Protection device for producing ITO (indium tin oxide) target material

Abstract

The utility model relates to the technical field of target material production, in particular to a protection device for producing an ITO (Indium Tin Oxide) target material. Comprising a protection barrel extending in the horizontal direction, one end of the protection barrel is open, a channel is formed in the other end of the protection barrel, an interlayer is arranged at the end, provided with the channel, of the protection barrel, the channel penetrates through the two sides of the interlayer, and a rear air pipe communicated with the interlayer is arranged outside the protection barrel. An air blowing ring is arranged outside the end, provided with the opening, of the protective cylinder, the air blowing ring is connected with a front air pipe, an air blowing opening is formed in the side, away from the channel, of the air blowing ring and surrounds the outer side of the opening by a circle, and oxygen blown out of the air blowing opening obliquely faces the axis of the protective cylinder; a supporting cylinder communicating with the protective cylinder is arranged on the lower portion of the protective cylinder, and the bottom of the supporting cylinder is connected with a seat box. According to the utility model, the ITO powder sprayed from the flame spraying gun can be protected, so that oxygen loss of the ITO powder is basically avoided, and the ITO target material with qualified oxygen content can be sprayed.

Description

Technical Field

[0001] The utility model relates to the technical field of target material production, in particular to a protection device for producing ITO target materials. Background Art

[0002] ITO targets are used to produce transparent conductive films, which are used in high-definition displays and heterojunction solar cells. Currently, sintering is the primary method used to produce ITO targets, resulting in high-quality targets. However, the production of rotating ITO targets requires the production of multiple target tube segments, which are then bonded to a backing tube, resulting in high costs. Therefore, many manufacturers are currently developing methods to produce rotating ITO targets using spraying. However, at high temperatures and in low ambient oxygen levels (such as atmospheric air), the ITO powder loses oxygen, resulting in a low oxygen content and unqualified performance. Therefore, a protective device is needed to provide an oxygen atmosphere during spraying. Utility Model Content

[0003] The technical problem to be solved by the present invention is to provide a protective device for producing ITO target materials in view of the above-mentioned technical deficiencies.

[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is: a protective device for producing ITO target materials, comprising a protective tube extending in a horizontal direction, one end of the protective tube is open and the other end is provided with a channel, the end of the protective tube provided with the channel is provided with an interlayer, the channel runs through both sides of the interlayer, the outside of the protective tube is provided with a rear air pipe connected to the interlayer, the outside of the protective tube is provided with an open end and an air blowing ring is provided, the air blowing ring is connected to the front air pipe, the side of the air blowing ring away from the channel is provided with an air port, the air port surrounds the opening of the protective tube, the oxygen blown out of the air port is inclined toward the axis of the protective tube, the lower part of the protective tube is provided with a support tube connected to it, and the bottom of the support tube is connected to a seat box.

[0005] To further optimize the technical solution, the interior of the seat box is a cavity, and the support tube is connected to the cavity in the seat box.

[0006] To further optimize the technical solution, a drawer is provided in the seat box, and the drawer can be pulled out from one side of the seat box.

[0007] To further optimize this technical solution, an observation window is provided on one side of the protective tube.

[0008] To further optimize this technical solution, the material of the observation window is quartz glass.

[0009] To further optimize the technical solution, a ring cavity is provided in the blowing ring, the blowing port is located on a side of the ring cavity close to the opening on the protective tube, and the width of the blowing port is smaller than the width of the ring cavity.

[0010] To further optimize this technical solution, there are multiple rear tracheas and multiple front tracheas.

[0011] The utility model has the following advantages: an opening is provided at one end of the protective tube and a channel is provided at the other end; an interlayer for spraying oxygen is provided at the end of the protective tube provided with the channel; an air blowing ring for blowing out an oxygen air curtain is provided on the outside of the end of the protective tube provided with the opening, thereby protecting the ITO powder sprayed from the flame spraying gun and preventing it from losing oxygen substantially, so that an ITO target material with a qualified oxygen content can be sprayed. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic structural diagram of a protective device for producing ITO targets.

[0013] Figure 2 A cross-sectional view of a protective device for producing ITO targets.

[0014] Figure 3 This is a schematic diagram of a protective device for producing ITO targets when in use.

[0015] In the figure: 1. seat box; 2. support tube; 3. protection tube; 31. passage; 32. rear air pipe; 33. blowing ring; 331. ring cavity; 332. blowing port; 34. front air pipe; 35. observation window; 36. interlayer; 4. drawer; 5. flame spray gun; 6. back tube. DETAILED DESCRIPTION

[0016] To make the objectives, technical solutions, and advantages of the present invention more clearly understood, the present invention is further described below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are merely illustrative and are not intended to limit the scope of the present invention. Furthermore, descriptions of known structures and technologies are omitted in the following description to avoid unnecessary confusion regarding the concepts of the present invention.

[0017] Specific implementation method: Figure 1-3As shown, a protective device for producing ITO target materials includes a protective tube 3 extending in the horizontal direction. The protective tube 3 is cylindrical, one end of the protective tube 3 is open, and the other end is provided with a channel 31. The cross section of the channel 31 is circular and the diameter of the circle is smaller than the inner diameter of the protective tube 3. The gun head of the flame spray gun 5 can be inserted into the protective tube 3 through the channel 31. The end of the protective tube 3 provided with the channel 31 is provided with an interlayer 36. The interlayer 36 is cylindrical. The channel 31 runs through both sides of the interlayer 36. The outside of the protective tube 3 is provided with a rear air pipe 3 connected to the interlayer 36. 2. The protective tube 3 is provided with an open end and a blowing ring 33 is provided on the outside. The blowing ring 33 is connected to a front air pipe 34 connected thereto. A blowing port 332 is provided on the side of the blowing ring 33 away from the channel 31. The blowing port 332 surrounds the opening on the protective tube 3. The oxygen blown out of the blowing port 332 is tilted toward the axis of the protective tube 3. In the absence of obstruction, the air flow blown out of the blowing port 332 can form an air curtain similar to the side of a cone. The lower part of the protective tube 3 is provided with a supporting tube 2 connected thereto. The bottom of the supporting tube 2 is connected to the seat box 1. When in use, combined with Figure 3 As shown, the seat box 1 is fixed on the middle carriage of the rotary bed (similar to a lathe) of the spraying equipment, and the gun head of the flame spray gun 5 (using an oxyacetylene flame and an oxidizing flame, that is, an excess of oxygen) is inserted into the protective tube 3 through the channel 31. The opening of the protective tube 3 faces the back tube 6 and is close to the back tube 6. The front air pipe 34 and the rear air pipe 32 are respectively connected to the oxygen source through hoses. During spraying, the back tube 6 rotates, and the middle carriage moves back and forth along the length of the back tube 6. The flame spray gun 5 sprays molten or semi-molten ITO powder toward the back tube 6, and the interlayer 36 sprays pure oxygen into the channel 31, so that It is not easy for the atmosphere to enter the protective tube 3 through the channel 31, and part of the oxygen ejected from the channel 31 can enter the protective tube 3 to increase the oxygen content therein (in order to make the oxygen content as high as possible, the air flow in the rear air pipe 32 should be as large as possible). The air outlet 332 can eject an oxygen curtain toward the back tube 6 (the deposition area of ​​the ITO powder ejected from the flame spraying gun 5 on the back tube 6 is located within the protection zone formed by the air curtain), making it difficult for the atmosphere to come into contact with the ITO powder flying from the left end of the protective tube 3 toward the back tube 6, so the ITO powder basically does not lose oxygen.

[0018] Furthermore, the interior of the seat box 1 is a cavity, and the support tube 2 is connected to the cavity inside the seat box 1. During the flight, a portion of the ITO powder sprayed from the flame spray gun 5 will settle, and most of the settled powder will enter the seat box 1 through the support tube 2.

[0019] Furthermore, a drawer 4 is provided in the seat box 1 , and the drawer 4 can be pulled out from one side of the seat box 1 . After being used for a certain period of time, the drawer 4 can be pulled out to collect the powder therein for recycling.

[0020] Furthermore, an observation window 35 is provided on one side of the protection tube 3 for observing the state of the flame.

[0021] Furthermore, the observation window 35 is made of quartz glass, which is resistant to high temperatures and has a small thermal expansion coefficient, and is not easy to break.

[0022] Furthermore, a ring cavity 331 is provided in the blowing ring 33, and the blowing port 332 is located on the side of the ring cavity 331 close to the opening on the protective tube 3. The width of the blowing port 332 is smaller than the width of the ring cavity 331, so that the air flow ejected from all parts of the blowing port 332 is relatively uniform and the air flow speed is relatively high.

[0023] Furthermore, the number of the rear air pipes 32 and the front air pipes 34 are both plural and symmetrically distributed about the axis of the protective tube 3, so that the airflow blown out from various parts of the interlayer 36 is more uniform, and the airflow blown out from various parts of the blowing port 332 is also more uniform.

[0024] It should be understood that the above-described specific embodiments of the present invention are merely illustrative of or explanation of the principles of the present invention and do not constitute limitations of the present invention. Therefore, any modifications, equivalent substitutions, improvements, etc. made without departing from the spirit and scope of the present invention shall be included within the scope of protection of the present invention. In addition, the appended claims of the present invention are intended to cover all variations and modifications that fall within the scope and metes and bounds of the appended claims, or equivalents thereof.

Claims

1. A protective device for producing an ITO target material, comprising a protective cylinder (3) extending in a horizontal direction, characterized in that: One end of the protective tube (3) is open, and the other end is provided with a channel (31). The end of the protective tube (3) provided with the channel (31) is provided with an interlayer (36). The channel (31) runs through both sides of the interlayer (36). The outside of the protective tube (3) is provided with a rear air pipe (32) connected to the interlayer (36). The end of the protective tube (3) provided with the opening is provided with an air blowing ring (33) on the outside. The air blowing ring (33) is connected to the front air pipe (34). The air blowing ring (33) is provided with an air blowing port (332) on the side away from the channel (31). The air blowing port (332) surrounds the opening of the protective tube (3). Oxygen blown out of the air blowing port (332) is inclined toward the axis of the protective tube (3). The lower part of the protective tube (3) is provided with a support tube (2) connected thereto. The bottom of the support tube (2) is connected to the seat box (1).

2. A protective device for producing ITO targets according to claim 1, characterized in that: The interior of the seat box (1) is a cavity, and the support tube (2) is in communication with the cavity in the seat box (1).

3. A protective device for producing ITO targets according to claim 2, characterized in that: A drawer (4) is provided in the seat box (1), and the drawer (4) can be pulled out from one side of the seat box (1).

4. The protective device for producing ITO targets according to claim 1, wherein: An observation window (35) is provided on one side of the protection tube (3).

5. The protective device for producing ITO targets according to claim 4, characterized in that: The material of the observation window (35) is quartz glass.

6. The protective device for producing ITO targets according to claim 1, characterized in that: A ring cavity (331) is provided in the blowing ring (33), and the blowing port (332) is located on a side of the ring cavity (331) close to the upper opening of the protective tube (3), and the width of the blowing port (332) is smaller than the width of the ring cavity (331).

7. A protective device for producing ITO targets according to any one of claims 1 to 6, characterized in that: There are multiple rear air tubes (32) and multiple front air tubes (34).

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