Novel electronic-grade hydrogen peroxide filtering and purifying device

Abstract

The utility model discloses a novel electronic grade hydrogen peroxide filtering and purifying device, and relates to the technical field of hydrogen peroxide processing, a limiting seat is arranged at the bottom of a filter cartridge, a filter element is arranged in the limiting seat, and a rotary deflection mechanism is arranged at the opening of the filter cartridge. And two groups of opposite cylinder covers are symmetrically mounted at the top end of a bracket of the rotary deflection mechanism. According to the design, on the basis of conduction of the liquid inlet valve, hydrogen peroxide is conveyed into the filter element through the pump to be filtered and purified, then the filtered and purified hydrogen peroxide is temporarily stored through the filter drum and is circularly discharged through the liquid discharging valve, and in the using process, the two drum covers are driven to be automatically opened and closed through deflection braking of the rotary deflection mechanism, so that the filter drum is opened; and after the filter element is put back after cleaning is completed, the cylinder cover is driven by the rotary deflection mechanism to be automatically closed, the filter element is subjected to cover pressing and limiting, regular cleaning is convenient and efficient, and meanwhile the manual control intensity is lower.

Description

Technical Field

[0001] The utility model relates to the field of hydrogen peroxide processing, in particular to a novel electronic-grade hydrogen peroxide filtering and purification device. Background Art

[0002] Electronic-grade hydrogen peroxide is a high-purity oxidant primarily used in large-scale integrated circuit production processes. As an electronic chemical raw material, it possesses strong oxidizing properties and high purity, making it widely used in cleaning and corrosion processes in the semiconductor and electronics industries. Before being pumped through a delivery pump, electronic-grade hydrogen peroxide must be filtered and purified through a filter to ensure its purity. For example, an industrial-grade electronic-grade hydrogen peroxide pre-pump filtration and purification device (publication number CN212680307U) disclosed on the China Patent Network employs a quick-install valve head assembly to connect the inlet pipe to the filter. The filter then filters and purifies the hydrogen peroxide, discharging the purified hydrogen peroxide through the outlet pipe.

[0003] However, the aforementioned patents and existing hydrogen peroxide pump filtration and purification devices still have some shortcomings. While these existing hydrogen peroxide pump filtration and purification devices offer convenient quick assembly, their filter bodies are difficult to disassemble, making regular cleaning of the filter element cumbersome and inconvenient. Therefore, those skilled in the art have proposed a novel electronic-grade hydrogen peroxide filtration and purification device to address the issues raised in the aforementioned background art. Utility Model Content

[0004] In view of the shortcomings of the existing technology, the present invention provides a novel electronic-grade hydrogen peroxide filtration and purification device, which solves the problem of the existing hydrogen peroxide filtration and purification device proposed in the background art that its filter element is easy to disassemble and clean and difficult to proceed.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: A novel electronic-grade hydrogen peroxide filtration and purification device includes a cart frame;

[0006] A filter cartridge is installed on the upper end of the push frame of the push frame;

[0007] The bottom of the filter cartridge is provided with a limit seat, and the inner seat of the limit seat is provided with a filter element;

[0008] The filter cartridge mouth is equipped with a rotating deflection mechanism, and two sets of opposite cartridge covers are symmetrically installed on the top of the bracket of the rotating deflection mechanism. The cartridge covers cover the cartridge mouth of the trolley frame and are press-fitted on top of the filter element.

[0009] As a further technical solution of the present invention: the rotating and swaying mechanism includes two groups of rotating frames symmetrically arranged at the cylinder mouth of the cart frame, one side of the bracket of each group of rotating frames is rotatably connected to a rotating shaft, and the outer side of the shaft rod of each group of rotating shafts is provided with an arm frame fixedly connected to the cylinder cover.

[0010] As a further technical solution of the present invention: a transmission shaft is installed at one end of the bracket of the rotating frame, a transmission motor is installed along the shaft direction of the transmission shaft, and positive and reverse transmission worms are provided at both ends of the shaft of the transmission shaft, and one end of the shaft of the two groups of rotating shafts is respectively provided with a transmission worm wheel meshing with the transmission worm.

[0011] As a further technical solution of the present invention: the filter element includes a first filter cartridge, a second filter cartridge, and a third filter cartridge arranged in sequence from the inside to the outside, and the first filter cartridge, the second filter cartridge, and the third filter cartridge are connected to each other as a whole, and the meshes of the first filter cartridge, the second filter cartridge, and the third filter cartridge decrease from large to small in sequence.

[0012] As a further technical solution of the present invention: a liquid inlet valve opposite to the filter element is provided in the middle of the cover plate of one group of the cartridge covers, and a liquid drain valve is provided at the bottom of the cartridge body.

[0013] As a further technical solution of the present invention: universal casters are provided below the push frame in a symmetrical manner in pairs.

[0014] The utility model provides a novel electronic-grade hydrogen peroxide filtration and purification device, which has the following beneficial effects compared with the existing technology:

[0015] The electronic-grade hydrogen peroxide filtration and purification device of this design, based on the conduction of the liquid inlet valve, transports the hydrogen peroxide into the filter element through a pump for filtration and purification, and then the filtered and purified hydrogen peroxide is buffered in the filter cartridge and circulated and discharged through the discharge valve. During its use, the swing brake of the rotary swing mechanism is utilized to drive the two sets of cartridge covers to open and close automatically, the filter cartridge is opened, and the filter element is disassembled and cleaned regularly. After the cleaning is completed and the filter element is put back, the rotary swing mechanism is utilized to drive the automatic closing of the cartridge cover, and at the same time, the filter cartridge is sealed and the filter element is pressed and limited to ensure stable placement. The regular cleaning is convenient and efficient, and the manual operation intensity is lower, which is more conducive to being suitable for different work site environments. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the structure of a new electronic-grade hydrogen peroxide filtration and purification device;

[0017] Figure 2 This is a partial cross-sectional view of a new type of electronic-grade hydrogen peroxide filtration and purification device;

[0018] Figure 3This is a schematic diagram of the opening and closing structure of a new type of electronic-grade hydrogen peroxide filtration and purification device.

[0019] In the figure: 1. Cart frame; 2. Filter cartridge; 3. Rotating frame; 4. Rotating shaft; 5. Arm frame; 6. Cart cover; 7. Liquid inlet valve; 8. Liquid discharge valve; 9. Filter element; 91. First filter cartridge; 92. Second filter cartridge; 93. Third filter cartridge; 10. Drive worm gear; 11. Drive worm; 12. Drive shaft; 13. Drive motor; 14. Limit seat. DETAILED DESCRIPTION

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0021] See also Figure 1-3 The utility model provides a new technical solution for an electronic-grade hydrogen peroxide filtration and purification device: a new electronic-grade hydrogen peroxide filtration and purification device, comprising a trolley frame 1, wherein universal casters are symmetrically arranged in pairs under the trolley frame 1. By arranging universal casters on the trolley frame 1, the filtration and purification device can be flexibly pushed and moved to the work site in a roller-supported manner, thereby reducing the carrying intensity and improving the convenience of use.

[0022] The upper end of the push frame of the push frame 1 is equipped with a filter cartridge 2, and the tube mouth of the filter cartridge 2 is equipped with a rotating deflection mechanism, and the top of the bracket of the rotating deflection mechanism is symmetrically equipped with two sets of opposite tube covers 6. The rotating deflection mechanism includes two sets of rotating frames 3 symmetrically arranged at the tube mouth of the push frame 1, and one side of the bracket of each set of rotating frames 3 is rotatably connected to a rotating shaft 4, and the outer side of the shaft of each set of rotating shafts 4 is provided with an arm frame 5 fixedly connected to the tube cover 6. A transmission shaft 12 is installed at one end of the bracket of the rotating frame 3, and a transmission motor 13 is installed along the direction of the shaft of the transmission shaft 12, and the transmission motor 13 is installed along the direction of the shaft of the transmission shaft 12. Both ends of the shaft 12 are provided with forward and reverse relative transmission worms 11, and one end of the shafts of the two sets of rotating shafts 4 is respectively provided with a transmission worm wheel 10 meshing with the transmission worm 11. By controlling the operation of the transmission motor 13, the transmission shaft 12 is driven to rotate, and the transmission worms 11 at both ends of its shaft are synchronously driven to rotate. The meshing transmission of the two sets of transmission worms 11 arranged in forward and reverse directions and the corresponding transmission worm wheels 10 is utilized to drive the two relative transmission shafts 12 to rotate symmetrically, and then drive the combination of the arm frame 5 and the cylinder cover 6 to rotate symmetrically, so that the cylinder cover 6 is opened and closed symmetrically.

[0023] The cylinder cover 6 covers the cylinder mouth of the cart frame 1 and is pressed onto the top of the filter element 9. When the cylinder cover 6 is opened, the press-fit limit of the filter element 9 is released, and the filter element 9 is taken out for cleaning. After the filter element 9 is cleaned and placed inside the limit seat 14, the cylinder cover 6 is closed to press the filter element 9 and no manual installation is required.

[0024] A limit seat 14 is installed at the bottom of the filter cartridge 2, and a filter element 9 is installed on the inner pier of the limit seat 14. The filter element 9 includes a first filter cartridge 91, a second filter cartridge 92, and a third filter cartridge 93 arranged in sequence from the inside to the outside, and the first filter cartridge 91, the second filter cartridge 92, and the third filter cartridge 93 are connected and arranged in an integral manner. The meshes of the first filter cartridge 91, the second filter cartridge 92, and the third filter cartridge 93 are sequentially reduced from large to small. By utilizing the stepped filtration of the first filter cartridge 91, the second filter cartridge 92, and the third filter cartridge 93 in the filter cartridge 9, the hydrogen peroxide is filtered and purified in sequence, and impurities are filtered and isolated inside the filter cartridge 9, and the pure hydrogen peroxide is buffered in the filter cartridge 2.

[0025] A liquid inlet valve 7 opposite to the filter element 9 is provided in the middle of the cover plate of one group of cylinder covers 6, and a liquid discharge valve 8 is provided at the bottom of the cylinder body of the filter cartridge 2. The hydrogen peroxide to be filtered is pumped into the filter element 9 through the liquid inlet valve 7 by a pumping device. After step-by-step filtration and purification by the filter element 9, it is buffered in the filter cartridge 2 and then discharged through the conduction cycle of the liquid discharge valve 8.

[0026] The working principle of the present invention is as follows: when using the filtration and purification device to filter and purify electronic-grade hydrogen peroxide, the hydrogen peroxide to be filtered can be pumped into the filter element 9 through the liquid inlet valve 7 by a pumping device. After the hydrogen peroxide is filtered and purified in a step-by-step manner by the first filter cartridge 91, the second filter cartridge 92, and the third filter cartridge 93 in the filter element 9, impurities are isolated in the filter element 9, and the pure hydrogen peroxide is buffered in the filter cartridge 2 and then discharged through the conduction cycle of the drain valve 8.

[0027] And when the filter element 9 needs to be cleaned regularly in the future, the transmission motor 13 is controlled to work, driving the combined rotation of the transmission shaft 12 and the transmission worm 11, and the meshing transmission of the two sets of transmission worms 11 arranged in forward and reverse directions and the corresponding transmission worm wheels 10 is used to drive the two relative transmission shafts 12 to rotate symmetrically, and then drive the combined symmetrical rotation of the arm frame 5 and the cylinder cover 6, and open and close the cylinder cover 6 symmetrically to release the press-fit limit on the filter element 9, and then take out the filter element 9 for cleaning. After the filter element 9 is cleaned and placed inside the limit seat 14, the cylinder cover 6 is closed to seal the filter cartridge 2 while pressing the filter element 9 to limit it. No manual installation is required, and its overall operation is simple and convenient, and it has better on-site flexibility and adaptability.

[0028] The above description is merely a preferred embodiment of the present invention. It should be noted that those skilled in the art may make various improvements and modifications without departing from the principles of the present invention, and such improvements and modifications should be considered within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described or explained in this invention shall, unless otherwise specified or limited, be implemented in accordance with conventional means in the art.

Claims

1. A novel electronic grade hydrogen peroxide filtration and purification device, characterized in that: It includes a cart frame (1); A filter cartridge (2) is installed on the upper end of the push frame of the push frame (1); The bottom of the filter cartridge (2) is provided with a limiting seat (14), and the inner seat of the limiting seat (14) is provided with a filter element (9); The mouth of the filter cartridge (2) is equipped with a rotating deflection mechanism, and the top of the bracket of the rotating deflection mechanism is symmetrically equipped with two sets of opposite cartridge covers (6), and the cartridge covers (6) cover the mouth of the trolley frame (1) and are press-fitted on top of the filter element (9).

2. A novel electronic grade hydrogen peroxide filtration and purification device according to claim 1, characterized in that, The rotary deflection mechanism comprises two groups of rotary frames (3) symmetrically arranged at the cylinder mouth of the cart frame (1), one side of the bracket of each group of rotary frames (3) is rotatably connected to a rotary shaft (4), and an arm frame (5) fixedly connected to the cylinder cover (6) is arranged on the outer side of the shaft rod of each group of rotary shafts (4).

3. A novel electronic grade hydrogen peroxide filtration and purification device according to claim 2, characterized in that, A transmission shaft (12) is installed at one end of the bracket of the rotating frame (3), a transmission motor (13) is installed along the shaft direction of the transmission shaft (12), and positive and reverse opposite transmission worms (11) are provided at both ends of the shaft of the transmission shaft (12), and a transmission worm wheel (10) meshing with the transmission worm (11) is provided at one end of the shaft of the two groups of rotating shafts (4).

4. A novel electronic grade hydrogen peroxide filtration and purification device according to claim 1, characterized in that, The filter element (9) comprises a first filter cartridge (91), a second filter cartridge (92), and a third filter cartridge (93) which are sequentially arranged from the inside to the outside, and the first filter cartridge (91), the second filter cartridge (92), and the third filter cartridge (93) are connected and arranged as a whole, and the mesh sizes of the first filter cartridge (91), the second filter cartridge (92), and the third filter cartridge (93) decrease from large to small.

5. A novel electronic grade hydrogen peroxide filtration and purification device according to claim 1, characterized in that, A liquid inlet valve (7) opposite to the filter element (9) is provided at the middle of the cover plate of one group of the cartridge covers (6), and a liquid discharge valve (8) is provided at the bottom of the cartridge body of the filter cartridge (2).

6. A novel electronic grade hydrogen peroxide filtration and purification device according to claim 1, characterized in that, Universal casters are arranged in pairs symmetrically below the push frame of the push frame (1).

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