Height measurement blowing device and wafer cutting machine

Abstract

According to the height measurement injection device, the air channel pipeline is connected to the original spray pipe and the original water channel pipeline in parallel, the air channel pipeline and the water channel pipeline are used for providing compressed air and cleaning fluid for the spray pipe respectively, and the air channel control valve and the water channel control valve are connected to the air channel pipeline and the water channel pipeline in series respectively to control connection and disconnection of the pipelines. Before non-contact height measurement is carried out on the outer diameter of the cutting knife, the water path control valve on the water path pipeline is closed, the air path control valve on the air path pipeline is opened, residual water drops in the spraying pipe are blown away through compressed air, the situation that the water drops fall to the head of the optical fiber sensor and influence the luminous flux change of the optical fiber sensor is avoided, and therefore the height measurement error is avoided; and the height measurement precision is effectively improved. The utility model further provides a wafer cutting machine with the height measurement blowing device.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer cutting, and in particular relates to a height measuring blowing device and a wafer cutting machine. Background Art

[0002] Wafer dicing machines are key equipment in chip manufacturing, used to precisely cut and separate chips from semiconductor wafers. They primarily consist of an operating table, a dicing blade, and a nozzle. Their working principle is that the high-speed dicing blade contacts the wafer and cuts by feeding it linearly in three different directions. The nozzle is used to supply coolant to the cutting area on the wafer during the cutting process to reduce temperature and remove debris. However, the dicing blade wears during the cutting process, and the cutting depth gradually becomes shallower.

[0003] To compensate for the cutting depth of the cutter, a non-contact height measurement device is required to measure the cutter's outer diameter. This device works by using a through-beam fiber optic sensor to measure the cutter's outer diameter. When the cutter blocks the light signal, the photoelectric signal is converted into an analog voltage, which is then converted into a numerical dimension. However, when measuring the cutter's outer diameter, residual water droplets in the nozzle can drip onto the fiber optic sensor's tip, affecting the light flux and, consequently, the measurement accuracy.

[0004] Therefore, how to overcome the above technical defects is a problem that needs to be solved urgently by those skilled in the art. Utility Model Content

[0005] The purpose of the utility model is to provide a height measurement blowing device and a wafer cutting machine, which can prevent the optical fiber sensor from being affected by water droplets and effectively improve the height measurement accuracy.

[0006] In order to solve the above technical problems, the utility model provides a height measuring blowing device, including a nozzle, a main pipeline, an air pipeline, a water pipeline, an air control valve and a water control valve. One end of the nozzle is a blowing port, and the other end of the nozzle is connected to the air pipeline and the water pipeline respectively through the main pipeline. The air control valve and the water control valve are respectively connected in series to the air pipeline and the water pipeline. The air pipeline and the water pipeline are used to introduce compressed air and cleaning liquid respectively.

[0007] Optionally, in the above-mentioned height measuring blowing device, there are multiple nozzles.

[0008] Optionally, in the above-mentioned height measuring blowing device, multiple nozzles are arranged side by side and the blowing ports are all facing the cutting area.

[0009] Optionally, in the above-mentioned height measuring blowing device, the plurality of nozzles are arranged around the circumference of the cutting blade and the blowing ports are all facing the cutting area.

[0010] Optionally, in the above-mentioned height measuring blowing device, the nozzle, the air pipeline and the water pipeline are connected through a main control valve.

[0011] Optionally, in the above-mentioned height measuring blowing device, the main control valve is a shuttle valve.

[0012] Optionally, in the above-mentioned height measuring blowing device, the air circuit control valve and the water circuit control valve are both solenoid valves.

[0013] Optionally, the height measuring blowing device further includes a blowing mechanism for blowing air toward the head of the optical fiber sensor.

[0014] Optionally, in the above-mentioned height measuring blowing device, the air circuit control valve has an air inlet for introducing compressed air and two air outlets, and the two air outlets are respectively connected to the air circuit pipeline and the air inlet of the blowing mechanism.

[0015] The utility model also provides a wafer cutting machine, comprising a cutting blade, a non-contact height measuring device and the height measuring blowing device as described above.

[0016] The utility model provides a height measuring blowing device, which has the following beneficial effects:

[0017] An air pipeline is connected in parallel to the existing nozzle and water pipelines, supplying compressed air and cleaning fluid to the nozzle, respectively. Air and water control valves are connected in series to control the on / off of the pipelines. Before performing non-contact height measurement of the cutter's outer diameter, the water control valve on the water pipeline is closed, and the air control valve on the air pipeline is opened. Compressed air is then used to blow away any remaining water droplets in the nozzle, preventing them from falling onto the fiber optic sensor head and affecting its luminous flux. This prevents height measurement errors and effectively improves height measurement accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0019] Figure 1 A schematic structural diagram of a height measuring blowing device provided in an embodiment of the present utility model;

[0020] Figure 2 This is a schematic diagram of a height measuring blowing device provided in an embodiment of the utility model.

[0021] In the above picture:

[0022] 100-nozzle; 200-main control valve; 300-air control valve; 400-water control valve;

[0023] a- Compressed air; b- Cleaning fluid. DETAILED DESCRIPTION

[0024] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0025] The core of the utility model is to provide a height measurement blowing device and a wafer cutting machine, which can prevent the optical fiber sensor from being affected by water droplets and effectively improve the height measurement accuracy.

[0026] In order to enable those skilled in the art to better understand the technical solution provided by the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0027] Specifically, please refer to Figure 1-Figure 2 The utility model provides a height measuring blowing device, which includes a nozzle 100, a main pipeline, an air pipeline, a water pipeline, an air control valve 300 and a water control valve 400.

[0028] One end of the nozzle 100 is a nozzle. The other end of the nozzle 100 is connected to the air and water pipes via a main pipe. An air control valve 300 and a water control valve 400 are connected in series to the air and water pipes, respectively, to control the flow of compressed air a and cleaning fluid b.

[0029] The height measurement device provided in this solution connects an air pipeline in parallel to the existing nozzle and water pipelines. The air pipeline and water pipeline are used to supply compressed air a and cleaning liquid b to the nozzle 100, respectively. Air control valves 300 and water control valves 400 are connected in series to control the on / off of the pipelines. Before performing non-contact height measurement of the cutting blade's outer diameter, the water control valve 400 on the water pipeline is closed, and the air control valve 300 on the air pipeline is opened. Compressed air a is then used to blow away any remaining water droplets in the nozzle 100, preventing them from falling onto the fiber optic sensor head and affecting the sensor's luminous flux. This prevents height measurement errors and effectively improves height measurement accuracy.

[0030] To improve the spraying effect, a plurality of nozzles 100 are provided. The plurality of nozzles 100 can be arranged in various forms. In one form, the plurality of nozzles 100 are arranged side by side with the nozzles all facing the cutting area, thereby improving the spraying effect of the air and water jets. In another form, the plurality of nozzles 100 are arranged circumferentially around the cutting blade with the nozzles all facing the cutting area. By spraying air or water at different angles on the cutting area, the spraying effect of the air and water jets can be improved while also increasing the spraying area.

[0031] The nozzle 100 may be an L-shaped curved pipe, or a straight pipe or any other pipe shape, which is not further limited herein.

[0032] In a specific embodiment, the nozzle 100, the air pipeline and the water pipeline are connected via a main control valve 200. The main control valve 200 can control the on-off of the main pipeline when the media in the air pipeline and the water pipeline enter the main pipeline. Specifically, the main control valve 200 can be a shuttle valve. The shuttle valve is a special straight-stroke valve, which is characterized by combining the valve body and the actuator into one, so that the shuttle valve is small in size, easy to install, and can achieve fast switching and low pressure loss. The shuttle valve in this case is a three-way valve with two inlets and one outlet. The shuttle valve can be used to isolate the two media from each other when blowing water or air, avoiding the backflow of cleaning liquid b into the air pipeline or the backflow of compressed air a into the water pipeline, which damages the corresponding solenoid valve.

[0033] Based on the above specific embodiments, the air circuit control valve 300 and the water circuit control valve 400 are both solenoid valves, and the opening or closing of the air circuit control valve 300 and the water circuit control valve 400 can be controlled by an external control center.

[0034] The actual working process of the above-mentioned height measurement blowing device is as follows: when cutting the wafer, the water circuit solenoid valve is opened and the gas circuit solenoid valve is closed. The cleaning liquid b (such as cleaning water) passes through the water circuit solenoid valve and reaches the shuttle valve. Due to the structure of the shuttle valve, the gas circuit pipeline is closed. The cleaning liquid b reaches the nozzle 100 downward to meet the cutting requirements. When height measurement is required, the water circuit solenoid valve is closed, and the gas circuit solenoid valve is opened. The compressed air a reaches the shuttle valve through the gas circuit solenoid valve. Due to the structure of the shuttle valve, the water circuit pipeline is closed. The compressed air a reaches the nozzle 100 and the residual water droplets in the nozzle 100 are discharged together. The height is then measured by the optical fiber sensor. The above operation avoids water droplets falling onto the optical fiber sensor during the height measurement process, which affects the height measurement accuracy.

[0035] This solution also includes an air blowing mechanism for blowing air into the head of the fiber optic sensor. This allows for cleaning the sensor head before performing non-contact height measurement of the cutter's outer diameter. This solves the problem of water dripping from the side nozzle 100 and, combined with compressed air a supplied to the nozzle 100 from the air line, allows for self-cleaning of residual water droplets within the nozzle 100, ensuring the fiber optic sensor head remains clean.

[0036] Of course, if it is necessary to save internal space, the additional blowing mechanism may not be provided. Only the nozzle 100 and the air line are used to blow air from the inside of the nozzle 100, which can also effectively and thoroughly clean the residual water droplets.

[0037] In order to simplify the equipment, the air circuit control valve 300 can be designed as a three-way valve with an air inlet for introducing compressed air a and two air outlets. The two air outlets of the air circuit control valve 300 are respectively connected to the air circuit pipeline and the air inlet of the blowing mechanism, so that the compressed air a can be blown toward the cutting area and the optical fiber sensor at one time when the air circuit control valve 300 is opened.

[0038] In addition, the present invention also provides a wafer cutting machine, comprising a cutting blade, a non-contact height measuring device and a height measuring blowing device as described in the above specific embodiment. The blowing port of the nozzle 100 of the height measuring blowing device faces the cutting area.

[0039] Obviously, a wafer cutting machine including the above-mentioned height measuring blowing device has the same beneficial effects, which will not be further described here.

[0040] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0041] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0042] This document uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only intended to help understand the method and core concept of the present invention. It should be noted that those skilled in the art can make various improvements and modifications to the present invention without departing from the principles of the present invention, and such improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A height measuring blowing device, characterized in that: It includes a nozzle, a main pipeline, an air pipeline, a water pipeline, an air control valve and a water control valve. One end of the nozzle is a blowing port, and the other end of the nozzle is connected to the air pipeline and the water pipeline respectively through the main pipeline. The air control valve and the water control valve are respectively connected in series to the air pipeline and the water pipeline. The air pipeline and the water pipeline are used to introduce compressed air and cleaning liquid respectively.

2. The height measuring blowing device according to claim 1, characterized in that: There are multiple nozzles.

3. The height measuring blowing device according to claim 2, characterized in that: The plurality of nozzles are arranged side by side and the nozzles are all directed toward the cutting area.

4. The height measuring blowing device according to claim 2, characterized in that: The plurality of nozzles are arranged around the circumference of the cutting blade, and the nozzles are all directed toward the cutting area.

5. The height measuring blowing device according to claim 1, characterized in that: The nozzle, the air pipeline and the water pipeline are connected via a main control valve.

6. The height measuring blowing device according to claim 5, characterized in that: The main control valve is a shuttle valve.

7. The height measuring blowing device according to claim 1, characterized in that: The air circuit control valve and the water circuit control valve are both solenoid valves.

8. The height measuring blowing device according to claim 1, characterized in that: The utility model also comprises an air blowing mechanism for blowing air toward the head of the optical fiber sensor.

9. The height measuring blowing device according to claim 8, characterized in that: The air circuit control valve has an air inlet for introducing compressed air and two air outlets, and the two air outlets are respectively connected to the air circuit pipeline and the air inlet of the blowing mechanism.

10. A wafer cutting machine, characterized in that: The invention comprises a cutting knife, a non-contact height measuring device and a height measuring blowing device as claimed in any one of claims 1 to 9.

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