Semiconductor wafer sand blasting processing dust removal device

Abstract

The utility model discloses a semiconductor wafer sand blasting dust removal device, which belongs to the technical field of semiconductor wafer processing, and comprises a dust removal bin serving as a mounting carrier, and a dust removal mechanism is arranged in the dust removal bin. A recycling mechanism matched with the dust removal mechanism is arranged on the outer side of the dust removal bin, and a collecting mechanism is arranged at the bottom of the dust removal bin. Carborundum dust in air flowing through the interior of the dust removal bin is filtered and blocked through the three sets of circular-truncated-cone-shaped filter screens, water is continuously supplied to the interior of the mounting pipe through the water supply pipe, water is continuously sprayed to the bottoms of the circular-truncated-cone-shaped filter screens through the spray heads on the annular water pipe to clean the bottoms of the circular-truncated-cone-shaped filter screens, and the filtering effect of the three sets of circular-truncated-cone-shaped filter screens is guaranteed in real time; furthermore, the three groups of circular-truncated-cone-shaped filter screens can be cleaned in real time without stopping the dust removal work of the whole dust removal device, so that the working efficiency of the whole dust removal device is fully ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor wafer processing, in particular to a dust removal device for sandblasting processing of semiconductor wafers. Background Art

[0002] Semiconductor wafers are usually made of high-purity polycrystalline silicon ingots, which are mainly drawn into silicon single crystal ingots with different resistivities using the Chakros method. Silicon wafers are then formed through processes such as crystal orientation, heat treatment, grinding, and polishing. Sandblasting is a process in semiconductor wafer processing. A large amount of corundum dust generated during the sandblasting process leaves the interior of the sandblasting device with the air flow. In order to prevent the corundum dust from being directly discharged into the external environment and causing pollution to the air around the device, a semiconductor wafer sandblasting dust removal device is required.

[0003] During the dust removal process of the current semiconductor wafer sandblasting dust removal device, the filter screen usually needs to be replaced manually, and the dust removal work of the device needs to be stopped at this time, thereby reducing the working efficiency of the entire semiconductor wafer sandblasting dust removal device; and during the dust removal process of the semiconductor wafer sandblasting dust removal device, a large amount of corundum dust will be filtered and blocked. If the corundum dust cannot be collected and reused, a large amount of corundum dust resources will be wasted.

[0004] Therefore, it is urgent to provide a semiconductor wafer sandblasting dust removal device to solve the above problems. Utility Model Content

[0005] The technical problem to be solved by the utility model is to overcome the shortcomings of the above-mentioned prior art and provide a dust removal device for sandblasting of semiconductor wafers.

[0006] In order to solve the above technical problems, a technical solution adopted by the present invention is: to provide a semiconductor wafer sandblasting dust removal device, including a dust removal bin as an installation carrier, a dust removal mechanism is provided inside the dust removal bin, a recovery mechanism that cooperates with the dust removal mechanism is provided on the outside of the dust removal bin, a collection mechanism is provided at the bottom of the dust removal bin, an exhaust mechanism for auxiliary exhaust is provided on the top of the dust removal bin, a supporting mechanism is provided at the bottom end of the outside of the dust removal bin, an air intake pipe is provided at the bottom end of the outside of the dust removal bin, and the output end of the air intake pipe extends to the bottom end of the inside of the dust removal bin, and a first row of fans are installed at the bottom end of the inside of the dust removal bin.

[0007] The utility model is further configured as follows: the dust removal mechanism includes a water supply pipe located outside the exhaust mechanism, the output end of the water supply pipe extends to the center position inside the dust removal bin and is installed with a mounting pipe, three groups of frustum-shaped filters are evenly installed on the outside of the mounting pipe, three groups of annular water pipes are evenly installed on the outside of the mounting pipe, and each group of annular water pipes is provided with three, and nozzles are evenly installed on the outside of the annular water pipes.

[0008] Through the above technical solution, the water supply pipe is controlled to continuously supply water to the inside of the installation pipe, and then the nozzle on the annular water pipe continuously sprays water to clean the bottom of the truncated cone filter. The corundum dust filtered and blocked at the bottom of the truncated cone filter is mixed with muddy water and guided along the inner wall of the truncated cone filter to leave the bottom of the truncated cone filter, thereby ensuring the real-time filtering and blocking effect of the truncated cone filter on corundum dust.

[0009] The utility model is further configured as follows: the recovery mechanism includes an annular bin, which is provided with three groups, and the three groups of annular bins are evenly installed on the outside of the dust removal bin, the inner wall of the dust removal bin is evenly provided with three circles of drainage holes, the inner wall of the dust removal bin is evenly provided with three groups of annular collection bins, and the annular collection bins are connected with the top of the inside of the annular bin through the drainage holes, and four groups of filter components are evenly installed on the outside of the annular bin.

[0010] Through the above technical solution, the turbid water generated by cleaning the truncated cone filter screen follows the guidance of the truncated cone filter screen into the annular collection bin, and then enters the annular bin through the drainage hole. The turbid water is then filtered through the filter assembly and discharged directly, filtering and collecting the corundum dust removed by the dust removal mechanism.

[0011] The utility model is further configured as follows: the filter assembly includes a control valve, four groups of control valves are provided, and the input ends of the four groups of control valves are all connected to the bottom end of the annular warehouse, the output end of the control valve is installed with a mounting cover, the bottom thread of the mounting cover is provided with a filter cartridge, circular filter screens are evenly installed inside the filter cartridge, a drain pipe is provided at the bottom end of the filter cartridge, and the output end of the control valve is connected to the inner top of the filter cartridge.

[0012] Through the above technical solution, the muddy water inside the annular bin enters the interior of the filter cartridge through the control valve, and is then filtered by the circular filter screen inside the filter cartridge. Finally, the filtered muddy water is discharged through the drain pipe, and the corundum dust in the muddy water is filtered and retained inside the filter cartridge. Subsequently, the control valve is closed, and the filter cartridge is rotated to unscrew it, and the corundum dust blocked by the circular filter screen is cleaned and recycled.

[0013] The utility model is further configured as follows: the collecting mechanism includes a funnel bin, the top of the funnel bin is fixedly connected to the bottom of the dust removal bin, the bottom of the funnel bin is installed with a collecting bin through a flange assembly, and the top of the collecting bin is symmetrically installed with an arc-shaped filter screen.

[0014] The above technical solution helps to allow the muddy water attached to the bottom of the inner wall of the dust removal bin to enter the collection bin along the guidance of the funnel bin, and the corundum dust in the muddy water gradually settles in the collection bin, and the air entering the bottom of the dust removal bin is filtered by the arc filter. In conjunction with the first row of fans, the corundum dust sprayed out of the air intake pipe can be stably blown to the bottom of a group of frustum-shaped filters at the bottom, thereby reducing the damage to the inner wall of the dust removal bin after the corundum dust is sprayed into the dust removal bin.

[0015] The utility model is further configured as follows: the exhaust mechanism includes an exhaust cylinder located at the top of the dust removal bin, a fixing ring is installed on the top of the exhaust cylinder, and a second row of fans is installed on the inner ring of the fixing ring.

[0016] Through the above technical solution, controlling the second row of fans to cooperate with the first row of fans helps to allow the air inside the dust removal bin to flow stably toward the top of the exhaust pipe and be discharged.

[0017] The present invention is further configured as follows: the support mechanism includes a support ring located at the bottom end of the outer side of the dust removal bin, three groups of support legs are evenly installed on the bottom end of the support ring, and a support base is installed on the bottom end of the support legs.

[0018] Through the above technical solution, the dust removal bin can be stably supported by the support ring and the support legs.

[0019] The beneficial effects of the utility model are as follows:

[0020] 1. The utility model filters and blocks the emery dust in the air flowing through the dust removal bin through three groups of frustum-shaped filter screens, then continuously supplies water to the inside of the installation pipe through the water supply pipe, and then the nozzle on the annular water pipe continuously sprays water to clean the bottom of the frustum-shaped filter screen, thereby ensuring the filtering effect of the three groups of frustum-shaped filter screens in real time, and then ensuring the dust removal effect of the dust removal device, and the three groups of frustum-shaped filter screens can be cleaned in real time without stopping the dust removal work of the entire dust removal device, which helps to fully ensure the working efficiency of the entire dust removal device.

[0021] 2. The utility model utilizes a recovery mechanism to filter the muddy water generated by cleaning the frustum-shaped filter screen, and can uniformly clean the corundum dust blocked by the internal filtration into the same recovery bin by disassembling the filter cartridge, and can also cooperate with the collection mechanism to realize the centralized recovery of all the corundum dust entering the dust removal bin, which can not only ensure that the entire dust removal device can continuously filter and block the corundum dust, but also facilitate the centralized recovery of the corundum dust blocked by the filtration, thereby avoiding the waste of corundum dust resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a three-dimensional schematic diagram of the utility model;

[0023] Figure 2 This is an explosion diagram of the utility model;

[0024] Figure 3 It is a three-dimensional schematic diagram of a longitudinal section of the utility model;

[0025] Figure 4 This is a schematic diagram of the first perspective of the truncated cone filter of the utility model;

[0026] Figure 5 This is a schematic diagram of the frustum-shaped filter screen of the present invention from a second viewing angle;

[0027] Figure 6 This is a three-dimensional schematic diagram of the annular bin of the utility model;

[0028] Figure 7 This is a three-dimensional schematic diagram of the filter assembly of the utility model;

[0029] Figure 8 This is a schematic diagram of the annular collection bin of the utility model being located inside the dust removal bin;

[0030] Figure 9 It is a three-dimensional schematic diagram of the collection bin of the utility model.

[0031] In the figure: 1. Dust removal bin; 2. Dust removal mechanism; 201. Water supply pipe; 202. Mounting pipe; 203. Cone-shaped filter screen; 204. Annular water pipe; 205. Nozzle; 3. Recovery mechanism; 301. Annular bin; 302. Drain hole; 303. Annular collection bin; 304. Filter assembly; 3041. Control valve; 3042. Mounting cover; 3043. Filter cartridge; 3044. Circular filter screen; 3045. Drain pipe; 4. Collection mechanism; 401. Funnel bin; 402. Flange assembly; 403. Collection bin; 404. Arc-shaped filter screen; 5. Exhaust mechanism; 501. Exhaust pipe; 502. Second row fan; 6. Support mechanism; 601. Support ring; 602. Support leg; 603. Support base; 7. Inlet pipe; 8. First row fan. DETAILED DESCRIPTION

[0032] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more precise definition of the protection scope of the present invention.

[0033] like Figure 1 - Figure 5As shown, a dust removal mechanism 2 is provided inside the dust removal bin 1. The dust removal mechanism 2 includes a water supply pipe 201 located outside the exhaust mechanism 5. The output end of the water supply pipe 201 extends to the center position of the dust removal bin 1 where a mounting pipe 202 is installed. Three groups of frustum-shaped filter screens 203 are evenly installed on the outside of the mounting pipe 202. Three groups of annular water pipes 204 are evenly installed on the outside of the mounting pipe 202, and each group of annular water pipes 204 is provided with three. Nozzles 205 are evenly installed on the outside of the annular water pipes 204. The water supply pipe 201 is controlled to continuously supply water to the inside of the mounting pipe 202, and then the nozzles 205 on the annular water pipes 204 continuously spray water to clean the bottom of the frustum-shaped filter screen 203. The corundum dust filtered and blocked at the bottom of the frustum-shaped filter screen 203 is mixed with muddy water and guided along the inner wall of the frustum-shaped filter screen 203 to leave the bottom of the frustum-shaped filter screen 203, thereby ensuring the real-time filtering and blocking effect of the frustum-shaped filter screen 203 on corundum dust.

[0034] like Figure 3 and Figure 6 - Figure 9As shown, the outer side of the dust removal bin 1 is provided with a recovery mechanism 3 that cooperates with the dust removal mechanism 2, and the bottom of the dust removal bin 1 is provided with a collection mechanism 4. The recovery mechanism 3 includes an annular bin 301, and the annular bin 301 is provided with three groups, and the three groups of annular bins 301 are evenly installed on the outer side of the dust removal bin 1. The inner wall of the dust removal bin 1 is evenly provided with three circles of drainage holes 302, and the inner wall of the dust removal bin 1 is evenly provided with three groups of annular collection bins 303, and the annular collection bins 303 are connected to the top of the inner side of the annular bin 301 through the drainage holes 302. Four groups of filter components 304 are evenly installed on the outer side of the annular bin 301, and the filter components 3 04 includes a control valve 3041, which is provided with four groups of control valves 3041, and the input ends of the four groups of control valves 3041 are all connected to the bottom end of the annular bin 301. The output end of the control valve 3041 is installed with a mounting cover 3042, and the bottom thread of the mounting cover 3042 is provided with a filter cartridge 3043. The inside of the filter cartridge 3043 is evenly installed with a circular filter screen 3044. The bottom end of the filter cartridge 3043 is provided with a drain pipe 3045. The output end of the control valve 3041 is connected to the inner top of the filter cartridge 3043. The collecting mechanism 4 includes a funnel bin 401, and the top of the funnel bin 401 The bottom end of the dust removal bin 1 is fixedly connected, and a collecting bin 403 is installed at the bottom end of the funnel bin 401 through a flange assembly 402. An arc-shaped filter screen 404 is symmetrically installed on the top of the collecting bin 403, so that the muddy water generated by cleaning the truncated cone filter screen 203 enters the annular collection bin 303 along the guide of the truncated cone filter screen 203, and then enters the annular bin 301 through the drainage hole 302, allowing the muddy water inside the annular bin 301 to enter the interior of the filter cartridge 3043 through the control valve 3041, and then filtered by the circular filter screen 3044 inside the filter cartridge 3043, and finally discharged through the drainage pipe 3 045 discharges the filtered muddy water, filters the corundum dust in the muddy water and leaves it inside the filter cartridge 3043, then closes the control valve 3041, and then rotates and unscrews the filter cartridge 3043, and centrally cleans and recycles the corundum dust blocked by the circular filter screen 3044, and filters and collects the corundum dust removed by the dust removal mechanism 2. A part of the corundum dust located at the bottom of the dust removal bin 1 is mixed with the clean water sprayed by the nozzle 205 and attached to the inner wall of the dust removal bin 1, and then flows along the inner wall of the dust removal bin 1 to the inner wall of the funnel bin 401, and then falls from the inner wall of the funnel bin 401 to the inside of the collection bin 403.

[0035] When the utility model is in use, the air containing corundum dust is discharged into the bottom end of the dust removal bin 1 through the air inlet pipe 7, and then the first exhaust fan 8 and the second exhaust fan 502 are controlled to discharge the air inside the dust removal bin 1 to the top of the dust removal bin 1 at the same time. The outside air is filtered through the arc filter 404 and enters the inner bottom of the dust removal bin 1. During the process, the three groups of frustum-shaped filter screens 203 filter and block the corundum dust in the air. At the same time, the water supply pipe 201 is controlled to continuously supply water to the inside of the installation pipe 202, and then the nozzle 205 on the annular water pipe 204 continuously sprays water to clean the bottom of the frustum-shaped filter screen 203. The corundum dust filtered and blocked at the bottom of the frustum-shaped filter screen 203 is mixed with muddy water along the frustum-shaped filter screen. The muddy water flows into the annular collection bin 303 through the guide of the inner wall of the filter screen 203, and then enters the annular bin 301 through the drain hole 302, and then enters the filter cartridge 3043 through the control valve 3041. The circular filter screen 3044 filters the muddy water entering the filter cartridge 3043, and filters and blocks the corundum dust in the muddy water. The filtered muddy water leaves the interior of the filter cartridge 3043 through the drain pipe 3045. A part of the corundum dust located at the bottom end of the dust removal bin 1 is mixed with the clean water sprayed by the nozzle 205 and attached to the inner wall of the dust removal bin 1, and then flows along the inner wall of the dust removal bin 1 to the inner wall of the funnel bin 401, and then falls into the interior of the collection bin 403 from the inner wall of the funnel bin 401.

[0036] The above description is merely an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the description and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A dust removal device for sandblasting semiconductor wafers, comprising a dust removal chamber (1) as a mounting carrier, characterized in that: The interior of the dust removal bin (1) is provided with a dust removal mechanism (2), the exterior of the dust removal bin (1) is provided with a recovery mechanism (3) that cooperates with the dust removal mechanism (2), the bottom of the dust removal bin (1) is provided with a collection mechanism (4), the top of the dust removal bin (1) is provided with an exhaust mechanism (5) for auxiliary exhaust, the bottom end of the exterior of the dust removal bin (1) is provided with a support mechanism (6), the bottom end of the exterior of the dust removal bin (1) is provided with an air intake pipe (7), and the output end of the air intake pipe (7) extends to the bottom end of the interior of the dust removal bin (1), and the bottom end of the interior of the dust removal bin (1) is installed with a first exhaust fan (8).

2. The semiconductor wafer sandblasting dust removal device according to claim 1, characterized in that: The dust removal mechanism (2) comprises a water supply pipe (201) located outside the exhaust mechanism (5); the output end of the water supply pipe (201) extends to the center position inside the dust removal bin (1) and is provided with a mounting pipe (202); three groups of frustum-shaped filter screens (203) are evenly installed on the outside of the mounting pipe (202); three groups of annular water pipes (204) are evenly installed on the outside of the mounting pipe (202), and each group of annular water pipes (204) is provided with three; and nozzles (205) are evenly installed on the outside of the annular water pipes (204).

3. The semiconductor wafer sandblasting dust removal device according to claim 1, characterized in that: The recovery mechanism (3) comprises an annular bin (301), wherein the annular bin (301) is provided with three groups, and the three groups of annular bins (301) are evenly installed on the outside of the dust removal bin (1), the inner wall of the dust removal bin (1) is evenly provided with three circles of drainage holes (302), the inner wall of the dust removal bin (1) is evenly provided with three groups of annular collection bins (303), and the annular collection bins (303) are connected to the top of the annular bin (301) through the drainage holes (302), and four groups of filter components (304) are evenly installed on the outside of the annular bin (301).

4. A semiconductor wafer sandblasting dust removal device according to claim 3, characterized in that: The filter assembly (304) comprises a control valve (3041), wherein four groups of the control valves (3041) are provided, and the input ends of the four groups of control valves (3041) are all connected to the bottom end of the annular bin (301); the output end of the control valve (3041) is provided with a mounting cover (3042); the bottom thread of the mounting cover (3042) is provided with a filter cartridge (3043); circular filter screens (3044) are evenly installed inside the filter cartridge (3043); a drain pipe (3045) is provided at the bottom end of the filter cartridge (3043); and the output end of the control valve (3041) is connected to the inner top of the filter cartridge (3043).

5. The semiconductor wafer sandblasting dust removal device according to claim 1, characterized in that: The collecting mechanism (4) comprises a hopper bin (401), the top end of the hopper bin (401) is fixedly connected to the bottom end of the dust removal bin (1), the bottom end of the hopper bin (401) is mounted with a collecting bin (403) via a flange assembly (402), and the top of the collecting bin (403) is symmetrically mounted with an arc-shaped filter screen (404).

6. The semiconductor wafer sandblasting dust removal device according to claim 1, characterized in that: The exhaust mechanism (5) comprises an exhaust pipe (501) located at the top of the dust removal bin (1); a fixing ring is installed at the top of the exhaust pipe (501), and a second exhaust fan (502) is installed on the inner ring of the fixing ring.

7. The semiconductor wafer sandblasting dust removal device according to claim 1, characterized in that: The support mechanism (6) comprises a support ring (601) located at the bottom end of the outer side of the dust removal bin (1), three groups of support legs (602) are evenly mounted on the bottom end of the support ring (601), and a support base (603) is mounted on the bottom end of the support legs (602).

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