Encoder clamping jig for semiconductor valve machining

Abstract

The utility model belongs to the field of clamping jigs, in particular to an encoder clamping jig for semiconductor valve processing, which comprises a clamping jig body and an encoder, the clamping jig body comprises a main clamp, a shell, a connecting pipe and a chuck, the shell is fixedly mounted on one side of the main clamp, the connecting pipe is fixedly mounted on one side of the shell, and the chuck is fixedly mounted on the other side of the shell. One side of the connecting pipe is provided with a chuck for clamping the encoder, one side of the chuck is provided with two step surfaces, the other side of the chuck is provided with a guide hole, one side of the chuck is provided with a groove, the inner wall of the groove is provided with a positioning pin, the encoder is provided with a positioning hole, and the positioning pin is matched with the corresponding positioning hole. Three guide grooves are formed in the inner wall of the chuck, and one side of each guide groove is provided with an opening. According to the utility model, the design is reasonable, and the positioned encoder can be clamped and fixed through the movement of the plurality of clamping seats, so that the encoder can be conveniently processed.

Description

Technical Field

[0001] The utility model relates to the technical field of clamping fixtures, in particular to an encoder clamping fixture for semiconductor valve processing. Background Art

[0002] Semiconductor valves are mainly used to control the flow of various fluids in the semiconductor manufacturing process. By opening, closing or adjusting the opening of the valve, precise control of fluid transmission is achieved to meet the strict requirements of the semiconductor production process for fluid supply, pressure, flow, etc.

[0003] In the processing of semiconductor valves, the encoder is an important detection and control component. Its precise clamping is crucial to ensuring processing accuracy and subsequent valve performance.

[0004] However, the encoder for semiconductor valve processing is completed by die-casting of the blank. The rough surfaces are uneven and cannot be used as reference surfaces. In addition, there is a 120-degree angle requirement for the three side holes. The reference surface cannot be reliably measured, which will result in defective products and abnormal production. There is also a problem of inconvenience in positioning, clamping and processing the encoder. Therefore, we proposed an encoder clamping fixture for semiconductor valve processing to solve the above problems. Utility Model Content

[0005] The purpose of the utility model is to solve the shortcomings of the prior art and to propose an encoder clamping fixture for semiconductor valve processing.

[0006] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0007] An encoder clamping jig for semiconductor valve processing, comprising a clamping jig body and an encoder. The clamping jig body comprises a main clamp, a shell, a connecting pipe, and a chuck. The shell is fixedly mounted on one side of the main clamp, a connecting pipe is fixedly mounted on one side of the shell, and a chuck for clamping the encoder is mounted on one side of the connecting pipe.

[0008] One side of the chuck is provided with two step surfaces, the other side of the chuck is provided with a guide hole, one side of the chuck is provided with a groove, the inner wall of the groove is provided with a positioning pin, the encoder is provided with a positioning hole, and the positioning pin is adapted to the corresponding positioning hole;

[0009] The inner wall of the chuck is provided with three guide grooves with one side being open, the inner wall of the guide hole is provided with three movable grooves, the movable grooves are connected with the guide grooves, a movable seat is slidably installed in the movable groove, and a clamping seat for fixing the encoder is fixedly installed on one side of the movable seat.

[0010] Preferably, a driving plate is slidably installed in the connecting tube, a plurality of hinged rods are hinged on one side of the driving plate, and one end of the hinged rod is hinged on the corresponding moving seat.

[0011] Preferably, a driving mechanism is provided in the shell, and the driving mechanism is connected to the driving plate, and a limiting mechanism is provided between the driving plate and the shell.

[0012] Preferably, the driving mechanism includes a fixed plate and a hydraulic cylinder, the fixed plate is fixedly mounted on the top and bottom inner walls of the shell, the hydraulic cylinder is fixedly mounted on one side of the fixed plate, and the output shaft of the hydraulic cylinder is fixedly mounted on the driving plate.

[0013] Preferably, the limiting mechanism includes a limiting seat and a limiting rod, the limiting seat is fixedly mounted on the top and bottom inner walls of the shell, the limiting rod is fixedly mounted on the driving plate, and the limiting rod passes through the corresponding limiting seat.

[0014] Preferably, a limiting hole is provided on one side of the limiting seat, and the limiting rod is slidably connected to the corresponding limiting hole.

[0015] Preferably, a mounting hole is provided on the clamping seat, and a fixing mechanism for fixing the clamping seat is provided on the movable seat.

[0016] Preferably, the fixing mechanism includes a threaded rod and a nut, wherein the threaded rod is fixedly mounted on one side of the movable seat, and the threaded rod passes through the corresponding mounting hole and is threadedly mounted with a nut.

[0017] Beneficial effects of the utility model:

[0018] 1. By providing a nut and a threaded rod, when the nut is unscrewed from the threaded rod, the clamping seat can be removed, thereby achieving the purpose of disassembling and replacing the clamping seat;

[0019] 2. Place the encoder into the chuck. At this time, the positioning pin can pass through the corresponding positioning hole to achieve the purpose of positioning the encoder. The hydraulic cylinder can drive the driving plate to move. The driving plate can drive the moving seat to move through the hinged rod. Multiple moving seats can drive the clamping seat to move toward the direction of the encoder. The encoder can be clamped and fixed through multiple clamping seats, which facilitates the processing of the encoder. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the three-dimensional structure of an encoder clamping fixture for semiconductor valve processing proposed by the present invention;

[0021] Figure 2 This is a schematic diagram of the three-dimensional structure of an encoder of an encoder clamping fixture for semiconductor valve processing proposed by the present invention;

[0022] Figure 3 This is a partial cross-sectional three-dimensional structural diagram of an encoder clamping fixture for semiconductor valve processing proposed by the present invention;

[0023] Figure 4 This is a structural schematic diagram of part A of an encoder clamping fixture for semiconductor valve processing proposed by the present invention.

[0024] In the figure: 1. Clamping fixture body; 101. Main clamp; 102. Shell; 103. Connecting tube; 104. Clamp; 105. Guide hole; 2. Encoder; 301. Groove; 302. Locating pin; 303. Locating hole; 401. Fixing plate; 402. Hydraulic cylinder; 403. Driving plate; 501. Limit seat; 502. Limit rod; 6. Guide groove; 7. Moving groove; 801. Moving seat; 802. Articulated rod; 803. Clamping seat; 901. Mounting hole; 902. Threaded rod; 903. Nut. DETAILED DESCRIPTION

[0025] The following will clearly and completely describe the technical solutions of the present invention in conjunction with specific embodiments. Obviously, the embodiments described are only some of the embodiments of the present invention, and not all of them. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without inventive effort are also within the scope of protection of the present invention.

[0026] Reference Figure 1-4 An encoder clamping jig for semiconductor valve processing includes a clamping jig body 1 and an encoder 2. The clamping jig body includes a main clamp 101, a shell 102, a connecting pipe 103 and a chuck 104. The shell 102 is fixedly installed on one side of the main clamp 101. The connecting pipe 103 is fixedly installed on one side of the shell 102. The chuck 104 for clamping the encoder 2 is installed on one side of the connecting pipe 103. One side of the chuck 104 is provided with two step surfaces, and the other side of the chuck 104 is provided with a guide hole 105. One side of the chuck 104 is provided with a groove 301, and a positioning pin is installed on the inner wall of the groove 301. 302, a positioning hole 303 is provided on the encoder 2, and the positioning pin 302 is adapted to the corresponding positioning hole 303, three guide grooves 6 with an open side are provided on the inner wall of the chuck 104, and three movable grooves 7 are provided on the inner wall of the guide hole 105. The movable groove 7 is connected with the guide groove 6, and a movable seat 801 is slidably installed in the movable groove 7. A clamping seat 803 for fixing the encoder 2 is fixedly installed on one side of the movable seat 801. The encoder 2 can be clamped by providing the chuck 104, and the purpose of positioning the encoder 2 can be achieved by cooperating with the positioning pin 302 and the positioning hole 303.

[0027] In this embodiment, a driving plate 403 is slidably installed in the connecting tube 103, and multiple hinged rods 802 are hinged on one side of the driving plate 403. One end of the hinged rod 802 is hinged on the corresponding moving seat 801. By providing the hinged rod 802, the movement of the driving plate 403 drives the moving seat 801 to move through the hinged rod 802.

[0028] In this embodiment, a driving mechanism is provided in the shell 102, and the driving mechanism is connected to the driving plate 403, and a limiting mechanism is provided between the driving plate 403 and the shell 102. The driving mechanism includes a fixed plate 401 and a hydraulic cylinder 402. The fixed plate 401 is fixedly installed on the top and bottom inner walls of the shell 102. A hydraulic cylinder 402 is fixedly installed on one side of the fixed plate 401, and the output shaft of the hydraulic cylinder 402 is fixedly installed on the driving plate 403. By providing the hydraulic cylinder 402, the hydraulic cylinder 402 can drive the driving plate 403 to move through the output shaft.

[0029] In this embodiment, the limiting mechanism includes a limiting seat 501 and a limiting rod 502. The limiting seat 501 is fixedly mounted on the top and bottom inner walls of the shell 102, and the limiting rod 502 is fixedly mounted on the driving plate 403. The limiting rod 502 passes through the corresponding limiting seat 501. A limiting hole is provided on one side of the limiting seat 501, and the limiting rod 502 is slidingly connected to the corresponding limiting hole. By setting the limiting hole, the limiting rod 502 can be guided. Through the cooperation of the limiting rod 502 and the limiting seat 501, the driving plate 403 can be guided, thereby achieving the purpose of stable movement of the driving plate 403.

[0030] In this embodiment, a mounting hole 901 is provided on the clamping seat 803, and a fixing mechanism for fixing the clamping seat 803 is provided on the movable seat 801. The fixing mechanism includes a threaded rod 902 and a nut 903. The threaded rod 902 is fixedly installed on one side of the movable seat 801. The threaded rod 902 passes through the corresponding mounting hole 901 and is threadedly installed with a nut 903. By providing the nut 903 and the threaded rod 902, when the nut 903 is unscrewed from the threaded rod 902, the clamping seat 803 can be removed, thereby achieving the purpose of disassembling and replacing the clamping seat 803.

[0031] In the present invention, by providing a nut 903 and a threaded rod 902, when the nut 903 is unscrewed from the threaded rod 902, the clamping seat 803 can be removed, thereby achieving the purpose of disassembling and replacing the clamping seat 803, and placing the encoder 2 into the chuck 104. At this time, the positioning pin 302 can pass through the corresponding positioning hole 303, thereby achieving the purpose of positioning the encoder 2. By starting the hydraulic cylinder 402, the hydraulic cylinder 402 can drive the driving plate 403 to move through the output shaft, and the driving plate 403 can drive the moving seat 801 to move through the hinged rod 802. Multiple moving seats 801 can drive the clamping seat 803 to move in the direction of the encoder 2. Through multiple clamping seats 803, the encoder 2 can be clamped and fixed, thereby facilitating the processing of the encoder 2.

[0032] The above describes in detail the encoder clamping fixture for semiconductor valve processing provided by the present invention. This article uses specific embodiments to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is intended only to facilitate understanding of the method and core concept of the present invention. It should be noted that those skilled in the art may make various improvements and modifications to the present invention without departing from the principles of the present invention, and such improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. An encoder clamping fixture for semiconductor valve processing, characterized in that: The invention comprises a clamping fixture body (1) and an encoder (2), wherein the clamping fixture body comprises a main clamp (101), a shell (102), a connecting pipe (103) and a clamp (104), wherein the shell (102) is fixedly mounted on one side of the main clamp (101), a connecting pipe (103) is fixedly mounted on one side of the shell (102), and a clamp (104) for clamping the encoder (2) is mounted on one side of the connecting pipe (103); One side of the chuck (104) is provided with two step surfaces, the other side of the chuck (104) is provided with a guide hole (105), one side of the chuck (104) is provided with a groove (301), a positioning pin (302) is installed on the inner wall of the groove (301), and a positioning hole (303) is provided on the encoder (2), and the positioning pin (302) is adapted to the corresponding positioning hole (303); Three guide grooves (6) with one side open are provided on the inner wall of the chuck (104), three movable grooves (7) are provided on the inner wall of the guide hole (105), the movable grooves (7) are connected to the guide grooves (6), a movable seat (801) is slidably installed in the movable groove (7), and a clamping seat (803) for fixing the encoder (2) is fixedly installed on one side of the movable seat (801).

2. The encoder clamping fixture for semiconductor valve processing according to claim 1 is characterized in that: A driving plate (403) is slidably mounted in the connecting tube (103), and a plurality of hinged rods (802) are hinged on one side of the driving plate (403), and one end of the hinged rod (802) is hinged on a corresponding movable seat (801).

3. The encoder clamping fixture for semiconductor valve processing according to claim 1 is characterized in that: A driving mechanism is provided in the housing (102), and the driving mechanism is connected to the driving plate (403), and a limiting mechanism is provided between the driving plate (403) and the housing (102).

4. The encoder clamping fixture for semiconductor valve processing according to claim 3 is characterized in that: The driving mechanism comprises a fixed plate (401) and a hydraulic cylinder (402), wherein the fixed plate (401) is fixedly mounted on the top and bottom inner walls of the housing (102), a hydraulic cylinder (402) is fixedly mounted on one side of the fixed plate (401), and an output shaft of the hydraulic cylinder (402) is fixedly mounted on the driving plate (403).

5. The encoder clamping fixture for semiconductor valve processing according to claim 3 is characterized in that: The limiting mechanism comprises a limiting seat (501) and a limiting rod (502), wherein the limiting seat (501) is fixedly mounted on the top and bottom inner walls of the housing (102), and the limiting rod (502) is fixedly mounted on the driving plate (403), and the limiting rod (502) passes through the corresponding limiting seat (501).

6. The encoder clamping fixture for semiconductor valve processing according to claim 5, characterized in that: A limiting hole is provided on one side of the limiting seat (501), and the limiting rod (502) is slidably connected to the corresponding limiting hole.

7. The encoder clamping fixture for semiconductor valve processing according to claim 1 is characterized in that: The clamping seat (803) is provided with a mounting hole (901), and the movable seat (801) is provided with a fixing mechanism for fixing the clamping seat (803).

8. The encoder clamping fixture for semiconductor valve processing according to claim 7, characterized in that: The fixing mechanism comprises a threaded rod (902) and a nut (903). The threaded rod (902) is fixedly mounted on one side of the movable seat (801). The threaded rod (902) passes through the corresponding mounting hole (901) and is threadedly mounted with the nut (903).

Images