Inclined plane feeding structure of thinning machine

Abstract

The utility model provides a thinning machine inclined plane feeding structure which comprises a support of a U-shaped structure, a square box capable of moving up and down in the vertical direction is arranged in the support, a connecting plate capable of moving up and down in the vertical direction is arranged on the front side of the square box, and a lower inclined plane is formed at the bottom end of the connecting plate. A push plate capable of moving in the length direction of the square box is arranged on the lower portion of the front side of the square box, an upper inclined face is formed at the top end of the push plate and abuts against the lower inclined face, a main shaft sleeve is arranged on the connecting plate, and an air main shaft is arranged in the main shaft sleeve. The connecting plate is installed on the square box, the lower inclined face is arranged at the bottom end of the connecting plate and matched with the upper inclined face of the push plate, so that the connecting plate moves up and down, the square box moves up and down through the ball screw, the two sets of feeding systems are arranged, the feeding stroke of the inclined faces is effectively increased, and the device can adapt to thinning of workpieces with various thicknesses. And the advantages of high stability and high precision of the inclined plane feeding mechanism can be reflected.

Description

Technical Field

[0001] The utility model belongs to the technical field of thinning machines and relates to an inclined surface feeding structure of a thinning machine. Background Art

[0002] The semiconductor industry is rapidly developing. Mechanical grinding, a thinning process that has replaced chemical grinding in some applications due to its high efficiency and environmentally friendly advantages, has begun to play a significant role in the industry. As a feed mechanism in mechanical grinding equipment, bevel mechanisms offer excellent grinding stability and precision, ensuring high-quality thinned products, including reduced surface damage, improved surface roughness, and a reduced TTV. However, bevel mechanisms also have significant drawbacks. The mechanism requires a large space, resulting in bulky equipment. Currently available mechanical grinding equipment using bevel mechanisms sacrifices total feed stroke to minimize size, making them unsuitable for processing thicker semiconductor products and only suitable for processing thinner silicon wafers or wafers. However, as the semiconductor industry continues to advance, product materials and types are becoming increasingly diverse, and mechanical grinding equipment using bevel mechanisms should also keep pace with this trend. Therefore, a compact bevel feed mechanism that can accommodate a wide range of semiconductor product thicknesses while ensuring excellent thinning quality has become a pressing need for those skilled in the art. Utility Model Content

[0003] The purpose of the utility model is to provide a thinning machine inclined surface feeding structure to solve the problem that the existing thinning machine with inclined surface mechanism has a small stroke in the background technology.

[0004] To this end, the utility model adopts the following technical solutions:

[0005] A thinning machine inclined surface feeding structure, comprising:

[0006] A support, wherein the support has a U-shaped structure;

[0007] A square box is arranged in the support and can move up and down in the vertical direction. A vertical first slide groove is provided on each side of the width direction of the square box. A first ball screw is provided in the first slide groove. A first nut pair is provided on the first ball screw. The first nut pair is located in the first slide groove and is fixedly connected to the support.

[0008] A connecting plate is provided on the front side of the box and can move up and down in a vertical direction, and a bottom end of the connecting plate forms a downwardly inclined surface;

[0009] A push plate is provided at the lower front portion of the box and is movable along the length of the box, with an upper inclined surface formed at the top end of the push plate, the upper inclined surface being in contact with the lower inclined surface;

[0010] A main shaft sleeve, the main shaft sleeve is mounted on the connecting plate and can move with the connecting plate, and an air main shaft is arranged in the main shaft sleeve;

[0011] Furthermore, a second slide groove is provided at the lower front part of the square box along the length direction of the square box, a second ball screw is provided in the second slide groove, a second nut pair is provided on the second ball screw, and the push plate is fixed on the second nut pair.

[0012] Furthermore, one end of the second ball screw is connected to a second motor for driving the second ball screw to rotate, and the second motor is installed on one side of the square box.

[0013] Furthermore, the second motor is connected to the second ball screw via a reducer.

[0014] Furthermore, the second chute is arranged horizontally.

[0015] Furthermore, the top end of the first ball screw is connected to a first motor, and the first motor is installed on the top end of the square box.

[0016] Furthermore, a plurality of vertically arranged first guide rails are provided on both sides of the square box, a slider is installed on the first guide rail, a first slot is provided on the slider, the first guide rail is located in the first slot, and the slider is fixed to the inner wall of the support.

[0017] Furthermore, a plurality of vertically arranged second guide rails are provided on one side of the square box close to the connecting plate, and a second card slot corresponding to the second guide rails is provided on the connecting plate, and the second guide rails are located in the second card slots.

[0018] Furthermore, the side wall of the main shaft sleeve is connected to a first support rod arranged horizontally, and a second support rod arranged coaxially with the first support rod is provided on the side away from the first support rod. The first support rod is connected to a first support cylinder arranged vertically, and the second support rod is connected to a second support cylinder arranged vertically. The top ends of the first support cylinder and the second support cylinder are fixed to the top of the support.

[0019] The beneficial effect of the present invention is that the connecting plate is installed on the square box, and a lower inclined surface is provided at the bottom end of the connecting plate and cooperates with the upper inclined surface of the push plate, so that the connecting plate moves up and down, and the square box moves up and down through the ball screw. Two sets of feeding systems are provided, which effectively increases the feeding stroke of the inclined surface, can adapt to the thinning of workpieces of various thicknesses, and can also reflect the advantages of high stability and high precision of the inclined surface feeding mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0021] Figure 2 for Figure 1 A partial enlarged view of part A in the middle;

[0022] Figure 3 for Figure 1 A partial enlarged view of part B in the middle;

[0023] Figure 4 This is a schematic front view of the structure of the utility model;

[0024] Figure 5 It is a schematic side view of the structure of the utility model;

[0025] In the figure, 1-support, 2-square box, 3-first slide, 4-first ball screw, 5-first nut pair, 6-first motor, 7-first guide rail, 8-slider, 9-first slot, 10-connecting plate, 11-lower inclined surface, 12-push plate, 13-upper inclined surface, 14-second slide, 15-second ball screw, 16-second nut pair, 17-second motor, 18-reducer, 19-second guide rail, 20-second slot, 21-spindle sleeve, 22-air spindle, 23-first support rod, 24-second support rod, 25-first supporting cylinder, 26-second supporting cylinder. DETAILED DESCRIPTION

[0026] The utility model is described in detail below with reference to the accompanying drawings:

[0027] like Figure 1 As shown, a thinning machine inclined feeding structure includes a U-shaped support 1, a square box 2 is provided in the support 1, and the square box 2 can move up and down in the vertical direction in the support 1. A vertically arranged first slide 3 is provided on each side of the width direction of the square box 2, and a vertically arranged first ball screw 4 is provided in the first slide 3. A first nut pair 5 is provided on the first ball screw 4. The first nut pair 5 is located in the first slide 3 and can move in the first slide 3 under the action of the first ball screw 4. The first nut pair 5 is fixedly connected to the inner wall of the support 1, and is connected to the first nut 5 through the first nut. The pair 5 moves, which can make the square box 2 move up and down in the vertical direction relative to the support 1. The top end of the first ball screw 4 is connected to the first motor 6 for driving the first ball screw 4 to rotate. The first motor 6 is installed on the top of the square box 2. In order to make the square box 2 more stable when moving up and down, a plurality of vertically arranged first guide rails 7 are provided on both sides of the square box 2. Slide blocks 8 are installed on the first guide rails 7. The slide blocks 8 are fixed to the inner wall of the support 1. The slide blocks 8 are provided with first slots 9. The first guide rails 7 are located in the first slots 9. The first guide rails 7 can make the movement of the square box 2 more stable.

[0028] The front side of the box 2 is provided with a connecting plate 10, which can move up and down in the vertical direction, that is, relative to the box 2, the bottom end of the connecting plate 10 forms a lower inclined surface 11, and the lower part of the front side of the box 2 is provided with a push plate 12 which can move along the length direction of the box 2. The top of the push plate 2 forms an upper inclined surface 13. The upper inclined surface 13 always rests on the lower inclined surface 11 under the action of gravity, and one side of the push plate 2 rests on the side wall of the box 2. The horizontal movement of the push plate 12 can make the connecting plate 10 move up and down in the vertical direction. When the push plate 12 moves toward the lower side of the upper inclined surface 13, the connecting plate 10 is lifted up, so that the connecting plate 10 moves upward. When the push plate 12 moves to the higher side of the upper inclined surface 13, the connecting plate 10 moves downward under the action of gravity. Specifically, the lower part of the front side of the box 2 is provided with a second slide groove 14 horizontally arranged along the length direction of the box. A second ball screw 15 is provided in the second slide groove 14, and a second nut pair 16 is provided on the second ball screw 15. The push plate 12 is fixed on the second nut pair 16, and the push plate 12 can be driven to move by the second nut pair 16. One end of the second ball screw 15 is connected to a second motor 17 for driving the second ball screw 15 to rotate. The second motor 17 is installed on one side of the square box 2. In order to increase the torque, the second motor 17 is connected to the second ball screw 15 through a reducer 18. In order to make the connecting plate 10 more stable during movement, a plurality of vertically arranged second guide rails 19 are provided on one side of the square box 2 close to the connecting plate 10, and a second groove 20 corresponding to the second guide rail 19 is provided on the connecting plate 10. The second guide rail position 19 is in the second groove 20. The cross section of the second guide rail 19 is a T-shaped structure, and the cross section of the second groove 20 is also a T-shaped structure.

[0029] A main shaft sleeve 21 that can move with the connecting plate 10 is installed on the connecting plate 10, and an air spindle 22 is arranged in the main shaft sleeve 21. Both the main shaft sleeve 21 and the air spindle 22 adopt conventional equipment of existing thinning machines. A grinding wheel can be installed on the air spindle 22 for thinning operations. The main shaft sleeve 21 and the air spindle 22 can be driven to move up and down through the connecting plate 10. Through the up and down movement of the square box 2 and the movement of the connecting plate 10, the air spindle 22 can have a larger stroke to meet the processing requirements of semiconductor materials of different thicknesses, and at the same time have better precision.

[0030] The side wall of the main shaft sleeve 21 is connected to a first support rod 23 that is arranged horizontally, and a second support rod 24 that is coaxial with the first support rod 23 is provided on the side away from the first support rod 23. The first support rod 23 is connected to a first support cylinder 25 that is arranged vertically, and the second support rod 24 is connected to a second support cylinder 26 that is arranged vertically. The top ends of the first support cylinder 25 and the second support cylinder 26 are fixed to the top of the support 1. The first support rod 23 and the second support rod 24 can support the main shaft sleeve 11. Since the air main shaft 22 and the main shaft sleeve 21 are heavy and have a forward center of gravity, this will generate a huge torque between the connecting plate 10 and the main shaft sleeve 21, causing the main shaft sleeve 11 to be tilted. The shaft sleeve 21 falls off from the connecting plate 10, so the cylinder is installed to balance the torque. The first supporting cylinder 25 and the second supporting cylinder 26 are both conventional structures in the field. The first supporting cylinder 25 and the second supporting cylinder 26 are provided with a constant pressure valve. The pressure value of the constant pressure valve is set according to the gravity of the air main shaft 22, so that it always outputs a force slightly smaller than the gravity of the air main shaft 22 upward to support the air main shaft. When the air main shaft 22 moves downward, the first supporting cylinder 25 and the second supporting cylinder 26 extend accordingly, the pressure in the rod cavity will increase, and the constant pressure valve will relieve pressure, so the first supporting cylinder 25 and the second supporting cylinder 26 always output a force slightly smaller than the gravity of the air main shaft 22 upward.

[0031] The usage of this utility model is as follows:

[0032] When the product is subjected to mechanical grinding and thinning operations, first, the two first motors 6 rotate simultaneously, driving the two first ball screws 4 to rotate, so that the square box 2 moves upward, and the air spindle 22 moves to the farthest position from the product to ensure that the inclined feeding structure can adapt to processed products of various thicknesses. At the same time, the push plate 12 is located at the lower end of the lower inclined surface 11 of the connecting plate 10, so that the connecting plate 10 is located at the highest position, and then the first ball screw 6 is rotated in the opposite direction to move the square box 2 downward, so that the air spindle 22 moves downward to reduce the distance from the product, completing the idle stroke or rough grinding. During this process, the dynamic spindle sleeve 2 drives the first support cylinder 25 and the second support cylinder 26 to extend simultaneously.

[0033] After the idle stroke or rough grinding stage feeding is completed, the fine grinding stage feeding is carried out. During the fine grinding stage feeding, the two first motors 6 remain locked, so that the square box 2 remains stationary, and the second motor 17 runs, driving the second ball screw 15 to rotate through the reducer 18, and the second nut pair 16 drives the push plate 12 to move along the length direction of the square box 2, that is, the push plate 12 moves toward the higher end of the lower inclined surface 11 of the connecting plate 10, so that the connecting plate 10, the main shaft sleeve 21 and the air spindle 22 move downward under the action of gravity, achieving higher quality fine grinding stage feeding. During this process, the dynamic main shaft sleeve 2 drives the first supporting cylinder 25 and the second supporting cylinder 26 to extend at the same time, and provide support for the air spindle 22.

[0034] This structure uses two feeding systems, a combination of ball screw direct feeding and inclined plane mechanism feeding, to adapt to semiconductor products of various thicknesses while also embodying the advantages of high stability and high precision of the inclined plane feeding mechanism.

Claims

1. A thinning machine inclined feeding structure, characterized in that, include: A support (1), wherein the support (1) is in a U-shaped structure; A square box (2), the square box (2) is arranged in a support (1) and can move up and down in a vertical direction, a vertically arranged first slide groove (3) is provided on each side of the width direction of the square box (2), a first ball screw (4) is provided in the first slide groove (3), a first nut pair (5) is provided on the first ball screw (4), the first nut pair (5) is located in the first slide groove (3), and the first nut pair (5) is fixedly connected to the support (1); A connecting plate (10), the connecting plate (10) being arranged on the front side of the square box (2) and being movable up and down in a vertical direction, the bottom end of the connecting plate (10) forming a lower inclined surface (11); A push plate (12), the push plate (12) is arranged at the lower front portion of the box (2) and is movable along the length direction of the box (2), the top end of the push plate (12) forms an upper inclined surface (13), and the upper inclined surface (13) abuts against the lower inclined surface (11); A main shaft sleeve (21) is mounted on the connecting plate (10) and can move with the connecting plate (10), and an air main shaft (22) is provided in the main shaft sleeve (21).

2. A thinning machine inclined surface feeding structure according to claim 1, characterized in that: A second slide groove (14) is provided at the lower front portion of the square box (2) along the length direction of the square box (2), a second ball screw (15) is provided in the second slide groove (14), a second nut pair (16) is provided on the second ball screw (15), and the push plate (12) is fixed on the second nut pair (16).

3. A thinning machine inclined surface feeding structure according to claim 2, characterized in that: One end of the second ball screw (15) is connected to a second motor (17) for driving the second ball screw (15) to rotate, and the second motor (17) is installed on one side of the square box (2).

4. The inclined surface feeding structure of a thinning machine according to claim 3, characterized in that: The second motor (17) is connected to the second ball screw (15) via a reducer (18).

5. The inclined surface feeding structure of a thinning machine according to claim 2, characterized in that: The second chute (14) is arranged horizontally.

6. The inclined surface feeding structure of a thinning machine according to claim 1, characterized in that: The top end of the first ball screw (4) is connected to a first motor (6), and the first motor (6) is installed on the top end of the square box (2).

7. The inclined surface feeding structure of a thinning machine according to claim 1, characterized in that: A plurality of vertically arranged first guide rails (7) are provided on both sides of the square box (2), a slider (8) is installed on the first guide rail (7), a first slot (9) is provided on the slider (8), the first guide rail (7) is located in the first slot (9), and the slider (8) is fixed to the inner wall of the support (1).

8. The inclined surface feeding structure of a thinning machine according to claim 1, characterized in that: A plurality of vertically arranged second guide rails (19) are provided on one side of the square box (2) close to the connecting plate (10), and a second card slot (20) corresponding to the second guide rail (19) is provided on the connecting plate (10). The second guide rail (19) is located in the second card slot (20).

9. The inclined surface feeding structure of a thinning machine according to claim 1, characterized in that: The side wall of the main shaft sleeve (21) is connected to a first support rod (23) arranged horizontally, and a second support rod (24) arranged coaxially with the first support rod (23) is provided on a side away from the first support rod (23); the first support rod (23) is connected to a first support cylinder (25) arranged vertically, and the second support rod (24) is connected to a second support cylinder (26) arranged vertically, and the top ends of the first support cylinder (25) and the second support cylinder (26) are fixed to the top of the support (1).

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