Multi-point layout air inlet ring cavity

Abstract

The utility model relates to the field of semiconductor cleaning, and discloses a multi-point layout air inlet ring cavity which comprises a fixing mechanism, the fixing mechanism comprises an inner fixing ring and two magnetic suction rings, an inner shunt ring is fixedly arranged at the lower end of the inner side of the inner fixing ring, a sliding groove is formed in the upper portion of the interior of the inner fixing ring, and the two magnetic suction rings are arranged in the sliding groove. A rotating mechanism is clamped and rotationally arranged on the outer side of the fixing mechanism, the rotating mechanism comprises an outer rotating body, a plurality of upper air inlet holes are formed in the position, close to the edge, of the upper end of the outer rotating body, and an upper flow dividing ring is fixedly arranged on the portion, close to the upper portions of the upper air inlet holes, of the periphery of the outer rotating body. According to the spiral-flow type gas inlet device, spiral-flow type gas inlet can be achieved, the design of multiple holes and multi-direction guiding is matched, gas can be diffused more rapidly, diffusion uniformity is improved, the influence of the thickness of the gas inlet ring on gas circulation can be reduced through the guiding design, the cleaning efficiency can be improved, and the cleaning cost can be reduced.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor cleaning, in particular to a multi-point layout air intake ring cavity. Background Art

[0002] During operation, semiconductor cleaning equipment usually needs to use various gases to dry the wafer surface to prevent water spots or other contaminants from re-attaching to the wafer surface. In order to improve the cleaning ability, an air inlet ring cavity is required to increase the diffusion speed and uniformity of the gas so that the gas can completely cover the wafer surface.

[0003] Many existing air intake ring cavities have limited effects in improving gas diffusion speed and diffusion uniformity. Although they are better than the traditional linear air intake method, they only add more air holes and guide the gas to the surroundings through the air holes opened on the side. However, most of their guidance still uses a linear air intake method, and the diffusion effect is still not fast and uniform enough. Some air intake ring cavities with multi-point layouts will restrict the flow of gas due to their own thickness, and will also have an adverse effect on gas diffusion. The slow and uneven diffusion speed will cause the equipment to consume more electricity and spend more time on gas input, affecting the cleaning efficiency of semiconductor materials and increasing cleaning costs.

[0004] Therefore, those skilled in the art provide a multi-point layout intake ring cavity to solve the problems raised in the above background technology. Utility Model Content

[0005] The purpose of the present utility model is to solve the shortcomings existing in the prior art, and a multi-point layout intake ring cavity is proposed. The device can realize swirl-type air intake. Combined with the multi-porous and multi-directional guiding design, the gas can be diffused more quickly and the diffusion uniformity can be improved. The guiding design can reduce the influence of the intake ring thickness on the gas circulation, thereby improving the cleaning efficiency and reducing the cleaning cost.

[0006] To achieve the above objectives, the present invention provides the following technical solutions: a multi-point layout intake ring cavity, comprising a fixing mechanism, the fixing mechanism comprising an inner fixing ring and two magnetic rings, an inner diverter ring fixedly provided on the inner side of the inner fixing ring near the lower end, and a slide groove provided on the inner side of the inner fixing ring near the upper end;

[0007] A rotating mechanism is provided on the outer side of the fixing mechanism for rotation. The rotating mechanism includes an outer rotating body, a plurality of upper air inlet holes are provided at the edge of the upper end of the outer rotating body, an upper diverter ring is fixedly provided on the part of the outer rotating body above the upper air inlet hole, a lower diverter ring is fixedly provided on the part of the outer rotating body below the upper air inlet hole, a turntable is fixedly provided on the inner side of the outer rotating body near the slide groove area, a plurality of windmill plates are fixedly provided in the circular ring near the center of the turntable, and a plurality of lower air outlet holes are provided on the edge of the lower end of the outer rotating body.

[0008] Furthermore, an air inlet groove is provided between the upper end of the inner diverter ring and the inner fixed ring, and the air inlet groove is communicated with a plurality of lower air outlet holes.

[0009] Furthermore, the portion of the outer rotating body located within the inner fixed ring is located between two magnetic rings. The portion of the outer rotating body located within the inner fixed ring is also magnetically arranged, and its upper and lower ends are magnetically repelled from adjacent magnetic rings.

[0010] Furthermore, the inner size of the outer rotating body is consistent with the circumferential size of the inner fixed ring, and the circumferential size of the turntable is consistent with the inner size of the slide groove.

[0011] Furthermore, the two magnetic rings are fixedly connected to the inner fixed ring, and a clamping block is fixedly provided at the center of one end of the two magnetic rings close to the turntable. A clamping groove is provided near the clamping block at the upper and lower ends of the turntable, and the circumferential dimensions of the two clamping blocks are consistent with the circumferential dimensions of the clamping grooves.

[0012] Furthermore, a first air groove is provided above the upper diverter ring of the outer rotating body, a second air groove is provided between the upper diverter ring and the lower diverter ring of the outer rotating body, and a third air groove is provided below the lower diverter ring of the outer rotating body.

[0013] Furthermore, the No. 1 air tank, the No. 2 air tank and the No. 3 air tank are all connected to the upper air inlet.

[0014] Furthermore, the upper diverter ring is arranged obliquely upward, the lower diverter ring is arranged obliquely downward, and the inner diverter ring is arranged obliquely upward.

[0015] The utility model has the following beneficial effects:

[0016] 1. The utility model proposes a multi-point layout air intake ring cavity. When the device is ventilated, the gas will quickly intake from the inside of the inner fixed body in a straight line downward. Under the influence of the inner diverter ring, the gas will flow into the multiple lower air outlet holes from the arc surface of the upper end of the inner diverter ring and be discharged from the multiple lower air outlet holes, which can reduce the influence of the thickness of the air intake ring cavity itself and improve the diffusion efficiency. A part of the gas will flow in from the multiple upper air intake holes opened at the upper end of the outer rotating body. The gas flowing into the upper air intake holes will be affected by the upper diverter ring and the lower diverter ring to transport the gas in three different directions. The above design can divide the linear air intake gas into multiple branches, and circulate rapidly to different direction areas, thereby accelerating the diffusion speed and diffusion uniformity.

[0017] 2. The utility model proposes a multi-point layout of the air intake ring cavity. When the device is ventilated, when the gas flows in from the inside of the inner fixed body, the gas will drive the turntable and the outer rotating body to rotate through the windmill plate. Due to the two magnetic rings, the friction between the outer rotating body and the inner fixed body is small, and it can rotate quickly. Combined with the gas output from multiple upper air inlet holes and lower air outlet holes, a gas vortex can be formed, further accelerating the diffusion speed and diffusion uniformity of the gas, so that the gas can fill the enclosed space in a short time, and the cleaning and preservation of the semiconductor material can be completed in time. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a front axonometric diagram of the present invention;

[0019] Figure 2 This is a rear axonometric diagram of the present invention;

[0020] Figure 3 It is a front view schematic diagram of the utility model;

[0021] Figure 4 It is a schematic diagram of a partial sectional view of the front axonometric view of the present invention.

[0022] Legend:

[0023] 1. Fixing mechanism; 2. Rotating mechanism; 101. Inner fixing ring; 102. Inner diverter ring; 103. Magnetic ring; 104. Slide; 201. Outer rotating body; 202. Lower diverter ring; 203. Upper diverter ring; 204. Lower air outlet; 205. Upper air inlet; 206. Turntable; 207. Windmill plate. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0025] Reference Figure 1 The utility model provides an embodiment: a multi-point layout intake ring cavity, including a fixing mechanism 1, and a rotating mechanism 2 is provided on the outer side of the fixing mechanism 1 for clamping and rotating.

[0026] Specifically, the rotating mechanism 2 is partially engaged with the fixing mechanism 1 , and the rotating mechanism 2 can transform the oblique and straight airflow outputs into swirl outputs by rotating, thereby improving the gas diffusion speed and uniformity.

[0027] Reference Figure 2 and Figure 4 The fixing mechanism 1 includes an inner fixing ring 101 and two magnetic rings 103. An inner diverter ring 102 is fixedly provided on the inner side of the inner fixing ring 101 near the lower end. A sliding groove 104 is provided on the upper part of the inner fixing ring 101. An air inlet groove is provided between the upper end of the inner diverter ring 102 and the inner fixing ring 101. The air inlet groove is connected to a plurality of lower air outlet holes 204.

[0028] Specifically, the purpose of setting the two magnetic rings 103 is to reduce the friction between the turntable 206 and the inner fixed ring 101 when it rotates, so that the wind speed of the incoming air can be better utilized to drive the turntable 206 to rotate, so that the outer rotating body 201 can rotate faster with less resistance, forming a larger gas vortex.

[0029] Reference Figure 2 、 Figure 3 and Figure 4 The rotating mechanism 2 includes an outer rotating body 201, a plurality of upper air inlet holes 205 are opened at the edge of the upper end of the outer rotating body 201, an upper diverter ring 203 is fixedly provided on the upper part of the outer rotating body 201 near the upper air inlet hole 205, and a lower diverter ring 202 is fixedly provided on the lower part of the outer rotating body 201 near the upper air inlet hole 205. A turntable 206 is fixedly provided on the inner side of the outer rotating body 201 near the chute 104, and a plurality of windmill plates 207 are fixedly provided in the circle near the center of the turntable 206. A plurality of lower air outlet holes 204 are opened at the edge of the lower end of the outer rotating body 201, and the part of the outer rotating body 201 located inside the inner fixed ring 101 is located between the two magnetic rings 103. The part of the outer rotating body 201 located inside the inner fixed ring 101 also adopts a magnetic attraction setting, and its upper and lower ends are magnetically attracted and repelled by the adjacent magnetic rings 103;

[0030] The inner size of the outer rotating body 201 is consistent with the size of the inner fixed ring 101, the size of the turntable 206 is consistent with the inner size of the slide groove 104, and the two magnetic rings 103 are fixedly provided with a clamping block at the center of one end near the turntable 206. The upper and lower ends of the turntable 206 are provided with a clamping groove near the clamping block. The sizes of the two clamping blocks are consistent with the sizes of the clamping grooves. The outer rotating body 201 is provided with a No. 1 air groove above the upper diverter ring 203, and the outer rotating body 201 is provided with a No. 2 air groove between the upper diverter ring 203 and the lower diverter ring 202. The outer rotating body 201 is provided with a No. 3 air groove below the lower diverter ring 202. The No. 1 air groove, the No. 2 air groove and the No. 3 air groove are all connected to the upper air inlet 205. The upper diverter ring 203 is tilted upward, the lower diverter ring 202 is tilted downward, and the inner diverter ring 102 is tilted upward;

[0031] Specifically, after the gas enters from the upper air inlet 205, it will be output to three different areas through the No. 1 air slot, the No. 2 air slot and the No. 3 air slot respectively, so as to improve the uniformity of gas diffusion. The three air slots are of the same size. The gas entering from the inner fixed ring 101, part of the gas close to the edge of the inner fixed ring 101 will be guided into the lower air outlet 204 by the inner diverter ring 102, so that the entry of the gas will not be affected by the thickness of the outer rotating body 201 and the inner fixed ring 101. The multiple windmill plates 207 are arranged at an angle, and can drive the turntable 206 and the outer rotating body 201 to rotate under the action of the intake air.

[0032] Working principle: When the device is taking in air, part of the high-speed entering gas will pass through the inner fixed ring 101, and the other part will pass through the upper air inlet 205 near the edge. After the gas enters the inner fixed ring 101, most of the gas will be input in a straight line, and another part will be guided by the inner diverter ring 102, and will be introduced into the lower air outlet 204 and input downward, which can avoid the influence of the thickness of the outer rotating body 201 and the inner fixed ring 101. The gas entering from the upper air inlet 205 is affected by the upper diverter ring 203 and the lower diverter ring 202 and can be directed to three different areas, thereby improving the diffusion speed and uniformity of the gas. The straight-line input gas will blow the windmill plate 207, providing power for the rotation of the turntable 206 and the outer rotating body 201. Under the action of the two magnetic rings 103, the friction between the turntable 206 and the inner fixed ring 101 can be reduced, so that the outer rotating body 201 can rotate faster. Under the rotation, combined with the rapid entry of gas, a gas vortex can be formed, which can further increase the diffusion speed of the gas.

[0033] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A multi-point layout intake ring cavity, comprising a fixing mechanism (1), characterized in that: The fixing mechanism (1) comprises an inner fixing ring (101) and two magnetic rings (103); an inner diverter ring (102) is fixedly provided on the inner side of the inner fixing ring (101) near the lower end; and a sliding groove (104) is provided on the upper side of the inner fixing ring (101); The fixing mechanism (1) is provided with a rotating mechanism (2) on the outer side thereof for being engaged and rotated. The rotating mechanism (2) comprises an outer rotating body (201). A plurality of upper air inlet holes (205) are provided at the edge of the upper end of the outer rotating body (201). An upper diverter ring (203) is fixedly provided on the upper part of the outer rotating body (201) near the upper air inlet hole (205). A lower diverter ring (202) is fixedly provided on the lower part of the outer rotating body (201) near the upper air inlet hole (205). A turntable (206) is fixedly provided on the inner side of the outer rotating body (201) near the chute (104). A plurality of windmill plates (207) are fixedly provided in a circular ring near the center of the turntable (206). A plurality of lower air outlet holes (204) are provided on the edge of the lower end of the outer rotating body (201).

2. The multi-point layout intake ring cavity according to claim 1, characterized in that: An air inlet groove is provided between the upper end of the inner diverter ring (102) and the inner fixed ring (101), and the air inlet groove is in communication with a plurality of lower air outlet holes (204).

3. The multi-point layout intake ring cavity according to claim 1, characterized in that: The portion of the outer rotating body (201) located inside the inner fixed ring (101) is located between two magnetic rings (103). The portion of the outer rotating body (201) located inside the inner fixed ring (101) is also magnetically arranged, and its upper and lower ends are magnetically attracted and repelled by adjacent magnetic rings (103).

4. The multi-point layout intake ring cavity according to claim 1, characterized in that: The inner dimensions of the outer rotating body (201) are consistent with the circumferential dimensions of the inner fixed ring (101), and the circumferential dimensions of the rotating disk (206) are consistent with the inner dimensions of the chute (104).

5. The multi-point layout intake ring cavity according to claim 1, characterized in that: The two magnetic rings (103) are fixedly connected to the inner fixed ring (101), and a clamping block is fixedly provided at the center of one end of the two magnetic rings (103) close to the turntable (206). The upper and lower ends of the turntable (206) are both provided with a clamping groove close to the clamping block, and the dimensions of the two clamping blocks are consistent with the dimensions of the clamping grooves.

6. The multi-point layout intake ring cavity according to claim 1, characterized in that: The outer rotating body (201) is provided with a first air groove above the upper diverter ring (203), a second air groove is provided between the upper diverter ring (203) and the lower diverter ring (202), and a third air groove is provided below the lower diverter ring (202).

7. The multi-point layout intake ring cavity according to claim 6, characterized in that: The first air tank, the second air tank and the third air tank are all connected to the upper air inlet (205).

8. The multi-point layout intake ring cavity according to claim 1, characterized in that: The upper diverter ring (203) is arranged obliquely upward, the lower diverter ring (202) is arranged obliquely downward, and the inner diverter ring (102) is arranged obliquely upward.

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