Pipeline device capable of preventing blockage during automatic waste discharge

Abstract

The utility model discloses an anti-clogging pipeline device during automatic waste discharge, which is applied to the field of waste liquid collection and comprises a bottom plate, a fixing frame is arranged at the top of the bottom plate, a support plate is bolted between the bottom plate and the fixing frame, and a machine waste liquid pipeline is arranged at the top of the fixing frame in a penetrating manner. The bottom end of the machine waste liquid pipeline is fixedly sleeved with a three-way pipe, the other two ends of the three-way pipe are fixedly sleeved with connecting pipelines, valves are installed on the surfaces of the connecting pipelines, fixing bases are symmetrically installed at the bottom of the fixing frame, and the interiors of the fixing bases are in threaded connection with collecting tanks. And the surface of the collecting tank is communicated with an overflow drainage pipeline in a penetrating manner. The waste liquid collecting and separating effect of the device can be improved, the frequent cleaning burden of personnel is relieved, cleaning can be conducted without shutdown by switching the flow direction, the utilization rate of a machine table is increased, and practicability is high.

Description

Technical Field

[0001] The utility model relates to the field of waste liquid collection, in particular to a pipeline blocking prevention device for automatic waste discharge. Background Art

[0002] During wafer coating, the wafer coater uses a chemical solution to clean the wafer backside during coating to prevent contamination. After coating, a side wash is performed to remove photoresist from the wafer edge using chemical solution to facilitate subsequent processing. This process generates waste liquid due to the use of chemical solution. This waste liquid can be mixed with some photoresist. Direct discharge of this waste liquid over time can cause clogging of the discharge pipes due to the accumulated photoresist. Therefore, direct discharge from the factory side is not feasible.

[0003] The existing waste liquid discharge method is to place a waste liquid barrel inside the machine. The waste liquid first flows into the waste liquid barrel for collection. When the appropriate liquid level is collected, the operator will replace the waste liquid barrel. Although there will be no leakage, there are other problems during use. For example, cleaning is relatively frequent, and waste liquid and photoresist will accumulate together in the container. Although photoresist only occupies a very small part of the container, when there is too much waste liquid, the container still needs to be replaced. During the replacement process, the machine will be unable to produce, reducing the machine utilization rate. In order to solve the above problems, we propose an automatic waste discharge anti-blocking pipeline device. Utility Model Content

[0004] The utility model aims to provide a pipeline device for automatically discharging waste to prevent clogging, which solves the problems that the existing pipeline device has poor collection effect and frequent cleaning.

[0005] The above technical objectives of the present utility model are achieved through the following technical solutions: a device for preventing pipeline blockage during automatic waste discharge, comprising a base plate, a fixed frame is provided on the top of the base plate, a support plate is bolted between the base plate and the fixed frame, a machine waste liquid pipeline is provided through the top of the fixed frame, a three-way pipe is fixedly connected to the bottom end of the machine waste liquid pipeline, and the other two ends of the three-way pipe are fixedly connected to connecting pipelines, a valve is installed on the surface of the connecting pipeline, a fixing seat is symmetrically installed on the bottom of the fixed frame, the internal thread of the fixing seat is connected to a collection tank, and the surface of the collection tank is penetrated by an overflow drainage pipeline.

[0006] The adoption of the above technical solution can improve the device's collection and separation effect on waste liquid, reduce the burden of frequent cleaning for personnel, and enable cleaning without stopping the machine by switching the flow direction, thereby improving the utilization rate of the machine and being highly practical.

[0007] The utility model is further configured as follows: a fixing plate is fixedly sleeved on the surface of the machine waste liquid pipeline and the connecting pipeline, and the bottom of the fixing plate is bolted to the fixing frame.

[0008] By adopting the above technical solution, the waste liquid pipeline and the connecting pipeline of the machine can be fixed by setting the fixing plate, thereby improving the stability of the waste liquid pipeline and the connecting pipeline of the machine during the drainage process.

[0009] The utility model is further configured as follows: a non-slip pad is bonded to the bottom of the bottom plate.

[0010] By adopting the above technical solution and providing the anti-skid pad, the friction force of the bottom of the base plate when it is temporarily placed can be increased, thereby playing an anti-skid role.

[0011] The utility model is further configured as follows: two mounting holes are provided on the top of the base plate.

[0012] By adopting the above technical solution, the setting of the mounting holes can facilitate personnel to fix the device to the equipment platform with screws.

[0013] The utility model is further configured such that: the distance between the bottom of the collection tank and the bottom plate is greater than the height of the fixing seat.

[0014] By adopting the above technical solution, the reserved space below the collection tank can be sufficient for removing the collection tank.

[0015] The utility model is further configured as follows: the surfaces of the bottom plate, the support plate and the fixing frame are all coated with anti-corrosion paint.

[0016] By adopting the above technical solution and providing the anti-corrosion coating, the anti-corrosion and moisture-proof effects of the surfaces of the bottom plate, the support plate and the fixing frame can be improved.

[0017] The utility model is further configured as follows: the collection tank is made of a transparent material.

[0018] The above technical solution can facilitate personnel to observe the internal deposited photoresist.

[0019] In summary, the present invention has the following beneficial effects:

[0020] The utility model fixes the bottom plate to the specified position first, and fixes the bottom end of the machine waste liquid pipeline to the tee pipe after the bottom plate is fixed. After the machine waste liquid pipeline is fixed, the valve on the left connecting pipeline is opened to allow the waste liquid and photoresist to enter the collection tank on the left. The heavier photoresist will settle at the bottom, and the waste liquid will flow into a larger container prepared separately through the overflow drainage pipeline after rising. When there is too much precipitated photoresist in the left collection tank, the left valve is closed and the right valve is opened, so that the waste liquid can change its flow direction and enter the right collection tank. Finally, the left collection tank can be removed for cleaning. This can improve the collection and separation effect of the device on waste liquid, reduce the burden of frequent cleaning on personnel, and can achieve cleaning without stopping the machine by switching the flow direction, thereby improving the utilization rate of the machine and having high practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a three-dimensional diagram of the structure of the utility model;

[0022] Figure 2 This is a front sectional view of the structure of the utility model;

[0023] Figure 3 This utility model Figure 2 A magnified view of the structure at center A.

[0024] Figure numerals: 1. Base plate; 2. Support plate; 3. Fixing frame; 4. Machine waste liquid pipeline; 5. Tee pipe; 6. Connecting pipeline; 7. Valve; 8. Fixing seat; 9. Collection tank; 10. Overflow drainage pipeline; 11. Fixing plate; 12. Anti-slip pad; 13. Mounting hole. DETAILED DESCRIPTION

[0025] The present invention will be described in further detail below with reference to the accompanying drawings.

[0026] refer to Figure 1 、 Figure 2 and Figure 3 , an anti-clogging pipeline device for automatic waste discharge, comprising a bottom plate 1, a fixing frame 3 is provided on the top of the bottom plate 1, a support plate 2 is bolted between the bottom plate 1 and the fixing frame 3, a machine waste liquid pipeline 4 is penetrated on the top of the fixing frame 3, a three-way pipe 5 is fixedly sleeved on the bottom end of the machine waste liquid pipeline 4, and a connecting pipe 6 is fixedly sleeved on the other two ends of the three-way pipe 5, a valve 7 is installed on the surface of the connecting pipe 6, a fixing seat 8 is symmetrically installed on the bottom of the fixing frame 3, and a collecting tank 9 is connected to the internal thread of the fixing seat 8. An overflow drainage pipeline 10 is penetrated and connected on the surface of the collecting tank 9. By first fixing the bottom plate 1 to the specified position, when the bottom plate 1 is fixed, the bottom end of the machine waste liquid pipeline 4 is fixed to the three-way pipe 5, after the waste liquid pipeline 4 of the machine is fixed, the valve 7 on the left connecting pipeline 6 is opened to allow the waste liquid and photoresist to enter the left collection tank 9. The heavier photoresist will settle at the bottom, and the waste liquid will flow into another larger container prepared through the overflow drainage pipeline 10 after rising. When there is too much precipitated photoresist in the left collection tank 9, the left valve 7 is closed and the right valve 7 is opened, so that the waste liquid can change its flow direction and enter the right collection tank 9. Finally, the left collection tank 9 can be removed for cleaning. This can improve the collection and separation effect of the device on the waste liquid, reduce the burden of frequent cleaning on personnel, and can achieve cleaning without stopping the machine by switching the flow direction, thereby improving the utilization rate of the machine and having high practicality.

[0027] refer to Figure 1 and Figure 3The surfaces of the machine waste liquid pipeline 4 and the connecting pipeline 6 are fixedly sleeved with a fixing plate 11, and the bottom of the fixing plate 11 is bolted to the fixing frame 3. Through the setting of the fixing plate 11, the machine waste liquid pipeline 4 and the connecting pipeline 6 can be fixed, thereby improving the stability of the machine waste liquid pipeline 4 and the connecting pipeline 6 during the drainage process.

[0028] refer to Figure 1 and Figure 2 The bottom of the base plate 1 is bonded with an anti-skid pad 12. The provision of the anti-skid pad 12 can increase the friction strength of the bottom of the base plate 1 when it is temporarily placed, thereby playing an anti-skid role.

[0029] refer to Figure 2 Two mounting holes 13 are provided on the top of the base plate 1. The mounting holes 13 can facilitate personnel to fix the device to the equipment platform with screws.

[0030] refer to Figure 2 The distance between the bottom of the collecting tank 9 and the base plate 1 is greater than the height of the fixing seat 8, so that the reserved space below the collecting tank 9 is sufficient for the collecting tank 9 to be removed.

[0031] refer to Figure 1 、 Figure 2 and Figure 3 The surfaces of the base plate 1, the support plate 2 and the fixing frame 3 are all coated with anti-corrosion paint. By setting the anti-corrosion paint, the anti-corrosion and moisture-proof effects of the surfaces of the base plate 1, the support plate 2 and the fixing frame 3 can be improved.

[0032] refer to Figure 1 and Figure 2 The collecting tank 9 is made of transparent material, which makes it easy for personnel to observe the precipitated photoresist inside.

[0033] Brief description of the usage process: First fix the bottom plate 1 to the designated position. After the bottom plate 1 is fixed, fix the bottom end of the machine waste liquid pipeline 4 to the tee pipe 5. After the machine waste liquid pipeline 4 is fixed, open the valve 7 on the left connecting pipeline 6 to allow the waste liquid and photoresist to enter the collection tank 9 on the left. The heavier photoresist will settle at the bottom, and the waste liquid will flow into a larger container prepared separately through the overflow drainage pipeline 10 after rising. When there is too much precipitated photoresist in the left collection tank 9, close the left valve 7 and then open the right valve 7 to change the flow direction of the waste liquid and enter the right collection tank 9. Finally, remove the left collection tank 9 for cleaning.

[0034] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed. However, as long as they are within the scope of the claims of the present invention, they are protected by patent law.

Claims

1. A device for preventing pipeline blockage during automatic waste discharge, comprising a bottom plate (1), characterized in that: A fixing frame (3) is provided on the top of the bottom plate (1), a support plate (2) is bolted between the bottom plate (1) and the fixing frame (3), a machine waste liquid pipeline (4) is provided through the top of the fixing frame (3), a three-way pipe (5) is fixedly sleeved on the bottom end of the machine waste liquid pipeline (4), and a connecting pipeline (6) is fixedly sleeved on the other two ends of the three-way pipe (5), and a valve (7) is installed on the surface of the connecting pipeline (6), and a fixing seat (8) is symmetrically installed on the bottom of the fixing frame (3), and the internal thread of the fixing seat (8) is connected to a collecting tank (9), and the surface of the collecting tank (9) is penetrated and connected with an overflow drainage pipeline (10).

2. The device for preventing pipeline blockage during automatic waste discharge according to claim 1, characterized in that: The surfaces of the machine waste liquid pipeline (4) and the connecting pipeline (6) are both fixedly sleeved with a fixing plate (11), and the bottom of the fixing plate (11) is bolted to the fixing frame (3).

3. The anti-clogging pipeline device for automatic waste discharge according to claim 1, characterized in that: An anti-slip pad (12) is bonded to the bottom of the base plate (1).

4. The device for preventing pipeline blockage during automatic waste discharge according to claim 1, characterized in that: Two mounting holes (13) are provided on the top of the base plate (1).

5. The device for preventing pipeline blockage during automatic waste discharge according to claim 1, characterized in that: The distance between the bottom of the collecting tank (9) and the bottom plate (1) is greater than the height of the fixing seat (8).

6. The device for preventing pipeline blockage during automatic waste discharge according to claim 1, characterized in that: The surfaces of the base plate (1), the support plate (2) and the fixing frame (3) are all coated with anti-corrosion paint.

7. The device for preventing pipeline blockage during automatic waste discharge according to claim 1, characterized in that: The collecting tank (9) is made of a transparent material.

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