Special gas diaphragm compressor

Abstract

The utility model provides a special gas diaphragm compressor, and relates to the field of compressors. The special gas diaphragm compressor applies special gas with low critical temperature and critical pressure, and comprises a gas side diaphragm head and an anti-residue assembly, a plurality of exhaust holes and a plurality of liquid guide grooves are formed in the molded surface of the gas side film head, the liquid guide grooves are distributed in a radial shape, the radial concentration end of each liquid guide groove is close to the center of the gas side film head, and the other end of each liquid guide groove is close to the outer edge of the gas side film head; the multiple exhaust holes are all located in the center of the gas side film head and are formed in the circumferential direction of the gas side film head at intervals. The number of the liquid guide grooves is smaller than or equal to that of the exhaust holes, and the multiple liquid guide grooves communicate with the corresponding exhaust holes correspondingly. And the anti-residue assembly is communicated with the liquid guide groove. The special gas diaphragm compressor solves the technical problem that a conventional special gas diaphragm compressor is high in failure rate in the prior art.

Description

Technical Field

[0001] The present application relates to the field of compressors, and in particular, to a special gas diaphragm compressor. Background Art

[0002] A diaphragm compressor is a reciprocating positive displacement compressor that completely isolates the high-pressure oil system from the gas compression system through a diaphragm. The gas compression system in the diaphragm cavity is completely sealed from the outside world, ensuring no leakage and no contamination during the gas compression process.

[0003] The pressure and temperature of the gas will change rapidly during the suction and exhaust process of the diaphragm head. For some special gas diaphragm compressors, due to the low critical temperature and critical pressure of the gas (for example, phosphorus pentafluoride, the critical temperature is about 18.95 ° C, and the critical pressure is about 3.39 MPa), the gas may be liquefied during the compression process. After the gas is liquefied, its physical properties change dramatically. The flow characteristics change from low flow resistance to high flow resistance, and the compressibility changes from easy to compress to difficult to compress. However, the driving mechanism of the diaphragm compressor is designed according to the characteristics of the gas. After the gas is liquefied, the driving mechanism continues to pressurize, and the liquid is difficult to discharge, which will cause overpressure in the diaphragm cavity, causing the diaphragm to rupture and fail, and even cause the driving mechanism (such as the crank, connecting rod, etc.) to break and fail. Therefore, conventional special gas diaphragm compressors are prone to failure. Utility Model Content

[0004] The purpose of the embodiments of the present application is to provide a special gas diaphragm compressor to alleviate the technical problem of high failure rate of conventional special gas diaphragm compressors in the prior art.

[0005] In order to solve the above technical problems, the technical solution provided by the present invention is:

[0006] The special gas diaphragm compressor provided by the utility model uses special gases with low critical temperature and critical pressure, and includes a gas side diaphragm head and an anti-residue component;

[0007] The profile of the air side membrane head is provided with a plurality of exhaust holes and a plurality of liquid guide grooves, and the plurality of liquid guide grooves are radially distributed, with the radial concentrated end close to the center of the air side membrane head and the other end close to the outer edge of the air side membrane head;

[0008] The plurality of exhaust holes are all located at the center of the air side membrane head and are spaced apart along the circumference of the air side membrane head;

[0009] The number of the liquid-conducting grooves is less than or equal to the number of the exhaust holes, and the plurality of liquid-conducting grooves are respectively connected to the corresponding exhaust holes;

[0010] The anti-residue component is communicated with the liquid guiding groove.

[0011] Furthermore, the profile of the air-side membrane head is further provided with an annular liquid-conducting groove, which extends along the circumference of the air-side membrane head and is connected with the plurality of liquid-conducting grooves.

[0012] Furthermore, the annular liquid guiding groove is annular and is arranged concentrically with the air side membrane head; and / or, there are multiple annular liquid guiding grooves, and the multiple annular liquid guiding grooves are arranged at intervals along the radial direction of the air side membrane head.

[0013] Furthermore, the cross-sections of the liquid-conducting groove and the annular liquid-conducting groove are both configured to be semicircular, rectangular, or the bottom wall is configured to be arc-shaped.

[0014] Furthermore, the anti-residue component includes a drainage channel, a stop valve and a recovery container;

[0015] One end of the drainage channel is communicated with the liquid guiding groove, and the other end is communicated with the recovery container, and the shut-off valve is installed in the drainage channel.

[0016] Furthermore, the drainage channel includes a first channel, a second channel and a third channel;

[0017] The air side membrane head is provided with the first channel and the second channel, one end of the first channel is connected to the liquid guide groove, the other end is connected to the second channel, and extends along the axial direction of the air side membrane head; the second channel extends along the radial direction of the air side membrane head;

[0018] The anti-residue component further includes a connecting pipe, the connecting pipe is provided with the third channel, one end of the third channel is connected to the second channel, and the other end is connected to the recovery container, and the shut-off valve is installed on the connecting pipe.

[0019] Furthermore, the special gas diaphragm compressor includes a main pump, a reversing valve and a variable frequency motor. The reversing valve is connected to the main pump and the gas side diaphragm head respectively, and the variable frequency motor is transmission-connected to the main pump.

[0020] Furthermore, the special gas diaphragm compressor includes a heat exchange component, and the profile of the gas-side diaphragm head is also provided with an air inlet hole;

[0021] The heat exchange component includes an exhaust pipe and an air intake pipe. The exhaust pipe is communicated with the exhaust hole, and the air intake pipe is communicated with the air intake hole. The exhaust pipe and the air intake pipe are adjacent to each other.

[0022] Furthermore, the air intake pipe is sleeved on the exhaust pipe.

[0023] Based on the above technical solutions, the technical effects that can be achieved by this utility model are analyzed as follows:

[0024] The utility model provides a special gas diaphragm compressor, which uses special gases with low critical temperature and critical pressure, and includes a gas-side diaphragm head and an anti-residue component; the surface of the gas-side diaphragm head is provided with a plurality of exhaust holes and a plurality of liquid guide grooves, and the plurality of liquid guide grooves are radially distributed, with the radial concentrated end close to the center of the gas-side diaphragm head and the other end close to the outer edge of the gas-side diaphragm head; the plurality of exhaust holes are all located at the center of the gas-side diaphragm head and are arranged at intervals along the circumference of the gas-side diaphragm head; the number of liquid guide grooves is less than or equal to the number of exhaust holes, and the plurality of liquid guide grooves are respectively connected to the corresponding exhaust holes; the anti-residue component is connected to the liquid guide grooves. The function of the liquid guide grooves is that when the gas is liquefied, the diaphragm continues to move and eventually sticks to the surface of the diaphragm head. At this time, the liquid can be contained in the liquid guide grooves and connected to the exhaust holes through the liquid guide grooves, thereby being discharged. Since the liquid is contained in the liquid guide grooves, there is no liquid between the surface of the gas-side diaphragm head and the diaphragm, so it will not have a great impact on the drive mechanism of the compressor, thereby avoiding failure of the compressor after the gas is liquefied. Specialty gases are gases with low critical temperatures and pressures, such as phosphorus pentafluoride, which has a critical temperature of approximately 18.95°C and a critical pressure of approximately 3.39 MPa. Multiple radially distributed liquid guide grooves increase their distribution area and ensure uniform liquid flow. Furthermore, before the compressor starts, an anti-residue assembly drains the liquid to prevent residual liquid from remaining in the air-side diaphragm, thus preventing liquid from impacting the compressor during initial startup. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 A schematic structural diagram of the gas-side diaphragm head in the special gas diaphragm compressor provided in an embodiment of the present application;

[0027] Figure 2 A schematic structural diagram of a liquid discharge channel in a special gas diaphragm compressor provided in an embodiment of the present application;

[0028] Figure 3 A schematic structural diagram of a heat exchange component in a special gas diaphragm compressor provided in an embodiment of the present application;

[0029] Figure 4 This is a system schematic diagram of the special gas diaphragm compressor provided in an embodiment of the present application.

[0030] icon:

[0031] 1-air side membrane head; 11-liquid guide groove; 12-annular liquid guide groove; 13-drainage channel;

[0032] 2-stop valve; 3-recovery container;

[0033] 6-main pump; 7-reversing valve; 5-frequency conversion motor;

[0034] 4-heat exchange component; 42-exhaust pipe; 41-intake pipe; DETAILED DESCRIPTION

[0035] To make the objectives, technical solutions, and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all of the embodiments. Generally, the components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0036] In the description of this application, it should be noted that the terms "inner" and "outer" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or the orientations or positional relationships in which the product of this application is typically placed when in use. These terms are intended solely to facilitate the description of this application and simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first" and "second" and the like are used solely for distinction and should not be construed as indicating or implying relative importance.

[0037] It should also be noted that, in the description of this application, unless otherwise expressly specified or limited, the terms "disposed" and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to direct connections, indirect connections through an intermediate medium, or internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0038] See also Figures 1 to 4 The special gas diaphragm compressor provided by the embodiment of the present invention uses special gases with low critical temperature and critical pressure, and includes an air side membrane head 1 and an anti-residue component; the surface of the air side membrane head 1 is provided with multiple exhaust holes and multiple liquid guide grooves 11, and the multiple liquid guide grooves 11 are radially distributed, with their radial concentrated ends close to the center of the air side membrane head 1, and the other ends close to the outer edge of the air side membrane head 1; the multiple exhaust holes are all located at the center of the air side membrane head 1, and are arranged at intervals along the circumference of the air side membrane head 1; the number of liquid guide grooves 11 is less than or equal to the number of exhaust holes, and the multiple liquid guide grooves 11 are respectively connected to the corresponding exhaust holes; the anti-residue component is connected to the liquid guide grooves 11.

[0039] Specifically, see Figure 1 When the number of liquid guide grooves 11 is equal to the number of exhaust holes, multiple liquid guide grooves 11 are connected to multiple exhaust holes in a one-to-one correspondence; when the number of liquid guide grooves 11 is less than the number of exhaust holes, each liquid guide groove 11 is connected to the adjacent exhaust holes respectively. The diaphragm of the special gas diaphragm compressor compresses the gas, and when the gas is liquefied, the liquid can enter the liquid guide groove 11. When the diaphragm continues to compress and sticks to the air-side membrane head 1, since the liquid enters the liquid guide groove 11, there is almost no liquid between the diaphragm and the air-side membrane head 1, so the diaphragm will not be subjected to additional impact due to liquefaction. At the same time, driven by the gas pressure, the liquid can enter the central exhaust hole through the liquid guide groove 11 and be discharged downstream through the exhaust valve. Furthermore, the cross-section of the profile of the air-side membrane head 1 is parabolic.

[0040] The function of the liquid guide groove 11 is that when the gas is liquefied, the diaphragm continues to move and eventually sticks to the molded surface of the membrane head. At this time, the liquid can be contained in the liquid guide groove 11 and connected to the exhaust hole through the liquid guide groove 11, so as to be discharged. Since the liquid is contained in the liquid guide groove 11, there is no liquid between the molded surface of the gas-side membrane head 1 and the diaphragm, so it will not have a great impact on the drive mechanism of the compressor, thereby avoiding the failure of the compressor after the gas is liquefied. Among them, special gases refer to gases with low critical temperature and critical pressure, such as phosphorus pentafluoride, which has a critical temperature of about 18.95°C and a critical pressure of about 3.39Mpa. Multiple liquid guide grooves 11 are distributed radially, which increases the distribution area of ​​the liquid guide grooves 11 and allows the liquid to enter the liquid guide grooves 11. In addition, before the compressor is started, in order to prevent liquid from remaining in the gas-side membrane head 1, the anti-residue component discharges the liquid to avoid the impact of the liquid on the compressor in the initial stage of the compressor startup.

[0041] The following is a detailed description of the shape and structure of the special gas diaphragm compressor:

[0042] In an optional solution of the embodiment of the present utility model, the profile of the air side membrane head 1 is further provided with an annular liquid guide groove 12 , which extends along the circumference of the air side membrane head 1 and is connected with the plurality of liquid guide grooves 11 .

[0043] Specifically, the profile of the gas-side membrane head 1 is recessed downward to form a liquid guide groove 11 and an annular liquid guide groove 12 .

[0044] The main function of the annular liquid guide groove 12 is that when the liquid is unevenly distributed in the mold cavity, some liquid guide grooves 11 contain more liquid, while others contain less liquid. The annular liquid guide groove 12 can guide the liquid in the liquid guide groove 11 with more liquid to the liquid guide groove 11 with less liquid, thereby averaging the liquid inventory.

[0045] In an optional solution of the embodiment of the present invention, the annular liquid guide groove 12 is annular and is arranged concentrically with the air side membrane head 1; and / or, there are multiple annular liquid guide grooves 12, and the multiple annular liquid guide grooves 12 are arranged at intervals along the radial direction of the air side membrane head 1.

[0046] Specifically, in this embodiment, see Figure 1 , the annular liquid guide groove 12 is annular, and there is one annular liquid guide groove 12. Of course, the annular liquid guide groove 12 is set to an elliptical shape, etc., which should also be within the protection scope of the embodiment of the present utility model; there are multiple annular liquid guide grooves 12, and multiple annular liquid guide grooves 12 are set at intervals along the radial direction of the air-side membrane head 1, for example, the annular liquid guide grooves 12 are set to two, three or four, etc., which should also be within the protection scope of the embodiment of the present utility model. Preferably, the spacing between two adjacent annular liquid guide grooves 12 is equal. Furthermore, the groove width of the annular liquid guide groove 12 is equal to the groove width of the liquid guide groove 11.

[0047] The annular liquid guide groove 12 is annular and is concentrically arranged with the gas side membrane head 1. The annular liquid guide groove 12 can conveniently guide the liquid in the liquid guide groove 11 with more liquid to the liquid guide groove 11 with less liquid, and shorten the liquid travel. A plurality of annular liquid guide grooves 12 are provided to improve the average liquid storage effect.

[0048] In an optional solution of the embodiment of the present utility model, the cross-sections of the liquid-conducting groove 11 and the annular liquid-conducting groove 12 are both set to be semicircular, rectangular, or the bottom wall is set to be arc-shaped.

[0049] Specifically, the cross-sectional shape of the liquid-conducting groove 11 is the same as the cross-sectional shape of the annular liquid-conducting groove 12 , and the bottom wall of the liquid-conducting groove 11 is flush with the bottom wall of the annular liquid-conducting groove 12 to avoid obstruction of liquid flow.

[0050] In an optional scheme of an embodiment of the present utility model, the anti-residue component includes a drainage channel 13, a stop valve 2 and a recovery container 3; one end of the drainage channel 13 is connected to the liquid guide groove 11, and the other end is connected to the recovery container 3, and the stop valve 2 is installed in the drainage channel 13.

[0051] Specifically, the diameter of the liquid discharge channel 13 is equal to the width of the liquid guiding groove 11 .

[0052] Before starting the compressor, in order to prevent liquid from remaining in the gas-side membrane head 1, the stop valve 2 is opened, and the residual liquid is discharged to the liquid recovery container 3 through the drainage channel 13; then the stop valve 2 is closed, and the compressor is started; this can avoid the impact of the liquid on the compressor in the initial stage of startup.

[0053] In an optional scheme of an embodiment of the present utility model, the drainage channel 13 includes a first channel, a second channel and a third channel; the air side membrane head 1 is provided with a first channel and a second channel, one end of the first channel is connected to the liquid guide groove 11, and the other end is connected to the second channel, and extends along the axial direction of the air side membrane head 1; the second channel extends along the radial direction of the air side membrane head 1; the anti-residue component also includes a connecting pipe, the connecting pipe is provided with a third channel, one end of the third channel is connected to the second channel, and the other end is connected to the recovery container 3, and the stop valve 2 is installed on the connecting pipe.

[0054] Specifically, see Figure 2 The air-side membrane head 1 has a first channel and a second channel at its bottom. The first channel is an axial flow channel connected to the liquid guide groove 11 on the air-side membrane head 1; the second channel is a radial flow channel connected to the outside of the air-side membrane head 1. The first channel and the second channel are interconnected. The diameters of the first and second channels are generally comparable to the width of the liquid guide groove 11. The end of the second channel is connected to a connecting pipe, and the third channel of the connecting pipe is connected to the second channel. The shut-off valve 2 is installed in the connecting pipe, downstream of the second channel. The connecting pipe is connected to the downstream liquid recovery container 3.

[0055] The function of the liquid discharge channel 13 is to open the stop valve 2 downstream of the second channel before the compressor starts to prevent residual liquid in the air-side membrane head 1, and drain the residual liquid into the liquid recovery container 3. Then, the stop valve 2 is closed and the compressor is started. This can avoid the impact of liquid on the compressor during the initial startup.

[0056] In an optional solution of the embodiment of the present utility model, the special gas diaphragm compressor includes a main pump 6, a reversing valve 7 and a variable frequency motor 5. The reversing valve 7 is respectively connected to the main pump 6 and the gas side membrane head 1, and the variable frequency motor 5 is transmission-connected to the main pump 6.

[0057] Specifically, see Figure 4 The variable frequency motor 5 is used to drive the main pump 6 and the reversing valve 7 of the diaphragm compressor; its working principle is to reduce the operating frequency of the compressor by reducing the rotation speed of the variable frequency motor 5 in the initial startup stage. The compressor will compress the gas at a slower speed. At this time, even if the gas liquefies, due to the slow compression speed, the resistance of the liquid to discharge the compressor from the exhaust valve through the liquid guide groove 11 is small, and it will not have a great impact on the compressor drive mechanism. After the compressor has been running for a period of time, the heat generated by the gas compression increases the temperature of the gas side diaphragm head 1, thereby increasing the temperature of the gas, and the gas no longer liquefies. After detecting that the gas temperature is greater than the critical temperature, the speed of the variable frequency motor 5 is automatically increased, the operating frequency of the compressor is increased, and the exhaust efficiency is improved. At the same time, there is no need to worry about gas liquefaction.

[0058] In an optional scheme of an embodiment of the present utility model, the special gas diaphragm compressor includes a heat exchange component 4, and the surface of the gas side membrane head 1 is also provided with an air inlet hole; the heat exchange component 4 includes an exhaust pipe 42 and an air inlet pipe 41, the exhaust pipe 42 is connected to the exhaust hole, and the air inlet pipe 41 is connected to the air inlet hole, and the exhaust pipe 42 and the air inlet pipe 41 are arranged adjacent to each other.

[0059] Specifically, the air inlet is provided at the edge of the profile of the air side membrane head 1. The exhaust pipe 42 and the air inlet pipe 41 are arranged adjacent to each other, so that the high temperature gas in the exhaust pipe 42 heats the low temperature gas in the air inlet pipe 41, thereby increasing the air inlet temperature.

[0060] The heat exchange component 4 is used to increase the intake air temperature and avoid gas liquefaction.

[0061] In an optional solution of the embodiment of the present invention, the air intake pipe 41 is sleeved on the exhaust pipe 42 .

[0062] Specifically, see Figure 3 The heat exchange component 4 is configured as a sleeve, the central tube is the exhaust pipe 42 , and the outer ring tube is the intake pipe 41 .

[0063] Because exhaust temperatures are generally high (>100°C), high-temperature exhaust is used to heat the low-temperature intake air. While the exhaust and intake air are isolated from each other in the casing, heat exchange can occur through the metal tube. Heat exchange assembly 4 raises the intake air temperature above the critical temperature, thus preventing gas liquefaction.

[0064] The advantages of this special gas diaphragm compressor are described in detail below:

[0065] (1) When gas liquefaction occurs, the liquid can be discharged through the liquid guide groove 11 to avoid the impact of the liquid on the compressor.

[0066] (2) Drain the liquid before starting the compressor to avoid the impact of residual liquid in the gas side membrane head 1 on the compressor during startup.

[0067] (3) The variable frequency motor 5 is used to reduce the operating frequency of the compressor during startup, thereby reducing the fluid flow resistance and making it easier for the liquid to be discharged, thereby avoiding impact on the compressor.

[0068] (4) The heat exchange component 4 is used to increase the intake air temperature and avoid gas liquefaction.

[0069] In summary, this special gas diaphragm compressor avoids the impact of gas liquefaction on the compressor through multiple means, thereby improving the stability and service life of the compressor.

[0070] It should be noted that, unless there is any conflict, the features in the embodiments of this application can be combined with each other.

[0071] The above description is merely a preferred embodiment of the present application and is not intended to limit the present application. Various modifications and variations are possible for those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. A special gas diaphragm compressor, using special gases with low critical temperature and critical pressure, characterized in that: include: Air side membrane head (1) and anti-residue assembly; The profile of the air side membrane head (1) is provided with a plurality of exhaust holes and a plurality of liquid guide grooves (11), and the plurality of liquid guide grooves (11) are radially distributed, with the radial concentrated end close to the center of the air side membrane head (1) and the other end close to the outer edge of the air side membrane head (1); The plurality of exhaust holes are all located at the center of the air side membrane head (1) and are spaced apart along the circumference of the air side membrane head (1); The number of the liquid-conducting grooves (11) is less than or equal to the number of the exhaust holes, and the plurality of liquid-conducting grooves (11) are respectively connected to the corresponding exhaust holes; The anti-residue component is in communication with the liquid guiding groove (11).

2. The special gas diaphragm compressor according to claim 1, characterized in that: The profile of the air-side membrane head (1) is further provided with an annular liquid-conducting groove (12), which extends along the circumference of the air-side membrane head (1) and is in communication with the plurality of liquid-conducting grooves (11).

3. The special gas diaphragm compressor according to claim 2, characterized in that: The annular liquid guide groove (12) is annular and is arranged concentrically with the air side membrane head (1); and / or, a plurality of the annular liquid guide grooves (12) are provided, and the plurality of annular liquid guide grooves (12) are arranged at intervals along the radial direction of the air side membrane head (1).

4. The special gas diaphragm compressor according to claim 2, characterized in that: The cross-sections of the liquid-conducting groove (11) and the annular liquid-conducting groove (12) are both configured to be semicircular, rectangular, or have an arc-shaped bottom wall.

5. The special gas diaphragm compressor according to claim 1, characterized in that: The anti-residue component comprises a drainage channel (13), a stop valve (2) and a recovery container (3); One end of the drainage channel (13) is in communication with the liquid guiding groove (11), and the other end is in communication with the recovery container (3), and the shut-off valve (2) is installed in the drainage channel (13).

6. The special gas diaphragm compressor according to claim 5, characterized in that: The drainage channel (13) includes a first channel, a second channel and a third channel; The air-side membrane head (1) is provided with the first channel and the second channel, one end of the first channel is connected to the liquid guide groove (11), the other end of the first channel is connected to the second channel, and the first channel extends along the axial direction of the air-side membrane head (1); The second channel extends along the radial direction of the gas side membrane head (1); The anti-residue component further comprises a connecting pipe, the connecting pipe being provided with the third channel, one end of the third channel being in communication with the second channel, and the other end being in communication with the recovery container (3), and the shut-off valve (2) being mounted on the connecting pipe.

7. The special gas diaphragm compressor according to claim 1, characterized in that: The special gas diaphragm compressor comprises a main pump (6), a reversing valve (7) and a variable frequency motor (5), wherein the reversing valve (7) is respectively connected to the main pump (6) and the gas side diaphragm head (1), and the variable frequency motor (5) is transmission-connected to the main pump (6).

8. The special gas diaphragm compressor according to claim 1, characterized in that: The special gas diaphragm compressor comprises a heat exchange component (4), and the profile of the gas-side diaphragm head (1) is also provided with an air inlet hole; The heat exchange assembly (4) comprises an exhaust pipe (42) and an air intake pipe (41), wherein the exhaust pipe (42) is communicated with the exhaust hole, and the air intake pipe (41) is communicated with the air intake hole, and the exhaust pipe (42) and the air intake pipe (41) are arranged adjacent to each other.

9. The special gas diaphragm compressor according to claim 8, characterized in that: The air intake pipe (41) is sleeved on the exhaust pipe (42).

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