Mechanical arm for grabbing warped sheet
By setting isosceles triangle-distributed suction ports on the robotic arm and using elastic suction cups, the problem of difficult to firmly grasp warped wafers is solved, and the steady grasping and reliable transmission of the warped wafers are achieved.
Patent Information
- Application Number
- CN202422559837.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-22
- Publication Date
- 2025-09-12
- Estimated Expiration
- 2034-10-22
AI Technical Summary
Existing robotic arms have difficulty reliably grasping severely warped wafers, especially asymmetrically warped wafers, which are prone to the risk of slipping.
A robotic arm for grasping warped sheets is designed, which adopts three suction ports distributed in an isosceles triangle, and an elastic suction cup is set on each suction port. The elastic suction cup fits tightly with the surface of the warped sheet to provide stable support and reliable adsorption force.
It achieves stable grip of warped wafers, reduces the risk of slipping during wafer transfer, improves adsorption force and stability, and adapts to wafers with different warping shapes.
Smart Images
Figure CN223326389U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor wafer production and manufacturing equipment, in particular to a mechanical arm for grasping warped wafers. Background Art
[0002] With the continuous evolution of semiconductor manufacturing processes, controlling wafer warpage has become increasingly important. Wafers undergo dozens of processing steps during chip manufacturing, each of which requires robotic gripping to transfer the wafers between process equipment. Effective gripping is easy for wafers with low warpage, but for thinned wafers, effective gripping becomes more difficult due to the severe warpage they experience after the etching process.
[0003] Existing robotic arms adopt an integrated design, with a boss designed at the vacuum nozzle to connect to the vacuum, or a ceramic suction cup installed at the vacuum nozzle to achieve the adsorption function. However, since the boss or ceramic suction cup material has no elasticity and cannot adapt to deformation, for severely warped wafers, the vacuum port cannot reliably fit with the wafer, and the robotic arm cannot provide reliable adsorption. The adsorption force is small, making it difficult to grasp the wafer, or the adsorption is not firm, causing the risk of the wafer slipping during transmission.
[0004] In addition, the robotic arm uses a single-finger or double-finger structure. A single finger cannot effectively adsorb downward-warped wafers, while the double-finger structure mostly uses a symmetrical pair or multiple pairs of parallel vacuum nozzles. For asymmetrically upward-warped wafers, since all vacuum nozzles cannot fit tightly with the wafer at the same time, effective adsorption cannot be achieved, resulting in the risk of the wafer slipping during transmission. Utility Model Content
[0005] The purpose of the utility model is to provide a robotic arm for grasping warped wafers, so as to solve the problem that existing robotic arms are difficult to grasp asymmetrically warped wafers stably.
[0006] To achieve this purpose, the present invention adopts the following technical solutions:
[0007] A robotic arm for grasping warped pieces includes an arm body, a vacuum channel is provided inside the arm body, a first finger and a second finger extend from the arm body, a first surface of the first finger is provided with a first suction port and a second suction port connected to the vacuum channel, a first surface of the second finger is provided with a third suction port connected to the vacuum channel, a line connecting the positions of the first suction port, the second suction port and the third suction port forms an isosceles triangle, and a line connecting the positions of the first suction port and the second suction port forms the base of the isosceles triangle, and elastic suction cups are respectively provided on the first suction port, the second suction port and the third suction port, and the elastic suction cups fit tightly to the surface of the warped piece through their own elastic deformation.
[0008] Preferably, the extension direction of the first finger portion is parallel to the extension direction of the second finger portion, and the first surface of the first finger portion and the first surface of the second finger portion are in the same plane.
[0009] Preferably, the elastic suction cup is a rubber body, a through hole is provided in the center of the elastic suction cup, and an outer wall of the elastic suction cup is provided with embedding grooves which are respectively connected to the first suction port, the second suction port and the third suction port.
[0010] Preferably, the first suction port, the second suction port, and the third suction port are respectively formed with tapered hole portions on the corresponding first surfaces, the elastic suction cup protrudes from the first surface of the first finger and the first surface of the second finger, and a gap is left between the outer wall of the elastic suction cup and the hole wall of the tapered hole portion.
[0011] Preferably, the second surface of the first finger and the second surface of the second finger are respectively provided with channel grooves along their respective extension directions, and the first adsorption port, the second adsorption port and the third adsorption port are respectively provided at the bottom of the channel grooves, and the groove openings of the channel grooves are closed by a cover plate to form a vacuum channel.
[0012] Preferably, the channel groove of the first finger portion and the channel groove of the second finger portion are integrated into one, and a vacuum pipeline interface communicating with the channel groove is provided on the arm body.
[0013] Preferably, a groove for assisting in positioning the warping piece is provided on the first surface of the first finger portion and / or the first surface of the second finger portion.
[0014] The beneficial effects of the present invention are as follows: the warped piece grabbing robot arm is provided with three suction ports distributed in an isosceles triangle on the two fingers to adapt to the asymmetrical upward-warped surface, provide stable supporting force, and provide reliable suction force through the elastic suction cups on the suction ports in close contact with the surface of the warped piece, thereby achieving stable grasping of the warped piece. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 This is a schematic structural diagram of a mechanical arm for grabbing warped pieces provided by an embodiment of the present utility model;
[0016] Figure 2 It is a structural schematic diagram of the first surface of the arm body involved in an embodiment of the present utility model;
[0017] Figure 3 This is a structural exploded view of the second surface of the arm body according to an embodiment of the present utility model;
[0018] Figure 4 It is a schematic diagram of the assembly of the elastic suction cup involved in the embodiment of the present utility model.
[0019] In the attached figure:
[0020] 1. Arm body; 2. Vacuum channel; 3. First finger; 4. Second finger; 5. First adsorption port; 6. Second adsorption port; 7. Third adsorption port; 8. Elastic suction cup; 9. Through hole; 10. Embedded groove; 11. Conical hole; 12. Gap; 13. Channel groove; 14. Cover plate; 15. Vacuum pipe interface; 16. Groove. DETAILED DESCRIPTION
[0021] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.
[0022] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.
[0023] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.
[0024] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.
[0025] See also Figures 1 to 4As shown, the present preferred embodiment provides a robotic arm for grasping warped pieces, comprising an arm body 1, a vacuum channel 2 being provided inside the arm body 1, a first finger 3 and a second finger 4 extending from the arm body 1, a first surface of the first finger 3 being provided with a first suction port 5 and a second suction port 6 communicating with the vacuum channel 2, a first surface of the second finger 4 being provided with a third suction port 7 communicating with the vacuum channel 2, a line connecting the positions of the first suction port 5, the second suction port 6 and the third suction port 7 forming an isosceles triangle, and a line connecting the positions of the first suction port 5 and the second suction port 6 forming the base of the isosceles triangle, the first suction port 5, the second suction port 6 and the third suction port 7 being provided with elastic suction cups 8 respectively, and the elastic suction cups 8 fit tightly to the surface of the warped piece through their own elastic deformation.
[0026] Therefore, the warped piece grasping robot arm is provided with a first suction port 5, a second suction port 6 and a third suction port 7 distributed in an isosceles triangle on the two fingers to adapt to the asymmetrical upward warped surface and provide a stable supporting force. The elastic suction cup 8 on the suction port is in close contact with the surface of the warped piece to provide a reliable suction force, thereby achieving a stable grasping of the warped piece.
[0027] It should be noted that three points that are not on a straight line can define a circle, and at the same time, three points can form support for regular or even irregular three-dimensional objects. The two sides of an isosceles triangle are equal in length and have central symmetry. Taking the absorption of a wafer as an example, the third suction port 7 is at the vertex of the isosceles triangle. The center line passing through the vertex and perpendicular to the base of the isosceles triangle coincides with the diameter of the wafer. Even if the wafer has a certain degree of warping, the force on the wafer can be made more uniform and stable. It can be seen that the first suction port 5, the second suction port 6, and the third suction port 7 can form a stable support for the warped surface. Different from the parallel and symmetrical arrangement of the suction nozzles, the isosceles triangle distribution method can ensure that all three suction ports can reliably contact the surface of the warped wafer, thereby reducing energy loss and ensuring reliable adsorption.
[0028] Preferably, the extension direction of the first finger 3 is parallel to the extension direction of the second finger 4, and the first surface of the first finger 3 and the first surface of the second finger 4 are in the same plane, but not limited to this. This structure is more suitable for lifting and transferring conditions.
[0029] In particular, the elastic suction cup 8 is a rubber body, which has good elasticity and its shape can be adjusted in any direction as needed; a through hole 9 is provided in the center of the elastic suction cup 8, and an embedding groove 10 is provided on the outer wall of the elastic suction cup 8, which is respectively snap-connected to the first suction port 5, the second suction port 6 and the third suction port 7, thereby improving the adaptability to the surface of the warping piece and ensuring vacuum sealing, making it convenient for the installation and replacement of the elastic suction cup 8 and easy to implement.
[0030] Furthermore, the first suction port 5, the second suction port 6, and the third suction port 7 are respectively formed with tapered hole portions 11 on the corresponding first surfaces, the elastic suction cup 8 protrudes from the first surface of the first finger 3 and the first surface of the second finger 4, and a gap 12 is left between the outer wall of the elastic suction cup 8 and the hole wall of the tapered hole portion 11 to leave space for the elastic suction cup 8 to deform.
[0031] In particular, the second surface of the first finger 3 and the second surface of the second finger 4 are respectively provided with channel grooves 13 along their respective extension directions, and the first adsorption port 5, the second adsorption port 6, and the third adsorption port 7 are respectively opened at the bottom of the channel groove 13. The slots of the channel groove 13 are closed by the cover plate 14, thereby forming a vacuum channel 2, which facilitates the processing and subsequent maintenance of the vacuum channel 2.
[0032] Furthermore, the channel groove 13 of the first finger 3 and the channel groove 13 of the second finger 4 are integrated into one, and a vacuum pipeline interface 15 connected to the channel groove 13 is provided on the arm body 1 to provide the adsorption force required at the first adsorption port 5, the second adsorption port 6, and the third adsorption port 7.
[0033] In addition, a groove 16 for assisting in positioning the warping piece is provided on the first surface of the first finger portion 3 and / or the first surface of the second finger portion 4, thereby further improving the transfer stability of the warping piece.
[0034] In summary, the warped sheet grabbing robot has the following advantages:
[0035] 1) Designing the first finger 3 and the second finger 4, and respectively providing three isosceles triangle-shaped first adsorption ports 5, second adsorption ports 6, and third adsorption ports 7 on the first finger 3 and the second finger 4. The stability of the isosceles triangle structure itself can enhance the adsorption effect on warped sheets;
[0036] 2) The elastic suction cup 8 has good elasticity and adsorption properties, which can more effectively absorb the warped piece, solving the problem of the traditional ceramic suction cup being unable to effectively absorb the piece, and can prevent it from falling during transportation;
[0037] 3) The design of the elastic suction cup 8 avoids the problems that may be caused by changing the shape of the suction cup. Due to the material properties of the elastic suction cup 8, its shape can be adjusted as needed without affecting its adsorption performance and service life, thereby reducing production costs.
[0038] 4) The snap-fit design of the elastic suction cup 8 allows it to be directly mechanically embedded into the corresponding first suction port 5, second suction port 6, and third suction port 7, providing good sealing performance and making replacement simple and convenient. This reduces the complexity of the mechanism and reduces maintenance difficulty and cost.
[0039] 5) The application of this technical solution can not only be used in the field of semiconductor equipment to reliably transport wafers, but can also be widely used in other occasions that require the adsorption of smooth surface objects, and has broad application prospects.
[0040] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.
Claims
1. A warped sheet grabbing robot arm, characterized in that: The invention comprises an arm body (1), wherein a vacuum channel (2) is provided inside the arm body (1), and a first finger (3) and a second finger (4) are extended from the arm body (1), and a first surface of the first finger (3) is provided with a first adsorption port (5) and a second adsorption port (6) which are connected to the vacuum channel (2), and a first surface of the second finger (4) is provided with a third adsorption port (7) which is connected to the vacuum channel (2), and a line connecting the positions of the first adsorption port (5), the second adsorption port (6) and the third adsorption port (7) forms an isosceles triangle, and a line connecting the positions of the first adsorption port (5) and the second adsorption port (6) forms the base of the isosceles triangle, and an elastic suction cup (8) is respectively provided on the first adsorption port (5), the second adsorption port (6) and the third adsorption port (7), and the elastic suction cup (8) is tightly fitted to the surface of the warping piece through its own elastic deformation.
2. The warped sheet grabbing robot according to claim 1, characterized in that: The extension direction of the first finger portion (3) is parallel to the extension direction of the second finger portion (4), and the first surface of the first finger portion (3) and the first surface of the second finger portion (4) are in the same plane.
3. The warped sheet grabbing robot according to claim 1, characterized in that: The elastic suction cup (8) is a rubber body, a through hole (9) is provided at the center of the elastic suction cup (8), and an embedding groove (10) is provided on the outer wall of the elastic suction cup (8) and is respectively connected to the first suction port (5), the second suction port (6), and the third suction port (7).
4. The warped sheet grabbing robot according to claim 3, characterized in that: The first suction port (5), the second suction port (6), and the third suction port (7) are respectively formed with a tapered hole portion (11) on the corresponding first surface; the elastic suction cup (8) protrudes from the first surface of the first finger portion (3) and the first surface of the second finger portion (4); and a gap (12) is left between the outer wall of the elastic suction cup (8) and the hole wall of the tapered hole portion (11).
5. The warped sheet grabbing robot according to claim 1, characterized in that: The second surface of the first finger portion (3) and the second surface of the second finger portion (4) are respectively provided with channel grooves (13) along their respective extension directions; the first adsorption port (5), the second adsorption port (6), and the third adsorption port (7) are respectively provided at the bottom of the channel grooves (13); the notches of the channel grooves (13) are closed by a cover plate (14), thereby forming the vacuum channel (2).
6. The warped sheet grabbing robot according to claim 5, characterized in that: The channel groove (13) of the first finger portion (3) and the channel groove (13) of the second finger portion (4) are integrated into one, and a vacuum pipeline interface (15) communicating with the channel groove (13) is provided on the arm body (1).
7. The warped sheet grabbing robot according to claim 1, characterized in that: A groove (16) for assisting in positioning the warping piece is provided on the first surface of the first finger (3) and / or the first surface of the second finger (4).