Dust-free environmental pollution monitoring device

By designing a clean room air monitoring device with a rotating disc and air pump pressurized dissolution, the problem of clean room air detection is solved, and efficient and accurate air pollution monitoring is achieved. It is suitable for semiconductors, biomedicine, chemicals, food and other fields.

CN223346542UActive Publication Date: 2025-09-16SHANGHAI YIDING ELECTRONIC SYST INTEGRATION CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202422544877.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-22
Publication Date
2025-09-16
Estimated Expiration
2034-10-22

AI Technical Summary

Technical Problem

Existing clean room air testing methods have problems such as difficulty in collecting air samples, susceptibility to contamination, distorted results, untimely analysis, and limited types of substances being tested.

Method used

A dust-free environmental pollution monitoring device was designed, including a rotating disc, a detection instrument, a water sampling tube, an air sampling line, an air pump, and a dissolution bottle. The air pump applies pressure to dissolve the gas in ultrapure water in the nanopores, and the sample is directly sent to the detection instrument for analysis, solving the problems of difficulty in air sampling and timeliness of results.

Benefits of technology

It achieves efficient and accurate monitoring of clean room air pollution, ensures that samples are not easily contaminated, and the results are timely and accurate. It is suitable for clean room environment testing in the fields of semiconductors, biomedicine, chemistry and food.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN223346542U_ABST
    Figure CN223346542U_ABST
Patent Text Reader

Abstract

The utility model relates to the technical field of monitoring devices, and particularly discloses a dust-free environmental pollution monitoring device which comprises a rotating disc, a detection instrument is arranged on one side of the rotating disc, a sampling water test tube is arranged around the rotating disc, and an air sampling pipeline is arranged above the rotating disc; the air sampling pipeline comprises a control valve located between the air sampling pipeline and the air sampling pipeline, one side of the air sampling pipeline is connected with an air pump, one side of the air pump is provided with a pump air outlet, the other side of the air pump is provided with a pump air inlet, one side of the pump air outlet is connected with an air inlet valve, one side of the air inlet valve is connected with an air inlet pipe, and a dissolving bottle is arranged below the air inlet pipe. A sampling water valve located on the sampling water pipeline is arranged below the dissolving bottle, and the sampling water inlet is located above the detection instrument. The monitoring device solves the problem of difficulty in sampling air in the environment of the dust-free room, sampling and analysis are facilitated, a sample is not prone to being polluted, and the accuracy of a sample analysis result and the high efficiency of detection are ensured.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The utility model relates to the technical field of monitoring devices, in particular to a dust-free environmental pollution monitoring device. Background Art

[0002] The air quality in a clean room environment must meet ionic cleanliness requirements. The main sources of clean room air pollution are: the external environment entering through the clean room fresh air inlet, and the chemicals and special gases used in production within the clean room. These pollutants can cause product yields to decline and even lead to scrap. If pollutants cannot be monitored in a timely manner, long-term contamination will cause devastating product scrapping and a permanent, irreversible clean room environment during large-scale mass production.

[0003] At present, the existing detection method of directly taking clean room air samples and then sending them to the laboratory for analysis and testing has the following technical problems: 1. It is difficult to take air samples; 2. The sampling bottles used for taking samples are easily contaminated; 3. Timely analysis and testing cannot be carried out after sampling; 4. The waiting time for sampling is too long. All of the above factors will cause distortion and loss of timeliness of the results. In addition, the detection method that uses chemical agents to react with air pollutants also has the problem of limited types of substances to be tested. Utility Model Content

[0004] (1) Technical issues to be resolved

[0005] In response to the above problems, the present invention provides a dust-free environmental pollution monitoring device, in particular, an online monitoring device for high-quality clean room environmental pollution, which aims to solve the problems existing in the current clean room environment, such as the difficulty of air sampling, susceptibility to contamination, easy distortion of results, expensive air analysis and testing equipment, and limited types of substances to be tested.

[0006] (2) Technical solution

[0007] In order to solve the above technical problems, the utility model provides a dust-free environmental pollution monitoring device, comprising a rotating disc, a detection instrument is provided on one side of the rotating disc, a sampling water test tube is provided around the rotating disc, and an air sampling pipeline is provided above the rotating disc;

[0008] The air sampling pipeline includes a control valve located therebetween, one side of the air sampling pipeline is connected to the air pump, one side of the air pump is provided with a pump outlet, the other side of the air pump is provided with a pump inlet, one side of the pump outlet is connected to the air inlet valve, one side of the air inlet valve is connected to the air inlet pipe, a dissolution bottle is provided below the air inlet pipe, a sampling water valve located on the sampling water pipeline is provided below the dissolution bottle, a sampling water inlet is provided below the sampling water pipeline, and the sampling water inlet is located above the detection instrument.

[0009] Preferably, a plurality of the water sampling test tubes are provided, and the plurality of water sampling test tubes are arranged in a circle relative to the rotating disk.

[0010] Preferably, the air inlet valve is located between the air pump and the dissolution bottle, and a plurality of the air inlet valves are provided.

[0011] Preferably, the horizontal pipeline of the water sampling pipeline is parallel to the horizontal pipeline of the air sampling pipeline.

[0012] Preferably, the detection instrument is a polygonal structure, and the sampling water test tube is located above the detection instrument.

[0013] Preferably, the dissolution bottle is a columnar body, and a plurality of the dissolution bottles are provided.

[0014] Preferably, the air pumps are provided in plurality, and the plurality of air pumps are arranged side by side relative to the dissolving bottle.

[0015] Preferably, the control valve is located between the air pump and the air sampling pipeline, and a plurality of the control valves are provided.

[0016] Preferably, a plurality of the sampling water valves are provided, and the sampling water valves are located between the dissolution bottle and the sampling water pipeline.

[0017] Beneficial effects

[0018] 1. The utility model provides a dust-free environmental pollution monitoring device, which is equipped with a detection instrument on one side of a sampling water test tube rotating disk, and the sampling water test tube is placed around the sampling water test tube rotating disk, and an air sampling pipeline is arranged above the sampling water test tube rotating disk, and the sampling pipeline is arranged above the monitoring device. The monitoring device for clean room environmental pollution detection has a simple overall structure and is easy for staff to install and operate.

[0019] 2. The utility model provides a dust-free environmental pollution monitoring device. During the air sampling process, the monitoring device passes through the designed air sampling pipeline, and the gas enters through the air sampling control valve between the air sampling pipelines and flows into the air pump connected to one side of the air sampling pipeline. The air pump applies pressure to the gas, and the gas introduced flows through the pump outlet on one side thereof to the ultrapure water and air dissolving bottle inlet valve on one side. The gas enters the ultrapure water and air dissolving bottle through the ultrapure water and air inlet pipe and dissolves in the ultrapure water and air dissolving bottle, and then is sampled through the sampling water valve on the common pipeline of the sampling water. The design of the device solves the difficulty problem of taking air samples, facilitates air sampling, and the samples are not easily contaminated.

[0020] 3. The utility model provides a dust-free environmental pollution monitoring device, which is different from the traditional monitoring method that has the problem of being unable to conduct timely analysis and inspection after sampling, resulting in too long waiting time for samples, causing distorted results and loss of timeliness. The device is equipped with a sampling water test tube and a detection instrument under the sampling water pipeline, and the collected samples are sent to the detection instrument in time for test and analysis of the results, which effectively solves the timeliness of sample detection and ensures the accuracy of sample analysis results and the efficiency of detection.

[0021] 4. The present invention provides a dust-free environmental pollution monitoring device. This device employs nanopores distributed along the inner wall of an air sampling line. The sampled air is pressurized by an air pump and then pumped through the nanopores into water for accelerated dissolution, improving the efficiency of extracting air pollutants. Furthermore, the designed monitoring device can be applied to cleanroom pollution monitoring in semiconductor, biomedicine, chemical, and food environments, addressing the limited types of substances that can be tested when using chemical agents to react with air pollutants. The device can monitor environmental parameters within the cleanroom in real time, ensuring constant awareness of the environmental status. This allows staff to take timely corrective measures based on test results to maintain a clean and safe cleanroom environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the overall structure of a dust-free environmental pollution monitoring device of the present invention;

[0023] Figure 2 This is a first perspective view of a dust-free environmental pollution monitoring device according to the present invention;

[0024] Figure 3 This is a second perspective view of a dust-free environmental pollution monitoring device according to the present invention;

[0025] Figure 4 This is a third perspective view of a dust-free environmental pollution monitoring device according to the present invention;

[0026] Figure 5This is a fourth perspective view of a dust-free environmental pollution monitoring device according to the present invention;

[0027] Figure 6 This is a top view of a dust-free environmental pollution monitoring device according to the present invention;

[0028] Figure 7 This is a front view of a dust-free environmental pollution monitoring device according to the present invention.

[0029] The names of the components corresponding to the various reference numerals in the figure are: 1. Air sampling pipeline; 2. Control valve; 3. Air inlet pipe; 4. Dissolution bottle; 5. Air inlet valve; 6. Air pump; 7. Sampling water valve; 8. Pump air outlet; 9. Pump air inlet; 10. Sampling water pipeline; 11. Sampling water inlet; 12. Sampling water test tube; 13. Rotating disk; 14. Detection instrument. DETAILED DESCRIPTION

[0030] The present application is described in detail below with reference to the accompanying drawings and specific embodiments.

[0031] The following describes the embodiments of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the features in the following embodiments and embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative work are within the scope of protection of this application.

[0032] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on this application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement an apparatus and / or practice a method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this apparatus and / or practice this method.

[0033] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The illustrations only show components related to the present application and are not drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component can be changed at will, and the component layout type may also be more complicated.

[0034] Additionally, in the following description, specific details are provided to provide a thorough understanding of the examples, however, one skilled in the art will appreciate that the examples can be practiced without these specific details.

[0035] The following describes the technical solutions provided by various embodiments of the present application in conjunction with the accompanying drawings.

[0036] See Figures 1 to 7 The present invention provides a dust-free environmental pollution monitoring device. In order to make the practical purpose, technical solution and advantages of the present invention clearer, the specific operation process of the present invention is introduced in detail below in combination with the accompanying drawings and the working process of the device.

[0037] The utility model provides a dust-free environmental pollution monitoring device, comprising a rotating disc 13, a detection instrument 14 is provided on one side of the rotating disc 13, a sampling water test tube 12 is provided around the rotating disc 13, and an air sampling pipeline 1 is provided above the rotating disc 13;

[0038] The air sampling pipeline 1 includes a control valve 2 located therebetween, one side of the air sampling pipeline 1 is connected to the air pump 6, one side of the air pump 6 is provided with a pump air outlet 8, the other side of the air pump 6 is provided with a pump air inlet 9, one side of the pump air outlet 8 is connected to the air intake valve 5, one side of the air intake valve 5 is connected to the air intake pipe 3, a dissolution bottle 4 is provided below the air intake pipe 3, a sampling water valve 7 located on the sampling water pipeline 10 is provided below the dissolution bottle 4, a sampling water inlet 11 is provided below the sampling water pipeline 10, and the sampling water inlet 11 is located above the detection instrument 14.

[0039] See Figures 1 to 7 A plurality of water sampling test tubes 12 are provided, and the plurality of water sampling test tubes 12 are arranged in a circle relative to the rotating disk 13 .

[0040] See Figure 1The air intake valve 5 is located between the air pump 6 and the dissolution bottle 4, and there are multiple air intake valves 5. The horizontal pipeline of the sampling water pipeline 10 is parallel to the horizontal pipeline of the air sampling pipeline 1. The detection instrument 14 is a polygonal structure. The sampling water test tube 12 is located above the detection instrument 14. The dissolution bottle 4 is a columnar body. There are multiple dissolution bottles 4. There are multiple air pumps 6. Multiple air pumps 6 are arranged side by side relative to the dissolution bottle 4. The control valve 2 is located between the air pump 6 and the air sampling pipeline 1. There are multiple control valves 2. There are multiple sampling water valves 7. The sampling water valve 7 is located between the dissolution bottle 4 and the sampling water pipeline 10.

[0041] The working principle and specific workflow of a dust-free environment pollution monitoring device are as follows: according to the structural design of the device, installation is carried out to ensure the environmental standards of the clean room, including the limit values ​​of particulate matter, gas concentration, temperature and humidity, etc.; the monitoring device equipment and sensors are installed in a specific location and their sensitivity and accuracy are calibrated;

[0042] During the air sampling process, the gas enters through the air sampling control valve 2 between the air sampling pipeline 1 and flows into the air pump 6 connected to one side of the air sampling pipeline 1. The gas enters through the pump outlet 8 on one side and flows through the ultrapure water and air dissolution bottle inlet valve 5 on one side. The gas enters the ultrapure water and air dissolution bottle 4 through the ultrapure water and air inlet pipe 3. The gas passes through the ultrapure water to dissolve pollutants: organic matter, acid and base ions, anions and cations, etc. in the ultrapure water and air dissolution bottle 4. In order to efficiently extract air pollutants, the inner wall of the air sampling pipeline 1 is covered with nanopores. The sampled air is pressurized by the air pump 6 and pumped into the water through the nanopore to accelerate dissolution. The dissolved ultrapure water is then injected into the sampling tube 12 and sent to the analyzer for testing. The test results are displayed on the display of the detection instrument 14. The monitoring equipment continues to work to obtain continuous environmental data. The system automatically analyzes the collected data and compares it with the standard value. If an abnormality is found (such as excessive particle concentration or excessive gas), the system will automatically record the event and trigger an alarm. After receiving the alarm, the operator will promptly check the clean room, find the source of contamination and take corresponding measures.

[0043] The same or similar parts between the various embodiments in this specification can be referred to each other, and each embodiment focuses on the differences from other embodiments.

[0044] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present application should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A dust-free environmental pollution monitoring device, characterized by: It comprises a rotating disc (13), a detection instrument (14) is provided on one side of the rotating disc (13), a sampling water test tube (12) is provided around the rotating disc (13), and an air sampling pipeline (1) is provided above the rotating disc (13); The air sampling pipeline (1) includes a control valve (2) located therebetween, one side of the air sampling pipeline (1) is connected to an air pump (6), one side of the air pump (6) is provided with a pump air outlet (8), the other side of the air pump (6) is provided with a pump air inlet (9), one side of the pump air outlet (8) is connected to an air inlet valve (5), one side of the air inlet valve (5) is connected to an air inlet pipe (3), a dissolution bottle (4) is provided below the air inlet pipe (3), a sampling water valve (7) located on a sampling water pipeline (10) is provided below the dissolution bottle (4), a sampling water inlet (11) is provided below the sampling water pipeline (10), and the sampling water inlet (11) is located above the detection instrument (14).

2. The dust-free environmental pollution monitoring device according to claim 1, characterized in that: A plurality of the water sampling test tubes (12) are provided, and the plurality of water sampling test tubes (12) are arranged in a circumference relative to the rotating disc (13).

3. The dust-free environmental pollution monitoring device according to claim 1, characterized in that: The air inlet valve (5) is located between the air pump (6) and the dissolving bottle (4), and a plurality of the air inlet valves (5) are provided.

4. The dust-free environmental pollution monitoring device according to claim 1, characterized in that: The horizontal pipeline of the water sampling pipeline (10) is parallel to the horizontal pipeline of the air sampling pipeline (1).

5. The dust-free environmental pollution monitoring device according to claim 1, characterized in that: The detection instrument (14) is a polygonal structure, and the sampling water test tube (12) is located above the detection instrument (14).

6. The dust-free environmental pollution monitoring device according to claim 1, characterized in that: The dissolving bottle (4) is a columnar body, and a plurality of the dissolving bottles (4) are provided.

7. The dust-free environmental pollution monitoring device according to claim 1, characterized in that: The air pumps (6) are provided in plurality, and the plurality of air pumps (6) are arranged side by side relative to the dissolving bottle (4).

8. The dust-free environmental pollution monitoring device according to claim 1, characterized in that: The control valve (2) is located between the air pump (6) and the air sampling pipeline (1), and a plurality of the control valves (2) are provided.

9. The dust-free environmental pollution monitoring device according to claim 1, characterized in that: A plurality of the sampling water valves (7) are provided, and the sampling water valves (7) are located between the dissolving bottle (4) and the sampling water pipeline (10).