Electronic-grade helium purification device

By improving the fixed structure of the filter tank and the design of the water collecting tank, the maintenance of the filter device is simplified, solving the problems of complex maintenance and inconvenient water droplet treatment of traditional devices, and achieving efficient helium purification.

CN223324159UActive Publication Date: 2025-09-12HEFEI XIANWEI SEMICON MATERIAL CO LTD
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Patent Information

Application Number
CN202422598670.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-28
Publication Date
2025-09-12
Estimated Expiration
2034-10-28

AI Technical Summary

Technical Problem

Traditional filtration devices are complex and time-consuming to maintain, and water droplets in the cooling tank are difficult to handle, affecting the helium purification effect.

Method used

A filter tank fixing structure connected by a slot and a block is designed, and the rotating shaft is easy to disassemble; the water droplets at the bottom of the cooling tank are introduced into the water collecting tank through a water pipe, and the water collecting tank is connected by a slide block for easy cleaning.

Benefits of technology

The maintenance process of the filter tank is simplified, the maintenance efficiency is improved, and the stability and efficiency of the helium purification process are ensured.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses an electronic-grade helium purification device, which relates to the technical field of gas purification and comprises a shell, a cooling tank is mounted in the shell, a gas inlet is arranged behind the cooling tank, the cooling tank is mounted on the rear side in the shell through a support, and a rectifying tower is mounted in the shell. The filter tank has the advantages that the filter tank can be easily taken down to be cleaned and maintained by screwing the screw, rotating the fixing frame and sliding along the clamping groove, complex tools and tedious steps are not needed, the maintenance efficiency is improved, and the filter tank is convenient to clean and maintain. Impurity gas is liquefied into water drops to be gathered at the bottom during cooling and purification, water can be introduced into the water collecting tank by opening a water pipe valve, the water collecting tank can be conveniently taken down through a lower sliding groove and a sliding block, the internal water surface position can be visually known through a surface observation pipe, timely treatment is facilitated, and water overflow is prevented.
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Description

Technical Field

[0001] The utility model relates to the technical field of gas purification, in particular to an electronic grade helium purification device. Background Art

[0002] Traditional methods for maintaining filtration devices typically require complex tools and tedious procedures. Cleaning or repairing filter components can be time-consuming and labor-intensive, significantly impacting maintenance efficiency. Furthermore, during the cooling and purification process, traditional technologies are not ideal for handling water droplets generated in the cooling tank. These droplets, formed by the liquefaction of impurity gases, can affect the helium purification process, and cleaning these droplets is often a hassle. Utility Model Content

[0003] The purpose of the utility model is to provide an electronic grade helium purification device.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an electronic-grade helium purification device, comprising a shell, an air inlet pipe passing through one side of the shell, a filter tank installed inside the shell, the air inlet pipe is connected to a slot, a sealing ring is installed in the middle of the slot, a block is provided at the air inlet of the filter tank, a fixing frame is installed on the surface of the filter tank, buffer pads are evenly installed in the fixing frame, a rotating shaft is provided in the middle position below the fixing frame, a mounting frame is connected to the rear of the fixing frame, an isolation plate is installed on the bottom surface of the shell, a slide groove is provided on the upper surface of the isolation plate, a slider is provided in the slide groove, a water collecting box is installed on the upper surface of the slider, a water pipe is connected above the water collecting box, and an observation tube is installed on the surface of the water collecting box.

[0005] As a further solution of the present invention: the slot is fixed on the inner side of the intake pipe, and a groove is provided in the middle of the slot, the sealing ring is stuck in the groove, the card block is stuck in the middle of the slot, and the fixing frame is provided with two groups, and is located on both sides of the surface of the filter tank. Each group of the fixing frame is divided into two parts, the buffer pads are equidistantly distributed in the inner circle of the fixing frame, the rotating shaft connects the two parts of the fixing frame, and the top of the fixing frame is fixed by screws.

[0006] As a further solution of the present invention: there are two groups of slides, which are distributed on both sides of the upper surface of the isolation plate. The sliders are fixed on both sides of the bottom of the water collecting tank and are located inside the slides. A threaded interface is provided on the upper surface of the water collecting tank. The water pipe is installed inside the threaded interface. A valve body is installed in the water pipe. The observation tube is located on the front side of the water collecting tank surface.

[0007] As a further solution of the present invention: a cooling tank is installed inside the shell, an air inlet is provided at the rear of the cooling tank, the air inlet is connected to one side of the filter tank, the cooling tank is installed at the rear side of the shell through a bracket, and the bottom of the cooling tank is connected to the top of the water pipe.

[0008] As a further solution of the present invention: the upper surface of the cooling tank is connected to an air outlet, a distillation tower is installed inside the shell, the air outlet is connected to the middle position of the side of the distillation tower, the distillation tower is installed on the inner wall of the shell through a bracket, and an air outlet pipe is connected to the top of the distillation tower.

[0009] As a further solution of the present invention: hinges are installed on the front two sides of the shell, and a switch door is installed through the hinges.

[0010] By adopting the above technical solution, compared with the prior art, the beneficial effects of the present invention are:

[0011] 1. The utility model can be opened by turning the screws on the fixing frame, and the fixing frame can be rotated and opened according to the rotating axis. The two sides of the filter tank are slidably connected with other components through the card slots and blocks. When the filter tank needs to be removed, it is only necessary to hold the filter tank and apply force in the sliding direction of the card slot to remove the filter tank smoothly. When the filter tank needs to be cleaned or repaired, no complicated tools and tedious steps are required. It is only necessary to simply turn the screws, rotate the fixing frame and slide the filter tank along the card slot to remove it. This greatly saves time and labor costs and improves maintenance efficiency.

[0012] 2. In the present invention, during the process of purifying helium in the cooling tank, other impurity gases will liquefy into water droplets as the temperature drops, and these water droplets will gradually gather at the bottom of the cooling tank. At this time, by opening the valve on the water pipe connected to the bottom of the cooling tank, the water at the bottom of the cooling tank can be smoothly introduced into the water collecting tank below. The water collecting tank is slidably connected by a chute and a slider provided below it. When the water collecting tank needs to be cleaned or the water therein is processed, it is only necessary to push the water collecting tank in a specific direction and utilize the sliding action of the chute and the slider to easily achieve the removal of the water collecting tank. An observation tube is installed on the surface of the water collecting tank. With the help of this observation tube, the position of the water surface inside the water collecting tank can be intuitively understood, so that the water collecting tank can be processed in time to prevent water overflow and the like.

[0013] Other advantages, objectives and features of the present invention will be described in part in the following description and will be apparent to those skilled in the art based on an examination of the following or may be learned from the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1This is an overall schematic diagram of an embodiment of the present utility model;

[0015] Figure 2 In the embodiment of the present utility model Figure 1 Schematic diagram of A;

[0016] Figure 3 This is a schematic diagram of the card slot in the embodiment of the utility model;

[0017] Figure 4 This is a schematic diagram of a fixing frame in an embodiment of the present utility model;

[0018] Figure 5 It is a front view schematic diagram of an embodiment of the present utility model.

[0019] In the figure: 1. Shell; 11. Air inlet pipe; 12. Air outlet pipe; 2. Filter tank; 21. Slot; 22. Sealing ring; 23. Block; 24. Fixing frame; 25. Buffer pad; 26. Rotating shaft; 27. Mounting frame; 3. Isolation plate; 31. Slide; 32. Slider; 33. Water collecting tank; 34. Water pipe; 35. Observation tube; 4. Cooling tank; 5. Distillation tower. DETAILED DESCRIPTION

[0020] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings. It should be noted that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation of the present invention.

[0021] In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0022] Please see the attached Figure 1 -Attached Figure 5The utility model discloses an electronic grade helium purification device, comprising a shell 1, on one side of the shell 1, an air inlet pipe 11 passes through, a filter tank 2 is installed inside the shell 1, which provides a key component for the filtering link of the entire system, and at the same time, an isolation plate 3 is installed on the bottom surface of the shell 1, which plays an important role in separation and support, the air inlet pipe 11 is connected to a card slot 21, and a sealing ring 22 is installed in the middle part of the card slot 21. The existence of the sealing ring 22 ensures the sealing of the gas during transmission, prevents gas leakage, and ensures the stable operation of the entire system, and a corresponding card block 23 is provided at the air inlet of the filter tank 2. Through the close cooperation between the card block 23 and the card slot 21, a reliable connection between the air inlet pipe 11 and the filter tank 2 is achieved, so that the gas can smoothly enter the filter tank 2 for filtering treatment, and a fixing frame 24 is installed on the surface of the filter tank 2. This fixing frame 24 not only fixes the filter tank 2, but also provides additional protection for the filter tank 2. Buffer pads 25 are evenly installed in the fixing frame 24. These buffer pads 25 can The filter tank 2 is effectively reduced from the impact of external vibrations, and the filter structure inside the filter tank 2 is protected from damage. At the same time, a rotating shaft 26 is provided in the middle position below the fixing frame 24. The rotating shaft 26 enables the fixing frame 24 to be rotated, which provides convenience for the installation and removal of the filter tank 2. The fixing frame 24 is also connected to the mounting frame 27 at the rear, which further enhances the stability and reliability of the fixing frame 24. A slide groove 31 is provided on the upper surface of the isolation plate 3 on the bottom surface of the housing 1, and a slider 32 is installed in the slide groove 31. A water collecting tank 33 is installed on the upper surface of the block 32. The water collecting tank 33 can be easily installed and disassembled by sliding the slider 32 in the slide groove 31, which facilitates the cleaning and maintenance of the water collecting tank 33. A water pipe 34 is connected above the water collecting tank 33. This water pipe 34 introduces the water generated during the filtration process into the water collecting tank 33. An observation tube 35 is installed on the surface of the water collecting tank 33. Through the observation tube 35, the operator can intuitively understand the water level inside the water collecting tank 33 and deal with the water collecting tank 33 in time to prevent water overflow.

[0023] In the first embodiment, the card slot 21 is fixed to the inner side of the air intake pipe 11, and a groove is provided in the middle position of the card slot 21, the sealing ring 22 is stuck in the inside of the groove, and the block 23 is stuck in the middle position of the card slot 21. There are two groups of fixing frames 24, which are located on both sides of the surface of the filter tank 2. Each group of fixing frames 24 is divided into two parts. The buffer pads 25 are equidistantly distributed in the inner circle of the fixing frames 24. The rotating shaft 26 connects the two parts of the fixing frames 24. The top of the fixing frames 24 is fixed by screws. There are two groups of slide grooves 31, which are distributed on both sides of the upper surface of the isolation plate 3. The sliders 32 are fixed on both sides of the bottom of the water collecting box 33 and are located inside the slide groove 31. A threaded interface is provided on the upper surface of the water collecting box 33. The water pipe 34 is installed inside the threaded interface. A valve body is installed in the water pipe 34. The observation tube 35 is located on the front side of the surface of the water collecting box 33.

[0024] Specifically, the slot 21 is fixed to the inner side of the air intake pipe 11, and a groove is provided in the middle position of the slot 21. The size of this groove perfectly matches the sealing ring 22, and the sealing ring 22 is stuck in the inside of the groove. When the gas enters the filter tank 2 through the air intake pipe 11, the sealing ring 22 can effectively prevent gas leakage, ensuring the sealing and stability of the entire gas transmission process. The card block 23 is accurately stuck in the middle position of the slot 21, realizing a tight connection between the air intake pipe 11 and the filter tank 2. Two groups of fixing frames 24 are provided on both sides of the surface of the filter tank 2. Each group of fixing frames 24 is divided into two independent parts. They surround the filter tank 2 together to provide stable support and protection for it. In the inner circle of the fixing frame 24, the buffer pads 25 are equidistantly distributed. These buffer pads 25 can effectively absorb external vibration and impact force, and protect the filtering structure inside the filter tank 2 from damage. The rotating shaft 26 cleverly connects the two parts of the fixing frame 24. The cam 35 is actuated to move the water pipe 34 downwards to allow the water to flow in and out of the water tank 33. The cam 35 is actuated to move the water pipe 34 downwards to allow the water pipe 34 to move in and out of the water tank 33. The cam 35 is actuated to move the water pipe 34 downwards to allow the water pipe 34 to move in and out of the water tank 33.

[0025] In the second embodiment, a cooling tank 4 is installed inside the shell 1, an air inlet is provided at the rear of the cooling tank 4, the air inlet is connected to one side of the filter tank 2, the cooling tank 4 is installed on the rear side of the shell 1 through a bracket, the bottom of the cooling tank 4 is connected to the top of the water pipe 34, the upper surface of the cooling tank 4 is connected to an air outlet, a distillation tower 5 is installed inside the shell 1, the air outlet is connected to the middle position of the side of the distillation tower 5, the distillation tower 5 is installed on the inner wall of the shell 1 through a bracket, the top of the distillation tower 5 is connected to an air outlet pipe 12, hinges are installed on the front two sides of the shell 1, and a switch door is installed through the hinges;

[0026] Specifically, a cooling tank 4 is carefully installed inside the shell 1. An air inlet is provided at the rear of the cooling tank 4. This air inlet is tightly connected to one side of the filter tank 2. The cooling tank 4 is firmly installed at the rear side of the shell 1 through a solid bracket, providing a stable support for it. The bottom of the cooling tank 4 is connected to the top of the water pipe 34, so that the water generated during the cooling process can smoothly flow into the water collecting tank 33 through the water pipe 34. The upper surface of the cooling tank 4 is connected to an air outlet, which transports the cooled gas out. Inside the shell 1 A distillation tower 5 is also installed. The distillation tower 5 is installed on the inner wall of the shell 1 through a reliable bracket to ensure that it remains stable during operation. The gas outlet is connected to the middle position of the side of the distillation tower 5, so that the cooled gas can enter the distillation tower 5 for further purification. The top of the distillation tower 5 is connected to an outlet pipe 12, and the gas after distillation and purification is discharged and collected through the outlet pipe 12. Hinges are installed on the front two sides of the shell 1, and a switch door is installed through these hinges. The design of the switch door facilitates the operator to inspect, maintain and repair the equipment inside the shell 1.

[0027] The utility model also provides a method for using an electronic-grade helium purification device, comprising the following steps:

[0028] S1. First, the helium to be purified enters the air inlet pipe 11, enters the filter tank 2 through the air inlet pipe 11, and undergoes preliminary filtration. Then, it enters the cooling tank 4 through the air outlet on the right side of the filter tank 2. The cooling tank 4 removes some impurities to achieve preliminary purification. Subsequently, the purified helium enters the distillation tower 5 through the air outlet above the cooling tank 4, and achieves final purification through the distillation tower 5. Finally, the purified helium passes through the air outlet pipe 12 to achieve collection of the helium.

[0029] S2. By turning the screws on the fixing frame 24, the fixing frame 24 can be opened. The fixing frame 24 can be rotated and opened along the rotating shaft 26. The two sides of the filter tank 2 are slidably connected through the card slot 21 and the card block 23. You only need to hold the filter tank 2 and apply force in the sliding direction of the card slot 21 to successfully remove the filter tank 2.

[0030] S3. When the helium is purified in the cooling tank 4, other impurity gases will be liquefied into water droplets, which will gather at the bottom of the cooling tank 4. By opening the valve on the water pipe 34, the water at the bottom of the cooling tank 4 is introduced into the water collecting tank 33 below. The water collecting tank 33 can be removed by sliding the chute 31 and the slider 32 below the water collecting tank 33. The observation tube 35 on the surface of the water collecting tank 33 can know the position of the water surface inside the water collecting tank 33.

[0031] Working principle:

[0032] First, the gas containing impurities enters the device through the intake pipe 11, and the slot 21 inside the intake pipe 11 is connected to the block 23 at the air inlet of the filter tank 2 to ensure that the gas can smoothly enter the filter tank 2. At the same time, the sealing ring 22 in the middle groove of the slot 21 ensures the sealing of the connection part to prevent gas leakage. After the gas enters the filter tank 2, the filter tank 2 begins to perform preliminary filtration on the gas to remove some larger particles and some specific impurities. The two groups of fixing frames 24 on both sides of the surface of the filter tank 2 provide it with stable support and protection. The buffer pads 25 evenly distributed on the inner circle of the fixing frame 24 can reduce the impact of external vibration on the filter tank 2. The rotating shaft 26 connects the two parts of the fixing frame 24 and is fixed at the top by screws, which makes it convenient to open the fixing frame 24 when necessary to maintain or replace the filter tank 2. The gas coming out of the filter tank 2 enters the cooling tank 4 through the air inlet at the rear of the cooling tank 4. The cooling tank 4 is installed on the rear side of the shell 1 through a bracket. In the cooling tank 4, some impurity gases in the gas will be affected by temperature. The temperature drops and the liquid is liquefied into water droplets. These water droplets gather at the bottom of the cooling tank 4 and flow into the water collecting box 33 through the water pipe 34 connected below. The sliders 32 on both sides of the bottom of the water collecting box 33 are located in the slide grooves 31 on both sides of the upper surface of the isolation plate 3, which facilitates the installation and removal of the water collecting box 33. The observation tube 35 on the surface of the water collecting box 33 allows the operator to know the water level inside the water collecting box 33 at any time. The cooled gas is discharged from the air outlet on the upper surface of the cooling tank 4 and enters the distillation tower 5. The distillation tower 5 is installed on the inner wall of the shell 1 through a bracket. The gas is further purified by utilizing the difference in boiling points of different substances. The high-purity gas after distillation is discharged from the air outlet pipe 12 above the distillation tower 5 for easy collection by users. The hinges on the front two sides of the shell 1 are equipped with a switch door, which facilitates the operator to inspect, maintain and repair the various components inside the device. When it is necessary to operate the filter tank 2, cooling tank 4, distillation tower 5 or water collecting box 33, the switch door can be opened and closed easily. At this point, the entire workflow is completed.

[0033] The above-mentioned front, back, left, right, up and down are all based on the Figure 1 As a benchmark, according to the person's observation perspective, the side of the device facing the observer is defined as the front, the left side of the observer is defined as the left, and so on.

[0034] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present invention.

[0035] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments.

[0036] For those skilled in the art, it is possible to make various changes, modifications, substitutions and variations to these embodiments without departing from the principles and spirit of the present invention, and they still fall within the scope of protection of the present invention.

Claims

1. An electronic grade helium purification device, comprising a housing (1), an air inlet pipe (11) passing through one side of the housing (1), a filter tank (2) installed inside the housing (1), characterized in that: The air inlet pipe (11) is connected to a card slot (21), a sealing ring (22) is installed in the middle of the card slot (21), a card block (23) is provided at the air inlet of the filter tank (2), a fixing frame (24) is installed on the surface of the filter tank (2), a buffer pad (25) is evenly installed in the fixing frame (24), a rotating shaft (26) is provided in the middle position below the fixing frame (24), a mounting frame (27) is connected to the rear of the fixing frame (24), an isolation plate (3) is installed on the bottom surface of the shell (1), a slide groove (31) is provided on the upper surface of the isolation plate (3), a slider (32) is provided in the slide groove (31), a water collecting box (33) is installed on the upper surface of the slider (32), a water pipe (34) is connected above the water collecting box (33), and an observation tube (35) is installed on the surface of the water collecting box (33).

2. The electronic grade helium purification device according to claim 1, characterized in that: The card slot (21) is fixed on the inner side of the air intake pipe (11), and a groove is provided in the middle of the card slot (21). The sealing ring (22) is stuck in the groove, and the card block (23) is stuck in the middle of the card slot (21). The fixing frame (24) is provided in two groups and is located on both sides of the surface of the filter tank (2). Each group of the fixing frame (24) is divided into two parts. The buffer pads (25) are equidistantly distributed in the inner ring of the fixing frame (24). The rotating shaft (26) connects the two parts of the fixing frame (24). The fixing frame (24) is fixed by screws.

3. The electronic grade helium purification device according to claim 1, characterized in that: The slide grooves (31) are provided in two groups and are distributed on both sides of the upper surface of the isolation plate (3). The sliders (32) are fixed on both sides of the bottom of the water collecting box (33) and are located inside the slide grooves (31). The upper surface of the water collecting box (33) is provided with a threaded interface. The water pipe (34) is installed inside the threaded interface. A valve body is installed in the water pipe (34). The observation tube (35) is located on the front side of the surface of the water collecting box (33).

4. The electronic grade helium purification device according to claim 1, characterized in that: A cooling tank (4) is installed inside the shell (1), an air inlet is provided at the rear of the cooling tank (4), and the air inlet is connected to one side of the filter tank (2). The cooling tank (4) is installed at the rear side of the shell (1) through a bracket, and the bottom of the cooling tank (4) is connected to the top of the water pipe (34).

5. The electronic grade helium purification device according to claim 4, characterized in that: The upper surface of the cooling tank (4) is connected to an air outlet, a distillation tower (5) is installed inside the shell (1), the air outlet is connected to the middle position of the side of the distillation tower (5), the distillation tower (5) is installed on the inner wall of the shell (1) through a bracket, and an air outlet pipe (12) is connected to the top of the distillation tower (5).

6. The electronic grade helium purification device according to claim 1, characterized in that: Hinges are installed on both front sides of the housing (1), and a switch door is installed via the hinges.