Liquid-gas conversion mechanism for thin film deposition equipment

Abstract

The utility model discloses a liquid-gas conversion mechanism for thin film deposition equipment, which belongs to the technical field of liquid-gas conversion mechanisms and comprises a heating machine base and a storage container, the storage container is arranged above the heating machine base, a gas outlet pipe is arranged above the storage container, and a water stirring mechanism is arranged in the storage container. The water stirring mechanism comprises a driven rotating plate, a hinged connecting rod, a lifting sliding sleeve and a lifting stirring frame. The driven rotating plate is rotationally connected into an inner cavity of the storage container. According to the utility model, through the arrangement of the steam driving mechanism, a gaseous precursor formed by evaporation can eject the driving rotating plate which is rotatably connected inside to different degrees when passing through the air outlet pipe, so that continuous shaking force generated by the driving rotating plate under the action of steam is transmitted to the driven rotating plate through the driving wheel, the transmission belt and the driven wheel; therefore, the effects of promoting the flowability of the liquid precursor and enhancing heat dissipation in the heating process by fully utilizing the power generated by the steam are achieved.

Description

Technical Field

[0001] The utility model belongs to the technical field of liquid-gas conversion mechanisms, in particular to a liquid-gas conversion mechanism for thin film deposition equipment. Background Art

[0002] During the CVD process, the liquid-to-gas conversion mechanism is primarily responsible for converting liquid precursors into gaseous precursors for chemical reactions. Specifically, the liquid-to-gas conversion mechanism converts liquid precursors into gaseous precursors through heating, evaporation, and other methods. These gaseous precursors then enter the reaction chamber for chemical reactions. This process is crucial for controlling the reaction rate and improving film quality. Application No. 202322580698.6 describes an evaporating crucible comprising an integral crucible body and a material guide tube. The crucible body is cylindrical, with an open top for feeding. The upper portion of the material guide tube extends from the bottom of the crucible body toward the interior of the crucible body, with the upper edge of the material guide tube lower than the upper edge of the crucible body; the lower portion of the material guide tube extends downward from the bottom of the crucible body. When heating materials using this evaporating crucible, the materials are heated evenly and evaporate quickly, and the material guide tube located in the crucible allows most of the gaseous material to flow out of the crucible.

[0003] The above technical solution is not convenient for automatic stirring when evaporating the liquid precursor. As a result, the fluidity of the liquid precursor in the heating container is average, and the heat dissipation efficiency is low, which is not conducive to rapid evaporation of the liquid. In addition, it is not convenient to effectively use steam power to heat the liquid for enhanced stirring during the evaporation of the liquid precursor. Utility Model Content

[0004] The purpose of the present utility model is to provide a liquid-gas conversion mechanism for thin film deposition equipment to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solution: a liquid-gas conversion mechanism for a thin film deposition equipment, comprising a heating machine base and a storage container, the storage container is arranged above the heating machine base, an air outlet pipe is arranged above the storage container, a water diverting mechanism is arranged inside the storage container, the water diverting mechanism comprises a driven rotating plate, a hinged connecting rod, a lifting sleeve and a lifting frame, the driven rotating plate is rotatably connected to the inner cavity of the storage container, the lifting frame is slidably connected to the inner cavity of the storage container, the lifting sleeve is embedded and fixed at the center of the lifting frame, the hinged connecting rod is hinged between the lifting sleeve and the driven rotating plate, a steam driving mechanism is arranged inside the air outlet pipe, the steam driving mechanism comprises an active rotating plate, a driving wheel, a transmission belt and a driven wheel, the active rotating plate is rotatably connected to the air outlet pipe through a rotating shaft, the driving wheel is fixed to the other rotating end of the active rotating plate, the driven wheel is fixed to the other end of the rotating shaft of the driven rotating plate, and the transmission belt is meshed and connected between the active wheel and the driven wheel.

[0006] It should be noted in the solution that a lifting guide rod is fixed at the center of the inner bottom wall of the storage container, and the lifting sleeve is slidably connected to the lifting guide rod.

[0007] It is further worth mentioning that a first hinge seat is provided on the side surface of the driven rotating plate, a second hinge seat is provided on the side surface of the lifting sleeve, one end of the hinge connecting rod is rotatably connected to the first hinge seat, and the other end of the hinge connecting rod is rotatably connected to the second hinge seat.

[0008] It should be further explained that a rotating seat is provided on the inner wall of the storage container, an extended rotating shaft is fixed at the center of one end face of the driven wheel, and the other end of the extended rotating shaft is rotatably connected to the rotating seat.

[0009] As a preferred embodiment, a rotation receiving interlayer is provided inside the air outlet pipe, and the driving wheel is rotatably connected to the rotation receiving interlayer of the air outlet pipe.

[0010] As a preferred embodiment, a sealing cover is provided on the upper end surface of the storage container, the lower end of the air outlet pipe is fixed at the top center of the sealing cover, and one end of the transmission belt passes through the air outlet pipe and the sealing cover.

[0011] Compared with the prior art, the liquid-gas conversion mechanism for thin film deposition equipment provided by the present invention has at least the following beneficial effects:

[0012] Through the steam drive mechanism, the evaporated gaseous precursor will produce different degrees of pushing on the internally rotating active rotating plate when passing through the outlet pipe. In this way, the continuous shaking force generated by the active rotating plate under the action of steam is transmitted to the driven rotating plate through the driving wheel, transmission belt and driven wheel, thereby making full use of the power generated by steam to promote the fluidity of the liquid precursor and enhance heat dissipation during the heating process.

[0013] Through the set water-dipping mechanism, during the shaking process of the active turn plate, the driven turn plate in a continuously reciprocating flipping state can perform a dipping operation on the liquid precursor in the storage container, and the lifting and lowering rack can move back and forth in the liquid precursor in the storage container. The lifting and lowering rack cooperates with the driven turn plate to ensure that the liquid precursor maintains strong fluidity during the heating process, thereby promoting the dissipation of heat and the formation of steam in the liquid precursor. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a three-dimensional diagram of the overall structure of the utility model;

[0015] Figure 2 This is a three-dimensional diagram of the cross-sectional structure of the sealing cover plate of the present invention;

[0016] Figure 3This is a three-dimensional diagram of the lifting frame structure of the utility model;

[0017] Figure 4 This is a three-dimensional diagram of the hinged connecting rod structure of the present invention.

[0018] In the figure: 1. Heating machine base; 2. Storage container; 3. Sealing cover; 4. Exhaust pipe; 5. Active rotating plate; 6. Rotated interlayer; 7. Driving wheel; 8. Transmission belt; 9. Driven wheel; 10. Extended rotating shaft; 11. Driven rotating plate; 12. Articulated connecting rod; 13. First articulated seat; 14. Second articulated seat; 15. Lifting sleeve; 16. Lifting rack; 17. Lifting guide rod. DETAILED DESCRIPTION

[0019] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0020] See also Figure 1-4 The utility model provides a liquid-gas conversion mechanism for a thin film deposition device, comprising a heating base 1 and a storage container 2, the storage container 2 is arranged above the heating base 1, an air outlet pipe 4 is arranged above the storage container 2, a water diversion mechanism is arranged inside the storage container 2, the water diversion mechanism comprises a driven rotating plate 11, a hinged connecting rod 12, a lifting sleeve 15 and a lifting frame 16, the driven rotating plate 11 is rotatably connected to the inner cavity of the storage container 2, the lifting frame 16 is slidably connected to the inner cavity of the storage container 2, the lifting sleeve 15 is connected to the inner cavity of the storage container 2, and the lifting sleeve 15 is connected to the inner cavity of the storage container 2. It is embedded and fixed in the center of the lifting and lowering frame 16, and the hinged connecting rod 12 is hinged between the lifting sleeve 15 and the driven rotating plate 11. A steam driving mechanism is provided inside the outlet pipe 4, and the steam driving mechanism includes an active rotating plate 5, a driving wheel 7, a transmission belt 8 and a driven wheel 9. The active rotating plate 5 is rotatably connected to the outlet pipe 4 through a rotating shaft, the driving wheel 7 is fixed to the other rotating end of the active rotating plate 5, and the driven wheel 9 is fixed to the other end of the rotating shaft of the driven rotating plate 11. The transmission belt 8 is meshed and connected between the active wheel 7 and the driven wheel 9.

[0021] Further as Figure 1 、 Figure 2 and Figure 3 As shown, it is worth noting that a lifting guide rod 17 is fixed at the center of the inner bottom wall of the storage container 2, and the lifting sleeve 15 is slidably connected to the lifting guide rod 17.

[0022] Further as Figure 3As shown, it is worth mentioning that a first articulated seat 13 is provided on the side surface of the driven rotating plate 11, a second articulated seat 14 is provided on the side surface of the lifting sleeve 15, one end of the articulated link 12 is rotatably connected to the first articulated seat 13, and the other end of the articulated link 12 is rotatably connected to the second articulated seat 14.

[0023] This solution has the following working process: before use, the sealing cover plate 3 is covered on the upper end of the storage container 2. When the heating base 1 is powered on, the storage container 2 and the liquid precursor inside can be heated. After being heated, the liquid precursor is converted into a gaseous precursor and discharged into the processing chamber of the thin film deposition equipment through the outlet pipe 4. In this process, the evaporated gaseous precursor will produce different degrees of pushing on the internal rotating active rotating plate 5 when passing through the outlet pipe 4. In this way, the continuous shaking force generated by the active rotating plate 5 under the action of steam is transmitted to the driven rotating plate 11 through the driving wheel 7, the transmission belt 8 and the driven wheel 9, thereby making full use of the power generated by the steam to promote the fluidity of the liquid precursor and enhance the heat dissipation during the heating process.

[0024] According to the above working process, it can be known that the gaseous precursor formed by evaporation will produce different degrees of pushing on the active rotating plate 5 connected internally when passing through the outlet pipe 4. In this way, the continuous shaking force generated by the active rotating plate 5 under the action of steam is transmitted to the driven rotating plate 11 through the driving wheel 7, the transmission belt 8 and the driven wheel 9, thereby making full use of the power generated by the steam to promote the fluidity of the liquid precursor and enhance the heat dissipation during the heating process.

[0025] Further as Figure 1 、 Figure 2 and Figure 4 As shown, it is worth mentioning that a turntable is provided on the inner wall of the storage container 2, and an extended rotating shaft 10 is fixed at the center of one end face of the driven wheel 9, and the other end of the extended rotating shaft 10 is rotatably connected to the turntable. During the shaking of the active turntable 5, the driven turntable 11 in a continuously reciprocating flipping state can perform a shifting operation on the liquid precursor in the storage container 2, and the reciprocating low-frequency shaking of the driven turntable 11 can drive the lifting sleeve 15 hinged to the hinged connecting rod 12 to slide up and down along the lifting guide rod 17, so that the lifting and shifting frame 16 can move back and forth in the liquid precursor of the storage container 2, and the lifting and shifting frame 16 cooperates with the driven turntable 11 to ensure that the liquid precursor maintains strong fluidity during the heating process, thereby promoting the dissipation of heat and the formation of steam in the liquid precursor.

[0026] Further as Figure 4 As shown, it is worth noting that a rotation receiving interlayer 6 is provided inside the air outlet pipe 4 , and the driving wheel 7 is rotatably connected to the rotation receiving interlayer 6 of the air outlet pipe 4 .

[0027] Further as Figure 1As shown, it is worth mentioning that a sealing cover plate 3 is provided on the upper end surface of the storage container 2, the lower end of the air outlet pipe 4 is fixed at the top center of the sealing cover plate 3, and one end of the transmission belt 8 passes through the air outlet pipe 4 and the sealing cover plate 3.

[0028] In summary: the gaseous precursor formed by evaporation will produce different degrees of pushing on the active rotating plate 5 connected internally when passing through the exhaust pipe 4, so that the continuous shaking force generated by the active rotating plate 5 under the action of steam is transmitted to the driven rotating plate 11 through the driving wheel 7, the transmission belt 8 and the driven wheel 9, thereby making full use of the power generated by the steam to promote the fluidity of the liquid precursor and enhance the heat dissipation during the heating process; during the shaking process of the active rotating plate 5, the driven rotating plate 11 in the continuous reciprocating flipping state can perform a shifting operation on the liquid precursor in the storage container 2, and the lifting and shifting frame 16 can move back and forth in the liquid precursor in the storage container 2. The lifting and shifting frame 16 cooperates with the driven rotating plate 11 to ensure that the liquid precursor maintains strong fluidity during the heating process, thereby promoting the heat dissipation and steam formation in the liquid precursor.

[0029] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. Although the embodiments of the present invention have been shown and described, this does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention. Regarding the contents of the embodiments of the present invention, ordinary technicians in this field can understand that these embodiments can be subjected to various changes, modifications, substitutions and variations without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the attached claims and their equivalents.

Claims

1. A liquid-gas conversion mechanism for a thin film deposition device, comprising a heating base (1) and a storage container (2), wherein the storage container (2) is arranged above the heating base (1), and is characterized in that: An air outlet pipe (4) is provided above the storage container (2), and a water diversion mechanism is provided inside the storage container (2), the water diversion mechanism comprising a driven rotating plate (11), a hinged connecting rod (12), a lifting sliding sleeve (15) and a lifting frame (16), the driven rotating plate (11) is rotatably connected to the inner cavity of the storage container (2), the lifting frame (16) is slidably connected to the inner cavity of the storage container (2), the lifting sliding sleeve (15) is embedded and fixed at the center of the lifting frame (16), the hinged connecting rod (12) is hinged to the lifting frame (16), and the lifting sliding sleeve (15) is fixed to the center of the lifting frame (16). A steam drive mechanism is provided inside the air outlet pipe (4) between the sliding sleeve (15) and the driven rotating plate (11). The steam drive mechanism comprises a driving rotating plate (5), a driving wheel (7), a transmission belt (8) and a driven wheel (9). The driving rotating plate (5) is rotatably connected to the air outlet pipe (4) via a rotating shaft. The driving wheel (7) is fixed to the other rotating end of the driving rotating plate (5). The driven wheel (9) is fixed to the other end of the rotating shaft of the driven rotating plate (11). The transmission belt (8) is meshedly connected between the driving wheel (7) and the driven wheel (9).

2. The liquid-to-gas conversion mechanism for thin film deposition equipment according to claim 1, wherein: A lifting guide rod (17) is fixed at the center of the inner bottom wall of the storage container (2), and the lifting sliding sleeve (15) is slidably connected to the lifting guide rod (17).

3. The liquid-to-gas conversion mechanism for thin film deposition equipment according to claim 2, characterized in that: A first hinge seat (13) is provided on the side surface of the driven rotating plate (11), a second hinge seat (14) is provided on the side surface of the lifting sleeve (15), one end of the hinge connecting rod (12) is rotatably connected to the first hinge seat (13), and the other end of the hinge connecting rod (12) is rotatably connected to the second hinge seat (14).

4. The liquid-to-gas conversion mechanism for thin film deposition equipment according to claim 3, wherein: The inner wall of the storage container (2) is provided with a rotating seat, an extended rotating shaft (10) is fixed at the center of one end surface of the driven wheel (9), and the other end of the extended rotating shaft (10) is rotatably connected to the rotating seat.

5. The liquid-to-gas conversion mechanism for thin film deposition equipment according to claim 4, characterized in that: A rotating interlayer (6) is provided inside the air outlet pipe (4), and the driving wheel (7) is rotatably connected to the rotating interlayer (6) of the air outlet pipe (4).

6. The liquid-to-gas conversion mechanism for thin film deposition equipment according to claim 5, characterized in that: The upper end surface of the storage container (2) is provided with a sealing cover plate (3), the lower end of the air outlet pipe (4) is fixed at the top center of the sealing cover plate (3), and one end of the transmission belt (8) passes through the air outlet pipe (4) and the sealing cover plate (3).

Images