Spraying device of packaging substrate

By setting a connecting pipe in the spray device and using the connecting vessel principle to make the liquid flow of each spray head consistent, the problem of uneven spraying is solved and the spraying effect and yield of the package substrate are improved.

CN223351918UActive Publication Date: 2025-09-19LEADING INTERCONNECT SEMICON TECH SHENZHEN CO LTD +1
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202422314074.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-20
Publication Date
2025-09-19
Estimated Expiration
2034-09-20

AI Technical Summary

Technical Problem

In existing spraying devices, the liquid flow rates sprayed by multiple spray heads are uneven, resulting in uneven amounts of liquid sprayed on the packaging substrate, affecting the spraying effect and process yield.

Method used

A connecting pipe is set on the spray pipeline, and the connecting vessel principle is used to make the liquid pressure at each sprinkler head equal, thereby ensuring the consistency of the liquid flow sprayed from each sprinkler head and achieving flow uniformity through the connecting vessel structure.

Benefits of technology

The spraying uniformity of the package substrate is improved, and the manufacturing yield and spraying efficiency are improved.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN223351918U_ABST
    Figure CN223351918U_ABST
Patent Text Reader

Abstract

A spraying device of a packaging substrate comprises a liquid inlet pipeline, a spraying pipeline, a plurality of spraying heads and a communicating pipeline, the spraying pipeline is communicated with the liquid inlet pipeline, the spraying pipeline is provided with a spraying flow channel extending in the direction away from a liquid inlet, the spraying pipeline is provided with a plurality of spraying openings and a plurality of communicating openings, and the spraying openings and the communicating openings are in one-to-one correspondence; a spraying head is arranged on each spraying opening; the communicating pipeline comprises a main pipeline extending along the extending direction and a plurality of branch pipelines, and each branch pipeline is communicated with one communicating port, so that the plurality of branch pipelines are in one-to-one correspondence with the plurality of spraying heads. According to the spraying device of the packaging substrate provided by the embodiment of the invention, the communicating pipeline is arranged on the spraying pipeline, and the liquid pressure intensity corresponding to each spraying head in the spraying runner can be equal by utilizing the principle of a communicating vessel, so that the flow of the liquid sprayed by each spraying head is kept consistent, the spraying uniformity of the whole packaging substrate is improved, and the spraying efficiency of the packaging substrate is improved. And the manufacturing yield and the spraying efficiency are improved.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The present application relates to the technical field of packaging substrate manufacturing, and in particular to a spray device for a packaging substrate. Background Art

[0002] During the production of packaging substrates, the process of forming circuits generally includes steps such as lamination pre-treatment, lamination, exposure, development, etching, film stripping, and water washing. Among them, lamination pre-treatment usually requires metal surface micro-etching, pickling, and water washing. In addition, during the production of packaging substrates, some microstructures such as through holes and grooves need to be electroplated on the surface. During the electroplating process, these microstructures need to be cleaned and wetted, and new and old solutions need to be replaced within these microstructures. The above micro-etching, cleaning, wetting, and solution replacement steps usually use a spraying method to spray cleaning liquid or solution on the packaging substrate. The quality of the spraying effect directly affects the yield and reliability of the final product.

[0003] Existing spray systems typically include a spray pipe, one end of which is connected to a liquid inlet pipe. Multiple spray heads are positioned along the length of the pipe. Liquid enters the pipe from one end and is then distributed to each spray head for spraying. However, the liquid flow rates of the various spray heads in existing spray systems vary, resulting in uneven liquid delivery to the package substrate, which in turn affects spraying performance and process yield. Utility Model Content

[0004] In view of this, in order to overcome at least one of the above-mentioned drawbacks, it is necessary to provide a spray device for packaging substrates.

[0005] An embodiment of the present application provides a spray device for a packaging substrate, comprising: a liquid inlet pipeline, a spray pipeline, a plurality of spray heads and a connecting pipeline, wherein the liquid inlet pipeline is connected to a liquid storage tank, and the liquid inlet pipeline has a liquid inlet; the spray pipeline is connected to the liquid inlet, and the spray pipeline has a spray flow channel extending in a direction away from the liquid inlet, and along the extension direction of the spray pipeline, a plurality of spray ports and a plurality of connecting ports are provided on the spray pipeline, and the plurality of spray ports correspond one-to-one to the plurality of connecting ports; a spray head is arranged on each of the spray ports; the connecting pipeline comprises a main pipeline extending along the extension direction, and a plurality of branch pipelines connected to the main pipeline, and each of the branch pipelines is connected to one of the connecting ports, so that the plurality of branch pipelines correspond one-to-one to the plurality of spray heads.

[0006] In some possible embodiments, the main pipeline and the branch pipeline are an integrated structure, and the branch pipeline and the spray pipeline are an integrated structure.

[0007] In some possible embodiments, the main pipeline and the branch pipeline, as well as the branch pipeline and the spray pipeline are all connected by welding.

[0008] In some possible embodiments, the main pipeline and the branch pipeline are detachably connected via a first connector, and the branch pipeline and the spray pipeline are detachably connected via a second connector.

[0009] In some possible embodiments, the main pipeline and the branch pipeline are both hoses.

[0010] In some possible embodiments, the spray device includes a plurality of spray pipelines arranged side by side, the liquid inlet pipeline includes a main liquid inlet pipeline and a branch liquid inlet pipeline connected to the main liquid inlet pipeline, and the branch liquid inlet pipeline is provided with a plurality of liquid inlets, and each liquid inlet is connected to a spray pipeline.

[0011] In some possible embodiments, the multiple spray ports are located on the same side of the spray channel, and the multiple communication ports are located on a side of the spray channel opposite to the spray ports.

[0012] In some possible embodiments, the spraying areas of two adjacent spray heads partially overlap.

[0013] In some possible embodiments, the liquid storage tank is located below the shower head, and a filter is provided between the liquid storage tank and the liquid inlet pipeline.

[0014] In some possible embodiments, the spray device further includes a spray chamber, wherein the spray pipeline, the spray head and the liquid storage tank are all located in the spray chamber, and the spray chamber has an inlet and an outlet that are relatively arranged, and the inlet and the outlet are located between the spray head and the liquid storage tank.

[0015] Compared with the prior art, the spraying device for the packaging substrate provided in the embodiment of the present application, by setting a connecting pipe on the spray pipe, utilizes the principle of the communicating vessel to make the liquid pressure corresponding to each spray head in the spray channel equal, thereby making the liquid flow rate sprayed by each spray head consistent, thereby improving the spraying uniformity of the entire packaging substrate, and improving the manufacturing yield and spraying efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic structural diagram of a spray device for a packaging substrate provided in one embodiment of the present application.

[0017] Figure 2 for Figure 1 Schematic diagram of the connection structure between the middle spray pipeline and the connecting pipeline.

[0018] Figure 3This is a structural diagram of the spray pipeline and the connecting pipeline to achieve liquid communication in one embodiment of the present application.

[0019] Figure 4 A schematic diagram of the structure of multiple spray pipes arranged side by side provided in one embodiment of the present application.

[0020] Figure 5 A schematic structural diagram of a spray device for a packaging substrate provided in another embodiment of the present application.

[0021] Figure 6 for Figure 5 Schematic diagram of the connection structure between the middle spray pipeline and the connecting pipeline.

[0022] Description of main component symbols

[0023] Spraying device 100,300

[0024] Liquid inlet line 1

[0025] Liquid inlet 11

[0026] Main liquid inlet line 12

[0027] Liquid inlet line 13

[0028] Spray pipe 2

[0029] Spray channel 21

[0030] Spray port 22

[0031] Communication port 23

[0032] Inlet port 24

[0033] End 25

[0034] Sprinkler 3

[0035] Connecting pipes 4, 4a

[0036] Main Road 41, 41a

[0037] Branch pipes 42, 42a

[0038] First connecting member 43

[0039] Second connecting member 44

[0040] Liquid storage tank 5

[0041] Filter 6

[0042] Spray room 7

[0043] Conveyor structure 8

[0044] Package substrate 200

[0045] The following specific implementation methods will further illustrate the present application in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0046] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments.

[0047] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application pertains. The terms used herein in the specification of this application are for the purpose of describing specific embodiments only and are not intended to limit this application.

[0048] It should be noted that, in this application, if used, the terms "first", "second", etc. are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise specified, "multiple" means two or more. Directional terms such as "up", "down", "left", and "right" are defined relative to the orientation of the components schematically placed in the accompanying drawings. It should be understood that these directional terms are relative concepts. They are used for description and clarification relative to each other, and they may change accordingly according to changes in the orientation of the components placed in the accompanying drawings. The term "direction" includes one-way or two-way along the straight line where the direction is located, and cannot be simply understood as one-way along the straight line where the direction is located.

[0049] In this application, if used, unless otherwise specified or limited, the term "connected" should be understood in a broad sense. For example, "connected" can mean fixed connection, detachable connection, or integration; it can be directly connected or indirectly connected through an intermediary. The term "and / or" as used herein includes any and all combinations of one or more of the relevant listed items.

[0050] It will be understood that when a layer, region or component is referred to as being “on” another layer, region or component, it can be directly or indirectly on the other layer, region or component. That is, for example, intervening layers, regions or components may be present.

[0051] Existing spray devices typically include a spray pipe whose inlet is connected to a liquid inlet pipe. Multiple spray heads are positioned along the length of the pipe. Liquid enters at one end of the pipe and is then distributed to each spray head for spraying. Research has found that for a long, rectangular spray pipe of a certain length, the liquid flow rate decreases from the inlet to the end. Liquid flow rate = cross-sectional area x flow rate. Consequently, the liquid flow rate entering each spray head varies, with the end heads in particular producing lower flow rates. This results in an uneven amount of liquid sprayed onto the package substrate, impacting spraying effectiveness and product yield.

[0052] To solve the above problems, please refer to Figures 1 to 3 As shown, an embodiment of the present application provides a spray device 100 for a packaging substrate 200, and the spray device 100 includes: a liquid inlet pipeline 1, a spray pipeline 2, a plurality of spray heads 3, and a connecting pipeline 4. The liquid inlet pipeline 1 is connected to a liquid storage tank 5, and the liquid storage tank 5 is used to contain liquid, and the liquid here can be a medicine or a cleaning liquid, etc. The liquid inlet pipeline 1 has a liquid inlet 11. Specifically, the liquid inlet 11 is provided at one end of the liquid inlet pipeline 1 away from the liquid storage tank 5. The spray pipeline 2 is connected to the liquid inlet 11, and the spray pipeline 2 has a spray flow channel 21 extending in a direction away from the liquid inlet 11. The liquid inlet pipeline 1 transports the liquid in the liquid storage tank 5 to the spray flow channel 21 of the spray pipeline 2. Along the extension direction a of the spray pipeline 2, the spray pipeline 2 is provided with a plurality of spray ports 22 and a plurality of connecting ports 23, and the plurality of spray ports 22 corresponds to the plurality of connecting ports 23 one by one. A spray head 3 is provided on each of the spray ports 22 . The liquid in the spray channel 21 can be sprayed out by the spray head 3 . The spray head 3 is located above the packaging substrate 200 , thereby spraying liquid onto the packaging substrate 200 .

[0053] The connecting pipeline 4 includes a main pipeline 41 extending along the extension direction a, and a plurality of branch pipelines 42 connected to the main pipeline 41. Each branch pipeline 42 is connected to one of the connecting ports 23, so that the plurality of branch pipelines 42 correspond one-to-one with the plurality of spray heads 3. The main pipeline 41 and the plurality of branch pipelines 42 in the connecting pipeline 4 form a communicating vessel structure. According to the principle of a communicating vessel, the ends of the plurality of branch pipelines 42 away from the spray channel 21 are connected through the main pipeline 41, so that the liquid pressure of each branch pipeline 42 near the spray channel 21 is equal. The branch pipelines 42 correspond one-to-one with the spray heads 3, so that the liquid pressure of the spray channel 21 corresponding to each spray head 3 is equal, thereby making the liquid flow rate sprayed by each spray head 3 approximately equal, thereby improving the uniformity of spraying.

[0054] In some embodiments, the liquid inlet pipe 1 and the spray pipe 2 can be an integrated structure. For example, the liquid inlet pipe 1 and the spray pipe 2 can be a single pipe, or the liquid inlet pipe 1 and the spray pipe 2 can be welded together to form an integrated structure. It is understood that in other embodiments, the liquid inlet pipe 1 can be detachably connected to the spray pipe 2 via a connecting joint (not shown) to facilitate the disassembly and assembly of the spray device 100 and the replacement of the liquid inlet pipe 1 and the spray pipe 2.

[0055] In some embodiments, the liquid inlet pipeline 1 can be a hard pipe or a hose. Specifically, the liquid inlet pipeline 1 is a hose, which is beneficial to the spatial layout of the spray device 100 and reduces the floor space.

[0056] See also Figure 2 As shown, the spray pipeline 2 is generally in the shape of an elongated strip. Along the extension direction a, the spray pipeline 2 includes an inlet end 24 and an end end 25 . The inlet end 24 is connected to the liquid inlet 11 of the liquid inlet pipeline 1 , and the end end 25 may be a closed end.

[0057] In some embodiments, along the extension direction a, a plurality of spray ports 22 are arranged in a straight line on the spray pipe 2 and are located on the same side of the spray channel 21. In addition, along the extension direction a, a plurality of communication ports 23 are arranged in a straight line on the spray pipe 2 and are located on the side of the spray channel 21 opposite to the spray ports 22. Specifically, for the convenience of description, Figure 2 The spray ports 22 are located at the bottom of the spray pipe 2, and the multiple spray ports 22 are located approximately at the same horizontal plane. The communication ports 23 are located at the top of the spray pipe 2, opposite the spray ports 22. This allows the multiple communication ports 23 to be located approximately at the same horizontal plane, and the distances between each group of corresponding communication ports 23 and the spray ports 22 are approximately equal. The arrangement of the communication ports 23 and the spray ports 22 can simplify the structure of the communication pipe 4, further improve the communication effect of the communication pipe 4, and further improve the effect of liquid pressure convergence at the multiple spray ports 22.

[0058] In some embodiments, the spray pipeline 2 can be a hard pipe, such as a metal pipe or a hard plastic pipe.

[0059] The spray head 3 is detachably mounted on the spray port 22 to facilitate replacement of the spray head 3. The spraying areas of two adjacent spray heads 3 partially overlap, so that the sprayed liquid can cover the entire packaging substrate 200.

[0060] See also Figure 2 and Figure 3 As shown, combined Figure 1The main line 41 in the connecting line 4 is located on the side of the spray line 2 away from the spray head 3, and the main line 41 is roughly parallel to the spray line 2. One end of each branch line 42 close to the spray line 2 is connected to the connecting port 23, and the end away from the spray line 2 is connected to the main line 41. One end of the multiple branch lines 42 is connected through the main line 41, and the other end of the multiple branch lines 42 is connected through the spray line 2, thereby forming a communicating vessel structure. According to the communicating vessel principle, the flow rate of the liquid sprayed by the spray head 3 corresponding to each branch line 42 is roughly equal, thereby improving the uniformity of spraying different areas on the packaging substrate 200.

[0061] In some embodiments, according to the principle of communicating vessels, the shape, length, thickness, etc. of the branch pipes 42 will not affect the liquid pressure in each branch pipe 42 after connection. Therefore, in this embodiment, the shape, length, thickness, etc. of the branch pipes 42 are not limited.

[0062] In some embodiments, the main line 41 and the branch line 42 can be an integrated structure, and the branch line 42 and the spray line 2 can be an integrated structure. Specifically, the main line 41 and the branch line 42 can be connected by welding or welding, and the branch line 42 can be welded to the connecting port 23 of the spray line 2. For example, when the spray line 2 and the connecting line 4 are both metal pipes, they can be connected by welding. When the spray line 2 and the connecting line 4 are both hard plastic pipes, they can be connected by welding. The connecting port 23 can be opened on the pipeline design of the original spray device, and then the connecting line 4 is welded to achieve consistent flow of each sprinkler head 3. In this way, there is no need to replace the entire spray device, and the existing equipment can be used directly, reducing the cost of equipment replacement.

[0063] See also Figure 4 As shown, refer to Figure 1 and Figure 2 The spray device 100 may include multiple spray pipelines 2 arranged side by side. The liquid inlet pipeline 1 includes a main liquid inlet pipeline 12 and a branch liquid inlet pipeline 13 connected to the main liquid inlet pipeline 12. The branch liquid inlet pipeline 13 is provided with multiple liquid inlets 11, each of which is connected to a spray pipeline 2. Each spray pipeline 2 is provided with a row of spray heads 3. In this way, multiple rows of spray pipelines 2 can form an array of spray heads 3, which can achieve efficient spraying of large-area packaging substrates 200.

[0064] It is understandable that the shape of the spray pipe 2 in the spray device 100 is not limited to a long strip, but can also be a ring or other shape. For example, multiple concentric ring spray pipes 2 can be provided to achieve efficient spraying of the circular packaging substrate 200.

[0065] Please refer again Figure 1 As shown, the liquid reservoir 5 can be located below the spray head 3, and the liquid sprayed by the spray head 3 can directly flow back to the liquid reservoir 5, so that the spray liquid can be recycled. In addition, a filter 6 can be provided between the liquid reservoir 5 and the liquid inlet pipeline 1 to filter the liquid in the liquid reservoir 5, and the filtered liquid then enters the liquid inlet pipeline 1.

[0066] The spraying device 100 also includes a spray chamber 7, wherein the spray pipe 2, the spray head 3 and the liquid storage tank 5 are all located in the spray chamber 7, and the connecting pipe 4 can be located in the spray chamber 7. The spray chamber 7 has a relatively arranged board inlet (not shown) and a board outlet (not shown), wherein the board inlet and the board outlet are located between the spray head 3 and the liquid storage tank 5. The package substrate 200 can enter the spray chamber 7 from the board inlet and exit from the board outlet after spraying is completed. In order to realize online spraying, a conveying structure 8 is also provided in the spray chamber 7, and the package substrate 200 is located on the conveying structure 8. Specifically, the conveying structure 8 can be a transmission roller.

[0067] See also Figure 5 and Figure 6 As shown, the embodiment of the present application further provides a spray device 300. The structure of the spray device 300 is basically the same as that of the aforementioned spray device 100, with the main difference being that the connecting pipe 4a in the spray device 300 is detachably connected to the spray pipe 2. Specifically, the main pipe 41a and the branch pipe 42a are detachably connected via a first connector 43, and the branch pipe 42a and the spray pipe 2 are detachably connected via a second connector 44.

[0068] In some embodiments, the first connector 43 and the second connector 44 may be adapters.

[0069] In some embodiments, the main line 41a and branch lines 42a can be either rigid pipes or flexible pipes. Specifically, in this embodiment, both the main line 41a and branch lines 42a are flexible pipes, which are easier to install. This detachable connecting line 4a also ensures consistent flow rates across all sprinkler heads 3 without replacing the entire device, while also facilitating disassembly and replacement of the connecting line 4a.

[0070] Compared with the prior art, the spraying device 100 (300) for the packaging substrate 200 provided in the embodiment of the present application, by setting a connecting pipe 4 (4a) on the spray pipe 2, utilizes the principle of a communicating vessel to make the liquid pressure corresponding to each spray head 3 in the spray channel 21 equal, thereby making the liquid flow rate sprayed by each spray head 3 consistent, so as to improve the spraying uniformity of the entire packaging substrate 200, thereby improving the manufacturing yield and spraying efficiency.

[0071] The above description is merely an optimized specific implementation of the present application, but in actual application, it cannot be limited to this implementation.

Claims

1. A spray device for packaging substrates, characterized in that: include: a liquid inlet pipeline, connected to the liquid storage tank, and having a liquid inlet; a spray pipeline connected to the liquid inlet, the spray pipeline having a spray flow channel extending in a direction away from the liquid inlet, and a plurality of spray ports and a plurality of communication ports being provided on the spray pipeline along the extension direction of the spray pipeline, wherein the plurality of spray ports correspond one to one with the plurality of communication ports; A plurality of spray heads, one of which is provided on each of the spray ports; as well as The connecting pipeline includes a main pipeline extending along the extending direction and a plurality of branch pipelines connected to the main pipeline, each of the branch pipelines is connected to one of the connecting ports, so that the plurality of branch pipelines correspond to the plurality of sprinkler heads one by one.

2. The spraying device for packaging substrate according to claim 1, characterized in that: The main pipeline and the branch pipeline are an integrated structure, and the branch pipeline and the spray pipeline are an integrated structure.

3. The spraying device for packaging substrate according to claim 2, characterized in that: The main pipeline and the branch pipeline, as well as the branch pipeline and the spray pipeline are all connected by welding.

4. The spraying device for packaging substrate according to claim 1, wherein: The main pipeline and the branch pipeline are detachably connected via a first connecting piece, and the branch pipeline and the spray pipeline are detachably connected via a second connecting piece.

5. The spraying device for packaging substrate according to claim 4, characterized in that: The main pipeline and the branch pipeline are both hoses.

6. The spraying device for packaging substrate according to claim 1, wherein: The spray device includes a plurality of spray pipelines arranged side by side, the liquid inlet pipeline includes a main liquid inlet pipeline and a branch liquid inlet pipeline connected to the main liquid inlet pipeline, and a plurality of liquid inlets are provided on the branch liquid inlet pipeline, and each liquid inlet is connected to a spray pipeline.

7. The spraying device for packaging substrate according to claim 1, wherein: The plurality of spray ports are located on the same side of the spray channel, and the plurality of communication ports are located on a side of the spray channel opposite to the spray ports.

8. The spraying device for packaging substrate according to claim 1, wherein: The spraying areas of two adjacent spray heads partially overlap.

9. The spraying device for packaging substrate according to claim 1, wherein: The liquid storage tank is located below the spray head, and a filter is provided between the liquid storage tank and the liquid inlet pipeline.

10. The spraying device for packaging substrate according to claim 9, characterized in that: It also includes a spray chamber, in which the spray pipeline, the spray head and the liquid storage tank are all located. The spray chamber has an inlet and an outlet that are relatively arranged, and the inlet and the outlet are located between the spray head and the liquid storage tank.