Sputtering target material welding verification jig

Abstract

The utility model belongs to the technical field of semiconductors, and discloses a welding verification jig for sputtering target materials. By adopting the design of the fixing part and the measuring part, an operator can carry out verification operation at a relatively long distance, the risk of scalding is reduced, and the operation safety is improved; through cooperation between the fixing part and the measuring part, the number of times of manual adjustment and direct measurement of a caliper is reduced, and human errors are reduced. The measuring part is designed to be the groove matched with the shape of the target blank, so that the target blank can be quickly positioned, the side surfaces can be accurately attached, and repeated adjustment is not needed; the outer edge of the groove of the measuring part is designed to be the same as the width of the back plate, so that the measuring process is more visual, the operation is easy, and the verification operation is simplified; the fixing part is detachable, so that the jig is convenient to mount, an operator can quickly mount and dismount the jig during operation, the operation time is shortened, the jig can be reused, the service life of the jig is prolonged, and the use cost is effectively reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a sputtering target welding calibration jig. Background Art

[0002] Sputtering targets are key raw materials for the preparation of electronic thin film materials. They are primarily composed of a target blank and a backing plate. The target blank is the core component of the sputtering target and serves as the target material for high-speed ion beam bombardment. During the sputtering coating process, after the target blank is struck by ions, its surface atoms are sputtered and scattered, depositing on the substrate to form an electronic thin film. The backing plate secures the target blank and is bonded to the target blank through various welding processes. The sputtering coating process must be carried out in a high vacuum and high voltage environment. To ensure the stability of the sputtering coating process and the quality of the thin film, it is crucial to calibrate the target blank size and the relative position of the target blank and the backing plate.

[0003] However, since the surface temperature of the target blank and the backing plate after welding is very high, if the operator performs welding calibration at a close distance, he or she is very likely to get burned, which poses a safety hazard. If the welding calibration is performed after the surface temperature of the target blank and the backing plate drops to a safe range, it will often reduce work efficiency. At the same time, using a caliper to calibrate each side of the target blank and the backing plate is very complicated. Utility Model Content

[0004] The purpose of the utility model is to provide a sputtering target welding calibration jig, which can effectively reduce the risk of burns to operators, has high operational safety, can simplify and speed up the calibration process, and improve calibration efficiency.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] A sputtering target welding calibration fixture is used to calibrate the target blank size and the relative position between the target blank and the backing plate, wherein the sputtering target welding calibration fixture includes:

[0007] a fixing portion, the fixing portion being detachably disposed on the back plate;

[0008] The measuring part is arranged on the side of the fixing part facing the target blank, and the measuring part is provided with a groove, the opening direction of the groove is opposite to the fixing part, the shape of the groove side wall matches the side shape of the target blank, part of the side surface of the target blank is fitted with the groove side wall, and the width of the measuring part is the same as the width of the back plate.

[0009] Furthermore, the sputtering target welding calibration fixture includes two groups of the fixing parts and the measuring parts, each group of the fixing parts and the measuring parts is arranged at one end of the back plate along the length direction of the back plate, and the two groups of the fixing parts and the measuring parts are positioned opposite to each other.

[0010] Furthermore, the sputtering target welding calibration jig further includes a fastener for fixing the fixing portion to the back plate.

[0011] Furthermore, the fasteners are symmetrically arranged on the fixing portion along the width direction of the back plate.

[0012] Furthermore, the fastener includes a bolt and a nut, the bolt is passed through the fixing portion and the back plate, and the nut is threadedly connected to the bolt.

[0013] Furthermore, the fastener includes a clamp, one end of the clamp is provided on the fixing portion, and the other end of the clamp can clamp and fix the fixing portion and the back plate.

[0014] Furthermore, the measuring portion and the fixing portion are arranged on a side facing the back plate as steps.

[0015] Furthermore, a buffer portion is provided on the contact surface between the measuring portion and the target blank.

[0016] Furthermore, the fixing portion and the measuring portion are integrally formed.

[0017] Furthermore, the measuring part and the fixing part are both made of heat-resistant materials.

[0018] Beneficial effects of the utility model:

[0019] The utility model provides a sputtering target welding calibration jig for calibrating the target blank size and the relative position of the target blank and the back plate. By adopting the design of the fixing part and the measuring part, the operator can perform the calibration operation at a long distance without direct contact with the high-temperature target blank and the back plate, which significantly reduces the risk of burns and improves the safety of operation. At the same time, the coordination between the fixing part and the measuring part reduces the number of manual adjustments and direct measurements with a caliper, avoids complex manual operations, makes the entire calibration process safer and more stable, and reduces the possibility of human error. By designing the measuring part to match the shape of the target blank, the operator can perform the calibration operation at a long distance without direct contact with the high-temperature target blank and the back plate, which significantly reduces the risk of burns and improves the safety of operation. The groove can quickly locate the target blank and ensure that the sides fit accurately without repeated adjustments. By designing the outer edge of the measuring part groove to be the same width as the backing plate, the relative position of the target blank and the backing plate can be guaranteed to be accurate, making the measurement process more intuitive and easy to operate. The operator can quickly determine whether the relative position of the target blank and the backing plate is correct by visual inspection or simple calibration tools, simplifying the verification operation. The detachable fixing part facilitates installation, making it convenient for the operator to quickly install and disassemble during operation, shortening the operation time, and can be reused, extending the service life of the fixture and effectively reducing the cost of use. Therefore, the sputtering target welding verification fixture can effectively reduce the risk of burns for operators, has high operational safety, can simplify and speed up the verification process, and improve verification efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a three-dimensional diagram of the sputtering target welding calibration fixture of the utility model;

[0021] Figure 2 This is the main view of the sputtering target welding calibration fixture of the utility model;

[0022] Figure 3 This is a side view of the sputtering target welding calibration fixture of the utility model;

[0023] Figure 4 This is an assembly drawing of a sputtering target welding calibration jig, a target material, and a back plate of the utility model.

[0024] In the picture:

[0025] 100, target blank; 200, backing plate;

[0026] 1. Fixing part; 2. Measuring part; 3. Groove; 4. Fastener; 5. Step. DETAILED DESCRIPTION

[0027] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0028] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0029] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0030] In the description of this embodiment, the terms "upper," "lower," "left," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0031] Please refer to Figures 1 to 4 As shown, the utility model provides a sputtering target welding calibration jig, which can effectively reduce the risk of burns for operators, has high operational safety, can simplify and speed up the calibration process, and improve calibration efficiency; the sputtering target welding calibration jig is used to calibrate the size of the target blank 100 and the relative position of the target blank 100 and the backing plate 200, and includes a fixing part 1 and a measuring part 2, wherein the fixing part 1 is detachably arranged on the backing plate 200; the measuring part 2 is arranged on a side of the fixing part 1 facing the target blank 100, and the measuring part 2 is provided with a groove 3, the opening direction of the groove 3 is opposite to the fixing part 1, the shape of the side wall of the groove 3 matches the side shape of the target blank 100, part of the side surface of the target blank 100 is in contact with the side wall of the groove 3, and the width of the measuring part is the same as the width of the backing plate 200.

[0032] By adopting the design of the fixing part 1 and the measuring part 2, the operator can perform the calibration operation at a long distance without direct contact with the high-temperature target blank 100 and the back plate 200, which significantly reduces the risk of burns and improves the safety of operation; at the same time, the coordination between the fixing part 1 and the measuring part 2 reduces the number of manual adjustments and direct measurements with a caliper, avoids complex manual operations, makes the entire calibration process safer and more stable, and reduces the possibility of human error; by designing the measuring part 2 as a groove 3 that matches the shape of the target blank 100, the target blank 100 can be quickly positioned and the side faces can be accurately fitted without repeated adjustments. Adjustment; By designing the outer edge of the groove 3 of the measuring part 2 to be the same width as the back plate 200, the relative position of the target blank 100 and the back plate 200 can be guaranteed to be accurate, making the measurement process more intuitive and easy to operate. The operator can quickly determine whether the relative position of the target blank 100 and the back plate 200 is correct by visual inspection or a simple calibration tool, thereby simplifying the verification operation; the detachable fixing part 1 facilitates the installation of the sputtering target welding verification jig, and facilitates the operator to quickly install and disassemble during operation, shortening the operation time, and can be reused, extending the service life of the jig, and effectively reducing the cost of use. Therefore, the sputtering target welding verification jig can effectively reduce the risk of burns to the operator, has high operational safety, can simplify and speed up the verification process, and improves verification efficiency.

[0033] like Figure 4As shown, in order to improve the calibration efficiency of the sputtering target welding calibration jig, in some embodiments, the sputtering target welding calibration jig includes two groups of fixing parts 1 and measuring parts 2, each group of fixing parts 1 and measuring parts 2 is arranged at one end of the back plate 200 along the length direction of the back plate 200, and the two groups of fixing parts 1 and measuring parts 2 are positioned relative to each other; the two groups of fixing parts 1 and measuring parts 2 are respectively arranged at both ends of the back plate 200, so that the target blank 100 can be quickly put into place in the jig, and the operator can quickly install the target blank 100 and perform calibration.

[0034] Combine Figure 1 and Figure 2 As shown, in order to improve the calibration accuracy of the sputtering target welding calibration jig, in some embodiments, the fixing part 1 and the measuring part 2 are integrally formed; the integrally formed design eliminates the connection point between the fixing part 1 and the measuring part 2, thereby reducing displacement or looseness caused by improper assembly, ensuring the stability of the entire jig during the calibration process, and improving the accuracy of the calibration; at the same time, the integrally formed design simplifies the structure of the jig, reduces the number of components, thereby reducing production costs and assembly complexity, and improving the efficiency of manufacturing and maintenance. Furthermore, the sputtering target welding calibration jig also includes a fastener 4 for fixing the fixing part 1 to the back plate 200, wherein the fastener 4 can ensure a stable connection between the fixing part 1 and the back plate 200, prevent displacement caused by vibration or external force during the calibration process, and thus improve the accuracy and reliability of the calibration. Furthermore, the fasteners 4 are symmetrically arranged on the fixing part 1 along the width direction of the back plate 200. The symmetrically arranged fasteners 4 can evenly distribute the force, ensuring that the fixing part 1 is evenly stressed on the back plate 200, reducing the possibility of tilting or displacement, thereby improving the stability of the entire fixture and the accuracy of the calibration process.

[0035] Combine Figure 1 and Figure 4As shown, in some embodiments, the fastener 4 includes a bolt and a nut, the bolt being passed through the fixing portion 1 and the back plate 200, and the nut being threadedly connected to the bolt, wherein the fastening structure of the bolt and the nut can provide a strong and lasting clamping force, ensuring that the fixing portion 1 is firmly combined with the back plate 200, preventing loosening or displacement during operation, and improving the stability of the device; at the same time, the use of bolts and nuts for connection is very simple, and the bolt and nut structure is highly adjustable, allowing the operator to adjust the fastening force according to actual needs, and can accurately control the degree of fastening between the fixing portion 1 and the back plate 200, and is applicable to back plates 200 and fixing portions 1 of various specifications. A gasket can be provided between the bolt and the fixing portion 1, and the gasket can form a buffer layer between the bolt and the fixing portion 1, reducing the friction generated by direct contact between the bolt and the fixing portion 1, and extending the service life of the fixture. In other embodiments, the fastener 4 includes a clamp, one end of which is disposed on the fixing portion 1, and the other end of which is capable of clamping and securing the fixing portion 1 and the back plate 200. The clamp design simplifies the securing and releasing process, allowing operators to quickly install or remove the fixing portion 1 and the back plate 200 without the use of tools, greatly improving work efficiency. Gaskets may be provided on the contact surfaces between the clamp and the fixing portion 1 and the back plate 200 to effectively prevent scratches or deformation of the back plate 200 or the fixing portion 1. Furthermore, the clamp may be, but is not limited to, a C-type clamp, etc., and is not specifically limited here.

[0036] Combine Figure 1 and Figure 3 As shown, to protect the integrity of the target blank 100, in some embodiments, a step 5 is provided on the side of the measuring portion 2 and the fixing portion 1 facing the backing plate 200. The step 5 reduces the contact area between the measuring portion 2 and the target blank 100, effectively dispersing or reducing the local force exerted by the measuring portion 2 on the target blank 100, thereby preventing the measuring portion 2 from exerting excessive pressure on the target blank 100, reducing the possibility of damage, and maintaining the surface integrity of the target blank 100. Furthermore, the step 5 also reserves space for the solder layer between the backing plate 200 and the target blank 100, thereby protecting the integrity of the solder layer. Furthermore, a buffer portion is provided on the contact surface between the measuring portion 2 and the target blank 100. Due to the high surface precision requirements of the target blank 100 during the sputtering coating process, the buffer portion effectively reduces direct contact between the measuring portion 2 and the target blank 100, preventing scratches, indentations, or damage caused by hard contact. Furthermore, the buffer portion absorbs some of the impact force during the measurement process, reducing wear on the target blank 100. The buffer portion may be made of, but not limited to, Teflon tape or silicone pad, and is not specifically limited here.

[0037] In order to extend the service life of the sputtering target welding calibration fixture, the measuring part 2 and the fixing part 1 are both made of heat-resistant materials. Since the surface temperature of the target blank 100 and the backing plate 200 after welding is relatively high, the use of heat-resistant materials can ensure that the fixture maintains its structural stability in a high-temperature environment and will not deform due to temperature changes, thereby extending the service life of the measuring part 2 and the fixing part 1 and reducing the frequency of maintenance and replacement. At the same time, by utilizing the heat-resistant material's ability to withstand high temperatures, the operator can perform calibration before the target blank 100 and the backing plate 200 are completely cooled, reducing the cooling waiting time and improving operational efficiency. Among them, the heat-resistant material can be, but is not limited to, heat-resistant plastics or high-temperature resistant alloys, etc., and is not specifically limited here.

[0038] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A sputtering target welding calibration jig, used to calibrate the size of a target blank (100) and the relative position of the target blank (100) and a backing plate (200), characterized in that: The sputtering target welding calibration fixture includes: a fixing portion (1), the fixing portion (1) being detachably arranged on the back plate (200); A measuring portion (2) is provided on a side of the fixing portion (1) facing the target blank (100), the measuring portion (2) is provided with a groove (3), the opening direction of the groove (3) is opposite to the fixing portion (1), the shape of the side wall of the groove (3) matches the side shape of the target blank (100), part of the side surface of the target blank (100) is in contact with the side wall of the groove (3), and the width of the measuring portion (2) is the same as the width of the back plate (200).

2. The sputtering target welding calibration jig according to claim 1, characterized in that: The sputtering target welding calibration jig comprises two groups of the fixing parts (1) and the measuring parts (2), each group of the fixing parts (1) and the measuring parts (2) is arranged at one end of the back plate (200) along the length direction of the back plate (200), and the two groups of the fixing parts (1) and the measuring parts (2) are positioned opposite to each other.

3. The sputtering target welding calibration jig according to claim 2, characterized in that: The sputtering target welding calibration jig further comprises a fastener (4) for fixing the fixing portion (1) on the back plate (200).

4. The sputtering target welding calibration jig according to claim 3, characterized in that: The fasteners (4) are symmetrically arranged on the fixing portion (1) along the width direction of the back plate (200).

5. The sputtering target welding calibration jig according to claim 4, characterized in that: The fastener (4) comprises a bolt and a nut, the bolt being passed through the fixing portion (1) and the back plate (200), and the nut being threadedly connected to the bolt.

6. The sputtering target welding calibration jig according to claim 3, characterized in that: The fastener (4) comprises a clamp, one end of which is arranged on the fixing portion (1), and the other end of which is capable of clamping and fixing the fixing portion (1) and the back plate (200).

7. The sputtering target welding calibration jig according to any one of claims 1 to 6, characterized in that: The side of the measuring portion (2) and the fixing portion (1) facing the back plate (200) is provided with a step (5).

8. The sputtering target welding calibration jig according to claim 7, characterized in that: A buffer portion is provided on the contact surface between the measuring portion (2) and the target blank (100).

9. The sputtering target welding calibration jig according to any one of claims 1 to 6, characterized in that: The fixing portion (1) and the measuring portion (2) are integrally formed.

10. The sputtering target welding calibration jig according to any one of claims 1 to 6, characterized in that: The measuring part (2) and the fixing part (1) are both made of heat-resistant materials.

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