High-purity pressure reducing valve with force feedback for semiconductor

Abstract

The utility model provides a semiconductor high-purity pressure reducing valve with force feedback, which comprises an upper bonnet, a diaphragm gland and a welding valve body which are sequentially arranged from top to bottom, and a lower bonnet sleeves the outer side of the joint of the diaphragm gland and the welding valve body; an adjusting bolt in threaded connection with the upper bonnet penetrates through the middle of the top surface of the upper bonnet; an upper spring is arranged in the inner cavity; a spring gland and a diaphragm assembly which are arranged up and down are arranged in an inner cavity of the diaphragm gland; the section of an inner cavity of the welding valve body is T-shaped, a valve seat support, a valve seat, a lifting valve element and a lower spring are sequentially arranged in the middle of the welding valve body from top to bottom, and a liquid inlet cavity and a liquid outlet cavity are formed in the lower end of the welding valve body left and right. The pressure reducing valve has the beneficial effects that the structure is ingenious, the diaphragm assembly is adopted to sense the change of downstream pressure, the valve element can be automatically adjusted up and down in combination with the acting force of the spring, and then the pressure reducing valve can automatically regulate and control the flow.

Description

Technical Field

[0001] The present invention relates to the technical field of valves, and in particular to a high-purity pressure reducing valve for semiconductors with force feedback. Background Art

[0002] A pressure reducing valve is a throttling element with variable local resistance. By varying the throttling area, the flow rate and kinetic energy of the fluid are altered, resulting in varying pressure losses, thereby achieving pressure reduction. A pressure reducing valve typically contains a spring, and the outlet pressure of the fluid is controlled by adjusting the spring pressure. When the fluid pressure exceeds the set value, the spring compresses, causing the valve to open and release some fluid to reduce pressure. Conversely, when the fluid pressure falls below the set value, the spring closes the valve, preventing further fluid flow. Currently, when existing pressure reducing valves are opened, gas flows from the inlet to the outlet. When the pressure on the outlet increases, the diaphragm reacts and moves upward, as the pressure offsets the downward force of the spring. The upward force exerted by the pressure pad against the gas pressure sealed on the diaphragm is equal to the downward force of the spring. Simply put, this balances the spring force and gas pressure, but can result in insensitive pressure regulation. Summary of the Invention

[0003] In order to solve the above problems, the present invention discloses a high-purity pressure reducing valve for semiconductors with force feedback.

[0004] The specific plan is as follows:

[0005] A high-purity pressure-reducing valve for semiconductors with force feedback, comprising an upper valve cap, a diaphragm gland and a welded valve body arranged in sequence from top to bottom, a lower valve cap is sleeved on the outer side of the connection between the diaphragm gland and the welded valve body; an adjusting bolt threadedly connected to the upper valve cap is passed through the middle of the top surface of the upper valve cap, an upper spring is arranged in the inner cavity, and the lower end of the adjusting bolt is connected to the upper end of the upper spring; a spring gland and a diaphragm assembly arranged in the inner cavity of the diaphragm gland are provided, the spring gland is connected to the lower end of the upper spring, and the diaphragm assembly is composed of a positioning disk, a wave diaphragm (2 layers or multiple layers) and a positioning seat arranged in sequence from top to bottom, the positioning disk and the positioning seat are welded to the upper part of the middle of the wave diaphragm On both sides of the lower part, the bottom of the wave diaphragm senses the fluid pressure and drives the positioning seat to fluctuate accordingly; the inner cavity cross-section of the welded valve body is T-shaped, and the middle part thereof is provided with a valve seat support, a valve seat, a lifting valve core and a lower spring in sequence from top to bottom. The valve seat support is fixed to the upper end of the middle part of the inner cavity of the welded valve body, and the valve seat is fixed to the bottom of the valve seat support. The upper end of the lifting valve core passes through the valve seat and the middle part of the valve seat support and is threadedly connected to the middle part of the bottom surface of the positioning seat. The lower end is connected to the upper end of the lower spring, and the lower end of the lower spring is connected to the lower end of the inner cavity of the welded valve body. The lower end of the welded valve body is provided with a liquid inlet cavity and a liquid outlet cavity arranged on the left and right, wherein the liquid inlet cavity is a U-shaped and the liquid outlet cavity is L-shaped.

[0006] Furthermore, the lower end of the inner cavity of the upper valve bonnet is connected to the lower end of the upper valve bonnet, the upper and lower ends of the inner cavity of the diaphragm pressure cover are respectively connected to the upper and lower ends of the diaphragm pressure cover, the upper end of the inner cavity of the welded valve body is connected to the upper end of the welded valve body, the lower end is connected to the right end of the liquid inlet cavity, and the upper end is connected to the upper end of the liquid outlet cavity.

[0007] Furthermore, the upper end of the adjusting bolt is threadedly connected to a cap nut, and the upper section of the external thread is connected to a hexagonal thin nut.

[0008] Furthermore, an adjusting pressure ring, a thrust bearing assembly and a spring pressure ring are sequentially provided between the lower end of the adjusting bolt and the upper end of the upper spring from top to bottom, and a spring retainer is provided on the outer side of the upper spring.

[0009] Furthermore, an O-ring is sleeved on the outer side of the upper end of the upper valve cap.

[0010] Furthermore, a valve core spring pad is provided at the lower end of the lower spring.

[0011] The beneficial effects of the present invention are: it has an ingenious structure, uses a diaphragm assembly to sense changes in downstream pressure, and combined with the force of the spring, can realize automatic up and down adjustment of the valve core, thereby enabling the pressure reducing valve to quickly and automatically regulate the flow when the downstream pressure fluctuates greatly. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a structural schematic diagram of the present invention.

[0013] Figure 2 It is a partial enlarged view of the diaphragm component part of the present invention.

[0014] List of reference numerals:

[0015] 1-welded valve body, 2-valve seat, 3-O-ring, 4-diaphragm gland, 5-lower valve bonnet, 6-spring gland, 7-upper valve bonnet, 8-upper spring, 9-spring pressure ring, 10-thrust bearing assembly, 11-adjusting pressure ring, 12-adjusting bolt, 13-hexagonal thin nut, 14-cap nut, 15-valve core spring washer, 16-lower spring, 17-lift valve core, 18-valve seat support, 19-diaphragm assembly, 20-spring retainer. DETAILED DESCRIPTION

[0016] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be understood that the following specific embodiments are only used to illustrate the present invention and are not used to limit the scope of the present invention.

[0017] As shown in the figure, the present invention provides a high-purity pressure reducing valve for semiconductors with force feedback, comprising an upper valve cap 7, a diaphragm gland 4 and a welded valve body 1 arranged in sequence from top to bottom, a lower valve cap 5 is sleeved on the outer side of the connection between the diaphragm gland 4 and the welded valve body 1; an adjusting bolt 12 threadedly connected to the upper valve cap 7 is passed through the middle of the top surface of the upper valve cap 7, an upper spring 8 is arranged in the inner cavity, and the lower end of the adjusting bolt 12 is connected to the upper end of the upper spring 8; a spring gland 6 and a diaphragm assembly 19 arranged in the inner cavity of the diaphragm gland 4 are provided, the spring gland 6 is connected to the lower end of the upper spring 8, and the diaphragm assembly 19 is composed of a positioning disk, a wave diaphragm (2 layers or multiple layers) and a positioning seat arranged in sequence from top to bottom, the positioning disk and the positioning seat are welded to the upper and lower sides of the middle of the wave diaphragm, and the wave diaphragm Used to sense fluid pressure and generate fluctuations accordingly; the inner cavity cross-section of the welded valve body 1 is T-shaped, and the middle part thereof is provided with a valve seat support 18, a valve seat 2, a lifting valve core 17 and a lower spring 16 in sequence from top to bottom. The valve seat support 18 is fixed to the upper end of the middle part of the inner cavity of the welded valve body 1, and the valve seat 2 is fixed to the lower end of the valve seat support 18. The upper end of the lifting valve core 17 passes through the middle of the valve seat 2 and the valve seat support 18 and is threadedly connected to the middle part of the bottom surface of the positioning seat. The lower end is connected to the upper end of the lower spring 16, and the lower end of the lower spring 16 is connected to the lower end of the inner cavity of the welded valve body 1. The lower end of the welded valve body 1 is also provided with a liquid inlet cavity and a liquid outlet cavity arranged on the left and right, wherein the liquid inlet cavity is a sub-shape, and the liquid outlet cavity is L-shaped, and the liquid inlet cavity and the liquid outlet cavity are respectively connected to the lower end and the upper end of the inner cavity of the welded valve body 1.

[0018] In this embodiment, the lower end of the inner cavity of the upper valve bonnet 7 is connected to the lower end of the upper valve bonnet 7, the upper and lower ends of the inner cavity of the diaphragm gland 4 are respectively connected to the upper and lower ends of the diaphragm gland 4, the upper end of the inner cavity of the welded valve body 1 is connected to the upper end of the welded valve body 1, the lower end is connected to the right end of the liquid inlet cavity, and the upper end is connected to the upper end of the liquid outlet cavity, and the surfaces in contact with the fluid cutoff are all electrochemically polished.

[0019] In this embodiment, the upper end of the adjusting bolt is threadedly connected to a cap nut 14 , and the upper section of the adjusting bolt is externally threadedly connected to a hexagonal thin nut 13 .

[0020] In this embodiment, an adjusting pressure ring 11, a thrust bearing assembly 10 and a spring pressure ring 9 are sequentially provided between the lower end of the adjusting bolt 12 and the upper end of the upper spring 8 from top to bottom, and a spring retainer 20 is provided on the outside of the upper spring 8.

[0021] In this embodiment, an O-ring 3 is sleeved on the outer side of the upper end of the upper valve cap 7 , and a valve core spring pad 15 is provided on the lower end of the lower spring 16 .

[0022] When using this device, turning the adjusting bolt causes the upper spring to apply downward pressure, separating the poppet from the valve seat and opening the pressure reducing valve. During operation, high-pressure fluid enters the inlet chamber and low-pressure fluid exits the outlet chamber. When downstream pressure fluctuates, the diaphragm assembly fluctuates. Under the combined action of the spring force and downstream pressure, the poppet automatically adjusts up and down, achieving automatic flow control.

[0023] The technical means disclosed in the solutions of the present invention are not limited to those disclosed in the above-mentioned embodiments, but also include technical solutions composed of any combination of the above-mentioned technical features. It should be noted that those skilled in the art may make various improvements and modifications without departing from the principles of the present invention, and such improvements and modifications are also considered to be within the scope of protection of the present invention.

Claims

1. A high-purity pressure reducing valve for semiconductors with force feedback, characterized in that: The utility model comprises an upper valve cap (7), a diaphragm pressure cover (4) and a welded valve body (1) which are arranged in sequence from top to bottom, and a lower valve cap (5) is sleeved on the outer side of the connection between the diaphragm pressure cover (4) and the welded valve body (1); an adjusting bolt (12) threadedly connected to the upper valve cap (7) is passed through the middle of the top surface of the upper valve cap (7), an upper spring (8) is arranged in the inner cavity, and the lower end of the adjusting bolt (12) is connected to the upper end of the upper spring (8); a spring pressure cover (6) and a diaphragm assembly (19) arranged in the inner cavity of the diaphragm pressure cover (4) are provided, and the spring pressure cover (6) is connected to the lower end of the upper spring (8); the diaphragm assembly (19) is composed of a positioning plate, a wave diaphragm and a positioning seat which are arranged in sequence from top to bottom, and the positioning plate and the positioning seat are welded to the upper and lower sides of the middle of the wave diaphragm, and the wave diaphragm is used to sense the fluid pressure and generate fluctuations accordingly; The inner cavity cross-section of the welded valve body (1) is T-shaped, and the middle portion thereof is provided with a valve seat support (18), a valve seat (2), a lifting valve core (17) and a lower spring (16) in sequence from top to bottom. The valve seat support (18) is fixed to the upper end of the middle portion of the inner cavity of the welded valve body (1), and the valve seat (2) is fixed to the lower end of the valve seat support (18). The upper end of the lifting valve core (17) passes through the middle portion of the valve seat (2) and the valve seat support (18) and is then threadedly connected to the middle portion of the bottom surface of the positioning seat. The lower end is connected to the upper end of the lower spring (16), and the lower end of the lower spring (16) is connected to the lower end of the inner cavity of the welded valve body (1). The lower end of the welded valve body (1) is further provided with a liquid inlet cavity and a liquid outlet cavity arranged on the left and right, wherein the liquid inlet cavity is a sub-shape and the liquid outlet cavity is L-shaped, and the liquid inlet cavity and the liquid outlet cavity are respectively connected to the lower end and the upper end of the inner cavity of the welded valve body (1).

2. A high-purity pressure reducing valve for semiconductors with force feedback according to claim 1, characterized in that: The lower end of the inner cavity of the upper valve cap (7) is communicated with the lower end of the upper valve cap (7), the upper and lower ends of the inner cavity of the diaphragm gland (4) are respectively communicated with the upper and lower ends of the diaphragm gland (4), the upper end of the inner cavity of the welded valve body (1) is communicated with the upper end of the welded valve body (1), the lower end is communicated with the right end of the liquid inlet cavity, and the upper end is communicated with the upper end of the liquid outlet cavity.

3. A high-purity pressure reducing valve for semiconductors with force feedback according to claim 1, characterized in that: The upper end of the adjusting bolt is threadedly connected to a cap nut (14), and the upper section is externally threadedly connected to a hexagonal thin nut (13).

4. A high-purity pressure reducing valve for semiconductors with force feedback according to claim 1, characterized in that: An adjusting pressure ring (11), a thrust bearing assembly (10) and a spring pressure ring (9) are sequentially provided between the lower end of the adjusting bolt (12) and the upper end of the upper spring (8) from top to bottom, and a spring retainer (20) is provided on the outer side of the upper spring (8).

5. The high-purity pressure reducing valve for semiconductor with force feedback according to claim 1, characterized in that: An O-ring (3) is sleeved on the outer side of the upper end of the upper valve cap (7).

6. The high-purity pressure reducing valve for semiconductor with force feedback according to claim 1, characterized in that: A valve core spring pad (15) is provided at the lower end of the lower spring (16).

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