Efficient wafer quality detection device

Abstract

The utility model discloses a high-efficiency wafer quality detection device, relates to the technical field of wafer quality detection, and aims to solve the problems that the existing quality detection device has defects in streamline multi-station synchronous detection and the overall detection efficiency needs to be improved. Belt conveyors are fixedly installed at the upper end of the supporting frame, a base table is arranged between the two belt conveyors, a linear module is fixedly installed on the upper surface of the base table, the moving end of the linear module is fixedly connected with a linkage seat, and the symmetrical side surfaces of the linkage seat are each fixedly connected with a bearing plate; a weighing sensor is fixedly installed on the upper surface of the bearing plate, the detection end of the weighing sensor is fixedly connected with a weighing seat, and a plurality of moving seats are fixedly installed on the outer surface of the belt conveyor. The effects that assembly line type multi-station synchronous detection operation can be carried out, and the detection efficiency is high are achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer quality detection, in particular to an efficient wafer quality detection device. Background Art

[0002] Wafers are products made by cutting wafer rods using special cutting equipment. As raw materials for chip production, wafers need to be tested and screened for quality before circuit lithography to avoid unqualified chips.

[0003] Existing quality inspection devices have shortcomings in conducting multi-station simultaneous inspection in a streamlined manner, and the overall inspection efficiency needs to be improved. Utility Model Content

[0004] The purpose of the utility model is to provide an efficient wafer quality inspection device capable of performing flow-type multi-station synchronous inspection operations with high inspection efficiency.

[0005] To achieve the above objectives, the present invention provides the following technical solutions:

[0006] An efficient wafer quality inspection device includes a support frame, a belt conveyor is fixedly installed on the upper end of the support frame, a base is arranged between two of the belt conveyors, and a linear module is fixedly installed on the upper surface of the base, the movable end of the linear module is fixedly connected to a linkage seat, and a supporting plate is fixedly connected to the symmetrical side surfaces of the linkage seat respectively, a weighing sensor is fixedly installed on the upper surface of the supporting plate, and the detection end of the weighing sensor is fixedly connected to the weighing seat.

[0007] By adopting the above technical solution, the quality of the wafer can be detected by weighing, and the detection operation of two wafers can be performed simultaneously, with high detection efficiency.

[0008] Furthermore, a plurality of movable seats are fixedly installed on the outer surface of the belt conveyor.

[0009] By adopting the above technical solution, the moving base can be used to improve the stability of wafer movement.

[0010] Furthermore, one side of the movable seat and the upper end of the weighing seat are both comb-shaped, and the comb-tooth structures on the movable seat and the weighing seat cooperate with each other.

[0011] By adopting the above technical solution, it is ensured that the upward movement of the weighing seat can effectively lift the wafer.

[0012] Furthermore, a mounting plate is fixedly connected to the symmetrical two sides of the upper end of the linear module, and a weight alarm is fixedly installed on the upper surface of the mounting plate. The weight alarm is electrically connected to the weighing sensor.

[0013] By adopting the above technical solution, the weighing alarm can be used to perform quality screening and control operations.

[0014] Furthermore, a cylinder is fixedly mounted on the lower surface of the mounting plate, a telescopic end of the cylinder is fixedly connected to a blanking plate, and the lower edge of the blanking plate is comb-shaped.

[0015] By adopting the above technical solution, the cylinder can be used to drive the blanking plate to move, and the blanking plate can be used to perform blanking operations on unqualified wafers.

[0016] Furthermore, a material discharge trough is fixedly connected to the upper surface of the support frame, and one end of the material discharge trough corresponds to the position of the material discharge plate.

[0017] By adopting the above technical solution, the transportation of unqualified products is facilitated.

[0018] In summary, the beneficial technical effects of the present invention are:

[0019] 1. The utility model can utilize a belt conveyor to convey wafers to be inspected in a flow-like manner. When the wafer is placed at a designated position, the linear module is started, and the linear module drives the linkage seat and the supporting plate to be raised in height, thereby raising the height of the weighing seat. At this time, the comb-shaped structure on the upper end of the weighing seat passes through the comb-tooth structure gap on the moving seat, which can effectively support the wafers conveyed on the moving seat. At this time, the weighing sensor can weigh the wafers and transmit the weighing data to the weight alarm. When the weight of the wafer is within the set range, it is preliminarily judged as a qualified product. When the weight is abnormal, the weight alarm sounds an alarm. By weighing the wafers, unqualified wafers can be quickly screened out. Two weighing seats are provided, so the inspection operation of two wafers can be performed simultaneously, and the inspection efficiency is effectively improved.

[0020] 2. When the wafer quality inspection fails, the utility model can start the cylinder, extend the cylinder, and then drive the blanking plate to move. The blanking plate can push the wafer supported on the weighing seat into the blanking chute and transfer it to the designated area along the blanking chute. It can conveniently and effectively remove unqualified products, and the overall functionality and practicality have been effectively improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0022] Figure 2 It is the main view of the present utility model.

[0023] In the figure: 1. Support frame; 2. Belt conveyor; 3. Moving seat; 4. Linear module; 5. Mounting plate; 6. Weight alarm; 7. Linkage seat; 8. Support plate; 9. Weighing sensor; 10. Weighing seat; 11. Unloading chute; 12. Cylinder; 13. Unloading plate. DETAILED DESCRIPTION

[0024] The method of the utility model is further described in detail below with reference to the accompanying drawings.

[0025] Reference Figure 1 、 Figure 2 , an efficient wafer quality inspection device, comprising a support frame 1, a belt conveyor 2 is fixedly installed on the upper end of the support frame 1, a base is arranged between the two belt conveyors 2, and a linear module 4 is fixedly installed on the upper surface of the base, the movable end of the linear module 4 is fixedly connected to a linkage seat 7, and a supporting plate 8 is fixedly connected to the symmetrical side surfaces of the linkage seat 7, a weighing sensor 9 (MP58T / 91KgC3MR) is fixedly installed on the upper surface of the supporting plate 8, and the detection end of the weighing sensor 9 is fixedly connected to the weighing seat 10, a plurality of movable seats 3 are fixedly installed on the outer surface of the belt conveyor 2, one side edge of the movable seat 3 and the upper end of the weighing seat 10 are comb-shaped, and the comb-tooth structures on the movable seat 3 and the weighing seat 10 cooperate with each other, a mounting plate 5 is fixedly connected to the symmetrical side edges of the upper end of the linear module 4, and a weight alarm 6 is fixedly installed on the upper surface of the mounting plate 5 The weight alarm 6 is electrically connected to the weighing sensor 9, wherein the belt conveyor 2 can be used to convey the wafer to be inspected in a flow-line manner. When the wafer is placed at the specified position, the linear module 4 is started, and the linear module 4 drives the linkage seat 7 and the supporting plate 8 to be lifted, thereby raising the height of the weighing seat 10. At this time, the comb-shaped structure at the upper end of the weighing seat 10 passes through the comb-tooth structure gap on the moving seat 3, which can effectively support the wafer transported on the moving seat 3. At this time, the weighing sensor 9 can weigh the wafer and transmit the weighing data to the weight alarm 6. When the weight of the wafer is within the set range, it is preliminarily judged as a qualified product. When the weight is abnormal, the weight alarm 6 sounds an alarm. By weighing the wafer, unqualified wafers can be quickly screened out, and there are two weighing seats 10, so the detection operation of two wafers can be performed simultaneously, and the detection efficiency is effectively improved.

[0026] Referring to Figure 2, a cylinder 12 is fixedly installed on the lower surface of the mounting plate 5, and the telescopic end of the cylinder 12 is fixedly connected to a blanking plate 13. The lower edge of the blanking plate 13 is comb-shaped, and a blanking trough 11 is fixedly connected to the upper surface of the support frame 1. One end of the blanking trough 11 corresponds to the position of the blanking plate 13. When the wafer quality inspection fails, the cylinder 12 can be started and extended to drive the blanking plate 13 to move. The blanking plate 13 can push the wafer supported on the weighing seat 10 into the blanking trough 11 and transfer it to the designated area along the blanking trough 11. It can conveniently and effectively remove unqualified products, and the overall functionality and practicality have been effectively improved.

[0027] Working principle: When in use, first install the device at the designated position, then place the wafer to be tested on the moving seat 3, then start the belt conveyor 2, so that the moving seat 3 and the wafer move together, when the wafer is placed at the designated position, start the linear module 4, the linear module 4 drives the linkage seat 7 and the supporting plate 8 to lift the height, thereby lifting the weighing seat 10. At this time, the comb-shaped structure at the upper end of the weighing seat 10 passes through the comb-shaped structure gap on the moving seat 3, which can effectively support the wafer conveyed on the moving seat 3. Circle, at this time the weighing sensor 9 can weigh the wafer and transmit the weighing data to the weight alarm 6. When the weight of the wafer is within the set range, it is preliminarily judged to be a qualified product. When the weight is abnormal, the weight alarm 6 sounds an alarm and starts the cylinder 12 at the same time. The cylinder 12 extends, thereby driving the blanking plate 13 to move. The blanking plate 13 can push the wafer supported on the weighing seat 10 into the blanking chute 11 and transfer it along the blanking chute 11 to the designated area, which can conveniently and effectively eliminate unqualified products.

[0028] The real-time examples of this specific real-time method are all preferred real-time examples of the present utility model, and are not intended to limit the protection scope of the present utility model. Therefore, any equivalent changes made based on the structure, shape, and principle of the present utility model should be included in the protection scope of the present utility model.

Claims

1. An efficient wafer quality detection device, comprising a support frame (1), characterized in that: A belt conveyor (2) is fixedly mounted on the upper end of the support frame (1), a base is provided between the two belt conveyors (2), and a linear module (4) is fixedly mounted on the upper surface of the base, a movable end of the linear module (4) is fixedly connected to a linkage seat (7), a supporting plate (8) is fixedly connected to the symmetrical side surfaces of the linkage seat (7), a weighing sensor (9) is fixedly mounted on the upper surface of the supporting plate (8), and a detection end of the weighing sensor (9) is fixedly connected to a weighing seat (10).

2. The efficient wafer quality inspection device according to claim 1, characterized in that: A plurality of movable seats (3) are fixedly mounted on the outer surface of the belt conveyor (2).

3. The efficient wafer quality inspection device according to claim 2, characterized in that: One side of the movable seat (3) and the upper end of the weighing seat (10) are both in the shape of comb teeth, and the comb tooth structures on the movable seat (3) and the weighing seat (10) cooperate with each other.

4. The efficient wafer quality inspection device according to claim 1, characterized in that: A mounting plate (5) is fixedly connected to the symmetrical two sides of the upper end of the linear module (4), and a weight alarm (6) is fixedly installed on the upper surface of the mounting plate (5). The weight alarm (6) is electrically connected to the weighing sensor (9).

5. The efficient wafer quality inspection device according to claim 4, characterized in that: A cylinder (12) is fixedly mounted on the lower surface of the mounting plate (5), and a blanking plate (13) is fixedly connected to the telescopic end of the cylinder (12), and the lower edge of the blanking plate (13) is in a comb-tooth shape.

6. The efficient wafer quality inspection device according to claim 5, characterized in that: A material discharge chute (11) is fixedly connected to the upper surface of the support frame (1), and one end of the material discharge chute (11) corresponds to the position of the material discharge plate (13).

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