Air pressure calibration device for static pressure plate

Abstract

The utility model provides a static pressure plate air pressure calibration device, and the device comprises a first sliding assembly which comprises a first sliding part and a first contact part, and the first contact part is connected to the first sliding part; the second sliding assembly comprises a second sliding piece and a second contact piece, in the first direction, the second sliding piece and the first sliding piece are oppositely arranged, and the second contact piece is connected to the second sliding piece; the at least one distance adjusting assembly is connected between the first sliding piece and the second sliding piece, and can enable the first sliding piece and the second sliding piece to move in the first direction in the opposite directions or in the opposite directions so as to adjust the distance between the first sliding piece and the second sliding piece in the first direction; and the elastic component is propped between the first sliding piece and the second sliding piece. The static pressure plate air pressure calibration device can calibrate the air pressure of the static pressure plate.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a static pressure plate air pressure calibration device. Background Art

[0002] A double-disc grinder is a double-sided grinding device for thinning silicon wafers. Its characteristic is that the silicon wafer is placed in a grinding chamber in a vertical position and both sides are ground simultaneously. During grinding, the position of the silicon wafer in the grinding chamber is controlled by static pressure plates located on both sides of the silicon wafer through air pressure, and the air pressure can be monitored by a barometer. The accuracy of air pressure measurement is crucial to the quality of the processed products. As a key measuring device, the barometer is prone to certain measurement deviations as the use time and frequency increase. There is no air pressure calibration device for calibrating the air pressure of the static pressure plate in the related art. Utility Model Content

[0003] An embodiment of the present disclosure provides a static pressure plate air pressure calibration device, which can calibrate the air pressure of a static pressure plate.

[0004] The technical solutions provided by the embodiments of the present disclosure are as follows:

[0005] In a first aspect, an embodiment of the present disclosure provides a static pressure plate air pressure calibration device, comprising:

[0006] A first sliding assembly includes a first sliding member and a first contact member, wherein the first contact member is connected to the first sliding member;

[0007] a second sliding assembly comprising a second sliding member and a second contact member, wherein the second sliding member is disposed opposite to the first sliding member in a first direction, and the second contact member is connected to the second sliding member;

[0008] at least one spacing adjustment assembly connected between the first sliding member and the second sliding member, and capable of causing the first sliding member and the second sliding member to move toward or away from each other along the first direction to adjust the spacing between the first sliding member and the second sliding member in the first direction;

[0009] The elastic component is pressed between the first sliding member and the second sliding member.

[0010] Exemplarily, the first sliding member is provided with a track structure extending along a second direction, the second direction being perpendicular to the first direction, and the second sliding member is provided with a push-pull member; the spacing adjustment assembly includes:

[0011] a fixed connecting member, one end of which is fixedly connected to the first sliding member, and the other end of which is provided with a first guide groove extending along the first direction; and

[0012] An operable member is provided with a sliding adapter structure that can slidably cooperate with the track structure, and the operable member is provided with a second guide groove, and when the elastic component is in a stationary state, the second guide groove intersects with the extension direction of the first guide groove, and the push-pull member is slidably connected in the first guide groove and the second guide groove.

[0013] Exemplarily, either the first sliding member or the second sliding member includes:

[0014] a first portion extending along the second direction;

[0015] a second portion connected to the first portion and extending along the first direction;

[0016] a third portion connected to the first portion and extending along the first direction; wherein,

[0017] The second part and the third part are spaced apart in the second direction, and the projection shape of the first part, the second part and the third part on the first projection plane is a U-shaped structure, and the first projection plane is a plane defined by the intersection of the first direction and the second direction; the openings of the U-shaped structure corresponding to the first sliding member and the U-shaped structure corresponding to the second sliding member are arranged facing each other.

[0018] Exemplarily, the area of ​​the first part located between the second part and the third part along the second direction is the middle area; wherein the elastic component abuts between the middle area of ​​the first sliding member and the middle area of ​​the second part.

[0019] Exemplarily, in the first sliding member, at least one of the second portion and the third portion includes two first limiting portions spaced apart along a third direction, the third direction being perpendicular to the first projection plane; wherein,

[0020] Each of the first limiting portions is provided with a limiting protrusion protruding toward the other first limiting portion at one end away from the first portion along the first direction, and a gap is formed between the limiting protrusions on the two first limiting portions along the third direction, and the two first limiting portions cooperate to form the track structure;

[0021] The operable part has two side surfaces arranged opposite to each other in the third direction, and each of the side surfaces is provided with a groove extending along the second direction, and the groove divides the operable part into a fourth part and a fifth part along the first direction, wherein the limiting protrusion is embedded in the groove, and the fourth part is accommodated in the space between the two first limiting parts.

[0022] Exemplarily, in the second sliding member, at least one of the second part and the third part includes two second limiting portions arranged at intervals along a third direction, and the third direction is perpendicular to the first projection plane; wherein the push-pull member includes a sliding rod, which extends axially along the third direction and is connected to the two second limiting portions.

[0023] Exemplarily, two spacing adjustment components are provided between the first sliding component and the second sliding component, wherein one spacing adjustment component is located between the first part of the first sliding component and the first part of the second sliding component, and the other spacing adjustment component is located between the second part of the first sliding component and the second part of the second sliding component.

[0024] Exemplarily, a side of the first contact member away from the second contact member in the first direction is a first contact side, and a first protrusion, a second protrusion, and a third protrusion are sequentially provided on the first contact side along the second direction, and the protrusion heights of the second protrusion, the third protrusion, and the first protrusion relative to the first contact side gradually decrease;

[0025] A side of the second contact member farther from the first contact member in the first direction is a second contact side, and a fourth protrusion, a fifth protrusion, and a sixth protrusion are sequentially provided on the second contact side along the second direction, and the protrusion heights of the fifth protrusion, the sixth protrusion, and the fourth protrusion relative to the first contact side gradually decrease;

[0026] The first protrusion and the fourth protrusion are located on the same straight line in the first direction, the second protrusion and the fifth protrusion are located on the same straight line in the first direction, and the third protrusion and the sixth protrusion are located on the same straight line in the first direction.

[0027] Exemplarily, the protrusion height of the first protrusion relative to the first contact side is equal to the protrusion height of the fourth protrusion relative to the second contact side; the protrusion height of the second protrusion relative to the first contact side is equal to the protrusion height of the fifth protrusion relative to the second contact side; the protrusion height of the third protrusion relative to the first contact side is equal to the protrusion height of the sixth protrusion relative to the second contact side.

[0028] Exemplarily, the elastic component includes:

[0029] a spring base, the spring base being fixed on the second sliding member;

[0030] A spring, one end of which is sleeved on the spring base, and the other end of which is pressed against the first sliding member.

[0031] The beneficial effects brought about by the embodiments of the present disclosure are as follows:

[0032] In an embodiment of the present disclosure, a static pressure plate air pressure calibration device is provided, which can be used to calibrate the air pressure of a static pressure plate. For example, it can be used to calibrate the air pressure of two static pressure plates located on opposite sides of a silicon wafer in a double-sided grinder. During calibration, the static pressure plate air pressure calibration device can control the first slider and the second slider to move toward each other in a first direction through the spacing adjustment component to reduce the spacing between the two. The first slider and the second slider are placed between the two static pressure plates. Thereafter, the elastic restoring force of the elastic component is used to cause the first slider and the second slider to move away from each other, and the first contact member is pressed against one of the static pressure plates and aligned with a predetermined air hole. The second contact member is pressed against the other static pressure plate and aligned with a predetermined air hole. At this time, the air pressure values ​​on the two static pressure plates can be obtained by a barometer. Based on the air pressure values ​​on the two static pressure plates, the air pressure of the static pressure plates can be calibrated. In this way, the static pressure plate air pressure calibration device provided by the embodiment of the present disclosure can improve the problem of deviation caused by barometer measurement and improve the quality of processed products. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 A schematic diagram showing a partial structure of the double-sided grinding machine disclosed herein;

[0034] Figure 2 A schematic diagram showing the structure of a static pressure plate;

[0035] Figure 3 A schematic diagram showing the structure of a static pressure plate air pressure calibration device provided by an embodiment of the present disclosure;

[0036] Figure 4 A schematic diagram showing the three-dimensional structure of the first sliding member;

[0037] Figure 5 A schematic diagram showing the three-dimensional structure of the operable parts;

[0038] Figure 6 A schematic diagram showing the three-dimensional structure of the second sliding member. DETAILED DESCRIPTION

[0039] To make the purpose, technical solutions, and advantages of the embodiments of the present disclosure more clear, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0040] Unless otherwise defined, the technical or scientific terms used in this disclosure should have the usual meanings understood by people with ordinary skills in the field to which this disclosure belongs. The words "first", "second" and similar words used in this disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one", "an" or "the" do not indicate a quantity limitation, but rather indicate the existence of at least one. Words such as "include" or "comprise" mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0041] As used in the embodiments of the present disclosure, the terms "parallel," "perpendicular," and "identical" include the strict sense of "parallel," "perpendicular," and "identical," as well as "approximately parallel," "approximately perpendicular," and "approximately identical" with respect to a certain tolerance, which, taking into account the tolerances associated with the measurement of a particular quantity (e.g., limitations of the measurement system), means within an acceptable range of deviation for a particular value as determined by one of ordinary skill in the art. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of the stated value.

[0042] In addition, in this document, unless otherwise defined, the terms "substantially," "essentially," "approximately," and "about" are used to describe and explain small variations. When used in connection with an event or circumstance, these terms can encompass situations where the event or circumstance occurs exactly, as well as situations where the event or circumstance occurs approximately. For example, when used in connection with a numerical value, these terms can include a range of variation of less than or equal to 10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, less than or equal to ±0.05%. The term "substantially coplanar" can refer to two surfaces being aligned along the same plane within the micrometer range, for example, within 40 μm, 30 μm, 20 μm, 10 μm, or 1 μm.

[0043] A double-disc grinder is a double-sided grinding device for thinning silicon wafers.

[0044] See Figure 1As shown, when grinding a silicon wafer, the silicon wafer 10 is placed vertically in the grinding chamber, and both sides are ground simultaneously by the grinding wheel 30. The position of the silicon wafer 10 in the grinding chamber is controlled by two static pressure plates 20 located on both sides of the silicon wafer 10 through air pressure.

[0045] See Figure 2 As shown, a plurality of air holes 21 are distributed on the static pressure plate 20. The air pressure of the static pressure plate 20 can be monitored by a barometer.

[0046] The static pressure plate air pressure calibration device provided in the embodiment of the present disclosure can be used to calibrate the air pressure on the static pressure plate 20 to avoid measurement deviation of the barometer.

[0047] like Figure 3 As shown, the static pressure plate air pressure calibration device includes: a first sliding assembly 100 , a second sliding assembly 200 , at least one spacing adjustment assembly 300 and an elastic assembly 400 .

[0048] The first sliding assembly 100 includes a first sliding member 110 and a first contact member 120 . The first contact member 120 is connected to the first sliding member 110 . The first contact member 120 is used to contact one of the two static pressure plates 20 .

[0049] The second sliding assembly 200 includes a second sliding member 210 and a second contact member 220. In a first direction, the second sliding member 210 is arranged opposite to the first sliding member 110. The second contact member 220 is connected to the second sliding member 210. The second contact member 220 is used to contact the other of the two static pressure plates 20.

[0050] The elastic component 400 can be pressed between the first sliding member 110 and the second sliding member 210. When in a stationary state, the elastic component 400 is not subjected to force. When subjected to force, the elastic component 400 can apply an elastic force to the first sliding member 110 and the second sliding member 210, thereby buffering the relative movement of the first sliding member 110 and the second sliding member 210 and applying an elastic restoring force to the first sliding member 110 and the second sliding member 210.

[0051] The spacing adjustment assembly 300 is connected between the first sliding member 110 and the second sliding member 210, and the spacing adjustment assembly 300 is configured to enable the first sliding member 110 and the second sliding member 210 to move toward or away from each other along the first direction X to adjust the spacing between the first sliding member 110 and the second sliding member 210 in the first direction X.

[0052] For example, when the elastic assembly 400 is in a stationary state, the first sliding member 110 and the second sliding member 210 have a first distance therebetween. When an external force is applied to the distance adjustment assembly 300, the distance therebetween can be adjusted to a second distance that is smaller than the first distance. When the external force on the distance adjustment assembly 300 is removed, the elastic assembly 400 can apply an elastic restoring force to the first sliding member 110 and the second sliding member 210.

[0053] The static pressure plate air pressure calibration device provided in the embodiment of the present disclosure can control the first sliding member 110 and the second sliding member 210 to move toward each other along the first direction X when performing air pressure calibration on the two static pressure plates 20 located on opposite sides of the silicon wafer 10 in the double-sided grinder by applying an external force to the spacing adjustment component 300, so as to reduce the distance between the two to the second distance. At this time, the first sliding member 110 and the second sliding member 210 can be placed between the two static pressure plates 20; thereafter, the external force on the spacing adjustment component 300 is canceled, and the elastic restoring force of the elastic component 400 is utilized to make the first sliding member 110 and the second sliding member 210 move away from each other, and the first contact member 120 is pressed against one of the static pressure plates 20 and aligned with the predetermined air hole 21, and the second contact member 220 is pressed against the other static pressure plate 20 and aligned with the predetermined air hole 21.

[0054] At this point, the barometer can be used to obtain the air pressure values ​​on the two static pressure plates 20, and based on the air pressure values ​​on the two static pressure plates 20, the air pressure of the static pressure plates 20 can be calibrated. Specifically, if the air pressure values ​​on the two static pressure plates 20 are the same, it can be considered that the air pressure on the two static pressure plates 20 does not need to be corrected; if the air pressure values ​​on the two static pressure plates 20 are different, the air pressure value on the barometer can be adjusted using the barometer's built-in air pressure knob until the air pressure values ​​on the barometers corresponding to the two static pressure plates 20 are the same, completing the air pressure calibration of the static pressure plates 20. In this way, the static pressure plate air pressure calibration device provided in the embodiments of the present disclosure can alleviate the problem of barometer measurement deviation and improve the quality of processed products.

[0055] In some exemplary embodiments, Figure 3As shown, the first sliding member 110 is provided with a track structure 111 extending along a second direction, the second direction Y is perpendicular to the first direction X, and the second sliding member 210 is provided with a push-pull member 211; the spacing adjustment component 300 includes a fixed connecting member 310 and an operable member 320, one end of the fixed connecting member 310 is fixedly connected to the first sliding member 110, and the other end is provided with a first guide groove 311 extending along the first direction X; the operable member 320 is provided with a sliding adaptation structure 321 that can slidably cooperate with the track structure 111, and the operable member 320 is provided with a second guide groove 322, and when the elastic component 400 is in a stationary state, the second guide groove 322 intersects with the extension direction of the first guide groove 311, and the push-pull member 211 is slidably connected in the first guide groove 311 and the second guide groove 322.

[0056] In the above solution, the process of adjusting the distance between the first sliding member 110 and the second sliding member 210 by the distance adjustment assembly 300 is as follows:

[0057] When the operable part 320 is subjected to an external force along the second direction Y, the sliding adaptation structure 321 is slidably matched with the track structure 111, and the sliding adaptation structure 321 moves along the second direction Y toward the direction close to the first sliding part 110 and the second sliding part 210. At this time, the push-pull member 211 is simultaneously guided by the second guide groove 322 on the operable part 320 and the first guide groove 311 on the fixed connection part 310, pushing the second sliding part 210 to move toward the direction close to the first sliding part 110, and the distance between the first sliding part 110 and the second sliding part 210 is reduced, so the elastic component 400 is compressed in the first direction X. At this time, the static pressure plate air pressure calibration device is placed between the two static pressure plates 20, and the external force on the operable part 320 is removed. Then, under the action of the elastic restoring force of the elastic component 400, the second sliding part 210 and the first sliding part 110 are stably pressed against the two static pressure plates 20.

[0058] It should be understood that the above is an exemplary description of the spacing adjustment component 300 , but is not limited thereto. The spacing adjustment component 300 may also be implemented in other ways.

[0059] As an exemplary embodiment, Figure 3 and Figure 5 As shown, either the first sliding member 110 or the second sliding member 210 includes:

[0060] a first portion S1 extending along the second direction Y;

[0061] a second portion S2 connected to the first portion S1 and extending along the first direction X;

[0062] a third portion S3 connected to the first portion S1 and extending along the first direction X;

[0063] In which, the second part S2 and the third part S3 are spaced apart in the second direction Y, and the projection shape of the first part S1, the second part S2 and the third part S3 on the first projection plane is a U-shaped structure, and the first projection plane is a plane defined by the intersection of the first direction X and the second direction Y; the openings of the U-shaped structure corresponding to the first sliding member 110 and the U-shaped structure corresponding to the second sliding member 210 are arranged facing each other.

[0064] In addition, as an exemplary embodiment, the area in the first part S1 located between the second part S2 and the third part S3 along the second direction Y is the middle area S10; wherein, the elastic component 400 is pressed between the middle area S10 of the first sliding member 110 and the middle area S10 of the second part S2.

[0065] With the above solution, the elastic component 400 is located between the two U-shaped structures, which can provide a certain degree of protection for the elastic component 400 , making the structure more stable and the structure of the entire device more compact.

[0066] In addition, as an exemplary embodiment, Figure 3 and Figure 4 As shown, in the first sliding member 110, at least one of the second portion S2 and the third portion S3 includes two first limiting portions S11 spaced apart along a third direction Z, and the third direction Z is perpendicular to the first projection plane;

[0067] Each of the first limiting portions S11 is provided with a limiting protrusion S12 at one end away from the first portion S1 along the first direction X, the limiting protrusion S12 protruding toward the other first limiting portion S11. A gap is formed between the limiting protrusions S12 on the two first limiting portions S11 along the third direction Z. The two first limiting portions S11 cooperate to form the track structure 111.

[0068] like Figure 5As shown, the operable member 320 has two side surfaces arranged opposite to each other in the third direction Z. Each side surface is provided with a groove S13 extending along the second direction Y. The groove S13 divides the operable member 320 into a fourth portion S4 and a fifth portion S5 along the first direction X. The limiting protrusion S12 is embedded in the groove S13, and the fourth portion S4 is accommodated in the space between the two first limiting portions S11.

[0069] In the above solution, the groove S13 cooperates with the limiting protrusion S12 to achieve slidable cooperation between the operable member 320 and the first sliding member 110 , while the structures of the track structure 111 and the sliding adapter structure 321 are simple.

[0070] However, it is understandable that the structures of the track structure 111 and the sliding adaptation structure 321 are not limited thereto.

[0071] In addition, as an example, Figure 6 As shown, in the second sliding member 210, at least one of the second portion S2 and the third portion S3 includes two second limiting portions S14 spaced apart along a third direction Z, wherein the third direction Z is perpendicular to the first projection plane. The push-pull member 211 includes a sliding rod 211', which extends axially along the third direction Z and is connected to the two second limiting portions S14. The portion of the sliding rod 211' located between the two second limiting portions S14 can pass through the first guide slot 311 and the second guide slot 322. This configuration further stabilizes the connection structure of the sliding rod 211' and prevents the sliding rod 211' from slipping out of the first guide slot 311 and the second guide slot 322.

[0072] In addition, as an exemplary embodiment, Figure 3 As shown, two spacing adjustment components 300 are provided between the first sliding component 100 and the second sliding component 210, wherein one spacing adjustment component 300 is located between the first portion S1 of the first sliding component 110 and the first portion S1 of the second sliding component 210, and the other spacing adjustment component 300 is located between the second portion S2 of the first sliding component 110 and the second portion S2 of the second sliding component 210.

[0073] With the above solution, two spacing adjustment components 300 are provided. When the user operates, the user can simultaneously apply opposite forces along the second direction Y to the two spacing adjustment components 300 by pressing to reduce the distance between the first sliding member 110 and the second sliding member 210. The operation is convenient and the structure is more stable.

[0074] In addition, as an exemplary embodiment, Figure 3 As shown, the side of the first contact member 120 away from the second contact member 220 in the first direction X is the first contact side, and the first contact side is provided with a first protrusion A, a second protrusion B, and a third protrusion C in sequence along the second direction Y, wherein the protrusion heights of the first protrusion A, the second protrusion B, and the third protrusion C relative to the first contact side are different, and the protrusion height of the second protrusion B relative to the first contact side is greater than the protrusion height of the third protrusion C relative to the first contact side, and the protrusion height of the third protrusion C relative to the first contact side is greater than the protrusion height of the first protrusion A relative to the first contact side;

[0075] A side of the second contact member 220 away from the first contact member 120 in the first direction X is a second contact side, and a fourth protrusion A', a fifth protrusion B', and a sixth protrusion are sequentially provided on the second contact side along the second direction Y, wherein the protrusion heights of the fourth protrusion A', the fifth protrusion B', and the sixth protrusion C' relative to the second contact side are different, and the protrusion height of the fifth protrusion B' relative to the first contact side is greater than the protrusion height of the sixth protrusion C' relative to the first contact side, and the protrusion height of the sixth protrusion C' relative to the first contact side is greater than the protrusion height of the fourth protrusion A' relative to the first contact side;

[0076] The first protrusion A and the fourth protrusion A' are located on the same straight line in the first direction X, the second protrusion B and the fifth protrusion B' are located on the same straight line in the first direction X, and the third protrusion C and the sixth protrusion C' are located on the same straight line in the first direction X.

[0077] Exemplarily, the protrusion height of the first protrusion A relative to the first contact side is equal to the protrusion height of the fourth protrusion A' relative to the second contact side; the protrusion height of the second protrusion B relative to the first contact side is equal to the protrusion height of the fifth protrusion B' relative to the second contact side; the protrusion height of the third protrusion C relative to the first contact side is equal to the protrusion height of the sixth protrusion C' relative to the second contact side.

[0078] With the above solution, the first protrusion A and the fourth protrusion A' with lower protrusion heights can be used to determine the reference air pressure value, while the third protrusion C and the sixth protrusion C' with higher protrusion heights can be used for calibration testing.

[0079] Specifically, when performing air pressure calibration on the static pressure plate 20, the following steps are included:

[0080] Step S01: Align the first protrusion A and the fourth protrusion A' with the corresponding two air holes 21 on the two static pressure plates 20, and set the air pressure values ​​of the two static pressure plates 20 on the barometer to zero to determine the reference air pressure value.

[0081] Step S02: align the third protrusion C and the sixth protrusion C′ with the corresponding two air holes 21 on the two static pressure plates 20 respectively;

[0082] Step S03: The barometer displays that the air pressure values ​​of the two static pressure plates 20 are positive. If the air pressure values ​​of the two static pressure plates 20 are the same, it is deemed that no air pressure calibration is required. If the air pressure values ​​of the two static pressure plates 20 are different, the air pressure values ​​are adjusted using the air pressure knob provided on the barometer.

[0083] In step S04, after the air pressure value is adjusted, repeat the above steps S01 to S03 until the barometer displays zero when the first protrusion A and the fourth protrusion A' are aligned with the air hole 21, and the barometer displays the same positive pressure value on the two static pressure plates 20 when the third protrusion C and the sixth protrusion C' are aligned with the air hole 21, and the calibration is completed.

[0084] In addition, as an exemplary embodiment, Figure 3 As shown, the elastic assembly 400 includes a spring base 410 and a spring 420. The spring base 410 is fixed to the second sliding member 210. One end of the spring 420 is sleeved on the spring base 410, and the other end abuts against the first sliding member 110. However, the specific structure of the elastic assembly 400 is not limited thereto.

[0085] There are a few points to note:

[0086] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure. Other structures may refer to conventional designs.

[0087] (2) For the sake of clarity, the thickness of layers or regions in the drawings used to describe the embodiments of the present disclosure are exaggerated or reduced, i.e., these drawings are not drawn to scale. It is understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or intervening elements may be present.

[0088] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to form new embodiments.

[0089] The above are only specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. The protection scope of the present disclosure should be based on the protection scope of the claims.

Claims

1. A static pressure plate air pressure calibration device, characterized in that: include: A first sliding assembly includes a first sliding member and a first contact member, wherein the first contact member is connected to the first sliding member; a second sliding assembly comprising a second sliding member and a second contact member, wherein the second sliding member is disposed opposite to the first sliding member in a first direction, and the second contact member is connected to the second sliding member; at least one spacing adjustment assembly connected between the first sliding member and the second sliding member, and capable of causing the first sliding member and the second sliding member to move toward or away from each other along the first direction to adjust the spacing between the first sliding member and the second sliding member in the first direction; The elastic component is pressed between the first sliding member and the second sliding member.

2. The static pressure plate air pressure calibration device according to claim 1, characterized in that: The first sliding member is provided with a track structure extending along a second direction, the second direction being perpendicular to the first direction, and the second sliding member is provided with a push-pull member; the spacing adjustment assembly includes: a fixed connecting member, one end of which is fixedly connected to the first sliding member, and the other end of which is provided with a first guide groove extending along the first direction; and An operable member is provided with a sliding adapter structure that can slidably cooperate with the track structure, and the operable member is provided with a second guide groove, and when the elastic component is in a stationary state, the second guide groove intersects with the extension direction of the first guide groove, and the push-pull member is slidably connected in the first guide groove and the second guide groove.

3. The static pressure plate air pressure calibration device according to claim 2, characterized in that: Either the first slider or the second slider includes: a first portion extending along the second direction; a second portion connected to the first portion and extending along the first direction; a third portion connected to the first portion and extending along the first direction; wherein, The second part and the third part are spaced apart in the second direction, and the projection shape of the first part, the second part and the third part on the first projection plane is a U-shaped structure, and the first projection plane is a plane defined by the intersection of the first direction and the second direction; the openings of the U-shaped structure corresponding to the first sliding member and the U-shaped structure corresponding to the second sliding member are arranged facing each other.

4. The static pressure plate air pressure calibration device according to claim 3, characterized in that: The area of ​​the first part located between the second part and the third part along the second direction is the middle area; wherein the elastic component abuts between the middle area of ​​the first sliding member and the middle area of ​​the second part.

5. The static pressure plate air pressure calibration device according to claim 3, characterized in that: In the first sliding member, at least one of the second portion and the third portion includes two first limiting portions spaced apart along a third direction, the third direction being perpendicular to the first projection plane; wherein, Each of the first limiting portions is provided with a limiting protrusion protruding toward the other first limiting portion at one end away from the first portion along the first direction, and a gap is formed between the limiting protrusions on the two first limiting portions along the third direction, and the two first limiting portions cooperate to form the track structure; The operable part has two side surfaces arranged opposite to each other in the third direction, and each of the side surfaces is provided with a groove extending along the second direction, and the groove divides the operable part into a fourth part and a fifth part along the first direction, wherein the limiting protrusion is embedded in the groove, and the fourth part is accommodated in the space between the two first limiting parts.

6. The static pressure plate air pressure calibration device according to claim 3, characterized in that: In the second sliding member, at least one of the second part and the third part includes two second limiting portions arranged at intervals along a third direction, and the third direction is perpendicular to the first projection plane; wherein the push-pull member includes a sliding rod, which extends axially along the third direction and is connected to the two second limiting portions.

7. The static pressure plate air pressure calibration device according to claim 3, characterized in that: Two spacing adjustment components are provided between the first sliding component and the second sliding component, wherein one spacing adjustment component is located between the first part of the first sliding component and the first part of the second sliding component, and the other spacing adjustment component is located between the second part of the first sliding component and the second part of the second sliding component.

8. The static pressure plate air pressure calibration device according to claim 2, characterized in that: A side of the first contact member that is away from the second contact member in the first direction is a first contact side, and a first protrusion, a second protrusion, and a third protrusion are sequentially provided on the first contact side along the second direction, and the protrusion heights of the second protrusion, the third protrusion, and the first protrusion relative to the first contact side gradually decrease; A side of the second contact member farther from the first contact member in the first direction is a second contact side, and a fourth protrusion, a fifth protrusion, and a sixth protrusion are sequentially provided on the second contact side along the second direction, and the protrusion heights of the fifth protrusion, the sixth protrusion, and the fourth protrusion relative to the first contact side gradually decrease; The first protrusion and the fourth protrusion are located on the same straight line in the first direction, the second protrusion and the fifth protrusion are located on the same straight line in the first direction, and the third protrusion and the sixth protrusion are located on the same straight line in the first direction.

9. The static pressure plate air pressure calibration device according to claim 8, characterized in that: The protrusion height of the first protrusion relative to the first contact side is equal to the protrusion height of the fourth protrusion relative to the second contact side; the protrusion height of the second protrusion relative to the first contact side is equal to the protrusion height of the fifth protrusion relative to the second contact side; the protrusion height of the third protrusion relative to the first contact side is equal to the protrusion height of the sixth protrusion relative to the second contact side.

10. The static pressure plate air pressure calibration device according to claim 1, characterized in that: The elastic component comprises: a spring base, the spring base being fixed on the second sliding member; A spring, one end of which is sleeved on the spring base, and the other end of which is pressed against the first sliding member.

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