Dry type adsorption tail gas treatment equipment

Abstract

The utility model provides dry-type adsorption tail gas treatment equipment which comprises a box body and an adsorption barrel installed in the box body, and further comprises a temperature monitoring device, the temperature monitoring device comprises a support and an infrared temperature sensor, the support is installed in the box body and connected with the box body, and the infrared temperature sensor is installed in the box body and connected with the box body. And the infrared temperature sensor is mounted on the bracket and keeps a certain distance from the adsorption barrel. The dry adsorption tail gas treatment equipment can intuitively and effectively monitor the temperature of the barrel body of the adsorption barrel in real time, so that the effectiveness and the accuracy of monitoring the temperature of the barrel body of the adsorption barrel are ensured, and the safety is also improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of waste gas treatment, and in particular relates to dry-type adsorption tail gas treatment equipment. Background Art

[0002] In the semiconductor process, waste gas treatment has gradually become an important part. Among them, the dry adsorption (adsorption scrubber) process is a commonly used waste gas treatment technology. Its main principle is to use adsorbents to adsorb harmful substances in the waste gas and convert them into harmless substances through chemical reactions, thereby achieving waste gas purification and emission reduction.

[0003] Currently, some commonly used dry adsorption exhaust gas treatment systems are used to support GaAs / InP epitaxial growth processes, collecting and treating waste gases generated by the preceding metal organic chemical vapor deposition (MOCVD) process. Because the waste gas adsorption process generates heat and places high demands on the adsorbent, improper adsorbent filling ratios or methods can lead to overheating of the adsorption barrel, posing a potential safety risk. Dry adsorption exhaust gas treatment systems lack temperature monitoring capabilities, requiring only handheld thermometers or visual inspection of the barrel for signs of heating. Handheld thermometers require the door to be open, which poses a significant safety risk due to the high toxicity of the exhaust gases. Visual inspection of the barrel provides no direct visual indication of the real-time reaction temperature. Therefore, current dry adsorption exhaust gas treatment systems cannot effectively and intuitively monitor the barrel temperature during waste gas treatment. Consequently, when the barrel temperature mismatches with the process, on-site personnel cannot promptly detect and respond, posing a safety hazard. Utility Model Content

[0004] In view of the shortcomings of the existing technology mentioned above, the purpose of the present invention is to provide a dry adsorption exhaust gas treatment equipment to solve the high safety risks in the existing related technology due to the need to open the door to operate the handheld thermometer, as well as the problem of observing the temperature of the adsorption barrel body with the naked eye.

[0005] To achieve the above-mentioned purpose, the utility model provides a dry adsorption exhaust gas treatment equipment, which includes a box body and an adsorption barrel installed in the box body, and also includes a temperature monitoring device, the temperature monitoring device includes a bracket and an infrared temperature sensor; the bracket is installed in the box body and connected to the box body; multiple infrared temperature sensors are installed on the bracket and maintain a certain distance from the adsorption barrel.

[0006] Optionally, the plurality of infrared temperature sensors on the bracket are arranged in sequence and spaced apart in a height direction corresponding to the adsorption barrel.

[0007] Optionally, three infrared temperature sensors are provided on the bracket.

[0008] Optionally, the bracket is provided with a mounting through hole, which is a long waist hole. The mounting through holes are arranged in a one-to-one correspondence with the infrared temperature sensors. Each infrared temperature sensor is arranged through a corresponding mounting through hole, and the infrared temperature sensor and the bracket are locked by a nut.

[0009] Optionally, the distance between the infrared temperature sensor and the adsorption barrel is 50 mm to 200 mm.

[0010] Optionally, the bracket is a sheet metal part, and / or one end of the bracket is fixed to the bottom surface of the box.

[0011] Optionally, each of the infrared temperature sensors is connected to a power supply and a control device respectively, and the control device is further communicatively connected to a preceding process machine, and the preceding process machine is configured to perform a shutdown operation when the control device outputs a corresponding warning signal.

[0012] Optionally, the control device includes a human-machine interface, and / or the control device and the power supply are both arranged on a control box, and the control box is installed on the box body.

[0013] Optionally, the front-stage process machine is a metal organic chemical vapor deposition device.

[0014] Optionally, two adsorption barrels are provided in the box body, and each adsorption barrel is equipped with a set of the temperature monitoring device.

[0015] As described above, the dry adsorption exhaust gas treatment equipment of the present invention has the following beneficial effects: the dry adsorption exhaust gas treatment equipment provided by the present invention realizes real-time monitoring of the temperature of the adsorption barrel body by adding a temperature monitoring device, thereby ensuring the effectiveness and accuracy of the temperature monitoring of the adsorption barrel body, while also improving safety, and the overall structure of the equipment is slightly changed, and the cost of use is low. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings are provided to facilitate a better understanding of the present invention and do not constitute an undue limitation of the present invention.

[0017] Figure 1 This is a schematic diagram of the three-dimensional structure of a bracket provided by the present invention according to one embodiment;

[0018] Figure 2 This is a schematic diagram of the main structure of a bracket provided by the present invention according to one embodiment;

[0019] Figure 3 This is a schematic diagram of the side structure of a bracket provided by the present invention according to one embodiment;

[0020] Figure 4 This is a schematic top view of the structure of a bracket provided by the present invention according to one embodiment;

[0021] Figure 5 This is a schematic diagram of the installation of a temperature monitoring device provided by the present invention according to one embodiment.

[0022] [The following are the descriptions of the reference numerals]:

[0023] 10-box, 20-adsorption barrel, 1-bracket, 11-mounting wall, 12-mounting hole, 13-mounting through hole, 2-infrared temperature sensor, 3-control device, 4-wire. DETAILED DESCRIPTION

[0024] To make the purpose, advantages and features of the present invention more clear, the present invention is further described in detail below with reference to the accompanying drawings. It should be noted that the drawings are all in a very simplified form and are not in exact proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

[0025] The following describes the implementation of the present invention through specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation methods. The details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the illustrations provided in this embodiment only illustrate the basic concept of the present invention in a schematic manner. Therefore, the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. The type, quantity and proportion of each component in actual implementation can be changed arbitrarily, and the component layout type may also be more complicated.

[0026] In addition, each embodiment described below has one or more technical features. However, this does not mean that users of the present invention must implement all technical features in any embodiment at the same time, or that they can only implement some or all technical features in different embodiments separately. In other words, as long as implementation is possible, those skilled in the art can, based on the disclosure of the present invention and depending on design specifications or implementation requirements, selectively implement some or all technical features in any embodiment, or selectively implement a combination of some or all technical features in multiple embodiments, thereby increasing the flexibility of the implementation of the present invention.

[0027] As used in this specification, the singular forms "a", "an", and "the" include plural objects, and the plural form "a plurality" includes more than two objects, unless the content clearly indicates otherwise. As used in this specification, the term "or" is generally used in a sense that includes "and / or", unless the content clearly indicates otherwise, and the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium, and it can be internal communication between two elements or an interactive relationship between two elements. Relational terms such as "first", "second", etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate or imply relative importance or implicitly indicate the number of technical features indicated. It should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "back," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," and the like, indicating positions or location relationships, are based on the positions or location relationships shown in the accompanying drawings and are intended only to facilitate the description of the present invention and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limiting the present invention. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0028] The purpose of this utility model is to provide a dry-type adsorption exhaust gas treatment device to address the high safety risks associated with existing handheld thermometers requiring the door to be opened, as well as the problem of visually observing the temperature of the adsorption barrel. The following description is based on the accompanying drawings.

[0029] Figure 1 The figure shows a three-dimensional structure diagram of the bracket 1 in the temperature monitoring device provided by some embodiments of the present invention. Figure 2 It shows the main structural diagram of the bracket provided by some embodiments of the present invention, Figure 3 shows a schematic diagram of the side structure of the bracket provided by some embodiments of the present utility model, Figure 4 Schematic diagrams of the top view of the bracket provided in some embodiments of the present invention are shown. Figure 5 Shown is a schematic diagram of the installation of the temperature monitoring device provided by some embodiments of the present utility model.

[0030] In an embodiment of the present invention, a dry adsorption tail gas treatment device is provided, which is preferably used in the metal organic chemical vapor deposition (MOCVD) epitaxial growth process of GaAs / InP to collect and treat the waste gas generated by the previous MOCVD process reaction.

[0031] Specifically, such as Figure 5 As shown, the dry adsorption exhaust gas treatment equipment includes a housing 10 and an adsorption barrel 20 installed within the housing 10. The adsorption barrel 20 may be single or multiple, with multiple generally referring to two, but more than two is not excluded. It should be noted that the two adsorption barrels 20 described in the drawings and the following content are intended only to provide a further understanding of this application. The illustrative embodiments disclosed herein and their descriptions are intended solely to explain the disclosure herein and do not constitute an undue limitation of this application.

[0032] In addition, the dry adsorption tail gas treatment equipment also includes a temperature monitoring device, which can intuitively and effectively monitor the barrel temperature of the adsorption barrel 20 in real time, thereby improving the effectiveness and safety of the temperature monitoring of the dry adsorption tail gas treatment equipment (or scrubber equipment), and indirectly monitoring the process reaction temperature by monitoring the barrel temperature of the adsorption barrel 20, thereby improving the emergency response capabilities of the equipment and increasing the safety performance of the equipment. Moreover, during specific implementation, only a simple modification of the existing dry adsorption tail gas treatment equipment is required, and one or more sets of temperature monitoring devices are installed. The overall structural changes of the equipment and the cost of use are small, and the cost of use is low. After the modification, the dry adsorption tail gas treatment equipment can monitor the barrel temperature of the adsorption barrel 20 in real time, avoiding the need to observe the barrel temperature of the adsorption barrel 20 with a handheld thermometer or the naked eye, ensuring the effectiveness and accuracy of the barrel temperature monitoring of the adsorption barrel 20, and also improving safety.

[0033] It should be understood that the dry adsorption exhaust gas treatment equipment provided in this embodiment can be an NSOD 200 adsorption exhaust gas treatment machine, or other types of dry adsorption exhaust gas treatment machines, but the present invention is not limited thereto.

[0034] The temperature monitoring device is further described below.

[0035] like Figures 1 to 4 As shown, the temperature monitoring device includes a bracket 1 and an infrared temperature sensor 2. Figure 5 As shown, the infrared temperature sensor 2 is mounted on a bracket 1; the bracket 1 is installed within and connected to the housing 10. After installation, the infrared temperature sensor 2 is aligned with the adsorption barrel 20 at a certain distance to detect the barrel temperature. Preferably, the temperature is detected at a location on the adsorption barrel 20 where heat is most noticeable.

[0036] It should be understood that the infrared temperature sensor 2 does not contact the adsorption barrel 20, achieving non-contact measurement. This non-contact temperature measurement method does not require insertion into the adsorption barrel 20 for measurement, thus maintaining the structure of the adsorption barrel 20 and effectively ensuring the sealing performance of the adsorption barrel 20. Furthermore, infrared temperature measurement is convenient to implement, and its position can be adjusted at any time as needed, making it more flexible and convenient to use.

[0037] The present invention does not limit the specific model and specifications of the infrared temperature sensor 2. Optionally, the infrared temperature sensor 2 uses a BRW600-400A infrared temperature sensor. Of course, the actual model is not limited to this.

[0038] The bracket 1 can be made into various shapes and sizes, without limitation. Common structures of the bracket 1 may include sheet metal, a frame, and the like. Based on cost and convenience, the bracket 1 is preferably a sheet metal member. The shape and size of the sheet metal member are not limited, as long as it can be adapted to the current device. The bracket 1 is made of metal, particularly a metal material with good corrosion resistance, with stainless steel being preferred, for example, various types of stainless steel, including but not limited to 304 stainless steel.

[0039] like Figure 1-Figure 4 As shown, when the bracket 1 is a sheet metal component, its thickness adopts the thickness commonly used in sheet metal processing, such as 1.0mm, 1.5mm, 2.0mm, 3.0mm, etc., and the thickness can be adjusted according to actual needs. Because the bracket 1 needs to support the infrared temperature sensor 2, its thickness must ensure its load-bearing capacity. The bracket 1 is preferably 2.0mm thick. This sheet metal component is relatively strong and can withstand a large weight. In addition, the walls of the sheet metal can be welded together, using argon arc welding or other commonly used welding processes.

[0040] The installation position of the bracket 1 in the box 10 is not limited to that shown in the drawings. In addition to being installed on the bottom surface of the box 10, the bracket 1 can also be installed on the side of the box 10 or on the top surface of the box 10. From the perspective of convenience, it is preferred to install the bracket 1 on the bottom surface of the box 10, side by side with the adsorption barrel 20. This also facilitates the detection of the barrel body temperature of the adsorption barrel 20 in the height direction of the adsorption barrel 20.

[0041] In addition, the connection between the bracket 1 and the box body 10 is a detachable connection or a non-detachable connection, and a detachable connection is preferably adopted. Figure 5 As shown, one end of the bracket 1 is fixed to the bottom surface of the box body 10 by bolts or other means. Figure 1As shown, one end of the bracket 1 is provided with a mounting wall 11, which is provided with a plurality of mounting holes 12. These holes 12 are preferably waist-shaped holes, which facilitate adjustment of the bracket 1's front-to-back position relative to the adsorption barrel 20. Optionally, two M8 hexagon socket head cap bolts are used for fastening, with the bolts specified as M8*16. Of course, this is not a limitation.

[0042] In addition, in order to install the infrared temperature sensor 2, the bracket 1 is provided with a mounting hole 13 for placing the infrared temperature sensor 2, see Figure 1 and Figure 2 . The mounting through hole 13 can allow the rod body of the infrared temperature sensor 2 to pass through. Specifically, the rod body of the infrared temperature sensor 2 is arranged through the mounting through hole 13, and then the infrared temperature sensor 2 and the bracket 1 are locked by the cooperation of the nut and the rod body (with external threads) of the infrared temperature sensor 2. Furthermore, in order to facilitate the adjustment of the position (upper and lower positions) of the infrared temperature sensor 2, the mounting through hole 13 is preferably a long waist hole, which allows the position of the infrared temperature sensor 2 in the height direction to be adjustable. It should also be noted that in addition to the above installation methods, the infrared temperature sensor 2 can also be installed on the bracket 1 by welding, bonding or clamping. The specific installation method can be reasonably selected according to actual conditions.

[0043] Furthermore, at least two infrared temperature sensors 2 are mounted on the bracket 1 to ensure accurate and effective temperature detection. All infrared temperature sensors 2 on the same bracket 1 are used to monitor the same adsorption barrel 20. This allows for real-time temperature monitoring of different locations on the adsorption barrel 20, ensuring accurate and timely data.

[0044] Multiple infrared temperature sensors 2 on the same bracket 1 are configured to detect the temperature of locations on the adsorption barrel 20 where heat is most noticeable. The location of heat is related to the filling method of the adsorbent within the adsorption barrel 20. Therefore, the infrared temperature sensors 2 can be arranged based on the filling method. The adsorbent in the adsorption barrel 20 is most commonly filled from bottom to top. Therefore, the multiple infrared temperature sensors 2 on the same bracket 1 are preferably arranged along the height of the adsorption barrel 20 to detect the temperature of locations on the barrel body of the adsorption barrel 20 where heat is most noticeable.

[0045] In order not to increase the cost while ensuring the accuracy of temperature monitoring, three infrared temperature sensors 2 are preferably installed on the same bracket 1, and the three infrared temperature sensors 2 are arranged in sequence at intervals in the height direction corresponding to the adsorption barrel 20, so as to realize temperature monitoring at the upper, middle and lower positions. These three positions happen to be the areas on the body of the adsorption barrel 20 where heat is more obvious.

[0046] The multiple infrared temperature sensors 2 on the same bracket 1 are arranged at equal or unequal distances in the height direction of the adsorption barrel 20, and the spacing can be set according to the heating position of the barrel body of the adsorption barrel 20. Preferably, the multiple infrared temperature sensors 2 on the same bracket 1 are arranged at equal distances in the height direction of the adsorption barrel 20.

[0047] Specific reference Figure 5 In the box 10, a bracket 1 is installed side by side next to each adsorption barrel 20, and each infrared temperature sensor 2 maintains a certain distance from the adsorption barrel 20. In theory, the closer the infrared temperature sensor 2 is to the adsorption barrel 20, the better, and the more accurate the temperature measurement. However, during use, in order to ensure the operability of the adsorption barrel 20 (such as disassembly and assembly, etc.), the distance cannot be too small, otherwise it will affect the operation of the adsorption barrel 20 and be detrimental to the operator's on-site operation. At this point, the distance between the infrared temperature sensor 2 and the adsorption barrel 20 should be appropriate. In practice, an appropriate distance can be selected based on the results of on-site debugging. Optionally, the distance between the infrared temperature sensor 2 and the adsorption barrel 20 is 50mm to 200mm, such as 50mm, 100mm or 200mm, but is not limited to this. It should be understood that the distance between the infrared temperature sensor 2 and the adsorption barrel 20 is the minimum distance from the rod end of the infrared temperature sensor 2 to the outer surface of the adsorption barrel 20.

[0048] The following is an exemplary illustration. As shown in the figure, an infrared temperature sensor 2 is installed at 25 cm, 55 cm, and 85 cm from the bottom of the adsorption barrel 20. Each adsorption barrel 20 is equipped with three infrared temperature sensors 2, for a total of six infrared temperature sensors 2. Two brackets 1 are provided. This provides three temperature measurement points per adsorption barrel 20, and a total of six temperature measurement points for the two adsorption barrels 20. It should be noted that the heights of the three infrared temperature sensors 2 can be adjusted and varied.

[0049] Each infrared temperature sensor 2 is powered by a power supply, typically a 24V DC power supply. Conventional dry adsorption exhaust gas treatment systems have a separate control box located above the housing 10, where the power supply is housed. In this case, simply lead the wires (indicated by dashed lines) 4 of the infrared temperature sensors 2 within the housing 10 directly into the control box and connect them to the power supply.

[0050] Each infrared temperature sensor 2 is further configured to be connected to a control device 3 , which processes the data collected by the infrared temperature sensor 3 . The processed data can be recorded, stored, and further displayed.

[0051] Specifically, each infrared temperature sensor 2 has a positive power supply electrode (generally a red terminal) and a negative power supply electrode (generally a black terminal). The positive power supply electrode is connected to the power supply, and the negative power supply electrode is connected to the control device 3 .

[0052] It should be noted that this embodiment does not limit the type of control device 3. As those skilled in the art will understand, the control device 3 can adopt any existing electronic device with computing, processing, and control functions, such as a PLC controller, a single-chip microcomputer, a microprocessor, etc.

[0053] In this embodiment, the control device 3 utilizes a PLC (Programmable Logic Controller) built into the dry adsorption exhaust gas treatment system. It monitors the temperature of the adsorption barrel 20 via input from the infrared temperature sensor 2 and simultaneously controls the status of the preceding process equipment (e.g., an MOCVD machine). The control device 3 and power supply are both located on the control box. It should be understood that in other embodiments, the control device 3 and the housing 10 may be arranged separately and not integrated together.

[0054] In short, the control device 3 can obtain the barrel temperature of the adsorption barrel 20 based on the data fed back by each infrared temperature sensor 2. Specifically, the infrared temperature sensor 2 feeds back the collected data to the control device 3. After processing, the control device 3 can output the actual temperature value for display on the human-machine interface. As those skilled in the art will understand, the control device 3 has the ability to process analog signals, including converting analog quantities into digital quantities, and converting digital quantities into analog quantities. When in use, the analog quantity collected by the infrared temperature sensor 2 can be converted into a digital quantity for reuse. Taking PLC as an example, the temperature analog module in the PLC can convert the analog temperature signal into a digital signal and input it into the PLC for processing.

[0055] Because the control device 3 is also communicatively connected to the preceding process equipment, the preceding process equipment can execute shutdown operations under the control of the control device 3. Specifically, the preceding process equipment executes shutdown operations when the control device 3 outputs a corresponding warning signal. This enables coordinated control of the dry adsorption exhaust gas treatment equipment and the preceding process equipment, enabling real-time monitoring and early warning functions, facilitating timely maintenance, troubleshooting, eliminating safety hazards, and preventing accidents.

[0056] In a preferred embodiment, the control device 3 is configured with two levels of temperature warnings: a first level of temperature warning value and a second level of temperature warning value. The first level of temperature warning value is lower than the second level of temperature warning value. This means that the first level of temperature warning value corresponds to a high temperature warning, while the second level of temperature warning value corresponds to an over-high temperature risk. These temperature warning values ​​can be set and input into the control device 3. This provides different levels of alarm prompts for different hazard levels, making it easier for staff to select appropriate response plans based on the hazard level. Of course, this is not intended to be limiting. In other embodiments, the number of temperature warning values ​​can be appropriately set based on actual needs.

[0057] Furthermore, when the actual temperature of the adsorption barrel 20 exceeds the first-level temperature warning value, the control device 3 issues a first warning signal, indicating that the adsorption barrel 20 is at risk of overheating and a warning is required. When the actual temperature of the adsorption barrel 20 exceeds the second-level temperature warning value, the control device 3 directly issues a second warning signal and feeds it back to the preceding process equipment, causing the preceding process equipment to shut down according to the received second warning signal. Both the first-level temperature warning value and the second-level temperature warning value can be adjusted and set according to the process. For example, the first-level temperature warning value can be set to 100°C, and the second-level temperature warning value can be set to 200°C.

[0058] Based on this, the control device 3 is in communication with the preceding process equipment, placing it under the control of the control device 3. The preceding process equipment is preferably a metal organic chemical vapor deposition (MOCVD) machine. This allows the equipment to promptly detect and implement emergency measures when the temperature of the adsorption barrel 20 is mismatched with the process, thus avoiding potential safety hazards. Specifically, emergency measures include immediately shutting down the preceding process equipment upon receiving an alarm signal, among other related actions.

[0059] In practice, the control device 3 can not only measure the temperature of the adsorption barrel 20 in real time to obtain the real-time temperature of the adsorption barrel 20, but also record and save the data in real time for easy viewing. The control device 3 is preferably configured with a built-in human-machine interface, through which the temperature warning value can be set independently, and the human-machine interface can also display the real-time temperature, historical temperature, and historical temperature curve of the adsorption barrel 20.

[0060] In summary, the present invention provides a dry-type adsorption exhaust gas treatment equipment, which includes a housing 10 and an adsorption barrel 20 installed in the housing 10, and also includes a temperature monitoring device, which includes a bracket 1 and an infrared temperature sensor 2; the bracket 1 is installed in the housing 10 and connected to the housing 10; the infrared temperature sensor 2 is installed on the bracket 1 and maintains a certain distance from the adsorption barrel 20 to detect the barrel body temperature of the adsorption barrel 20. The dry-type adsorption exhaust gas treatment equipment provided by the present invention has been modified and equipped with a temperature monitoring device, so that the dry-type adsorption exhaust gas treatment equipment itself can intuitively and effectively monitor the barrel body temperature of the adsorption barrel 20 in real time, which not only avoids the danger of manual handheld temperature measurement, but also overcomes the problem that the barrel body temperature cannot be intuitively and effectively reflected when observing the temperature with the naked eye, and ultimately ensures the effectiveness and accuracy of the temperature monitoring of the adsorption barrel 20, while also improving safety. In addition, the overall structure of the equipment is slightly changed, and the cost of use is low.

[0061] Furthermore, in some cases, the dry adsorption exhaust gas treatment equipment provided by the present invention can automatically set a temperature warning value through the control device 3. In particular, when the barrel body temperature exceeds the second-level temperature warning value, an alarm signal is directly issued, and the preceding process equipment is shut down, thereby ensuring the safety of the equipment's exhaust gas treatment process. Furthermore, the control device 3 can also view the historical temperature and temperature curve of the adsorption barrel 20 through the human-machine interface, facilitating troubleshooting and quickly locating and resolving any anomalies.

[0062] While the present invention is disclosed above, it is not limited thereto. Persons skilled in the art may make various modifications and variations to the present invention without departing from the spirit and scope of the present invention. Thus, if such modifications and variations fall within the scope of the claims and their equivalents, the present invention is intended to encompass such modifications and variations.

Claims

1. A dry adsorption tail gas treatment device, comprising a box body and an adsorption barrel installed in the box body, characterized in that: It also includes a temperature monitoring device, which includes a bracket and an infrared temperature sensor; the bracket is installed in the box and connected to the box; multiple infrared temperature sensors are installed on the bracket and maintain a certain distance from the adsorption barrel.

2. The dry adsorption tail gas treatment equipment according to claim 1, characterized in that: The plurality of infrared temperature sensors on the bracket are sequentially spaced apart in a height direction corresponding to the adsorption barrel.

3. The dry adsorption tail gas treatment equipment according to claim 2, characterized in that: Three infrared temperature sensors are arranged on the bracket.

4. The dry adsorption tail gas treatment equipment according to claim 2, characterized in that: The bracket is provided with a mounting through hole, which is a long waist hole. The mounting through holes are arranged in a one-to-one correspondence with the infrared temperature sensors. Each infrared temperature sensor is arranged through a corresponding mounting through hole, and the infrared temperature sensor and the bracket are locked by a nut.

5. The dry adsorption tail gas treatment equipment according to any one of claims 1 to 4, characterized in that: The distance between the infrared temperature sensor and the adsorption barrel is 50 mm to 200 mm.

6. The dry adsorption tail gas treatment equipment according to any one of claims 1 to 4, characterized in that: The bracket is a sheet metal part, and / or one end of the bracket is fixed to the bottom surface of the box.

7. The dry adsorption tail gas treatment equipment according to any one of claims 1 to 4, characterized in that: Each of the infrared temperature sensors is connected to a power supply and a control device respectively. The control device is also in communication connection with a preceding process machine. The preceding process machine is configured to execute a shutdown operation when the control device outputs a corresponding warning signal.

8. The dry adsorption tail gas treatment equipment according to claim 7, characterized in that: The control device includes a human-machine interface, and / or the control device and the power supply are both arranged on a control box, and the control box is installed on the box body.

9. The dry adsorption tail gas treatment equipment according to claim 7, characterized in that: The front-stage process machine is a metal organic chemical vapor deposition device.

10. The dry adsorption tail gas treatment equipment according to any one of claims 1 to 4, characterized in that: Two adsorption barrels are provided in the box body, and each adsorption barrel is equipped with a set of the temperature monitoring device.

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