Time-sharing coupling rotating shaft connection adjusting structure
The time-sharing coupled rotating shaft connection adjustment structure simplifies the adjustment control of the magnetron rotation radius, solves the problem of complex adjustment in traditional equipment, and improves the utilization rate of the target material.
Patent Information
- Application Number
- CN202422788339.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-15
- Publication Date
- 2025-09-16
- Estimated Expiration
- 2034-11-15
AI Technical Summary
In traditional magnetron sputtering equipment, the rotation radius adjustment of the magnetron requires the use of two power components, which leads to complex adjustment control and low target material utilization.
A time-sharing coupled rotating shaft connection adjustment structure is adopted, and the relative motion adjustment of the two shafts is achieved through the cooperation of the first drive unit and the second drive unit, which simplifies the control process. Only one power element is needed to achieve synchronous or relative rotation of the two shafts.
The simple and convenient adjustment of the two axes is realized, the utilization rate of the target material is improved, the control process is simplified, and the complexity of the equipment is reduced.
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Figure CN223342806U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of magnetron sputtering equipment, in particular to a time-sharing coupled rotating shaft connection adjustment structure. Background Art
[0002] During the sputtering of traditional planar target PVD, the magnetron usually switches back and forth between a fixed sputtering process position and a target washing process position, that is, it generally only moves between two positions. During the sputtering process, the target material is etched relatively deeply on the corresponding bound plasma rotation circle of this magnetron. After multiple continuous sputtering processes, deep grooves are eventually formed on the target material. The target washing movement on the same radius will also produce deep grooves. When the target material reaches the end of its service life, there is still a lot of target material on the target material that has not been effectively consumed, resulting in a relatively low target material utilization rate. In order to solve the problem of low target material utilization, some practices are to achieve multi-stage rotation radius adjustment of the magnetron through corresponding structural design. For example, the patent application with publication number "CN116288225A" discloses a device that can adjust the rotation radius of the magnetron. It adjusts the rotation radius of the magnetron by controlling the relative movement between two axes (a first axis and a second axis). However, it requires the use of two power components (a first power component and a second power component) to respectively control the rotation of the two axes. The adjustment control is relatively complicated. Therefore, there is an urgent need for a mechanism with simpler and more convenient adjustment control to achieve relative movement adjustment between the two axes. Utility Model Content
[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a time-sharing coupled rotating shaft connection adjustment structure, which can be used to adjust the relative motion of two shafts, and the adjustment is simple and convenient.
[0004] The time-sharing coupled rotating shaft connection adjustment structure according to the embodiment of the utility model includes: a base;
[0005] A first driving part, provided on the base;
[0006] a first rotating portion connected to the output end of the first driving portion and capable of rotating around its own central axis under the drive of the first driving portion, wherein the first rotating portion is provided with a first matching structure;
[0007] a second rotating portion, coaxially rotatably sleeved on the first rotating portion, the second rotating portion being provided with a second matching structure;
[0008] A coupling assembly comprising a coupling portion and a second driving portion, wherein the coupling portion is provided with a third matching structure, and the second driving portion is used to drive the coupling portion to move axially along the first rotating portion. The coupling portion has at least a first position and a second position during movement. When the coupling portion is in the first position, the first matching structure and the second matching structure both match with the third matching structure so that the first rotating portion, the second rotating portion, and the coupling portion can rotate synchronously. When the coupling portion is in the second position, the first matching structure is disengaged from the third matching structure so that the first rotating portion can rotate relative to the second rotating portion.
[0009] A limiting structure is used to limit the rotation of the second rotating part when the connecting part is located at the second position.
[0010] The time-sharing coupled rotating shaft connection adjustment structure according to the embodiment of the utility model has at least the following beneficial effects:
[0011] By adopting the above-mentioned structural arrangement, the first rotating part and the second rotating part can be respectively connected to the two shafts that need to be adjusted for relative motion, so that they can be used to adjust the relative motion of the two shafts. In this embodiment, the first driving part is used for rotation control, and the second driving part is used to control the connection and disconnection of the first rotating part and the second rotating part. There is no need to use two power elements to respectively control the rotation of the first rotating part and the second rotating part, that is, there is no need to use two power elements to respectively control the rotation of the two driven shafts, and the adjustment is simple and convenient.
[0012] According to some embodiments of the present invention, the first mating structure is configured as a first external spline, the second mating structure is configured as a second external spline, the connecting portion is coaxially sleeved on the second rotating portion, and the third mating structure is configured as an internal spline.
[0013] According to some embodiments of the present invention, the first rotating part includes a first rotating shaft and a first connecting part, the first rotating shaft is connected to the output end of the first driving part, the first connecting part is detachably mounted on the first rotating shaft, and the first external spline is arranged on the first connecting part.
[0014] According to some embodiments of the present invention, the connecting assembly also includes a mounting portion, which is fixed to the output end of the second driving portion and can move axially along the first rotating portion under the drive of the second driving portion. The connecting portion is rotatably connected to the mounting portion, and the rotation axis of the connecting portion is collinear with the central axis of the first rotating portion.
[0015] According to some embodiments of the present invention, there are at least two second driving parts, and the at least two second driving parts are evenly arranged around the central axis of the first rotating part. The second driving part has a driving shaft that can be extended and retracted along the axial direction of the first rotating part, and the driving shaft is connected to the mounting part.
[0016] According to some embodiments of the present invention, when the connecting portion is located at the second position, the third matching structure matches with the second matching structure.
[0017] According to some embodiments of the present invention, the limiting structure includes a limiting protrusion, the limiting protrusion is provided on the base, and the connecting part is provided with a plurality of recessed positions, and the plurality of recessed positions are evenly arranged around the circumference of the central axis of the first rotating part, wherein, when the connecting part rotates to a plurality of positions, the corresponding recessed positions are aligned with the limiting protrusion along the axial direction of the first rotating part, and when the connecting part is in the second position, the limiting protrusion is inserted into the corresponding recessed position.
[0018] According to some embodiments of the present invention, there are at least two limiting protrusions, which are evenly arranged around the circumference of the central axis of the first rotating part, and the limiting protrusions and the concave positions are distributed on the same circumference.
[0019] According to some embodiments of the present invention, the limiting protrusion is configured as a columnar structure, the recess is configured as a columnar hole, and one end of the limiting protrusion facing the recess is chamfered.
[0020] According to some embodiments of the present invention, the limiting protrusion is detachably provided on the base.
[0021] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:
[0023] Figure 1 This is a schematic diagram of the external structure of an embodiment of the utility model;
[0024] Figure 2 This is a schematic diagram of the state of the embodiment of the utility model when the connecting portion is at the first position;
[0025] Figure 3 This is a schematic diagram of the state of the embodiment of the utility model when the connecting portion is at the second position;
[0026] Figure 4 It is a structural schematic diagram of the second rotating part of an embodiment of the utility model;
[0027] Figure 5 It is a structural schematic diagram of a coupling assembly according to an embodiment of the present utility model.
[0028] Figure Number:
[0029] Base 100, limiting protrusion 110, mounting flange 120;
[0030] a first driving unit 200;
[0031] A first rotating portion 300 , a first external spline 301 , a first rotating shaft 310 , a first connecting portion 320 , and a first bearing assembly 330 ;
[0032] The second rotating part 400, the second external spline 401, the second rotating shaft 410, the second connecting part 420, and the second bearing assembly 430;
[0033] The coupling assembly 500 , the coupling portion 510 , the internal spline 511 , the recess 512 , the second driving portion 520 , the mounting portion 530 , and the third bearing assembly 540 . DETAILED DESCRIPTION
[0034] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.
[0035] In the description of the present invention, it should be understood that descriptions involving orientation, such as the orientation or positional relationship indicated by up, down, etc., are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0036] In the description of this utility model, "a plurality" means more than two. The use of "first" or "second" is solely for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features indicated, or implicitly indicating the order of the technical features indicated.
[0037] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.
[0038] Reference Figures 1 to 5As shown, a time-sharing coupled rotating shaft connection adjustment structure according to an embodiment of the present invention includes: a base 100, a first driving part 200, a first rotating part 300, a second rotating part 400, a coupling assembly 500, and a limiting structure.
[0039] The first driving unit 200 is disposed on the base 100 . In this embodiment, the first driving unit 200 includes a motor.
[0040] The first rotating part 300 is connected to the output end of the first driving part 200, that is, the first rotating part 300 is connected to the output shaft of the motor. The first rotating part 300 can rotate around its own central axis under the drive of the first driving part 200. The first rotating part 300 is provided with a first matching structure. In this embodiment, the central axis of the first rotating part 300 extends vertically.
[0041] The second rotating part 400 is coaxially distributed with the first rotating part 300, and the second rotating part 400 can be relatively rotatably sleeved on the first rotating part 300. The second rotating part 400 is provided with a second matching structure; it can be understood that the first matching structure and the second rotating part 400 are staggered along the axial direction of the first rotating part 300.
[0042] The coupling assembly 500 includes a coupling portion 510 and a second driving portion 520. The coupling portion 510 is provided with a third matching structure, wherein the third matching structure can match with the first matching structure. When the two match, the coupling portion 510 and the first rotating portion 300 can rotate synchronously around the central axis of the first rotating portion 300. The third matching structure can also match with the second matching structure. When the two match, the coupling portion 510 and the second rotating portion 400 can rotate synchronously around the central axis of the first rotating portion 300. The second driving portion 520 is used to drive the coupling portion 510 to move axially along the first rotating portion 300. The coupling portion 510 has at least a first position and a second position during its movement. When the coupling portion 510 is in the first position, the first The cooperating structure and the second cooperating structure both cooperate with the third cooperating structure so that the first rotating part 300, the second rotating part 400 and the connecting part 510 can rotate synchronously. At this time, the first driving part 200 can drive the first rotating part 300 and the second rotating part 400 to rotate synchronously; when the connecting part 510 is in the second position, the first cooperating structure is disengaged from the third cooperating structure so that the first rotating part 300 can rotate relative to the second rotating part 400. At this time, the first rotating part 300 is disconnected from the connecting part 510, that is, the first rotating part 300 is disconnected from the second rotating part 400, and the first driving part 200 can only drive the first rotating part 300 to rotate, but cannot drive the second rotating part 400 to rotate.
[0043] The limiting structure is used to limit the rotation of the second rotating portion 400 when the coupling portion 510 is in the second position. This limiting structure prevents the second rotating portion 400 from rotating when the first rotating portion 300 rotates. It is understood that when the coupling portion 510 is in the second position, the first rotating portion 300 rotates independently. If the second rotating portion 400 is not limited, vibrations generated during rotation of the first rotating portion 300 or friction between the second rotating portion 400 and the first rotating portion 300 could cause uncontrolled angular displacement of the second rotating portion 400, affecting adjustment accuracy.
[0044] The time-sharing coupled rotating shaft connection adjustment structure of the embodiment of the present invention can connect the first rotating part 300 and the second rotating part 400 to the two shafts that need to be adjusted for relative motion respectively. When it is necessary to make the two driven shafts rotate synchronously, the first driving part 200 can be stopped first, and then the second driving part 520 can drive the connecting part 510 to move to the first position, so that the first rotating part 300, the second rotating part 400 and the connecting part 510 are connected to each other, so that the first rotating part 300 and the second rotating part 400 can rotate synchronously, that is, the synchronous rotation of the two shafts is achieved; when it is necessary to make the two shafts rotate relative to each other to adjust the relative angular displacement between the two shafts When the rotation of the second rotating part 400 is stopped, the first driving part 200 can be stopped first, and then the second driving part 520 can be driven to drive the connecting part 510 to move to the second position, so that the connecting part 510 is disconnected from the first rotating part 300. At the same time, the rotation of the second rotating part 400 is limited by the limiting structure, so that the first rotating part 300 can rotate relative to the second rotating part 400, and the second rotating part 400 will not rotate with it. Then, the first driving part 200 is driven to drive the first rotating part 300 to rotate a certain angle. After the adjustment is completed, the second driving part 520 is again driven to drive the connecting part 510 to move to the first position, so that the first rotating part 300, the second rotating part 400 and the connecting part 510 are connected to each other. Through the above-mentioned structural arrangement, the time-sharing coupled rotating shaft connection adjustment structure of this embodiment can be used to adjust the relative motion of the two shafts. In this embodiment, the first driving part 200 is used for rotation control, and the second driving part 520 is used to control the connection and disconnection of the first rotating part 300 and the second rotating part 400. There is no need to use two power elements to respectively control the rotation of the first rotating part 300 and the second rotating part 400, that is, there is no need to use two power elements to respectively control the rotation of the two driven shafts, and the adjustment is simple and convenient.
[0045] It can be imagined that the time-sharing coupled rotating shaft connection adjustment structure of the embodiment of the utility model can be applied to the patent application "A device and method for adjusting the rotation radius of a PVD magnetron and the power of a planar target power supply" disclosed with publication number "CN116288225A", replacing the first power component and the second power component, so that the first rotating part 300 and the second rotating part 400 are respectively connected to the first shaft and the second shaft. When the magnetron needs to rotate at a fixed radius, the two shafts need to rotate synchronously. At this time, the first driving part 200 can be stopped first, and then the second driving part 520 can drive the connecting part 510 to move to the first position, so that the first rotating part 300, the second rotating part 400 and the connecting part 510 cooperate with each other, so that the first shaft and the second shaft can rotate synchronously. When the rotation radius of the magnetron needs to be adjusted, the first driving part 200 can be stopped first, and then the second driving part 520 can be driven to drive the connecting part 510 to move to the second position, so that the connecting part 510 is disconnected from the first rotating part 300. At the same time, the rotation of the second rotating part 400 is limited by the limiting structure, so that the first axis can rotate relative to the second axis, and the second axis does not rotate accordingly. Then, the first driving part 200 is driven to drive the first rotating part 300 to rotate a certain angle, so as to adjust the angular displacement of the first axis relative to the second axis, thereby adjusting the rotation radius of the magnetron. After the adjustment is completed, the second driving part 520 is again driven to drive the connecting part 510 to move to the first position, so as to reconnect the first rotating part 300, the second rotating part 400 and the connecting part 510.
[0046] Reference Figures 2 to 4 As shown, in some embodiments of the present invention, the first mating structure is configured as a first external spline 301, the second mating structure is configured as a second external spline 401, the coupling portion 510 is coaxially sleeved on the second rotating portion 400, and the third mating structure is configured as an internal spline 511. The spline mating form is used to achieve the mating of the coupling portion 510 with the first rotating portion 300 and the second rotating portion 400, which has a simple structure, convenient mating, and facilitates torque transmission. It is understood that the first external spline 301 and the second external spline 401 are splines with the same tooth shape and number of teeth, wherein the spline shape can be rectangular, involute, or special-shaped, preferably a rectangular spline, which can achieve high processing accuracy through grinding methods and has a wide range of dynamic connection applications under no-load conditions. A certain amount of lubrication can be performed between the spline mating.
[0047] Reference Figures 2 to 4As shown, in some embodiments of the present invention, the first rotating part 300 includes a first rotating shaft 310 and a first connecting part 320, the first rotating shaft 310 is connected to the output end of the first driving part 200, the first connecting part 320 is detachably sleeved on the first rotating shaft 310, and the first external spline 301 is provided on the first connecting part 320. In this embodiment, the second rotating part 400 is sleeved on the first rotating shaft 310, and the first connecting part 320 and the second rotating part 400 are staggered along the axial direction of the first rotating part 300; in this embodiment, by providing a detachable first connecting part 320 and providing a first external spline 301 on the first connecting part 320, it is possible to avoid directly processing the first external spline 301 on the first rotating shaft 310. When the first external spline 301 is damaged, there is no need to replace the entire first rotating part 300. It can be imagined that when the first driving part 200 adopts a motor, the first rotating shaft 310 can be connected to the output end of the motor through a coupling, which has a compact structure and low power loss. Of course, the connection form between the first rotating shaft 310 and the first driving part 200 is not limited to connection through a coupling.
[0048] In some specific embodiments, referring to Figures 2 to 4As shown, the second rotating part 400 includes a second rotating shaft 410 and a second connecting part 420. The second rotating shaft 410 is a hollow shaft and is sleeved on the first rotating shaft 310. The second connecting part 420 is also a hollow shaft-shaped part. The second connecting part 420 is coaxially fixedly connected to the second rotating shaft 410. The second matching structure is provided on the second connecting part 420. The second connecting part 420 and the first rotating shaft 310 are rotatably connected through the first bearing assembly 330. The first bearing assembly 330 is located at the inner wall of the second connecting part 420 and the first rotating shaft 310. 10, and a step structure for cooperating with the first bearing assembly 330 is provided between the outer walls of the second connecting portion 420 and the first rotating shaft 310, so as to realize the axial relative fixation of the first rotating shaft 310 and the second connecting portion 420. The step structure is a common means of positioning and installing bearings, and its specific structural form can also be diversified, so it is described in detail here; in addition, in order to ensure the stability of the connection between the first rotating shaft 310 and the second connecting portion 420, the first bearing assembly 330 can be provided with a plurality of bearings distributed along the axial direction of the first rotating shaft 310. Furthermore, a mounting flange 120 is provided on the base 100, and the mounting flange 120 is coaxially distributed with the second connecting part 420. The second connecting part 420 passes through the inner side of the mounting flange 120, and the second connecting part 420 is also rotatably connected to the mounting flange 120 through a second bearing assembly 430. The second bearing assembly 430 is located between the inner wall of the mounting flange 120 and the outer wall of the second connecting part 420, so that the second rotating part 400 can rotate more smoothly. In addition, a step structure is also provided between the second connecting part 420 and the mounting flange 120 to cooperate with the second bearing assembly 430 to achieve axial relative fixation of the second connecting part 420 and the mounting flange 120. Obviously, the second bearing assembly 430 can also be provided with multiple bearings along the axial direction of the second connecting part 420.
[0049] Reference Figure 2 and Figure 5As shown, in some embodiments of the present invention, the connecting assembly 500 also includes a mounting portion 530, which is fixed to the output end of the second driving portion 520 and can move axially along the first rotating portion 300 under the drive of the second driving portion 520. The connecting portion 510 rotates to connect the mounting portion 530, and the rotation axis of the connecting portion 510 is colinear with the central axis of the first rotating portion 300, that is, the connecting portion 510 can rotate around the central axis of the first rotating portion 300 relative to the mounting portion 530. In this way, when the connecting portion 510 rotates synchronously with the first rotating portion 300 and the second rotating portion 400, the second driving portion 520 does not need to rotate together, and the second driving portion 520 can be fixedly mounted on the base 100. In some specific embodiments, the mounting portion 530 has a cavity inside, the mounting portion 530 is sleeved on the connecting portion 510, and the mounting portion 530 and the connecting portion 510 are rotatably connected through the third bearing assembly 540. A step structure for cooperating with the third bearing assembly 540 is also provided between the mounting portion 530 and the connecting portion 510, so that the mounting portion 530 and the connecting portion 510 are relatively fixed along the axial direction of the first rotating portion 300. Obviously, the third bearing assembly 540 can also be provided with multiple bearings along the axial direction of the first rotating portion 300.
[0050] Reference Figure 1 and Figure 2 As shown, in some embodiments of the present invention, at least two second drive parts 520 are provided, and the at least two second drive parts 520 are evenly arranged around the central axis of the first rotating part 300. The second drive parts 520 have a drive shaft that can be extended and retracted along the axial direction of the first rotating part 300, and the drive shaft is connected to the mounting part 530. By providing at least two second drive parts 520, the generation of radial force can be reduced, allowing the mounting part 530 to move more smoothly along the axial direction of the first rotating part 300. It is conceivable that the second drive part 520 can be a pneumatic cylinder or an oil cylinder.
[0051] Reference Figure 2 and Figure 3 As shown, in some embodiments of the present invention, when the connecting portion 510 is in the second position, the third matching structure matches with the second matching structure, and during the process of the connecting portion 510 moving from the second position to the first position, the third matching structure remains matched with the second matching structure. The advantage of such a setting is that when it is necessary to move the connecting portion 510 from the second position to the first position, since the third matching structure has already matched with the second matching structure, it is only necessary to match the third matching structure with the first matching structure, which is more convenient.
[0052] Reference Figure 2 and Figure 3As shown, in some embodiments of the present invention, the limiting structure includes a limiting protrusion 110, the limiting protrusion 110 is provided on the base 100, and the connecting part 510 is provided with a plurality of recesses 512 at one end facing the limiting protrusion 110, and the plurality of recesses 512 are evenly arranged around the central axis of the first rotating part 300. When the connecting part 510 rotates to multiple positions, the corresponding recesses 512 are aligned with the limiting protrusion 110 along the axial direction of the first rotating part 300, and when the connecting part 510 is in the second position, the limiting protrusion 110 is inserted into the corresponding recess 512, and the limiting protrusion 110 cooperates with the recess 512 to achieve rotation locking of the connecting part 510 in the second position, thereby achieving rotation locking of the second rotating part 400 to prevent the second rotating part 400 from rotating. The structure is simple and practical; obviously, when the connecting part 510 moves to the first position, the limiting protrusion 110 and the recess 512 are disengaged. It can be understood that when the first mating structure is set to the first external spline 301, the second mating structure is set to the second external spline 401, and the third mating structure is set to the internal spline 511, the number and spacing of the recesses 512 are set according to the number of teeth of the spline and the adjustment angle between the teeth.
[0053] Reference Figure 1 and Figure 2 As shown, in some embodiments of the present invention, there are at least two limiting protrusions 110, and all the limiting protrusions 110 are evenly arranged around the circumference of the central axis of the first rotating part 300, and are distributed on the same circumference as the recess 512. At least two limiting protrusions 110 are provided, which can ensure the stability of the rotation locking of the connecting part 510, ensure the strength, and avoid damage to the limiting protrusions 110.
[0054] Reference Figure 1 and Figure 2 As shown, in some embodiments of the present invention, the limiting protrusion 110 is set as a columnar structure and extends along the axial direction of the first rotating part 300, and the recess 512 is set as a columnar hole. In this way, when the limiting protrusion 110 is inserted into the recess 512, the stability is high and the two are not easy to separate. In addition, the limiting protrusion 110 is provided with a chamfer at one end facing the recess 512. By setting the chamfer, the limiting protrusion 110 can be inserted into the recess 512 more smoothly.
[0055] Reference Figure 2 As shown, in some embodiments of the present invention, the limiting protrusion 110 is detachably provided on the base 100, so that when the limiting protrusion 110 is damaged, it can be easily replaced, which can also reduce maintenance costs. Specifically, the limiting protrusion 110 is set as a pin.
[0056] In the description of this specification, the reference terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification.
[0057] The embodiments of the present invention are described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made within the scope of knowledge possessed by ordinary technicians in the relevant technical field without departing from the purpose of the present invention.
Claims
1. A time-sharing coupled rotating shaft connection adjustment structure, characterized in that: include: base; A first driving part, provided on the base; a first rotating portion connected to the output end of the first driving portion and capable of rotating around its own central axis under the drive of the first driving portion, wherein the first rotating portion is provided with a first matching structure; a second rotating portion, coaxially rotatably sleeved on the first rotating portion, the second rotating portion being provided with a second matching structure; A coupling assembly comprising a coupling portion and a second driving portion, wherein the coupling portion is provided with a third matching structure, and the second driving portion is used to drive the coupling portion to move axially along the first rotating portion. The coupling portion has at least a first position and a second position during movement. When the coupling portion is in the first position, the first matching structure and the second matching structure both match with the third matching structure so that the first rotating portion, the second rotating portion, and the coupling portion can rotate synchronously. When the coupling portion is in the second position, the first matching structure is disengaged from the third matching structure so that the first rotating portion can rotate relative to the second rotating portion. A limiting structure is used to limit the rotation of the second rotating part when the connecting part is located at the second position.
2. The time-sharing coupled rotating shaft connection adjustment structure according to claim 1, characterized in that: The first matching structure is configured as a first external spline, the second matching structure is configured as a second external spline, the connecting portion is coaxially sleeved on the second rotating portion, and the third matching structure is configured as an internal spline.
3. The time-sharing coupled rotating shaft connection adjustment structure according to claim 2, characterized in that: The first rotating part includes a first rotating shaft and a first connecting part. The first rotating shaft is connected to the output end of the first driving part. The first connecting part is detachably sleeved on the first rotating shaft. The first external spline is provided on the first connecting part.
4. The time-sharing coupled rotating shaft connection adjustment structure according to claim 1, characterized in that: The connecting assembly also includes a mounting portion, which is fixed to the output end of the second driving portion and can move axially along the first rotating portion under the drive of the second driving portion. The connecting portion is rotatably connected to the mounting portion, and the rotation axis of the connecting portion is collinear with the central axis of the first rotating portion.
5. The time-sharing coupled rotating shaft connection adjustment structure according to claim 4, characterized in that: There are at least two second driving parts, and the at least two second driving parts are evenly arranged around the central axis of the first rotating part. The second driving part has a driving shaft that can be extended and retracted along the axial direction of the first rotating part, and the driving shaft is connected to the mounting part.
6. The time-sharing coupled rotating shaft connection adjustment structure according to claim 1, characterized in that: When the connecting portion is located at the second position, the third matching structure matches with the second matching structure.
7. The time-sharing coupled rotating shaft connection adjustment structure according to claim 6, characterized in that: The limiting structure includes a limiting protrusion, which is provided on the base, and the connecting part is provided with a plurality of recessed positions, and the plurality of recessed positions are evenly arranged around the circumference of the central axis of the first rotating part, wherein, when the connecting part rotates to a plurality of positions, the corresponding recessed positions are aligned with the limiting protrusion along the axial direction of the first rotating part, and when the connecting part is in the second position, the limiting protrusion is inserted into the corresponding recessed position.
8. The time-sharing coupled rotating shaft connection adjustment structure according to claim 7, characterized in that: There are at least two limiting protrusions, which are evenly arranged around the central axis of the first rotating part, and the limiting protrusions and the concave portions are distributed on the same circumference.
9. The time-sharing coupled rotating shaft connection adjustment structure according to claim 7, characterized in that: The limiting convex portion is configured as a columnar structure, the concave portion is configured as a columnar hole, and one end of the limiting convex portion facing the concave portion is chamfered.
10. The time-sharing coupled rotating shaft connection adjustment structure according to claim 7, characterized in that: The limiting protrusion is detachably arranged on the base.
Citation Information
Patent Citations
Device and method for adjusting PVD magnetron rotation radius and plane target power supply power
CN116288225A