Turnover type working table for direct-current sputtering power supply production

Abstract

The utility model discloses a turnover operating platform for direct current sputtering power supply production, which comprises a base, a mounting table is arranged above the base, two sides of the mounting table are fixedly connected with rotating frames, one side of the upper end of the base is fixedly connected with a supporting box, one side of the inner wall of the supporting box is fixedly provided with a driving device I, and the other side of the inner wall of the supporting box is fixedly provided with a driving device II. The output end of the first driving device is fixedly connected with one side of one rotating frame, and a guide ring is fixedly connected to the middle of the lower end of the mounting table. According to the utility model, through the structural design of the first driving device and the second driving device, the first driving device is started to turn over the target substrate fixed on the fixed box, the second driving device is started to rotate the gear disc, so that the target substrate fixed on the fixed box rotates, and when the first driving device and the second driving device are started at the same time, the target substrate is driven to rotate. And the target substrate fixed on the fixing box can be adjusted to any angle, so that the convenience of the working table and the coating quality are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of a flip-type operating table for producing a DC sputtering power supply, in particular to a flip-type operating table for producing a DC sputtering power supply. Background Art

[0002] The flip workbench for DC sputtering power supply production is a key auxiliary equipment in the sputtering coating process. The flip workbench can realize the flipping of the target substrate during the sputtering coating process, thereby improving the coating efficiency.

[0003] At present, most flip-type work tables used in the production of DC sputtering power supplies can only flip the target substrate when in use. Some areas on the surface of the target substrate cannot be fully processed, resulting in dead corners on the target substrate. Therefore, the flip-type work table has certain limitations when in use, affecting the coating quality. Utility Model Content

[0004] The purpose of the present utility model is to provide a flip-type workbench for producing a DC sputtering power supply, so as to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a flip-type workbench for DC sputtering power supply production, comprising a base, a mounting platform is provided above the base, and both sides of the mounting platform are fixedly connected to a rotating frame, and one side of the upper end of the base is fixedly connected to a support box, and one side of the inner wall of the support box is fixedly installed with a driving device 1, and the output end of the driving device 1 is fixedly connected to one side of one of the rotating frames, and the middle part of the lower end of the mounting platform is fixedly connected to a guide ring, and the inner wall of the guide ring is rotatably connected to a gear plate, the upper end of the gear plate is fixedly connected to a connecting shaft, and one end of the connecting shaft is fixedly connected to a rotating platform, and one side of the lower end of the mounting platform is fixedly installed with a driving device 2, and the output end of the driving device 2 is transmission-connected to a driving gear, and the outer surface of the driving gear is meshed with the outer surface of the gear plate.

[0006] As a further preferred embodiment of the present technical solution, a sliding groove is provided at the upper end of the mounting platform, and a plurality of rollers are fixedly mounted at the lower end of the rotating platform, and the outer surfaces of the plurality of rollers are rollingly connected to the inner wall of the sliding groove.

[0007] As a further preferred embodiment of the present technical solution, one side of each of the two rotating frames is fixedly connected to a plurality of reinforcing ribs, and one side of each of the plurality of reinforcing ribs is fixedly connected to one side of the mounting platform.

[0008] As a further preferred embodiment of the present technical solution, the upper end of the rotating table is fixedly connected to a fixed box, the inner top of the fixed box is rotatably connected to a rotating disk, the four corners of the rotating disk are rotatably connected to L-shaped pull rods, one end of the four L-shaped pull rods is rotatably connected to a mobile box, and four guide grooves are opened through the upper end of the fixed box, and the inner walls of the four guide grooves slide with one side of the lower end of the four mobile boxes.

[0009] As a further preferred embodiment of the present technical solution, the lower end of the rotating disk is fixedly connected to bevel gear 1, the outer surface of the bevel gear 1 is meshed with bevel gear 2, one side of the bevel gear 2 is fixedly connected to a rotating shaft, one end of the rotating shaft is fixedly connected to a hexagonal connecting rod, the outer surface of the hexagonal connecting rod is slidably connected to a hexagonal limiting ring, one side of the fixed box is fixedly connected to a fixing ring, and one side of the hexagonal limiting ring is slidably engaged with the inner wall of the fixing ring.

[0010] As a further preferred embodiment of the present technical solution, the inner walls of the four mobile boxes are slidably connected to a clamping frame, one side of the four clamping frames is fixedly connected to a return spring, and one end of the four return springs is respectively movably and fixedly connected to the inner walls of the four mobile boxes.

[0011] The utility model provides a flip-type workbench for DC sputtering power supply production, which has the following beneficial effects:

[0012] (1) The utility model adopts the structural design of the driving device 1 and the driving device 2. When the driving device 1 is turned on, the target substrate fixed on the fixed box is flipped over. When the driving device 2 is turned on, the gear plate is rotated, thereby rotating the target substrate fixed on the fixed box. When the driving device 1 and the driving device 2 are turned on at the same time, the target substrate fixed on the fixed box can be adjusted to any angle, thereby improving the convenience of the workbench and the coating quality.

[0013] (2) The utility model pulls the hexagonal limiting ring to slide it out of the fixed ring, thereby releasing the restriction of the hexagonal connecting rod, and then rotates the hexagonal connecting rod to rotate the rotating disk in the fixed box. The four L-shaped pull rods on the rotating disk rotate at the same time, so that the four moving boxes are close to each other, thereby fixing the target substrate on the fixed box. This structure is simple, easy to operate, and improves the fixing efficiency of the target substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0015] Figure 2 This is a schematic diagram of the connection structure between the gear plate and the rotating platform in the present invention;

[0016] Figure 3This is a schematic diagram of the internal structure of the fixed box in the utility model;

[0017] Figure 4 This is a schematic diagram of the exploded structure of the movable box and the fixed ring in the utility model;

[0018] In the figure: 1. Base; 2. Support box; 3. Drive unit 1; 4. Rotating frame; 5. Mounting table; 6. Drive unit 2; 7. Guide ring; 8. Rotating table; 9. Gear plate; 10. Drive gear; 11. Connecting shaft; 12. Sliding groove; 13. Roller; 14. Reinforcing rib; 15. Fixed box; 16. Guide groove; 17. Rotating plate; 18. L-shaped pull rod; 19. Bevel gear 1; 20. Bevel gear 2; 21. Rotating shaft; 22. Fixed ring; 23. Hexagonal connecting rod; 24. Hexagonal limiting ring; 25. Moving box; 26. Clamping frame; 27. Return spring. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present invention.

[0020] The utility model provides a technical solution: Figure 1 - Figure 4 As shown, in this embodiment, a flip-type workbench for producing a DC sputtering power supply includes a base 1, a mounting table 5 is provided above the base 1, and both sides of the mounting table 5 are fixedly connected to a rotating frame 4, a support box 2 is fixedly connected to one side of the upper end of the base 1, a driving device 3 is fixedly installed on one side of the inner wall of the supporting box 2, and the output end of the driving device 3 is fixedly connected to one side of one of the rotating frames 4, a guide ring 7 is fixedly connected to the middle part of the lower end of the mounting table 5, and a gear plate 9 is rotatably connected to the inner wall of the guide ring 7, and the upper end of the gear plate 9 is fixedly connected to a connecting shaft 11, and one end of the connecting shaft 11 is fixedly connected to a rotating table 8, and the mounting table 5 is fixedly connected to the upper end of the gear plate 9. A driving device 26 is fixedly installed on one side of the lower end, and the output end of the driving device 26 is transmission-connected to the driving gear 10. The outer surface of the driving gear 10 is engaged with the outer surface of the gear plate 9. Through the structural design of the driving device 13 and the driving device 26, the driving device 13 is turned on to flip the target substrate fixed on the fixed box 15, and the driving device 26 is turned on to rotate the gear plate 9, thereby rotating the fixed target substrate on the fixed box 15. When the driving device 13 and the driving device 26 are turned on at the same time, the target substrate fixed on the fixed box 15 can be adjusted to any angle, thereby improving the convenience of the workbench and the coating quality.

[0021] like Figure 1 and Figure 2As shown, a sliding groove 12 is provided at the upper end of the mounting platform 5, and a plurality of rollers 13 are fixedly mounted at the lower end of the rotating platform 8. The outer surfaces of the plurality of rollers 13 are all in rolling connection with the inner wall of the sliding groove 12. The structural design of the rollers 13 and the sliding groove 12 prevents the rotating platform 8 from being deformed due to the lack of a supporting structure at the edge of the rotating platform 8 due to long-term use.

[0022] like Figure 1 As shown, one side of the two rotating frames 4 is fixedly connected with multiple reinforcing ribs 14, and one side of the multiple reinforcing ribs 14 is fixedly connected to one side of the mounting platform 5. The structural design of the reinforcing ribs 14 improves the connection strength between the rotating frames 4 and the mounting platform 5.

[0023] like Figure 1 - Figure 3 As shown, the upper end of the rotating table 8 is fixedly connected to a fixed box 15, and the internal top of the fixed box 15 is rotatably connected to a rotating disk 17. The four corners of the rotating disk 17 are rotatably connected to L-shaped pull rods 18, and one end of the four L-shaped pull rods 18 is rotatably connected to a movable box 25. Four guide grooves 16 are opened through the upper end of the fixed box 15, and the inner walls of the four guide grooves 16 slide with one side of the lower end of the four movable boxes 25. By rotating the hexagonal connecting rod 23, the rotating disk 17 is rotated in the fixed box 15, and the four L-shaped pull rods 18 on the rotating disk 17 rotate at the same time, so that the four movable boxes 25 are close to each other, thereby fixing the target substrate on the fixed box 15, thereby improving the fixing efficiency of the target substrate.

[0024] like Figure 3 and Figure 4 As shown, the lower end of the rotating disk 17 is fixedly connected to the bevel gear 19, the outer surface of the bevel gear 19 is meshed with the bevel gear 20, one side of the bevel gear 20 is fixedly connected to the rotating shaft 21, one end of the rotating shaft 21 is fixedly connected to the hexagonal connecting rod 23, the outer surface of the hexagonal connecting rod 23 is slidably connected to the hexagonal limiting ring 24, one side of the fixed box 15 is fixedly connected to the fixed ring 22, one side of the hexagonal limiting ring 24 is slidably engaged with the inner wall of the fixed ring 22, by pushing the hexagonal limiting ring 24, one side of the hexagonal limiting ring 24 is slid into the fixed ring 22, the hexagonal connecting rod 23 is connected to the fixed ring 22 together, to prevent the rotating shaft 21 from rotating, resulting in unstable fixation of the target substrate.

[0025] like Figure 4 As shown, the inner walls of the four mobile boxes 25 are slidably connected to the clamping frames 26, and one side of the four clamping frames 26 is fixedly connected to the return springs 27. One end of the four return springs 27 is movably and fixedly connected to the inner walls of the four mobile boxes 25 respectively. The structural design of the return springs 27 prevents the clamping force of the mobile boxes 25 from being too large, which may cause damage to the target substrate.

[0026] The utility model provides a flip-type workbench for DC sputtering power supply production, and the specific working principle is as follows:

[0027] When using a DC sputtering power supply for production, first place the target substrate in the middle position of the fixed box 15, then pull the hexagonal limit ring 24, slide the hexagonal limit ring 24 out of the fixed ring 22, release the restriction of the hexagonal connecting rod 23, and then rotate the hexagonal connecting rod 23 to make the rotating disk 17 rotate in the fixed box 15. The four L-shaped pull rods 18 on the rotating disk 17 rotate at the same time, so that the four movable boxes 25 are close to each other, thereby fixing the target substrate on the fixed box 15, and then sliding the hexagonal limit ring 24 into the fixed ring 22, and then using a DC sputtering power supply to coat the target substrate. At the same time, turn on the drive device 1 3 and the drive device 2 6 at the same time, and the target substrate fixed on the fixed box 15 can be adjusted to the processing angle. Repeat the adjustment of the adjustment angle of the target substrate to complete the production.

[0028] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A flip-type workbench for producing a DC sputtering power supply, comprising a base (1), characterized in that: A mounting platform (5) is provided above the base (1), and both sides of the mounting platform (5) are fixedly connected to a rotating frame (4), and one side of the upper end of the base (1) is fixedly connected to a support box (2), and one side of the inner wall of the support box (2) is fixedly installed with a driving device (3), and the output end of the driving device (3) is fixedly connected to one side of one of the rotating frames (4). A guide ring (7) is fixedly connected to the middle part of the lower end of the mounting platform (5), and the inner wall of the guide ring (7) is rotatably connected to a gear plate (9), and the upper end of the gear plate (9) is fixedly connected to a connecting shaft (11), and one end of the connecting shaft (11) is fixedly connected to a rotating platform (8). A driving device (6) is fixedly installed on one side of the lower end of the mounting platform (5), and the output end of the driving device (6) is transmission-connected to a driving gear (10), and the outer surface of the driving gear (10) is meshed with the outer surface of the gear plate (9).

2. The flip-type workbench for DC sputtering power supply production according to claim 1, characterized in that: A sliding groove (12) is provided at the upper end of the mounting platform (5), and a plurality of rollers (13) are fixedly mounted at the lower end of the rotating platform (8), wherein the outer surfaces of the plurality of rollers (13) are all in rolling connection with the inner wall of the sliding groove (12).

3. The flip-type workbench for DC sputtering power supply production according to claim 2, characterized in that: One side of each of the two rotating frames (4) is fixedly connected to a plurality of reinforcing ribs (14), and one side of each of the plurality of reinforcing ribs (14) is fixedly connected to one side of the mounting platform (5).

4. The flip-type workbench for DC sputtering power supply production according to claim 1, characterized in that: The upper end of the rotating table (8) is fixedly connected to a fixed box (15), the inner top of the fixed box (15) is rotatably connected to a rotating disk (17), the four corners of the rotating disk (17) are rotatably connected to L-shaped pull rods (18), one end of each of the four L-shaped pull rods (18) is rotatably connected to a moving box (25), and four guide grooves (16) are opened through the upper end of the fixed box (15), and the inner walls of the four guide grooves (16) slide with one side of the lower end of the four moving boxes (25).

5. The flip-type workbench for DC sputtering power supply production according to claim 4, characterized in that: The lower end of the rotating disk (17) is fixedly connected to a bevel gear 1 (19), the outer surface of the bevel gear 1 (19) is meshed with a bevel gear 2 (20), one side of the bevel gear 2 (20) is fixedly connected to a rotating shaft (21), one end of the rotating shaft (21) is fixedly connected to a hexagonal connecting rod (23), the outer surface of the hexagonal connecting rod (23) is slidably connected to a hexagonal limiting ring (24), one side of the fixed box (15) is fixedly connected to a fixed ring (22), and one side of the hexagonal limiting ring (24) is slidably engaged with the inner wall of the fixed ring (22).

6. The flip-type workbench for DC sputtering power supply production according to claim 4, characterized in that: The inner walls of the four movable boxes (25) are slidably connected to a clamping frame (26), one side of the four clamping frames (26) is fixedly connected to a return spring (27), and one end of the four return springs (27) is movably and fixedly connected to the inner walls of the four movable boxes (25).

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