position 002 of the working surface of the side seat plate 301 and the middle seat plate 302.
[0042] Next, the first lifting motor 104 drives the moving block, driving the first base plate 105 to move vertically upward on the first vertical guide rail 106, and the first extension plate 103 together with the first lever arm 101 are lifted to a certain height as a whole, while lifting the third silicon wafer 001 in the equipment basket, the second silicon wafer 001 on the first placement position 002, and the first silicon wafer 001 on the second placement position 003; at this time, the first supporting teeth 102 are higher than the upper working surfaces of the side seat plate 301 and the middle seat plate 302.
[0043] like Figure 7 As shown, the front and rear drive motors 304 operate, driving the belt 307 via the drive wheel 306 and driven wheel 311, moving the first wafer carrier 100 to a rear transport position one wafer length away. Simultaneously, the second wafer carrier 200 is moved to a front transport position one wafer length away. The first support teeth 102 on the first lever arm 101 transfer the third wafer 001 to the first placement position 002 on the working surfaces of the side and center base plates 301 and 302, transfer the second wafer 001 to the second placement position 003, and transfer the first wafer 001 to the wafer placement position 004 for the next process step.
[0044] The first lifting motor 104 drives the moving block, driving the first base plate 105 to move vertically downward on the first vertical guide rail 106. The first extension plate 103 and the first lever arm 101 are lowered to a certain height as a whole, and the first silicon wafer 001 is dropped and placed on the wafer placement position 004 for the next process; at the same time, the second silicon wafer 001 is dropped and placed on the second placement position 003 on the working surface of the side seat plate 301 and the middle seat plate 302, and the third silicon wafer 001 is dropped and placed on the first placement position 002.
[0045] Following this pattern, the wafers in the equipment's basket are transferred one by one to wafer placement position 004 and then to the next workstation. Assuming the round-trip cycle of a single wafer loading mechanism is equivalent to the mainstream market cycle t, the wafer transfer cycle using this new method is t / 2, doubling wafer transfer efficiency.
[0046] The utility model can adjust the original single force arm to a multi-force arm without changing the original design space, and adopt a single or multiple power sources to drive the multiple force arms to perform cross reciprocating motion, thereby doubling the efficiency of digging and inserting the pieces, effectively reducing the rhythm of taking and placing the pieces, improving the industry's production capacity bottleneck, and playing a positive role in promoting the future development of the industry.
[0047] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. A flower basket taking and placing mechanism, characterized in that: It comprises a first chip-carrying mechanism (100), a second chip-carrying mechanism (200), a base assembly (300), and a silicon chip (001), wherein the first chip-carrying mechanism (100) and the second chip-carrying mechanism (200) are mounted on the base assembly (300); The first sheet-carrying mechanism (100) includes a first force arm (101), a first supporting tooth (102), a first extension plate (103), a first lifting motor (104), a first base plate (105), a first vertical guide rail (106), a first slide seat (107), and a first slider (108). The first supporting tooth (102) is regularly distributed on the first force arm (101). The first force arm (101) is connected to the first base plate (105) through the first extension plate (103). The first base plate (105) and the first slide seat (107) are connected through the first vertical guide rail (106). The first base plate (105) is fixed relative to the moving block of the first lifting motor (104). The moving block is driven by the first lifting motor (104) to drive the first base plate (105) to move vertically up and down on the first vertical guide rail (106). The first slide seat (107) is equipped with a first slider (108). The second sheet-carrying mechanism (200) includes a second force arm (201), a second supporting tooth (202), a second extension plate (203), a second vertical guide rail (204), a second slide seat (205), a second slider (206), and a second lifting motor (207). The second supporting tooth (202) is regularly distributed on the second force arm (201). The second force arm (201) is fixed on the second extension plate (203). The second extension plate (203) and the second slide seat (205) are connected via the second vertical guide rail (204). The second extension plate (203) is relatively fixed to the moving block of the second lifting motor (207). The moving block is driven by the second lifting motor (207) to drive the second extension plate (203) to move vertically up and down on the second vertical guide rail (204). The second slide seat (205) is equipped with a second slider (206). The base assembly (300) includes a side seat plate (301), a middle seat plate (302), a support leg (303), a front and rear drive motor (304), a base plate (305), a drive wheel (306), a drive belt (307), a second clamping block (308), a first slide rail (309), a first clamping block (310), a driven wheel (311), and a second slide rail (312). The base assembly (300) fixes the side seat plate (301) and the middle seat plate (302) on the same plane through the support leg (303). The front and rear drive motor (304) is installed On the base plate (305), the shaft end is connected to the driving wheel (306), and the other end of the base plate (305) is installed with a driven wheel (311). The driving wheel (306) and the driven wheel (311) are driven by a driving belt (307). The first clamping block (310) and the second clamping block (308) are respectively fixed on the symmetrical planes of the driving belt (307) and are respectively connected to the first sheet-carrying mechanism (100) and the second sheet-carrying mechanism (200). The first slide rail (309) and the second slide rail (312) are installed on the base plate (305).
2. The flower basket taking and placing mechanism according to claim 1, characterized in that: The first supporting teeth (102) and the second supporting teeth (202) are each grouped in two, the spacing between each group of supporting teeth is set according to the specifications of the silicon wafer, and adjacent groups are arranged at equal intervals.
3. The flower basket taking and placing mechanism according to claim 1, characterized in that: The base plate (305) is provided with matching guide grooves (313) corresponding to the first extension plate (103) and the second extension plate (203).
4. The flower basket taking and placing mechanism according to claim 1, characterized in that: The movable distance of the first slide rail (309) and the second slide rail (312) is a conveying distance of the length of a silicon wafer.
5. The flower basket taking and placing mechanism according to claim 1, characterized in that: The first slide rail (309) and the second slide rail (312) are arranged parallel to each other and are respectively adapted to the first slide block (108) and the second slide block (206) of the first sheet-carrying mechanism (100) and the second sheet-carrying mechanism (200).