Pneumatic lifting mechanism, reaction chamber and semiconductor equipment

Abstract

The utility model belongs to the technical field of lifting equipment, and discloses a pneumatic lifting mechanism, a reaction chamber and semiconductor equipment, the pneumatic lifting mechanism comprises a base, a lifting cylinder, a support frame body, a hinge frame and an anti-falling cylinder, the lifting cylinder is fixedly arranged on the base, and a support piece is arranged at the end part of an output rod of the lifting cylinder; the supporting frame bodies are arranged outside the output rod in a surrounding mode at intervals and fixedly connected with a base body of the lifting air cylinder. The supporting frame bodies are provided with channels for the output rod to stretch out. The hinge frame is hinged to the supporting frame body, a bumper bar is fixedly arranged on the hinge frame, and a through hole for the bumper bar to penetrate through is formed in the supporting frame body; the anti-falling air cylinder is fixedly installed on the base, the output end of the anti-falling air cylinder is rotationally connected with the hinge frame, and the anti-falling air cylinder can drive the hinge frame to rotate around the supporting frame body, so that the bumper extends to the position below the supporting piece and abuts against the output rod. According to the pneumatic lifting mechanism, the probability of danger caused by falling of the lifting air cylinder can be effectively reduced, and the whole equipment is safe and reliable.

Description

Technical Field

[0001] The utility model relates to the technical field of lifting equipment, in particular to a pneumatic lifting mechanism, a reaction chamber and semiconductor equipment. Background Art

[0002] Existing methods for preventing air cylinders from falling while in the raised position typically rely on maintaining air pressure to prevent the cylinder from falling. While these technologies offer some protection, if the pressure-maintaining mechanism fails, the cylinder can still fall if the air supply is cut off. This can damage the cylinder and potentially cause personal injury to the operator.

[0003] Therefore, there is an urgent need for a pneumatic lifting mechanism, a reaction chamber, and a semiconductor device to solve the above technical problems. Utility Model Content

[0004] The purpose of the present utility model is to provide a pneumatic lifting mechanism, a reaction chamber and a semiconductor device, aiming to solve the problem in the prior art that the lifting cylinder falls when the power is cut off due to an unexpected situation. The pneumatic lifting mechanism, the reaction chamber and the semiconductor device have a good anti-fall function, which increases safety and reliability and avoids personal injury to the operator.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] Pneumatic lifting mechanism, including:

[0007] base;

[0008] A lifting cylinder is fixedly mounted on the base, and a support is provided at the end of the output rod of the lifting cylinder;

[0009] a support frame, spaced and arranged around the outside of the output rod, the support frame being fixedly connected to the seat of the lifting cylinder, and the support frame being provided with a passage for the output rod to extend;

[0010] A hinge frame is hinged to the support frame, a safety rod is fixedly provided on the hinge frame, and a conducting hole for the safety rod to pass through is provided on the support frame;

[0011] An anti-falling cylinder is fixedly mounted on the base, and an output end of the anti-falling cylinder is rotatably connected to the hinge frame. The anti-falling cylinder can drive the hinge frame to rotate around the support frame, so that the safety rod is extended to the bottom of the support member and abuts against the output rod.

[0012] Preferably, the support member is configured as a positive T-shaped structure, the positive T-shaped structure comprising a horizontal plate and a vertical plate perpendicular to each other, the safety rod extends below the horizontal plate, and the vertical plate is connected to the output rod;

[0013] Alternatively, the support member is configured as a long rod-shaped structure, and the safety rod is extended to the bottom of the long rod-shaped structure.

[0014] Preferably, the support member is configured as a right T-shaped structure, comprising a horizontal plate and a vertical plate perpendicular to each other, the output rod and the horizontal plate being perpendicular to each other, and the end of the output rod abutting against the midpoint of the horizontal plate, the length of the horizontal plate being greater than the diameter of the output rod, and the vertical plate extending downward;

[0015] Alternatively, the support member is configured as a long rod-shaped structure, the end of the output rod is connected to the midpoint of the long rod-shaped structure, and the length of the long rod-shaped structure is greater than the diameter of the output rod.

[0016] Preferably, the hinge frame is a channel steel structure, two longitudinal beams of the channel steel structure are hinged to two sides of the support frame respectively, and the safety bar is installed on the cross beam of the channel steel structure.

[0017] Preferably, a connecting portion is protruding from the bottom of the crossbeam, the safety rod is mounted on the connecting portion, and the output end of the anti-fall cylinder is rotatably connected to the connecting portion via a connector.

[0018] Preferably, the connector includes a base plate fixedly connected to the output end of the anti-fall cylinder and two side plates respectively arranged perpendicularly at both ends of the base plate. The connecting part extends between the two side plates and is connected to the two side plates through a rotating shaft.

[0019] Preferably, the bottom of the base is provided with a plurality of evenly distributed supporting feet.

[0020] The utility model also provides a reaction chamber, comprising the pneumatic lifting mechanism as described in any of the above solutions.

[0021] The utility model also provides a semiconductor device, comprising the above-mentioned reaction chamber.

[0022] When the lifting cylinder is in the jacking state, the anti-fall cylinder drives the hinge frame to rotate around the support frame so that the safety bar is extended to the bottom of the support member and abuts against the output rod. At this time, the output end of the anti-fall cylinder is in the retracted state. If an accident occurs, such as the air source of the lifting cylinder is cut off, the output rod of the lifting cylinder will not retract and descend because the support member is supported by the safety bar, thereby playing a physical anti-fall function, effectively reducing the risk of equipment damage and saving the cost of the air pressure maintenance anti-fall method. In addition, because the anti-fall cylinder is currently in the retracted state, it will not move under the action of gravity, thereby ensuring that the anti-fall function is effectively played, increasing safety and reliability, and avoiding personal injury to the operator.

[0023] The reaction chamber provided by the utility model comprises the above-mentioned pneumatic lifting mechanism, which effectively increases the reliability and safety of the reaction chamber.

[0024] The semiconductor equipment provided by the present invention includes the above-mentioned reaction chamber. The semiconductor equipment has a low risk of damage and has high reliability and safety in use. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a longitudinal cross-sectional view of the anti-fall cylinder of the pneumatic lifting mechanism provided by an embodiment of the present utility model in an extended state;

[0026] Figure 2 It is a longitudinal cross-sectional view of the anti-fall cylinder of the pneumatic lifting mechanism provided by an embodiment of the present utility model in a retracted state;

[0027] Figure 3 This is a front view of the pneumatic lifting mechanism provided by an embodiment of the utility model;

[0028] Figure 4 It is a side view of the pneumatic lifting mechanism provided by an embodiment of the utility model;

[0029] Figure 5 It is a three-dimensional view of the pneumatic lifting mechanism provided by an embodiment of the utility model.

[0030] In the picture:

[0031] 100, base; 200, lifting cylinder; 300, positive T-shaped structure; 310, horizontal plate; 320, vertical plate; 400, channel steel structure; 410, longitudinal beam; 420, horizontal beam; 421, connection part; 500, safety bar; 600, joint piece; 610, bottom plate; 620, side plate; 700, anti-fall cylinder; 800, support frame. DETAILED DESCRIPTION

[0032] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0033] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0034] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0035] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0036] This embodiment provides a pneumatic lifting mechanism, which aims to solve the problem in the prior art that the lifting cylinder falls when the power is cut off due to an unexpected situation. The pneumatic lifting mechanism has a good anti-fall function, increases safety and reliability, and avoids personal injury to the operator.

[0037] like Figures 1 to 5 As shown, the pneumatic lifting mechanism includes a base 100, a lifting cylinder 200, a support frame 800, a hinge frame and an anti-fall cylinder 700. The lifting cylinder 200 is fixedly mounted on the base 100, and the end of the output rod of the lifting cylinder 200 is provided with a support member; the support frame 800 is spaced around the outside of the output rod, the support frame 800 is fixedly connected to the base of the lifting cylinder 200, and the support frame 800 is provided with a channel for the output rod to extend; the hinge frame is hinged to the support frame 800, and a safety rod 500 is fixedly mounted on the hinge frame, and a guide hole is provided on the support frame 800 for the safety rod 500 to pass through; the anti-fall cylinder 700 is fixedly mounted on the base 100, and the output end of the anti-fall cylinder 700 is rotatably connected to the hinge frame. The anti-fall cylinder 700 can drive the hinge frame to rotate around the support frame 800, so that the safety rod 500 is probed below the support member and abuts against the output rod.

[0038] The above-mentioned pneumatic lifting mechanism is provided with an anti-fall cylinder 700, a hinge frame and a safety rod 500. When the lifting cylinder 200 is not working, the safety rod 500 protrudes out of the support member. At this time, the output end of the anti-fall cylinder 700 is in an extended state. In this state, when the lifting cylinder 200 is in motion, the output rod of the lifting cylinder 200 is smoothly extended to the jacking state; when the lifting cylinder 200 is in the jacking state, the anti-fall cylinder 700 drives the hinge frame to rotate around the support frame 800, so that the safety rod 500 protrudes to the bottom of the support member and rests on the output rod. The output end of the anti-fall cylinder 700 is in a retracted state. If an accident occurs, such as the air source of the lifting cylinder 200 is cut off, the output rod of the lifting cylinder 200 will not retract and descend because the support is supported by the safety rod 500, thereby playing a physical anti-fall function, effectively reducing the risk of equipment damage, and saving the cost of the air pressure maintenance anti-fall method. In addition, because the anti-fall cylinder 700 is currently in a retracted state, it will not move under the action of gravity, ensuring that it effectively plays an anti-fall function, increasing safety and reliability, and avoiding personal injury to the operator.

[0039] Preferably, the support member is configured as a straight T-shaped structure 300, comprising a horizontal plate 310 and a vertical plate 320 perpendicular to each other. The safety bar 500 extends below the horizontal plate 310, and the vertical plate 320 is connected to the output rod. The straight T-shaped structure 300 is simple in structure and easy to manufacture. In other embodiments, the safety bar 500 may also abut the connection between the horizontal plate 310 and the vertical plate 320 or abut the vertical plate 320. In another possible embodiment, the support member may also be configured as a long rod-like structure, with the safety bar 500 extending below the long rod-like structure.

[0040] Furthermore, when the support member is configured as a straight T-shaped structure 300, the output rod and cross plate 310 are arranged perpendicular to each other, with the end of the output rod abutting the midpoint of the cross plate 310. The length of the cross plate 310 is greater than the diameter of the output rod, and the vertical plate 320 extends downward. When the support member is configured as a long rod, the end of the output rod is connected to the midpoint of the long rod. The length of the long rod is greater than the diameter of the output rod. This configuration allows the safety lever 500 to fully extend below the cross plate 310, ensuring reliable operation. The support member with a long rod structure can be connected to the output rod via screws, simplifying assembly.

[0041] Optionally, the hinge frame is a channel steel structure 400, with two longitudinal beams 410 of the channel steel structure 400 hingedly connected to either side of the support frame 800, and the bumper 500 mounted on the cross beam 420 of the channel steel structure 400. The two longitudinal beams 410 of the channel steel structure 400 are disposed on either side of the support frame 800, thereby improving the stability and reliability of the hinge. Specifically, the longitudinal beams 410 are hingedly connected to the support frame 800 via pins.

[0042] Preferably, a connecting portion 421 protrudes from the bottom of the crossbeam 420, to which the safety lever 500 is mounted. The output end of the anti-fall cylinder 700 is rotatably connected to the connecting portion 421 via a connector 600. The safety lever 500 is connected to the connecting portion 421 protruding from the crossbeam 420, providing ample space for operation. The safety lever 500 and the connecting portion 421 can be threadedly connected, clipped, or adhesively bonded.

[0043] The connector 600 includes a base plate 610 fixedly connected to the output of the anti-fall cylinder 700 and two side plates 620 perpendicularly disposed at either end of the base plate 610. The connecting portion 421 extends between the two side plates 620 and is connected to the two side plates 620 via a rotating shaft. The provision of the connector 600 effectively improves the smoothness of the connection between the output of the anti-fall cylinder 700 and the connecting portion 421. In other embodiments, the connector 600 can also be rotatably connected to the safety lever 500, i.e., the two side plates 620 are rotatably connected to the connecting portion 421 via a rotating shaft or pin.

[0044] Preferably, the line connecting the hinge point between the hinge frame and the support frame 800 and the contact point between the safety lever 500 and the output rod is perpendicular to the ground, so that the safety lever 500 and the support member are in full close contact, thereby improving the support reliability of the safety lever 500 on the support member.

[0045] Optionally, a plurality of evenly distributed supporting feet are provided at the bottom of the base 100 to support the base 100 and improve stability.

[0046] This embodiment further provides a reaction chamber, which includes the above-mentioned pneumatic lifting mechanism, and the pneumatic lifting mechanism effectively increases the reliability and safety of the reaction chamber.

[0047] This embodiment also provides a semiconductor device, including the above-mentioned reaction chamber. The semiconductor device has a low risk of damage and has high reliability and safety in use.

[0048] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. Pneumatic lifting mechanism, characterized in that, include: Base (100); A lifting cylinder (200) is fixedly mounted on the base (100), and a support member is provided at the end of an output rod of the lifting cylinder (200); A support frame (800) is arranged at intervals around the outside of the output rod, the support frame (800) is fixedly connected to the seat of the lifting cylinder (200), and the support frame (800) is provided with a channel for the output rod to extend; A hinge frame is hinged to the support frame (800), a safety rod (500) is fixedly provided on the hinge frame, and a conducting hole for the safety rod (500) to pass through is provided on the support frame (800); An anti-fall cylinder (700) is fixedly mounted on the base (100), and an output end of the anti-fall cylinder (700) is rotatably connected to the hinge frame. The anti-fall cylinder (700) can drive the hinge frame to rotate around the support frame (800), so that the safety rod (500) is extended to the bottom of the support member and abuts against the output rod.

2. The pneumatic lifting mechanism according to claim 1, characterized in that: The support member is configured as a positive T-shaped structure (300), the positive T-shaped structure (300) comprising a horizontal plate (310) and a vertical plate (320) perpendicular to each other, the safety rod (500) extends below the horizontal plate (310), and the vertical plate (320) is connected to the output rod; Alternatively, the support member is configured as a long bar-shaped structure, and the safety rod (500) extends below the long bar-shaped structure.

3. The pneumatic lifting mechanism according to claim 2, characterized in that: The support member is configured as the positive T-shaped structure (300), the positive T-shaped structure (300) comprising a transverse plate (310) and a vertical plate (320) perpendicular to each other, the output rod and the transverse plate (310) being perpendicular to each other, and the end of the output rod abutting against the midpoint of the transverse plate (310), the length of the transverse plate (310) being greater than the diameter of the output rod, and the vertical plate (320) extending downward; Alternatively, the support member is configured as the long rod-shaped structure, the end of the output rod is connected to the midpoint of the long rod-shaped structure, and the length of the long rod-shaped structure is greater than the diameter of the output rod.

4. The pneumatic lifting mechanism according to claim 1, characterized in that: The hinge frame is a channel steel structure (400), the two longitudinal beams (410) of the channel steel structure (400) are respectively hinged to the two sides of the support frame (800), and the safety rod (500) is installed on the cross beam (420) of the channel steel structure (400).

5. The pneumatic lifting mechanism according to claim 4, characterized in that: A connecting portion (421) is protruding from the bottom of the crossbeam (420), the safety rod (500) is mounted on the connecting portion (421), and the output end of the anti-fall cylinder (700) is rotatably connected to the connecting portion (421) via a connector (600).

6. The pneumatic lifting mechanism according to claim 5, characterized in that: The connector (600) comprises a bottom plate (610) fixedly connected to the output end of the anti-fall cylinder (700) and two side plates (620) respectively arranged perpendicularly at both ends of the bottom plate (610); the connecting portion (421) extends between the two side plates (620) and is connected to the two side plates (620) via a rotating shaft.

7. The pneumatic lifting mechanism according to claim 1, characterized in that: The bottom of the base (100) is provided with a plurality of evenly distributed supporting feet.

8. A reaction chamber, characterized in that It comprises the pneumatic lifting mechanism as described in any one of claims 1-7.

9. A semiconductor device, characterized in that Comprising the reaction chamber as claimed in claim 8.

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