High-temperature-resistant organic polymer film deposition equipment

Abstract

The utility model discloses high-temperature-resistant organic polymer thin film deposition equipment, and relates to the technical field of polymer thin films, the high-temperature-resistant organic polymer thin film deposition equipment comprises a base, a vacuum chamber is mounted on the upper surface of the base, and an air exhaust assembly used for vacuumizing the interior of the vacuum chamber is mounted on the base on one side of the vacuum chamber. Through cooperative arrangement of the vacuum chamber, the partition plates, the support, the peristaltic pump, the nozzles and other structures, an inner cavity of the vacuum chamber is divided into the multiple independent cavities through the partition plates, a user can add different organic polymer materials into the multiple cavities in the using process, and after being heated and melted through the electric heating wires, the organic polymer materials can be added into the multiple cavities; a plurality of peristaltic pumps in one-to-one correspondence with the cavities are used for conveying required liquid organic polymer materials into the corresponding nozzles to be sprayed out in sequence, so that a multi-layer organic polymer composite film is formed, and the problem that existing deposition equipment cannot be used for respectively depositing various high-molecular polymers of different materials at the same time is avoided as much as possible; and the use of the user is very inconvenient.

Description

Technical Field

[0001] The present application relates to the technical field of polymer films, and in particular to a high-temperature resistant organic polymer film deposition device. Background Art

[0002] Organic polymer films are made of organic polymers. With the development of the petroleum industry and technology, the application areas of polymer films have continued to expand, from the initial packaging films to smart polymer films, polymer functional films, etc.

[0003] The invention patent with publication number CN116586263A proposes a high-temperature resistant organic polymer thin film deposition device, including a top plate, a cracking mechanism is fixedly installed on the top surface of the top plate, and a low-temperature coating mechanism is fixedly installed on the top surface of the top plate; the cracking mechanism includes a cracking part, and a second mounting component is fixedly installed on the bottom surface of the cracking part, and the bottom surface of the second mounting component is fixed to the top surface of the top plate.

[0004] The above deposition equipment cannot deposit high molecular polymers of multiple different materials separately at the same time. When users prepare composite films of multiple high molecular materials, they need to use multiple devices in conjunction with each other, which makes it very inconvenient for users to use. Utility Model Content

[0005] The purpose of the present invention is to solve or at least alleviate the problem that existing deposition equipment cannot deposit high molecular polymers of multiple different materials simultaneously, which causes great inconvenience to users.

[0006] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0007] A high-temperature resistant organic polymer film deposition device includes a base with a vacuum chamber installed on the upper surface, an exhaust component for evacuating the interior of the vacuum chamber is installed on the base on one side of the vacuum chamber, and a support structure is installed on the base on the other side of the vacuum chamber. A plurality of partitions are provided in the inner cavity of the vacuum chamber to divide the inner cavity of the base into a plurality of chambers, a heating structure is embedded in the partition, and a plurality of spraying devices corresponding to the chambers are installed on the support structure.

[0008] By adopting the above technical solution, when using, the user first places different types of organic polymer materials into different chambers in the vacuum chamber respectively, and after sealing the vacuum chamber, the air inside the vacuum chamber is extracted through the vacuum pump and the exhaust hose to provide a vacuum environment for thin film deposition, and at the same time, the heating wire is energized to heat the organic polymer material until the organic polymer material melts to form a solution. At this time, the user can turn on one of the peristaltic pumps, and transport the liquid organic polymer material to the nozzle through the infusion tube and the connecting tube connected to the peristaltic pump, and spray it through the nozzle onto the external substrate to form a layer of organic polymer film, and then repeat the above steps to start other peristaltic pumps in turn to spray different organic polymer materials, thereby forming a multi-layer organic polymer composite film, which tries to avoid the problem that the existing deposition equipment cannot simultaneously deposit polymers of multiple different materials separately, causing great inconvenience to users.

[0009] Optionally, a sealing cover for sealing the vacuum chamber is embedded in the top opening of the vacuum chamber, and the sealing cover is screwed to the inner wall of the opening end of the vacuum chamber.

[0010] By adopting the above technical solution, a sealing cover is provided for sealing the vacuum chamber, and a screw connection method is adopted, which not only has a good sealing effect but also is convenient for users to install and remove the sealing cover.

[0011] Optionally, the vacuum extraction component includes a vacuum pump fixedly connected to the upper surface of the base, the vacuum end of the vacuum pump is fixedly connected to a vacuum hose, the end of the vacuum hose away from the vacuum pump passes through the sealing cover and is connected to the inner cavity of the vacuum chamber, and a sealing bearing is installed at the connection between the vacuum hose and the sealing cover.

[0012] By adopting the above technical solution, when the user uses it, the vacuum pump is started and the air inside the vacuum chamber is extracted through the vacuum hose, thereby forming a vacuum environment inside the vacuum chamber for the deposition of polymer materials. The provision of a sealed bearing not only improves the sealing performance of the connection between the vacuum hose and the sealing cover, but also makes it convenient for the user to open or close the sealing cover.

[0013] Optionally, a column is fixedly connected to the center of the bottom wall of the vacuum chamber, and a plurality of partitions are distributed in a ring shape around the circumference of the column.

[0014] By adopting the above technical solution, columns are provided to fix the partitions, thereby improving the stability of the connection between adjacent ends of multiple partitions.

[0015] Optionally, the partition is made of high-temperature resistant metal, and the heating structure is a plurality of heating wires embedded in the partition and electrically connected to an external power supply.

[0016] By adopting the above technical solution, when the heating wire is energized, the heating wire can generate high temperature, which is conducted to the organic polymer material through the metal partition, thereby heating the organic polymer material to a suitable temperature.

[0017] Optionally, the supporting structure includes a bracket in a U-shaped structure fixedly connected to the upper surface of the base, a support plate is provided between the bracket and the vacuum chamber, and two ends of the support plate are fixedly connected to the vacuum chamber and the bracket respectively.

[0018] By adopting the above technical solution, a bracket and a support plate are provided to support and fix the spraying device, thereby greatly improving the stability of the installation of the spraying device.

[0019] Optionally, the spraying device includes a plurality of peristaltic pumps fixedly mounted on the support plate, the input ends of the plurality of peristaltic pumps are fixedly connected to infusion tubes, and the ends of the plurality of infusion tubes away from the peristaltic pumps pass through the side wall of the vacuum chamber and extend to the interior of the corresponding chambers respectively. The spraying device also includes a plurality of nozzles fixedly connected to the horizontal section of the bracket, the output end of the peristaltic pump is fixedly connected to a connecting tube, and the end of the connecting tube away from the peristaltic pump passes through the bracket and is connected to the corresponding nozzle.

[0020] By adopting the above technical solution, when in use, the user can turn on one of the peristaltic pumps, transport the liquid organic polymer material to the nozzle through the infusion tube and connecting tube connected to the peristaltic pump, and spray it out through the nozzle onto the external substrate to form a layer of organic polymer film, and then repeat the above steps to start other peristaltic pumps in turn to spray different organic polymer materials, thereby forming a multi-layer organic polymer composite film.

[0021] In summary, the beneficial effects of this application are as follows:

[0022] The present application coordinates the structures such as a vacuum chamber, a partition, a bracket, a peristaltic pump and a nozzle. The inner cavity of the vacuum chamber is divided by the partition to form multiple independent chambers. When in use, the user can add different organic polymer materials to the multiple chambers. After heating and melting by the heating wire, the required liquid organic polymer materials are transported to the corresponding nozzles through multiple peristaltic pumps corresponding to the chambers one by one and sprayed out in sequence, thereby forming a multi-layer organic polymer composite film, which avoids the problem that the existing deposition equipment cannot simultaneously deposit polymers of multiple different materials separately, causing great inconvenience to the user. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the overall cross-sectional structure of this application;

[0024] Figure 2 This is a schematic diagram of the connection structure between the support structure and the nozzle of the present application;

[0025] Figure 3 It is a schematic diagram of the internal connection structure of the vacuum chamber of this application.

[0026] Explanation of the accompanying symbols: 1. Base; 2. Vacuum chamber; 3. Column; 4. Partition; 5. Heating wire; 6. Sealing cover; 7. Vacuum pump; 8. Exhaust hose; 9. Sealed bearing; 10. Bracket; 11. Support plate; 12. Peristaltic pump; 13. Infusion tube; 14. Nozzle; 15. Connecting pipe. DETAILED DESCRIPTION

[0027] The following is combined with Figure 1-3 This application is described in further detail.

[0028] See also Figure 1-3 A high-temperature resistant organic polymer thin film deposition device includes a base 1 with a vacuum chamber 2 installed on the upper surface. A vacuum assembly for evacuating the interior of the vacuum chamber 2 is installed on one side of the base 1. After the organic polymer material is introduced into the vacuum chamber 2, the vacuum chamber 2 can be sealed, and then the air inside the vacuum chamber 2 can be extracted through the vacuum assembly to form a vacuum environment for thin film deposition.

[0029] A supporting structure with supporting and connecting functions is installed on the base 1 on the other side of the vacuum chamber 2.

[0030] The inner cavity of the vacuum chamber 2 is provided with a plurality of partitions 4 that divide the inner cavity of the base 1 into a plurality of chambers. The inner cavity of the vacuum chamber 2 is divided into a plurality of independent chambers by the partitions 4, so that the user can add different organic polymer materials in different chambers and independently deposit different organic polymer materials at the same time.

[0031] A heating structure is embedded in the partition 4. While depositing the organic polymer material, the user energizes the heating structure to heat the substrate in the vacuum chamber 2 so that the interior of the vacuum chamber 2 reaches the desired deposition temperature.

[0032] A plurality of spraying devices corresponding to the chambers are installed on the support structure. After the deposition of the organic polymer material is completed, the organic polymer material can be sprayed out through the spraying device to form a thin film. There are multiple spraying devices, and the multiple spraying devices correspond to the multiple chambers one by one. Different types of organic polymer materials can be sprayed out independently in order to form a composite thin film material.

[0033] Reference Figure 1A sealing cover 6 is embedded in the top opening of the vacuum chamber 2 to seal the vacuum chamber 2. The sealing cover 6 is screwed to the inner wall of the opening end of the vacuum chamber 2. The sealing cover 6 is provided to seal the vacuum chamber 2. The screw connection method not only has a good sealing effect, but also is convenient for users to install and remove the sealing cover 6.

[0034] Reference Figure 1 The vacuum assembly includes a vacuum pump 7 fixedly connected to the upper surface of the base 1. The vacuum end of the vacuum pump 7 is fixedly connected to a vacuum hose 8. The end of the vacuum hose 8 away from the vacuum pump 7 passes through the sealing cover 6 and is connected to the inner cavity of the vacuum chamber 2. A sealing bearing 9 is installed at the connection between the vacuum hose 8 and the sealing cover 6. When the user starts the vacuum pump 7, the air inside the vacuum chamber 2 is extracted through the vacuum hose 8, thereby forming a vacuum environment inside the vacuum chamber 2 for the deposition of polymer materials. The provision of the sealing bearing 9 not only improves the sealing performance of the connection between the vacuum hose 8 and the sealing cover 6, but also makes it easier for the user to open or close the sealing cover 6.

[0035] Reference Figure 3 The center of the bottom wall of the vacuum chamber 2 is fixedly connected with a column 3, and multiple partitions 4 are distributed in a ring around the column 3. The column 3 is used to fix the partition 4 and improve the stability of the connection between adjacent ends of the multiple partitions 4.

[0036] Reference Figure 1 The partition 4 is made of a high-temperature resistant metal material, and the heating structure is a plurality of heating wires 5 embedded in the partition 4 and electrically connected to an external power source. When the heating wires 5 are energized, the heating wires 5 can generate high temperature, which is then transferred to the organic polymer material through the metal partition 4, thereby heating the organic polymer material to a suitable temperature.

[0037] Reference Figure 1 and Figure 2 The support structure includes a U-shaped bracket 10 fixedly connected to the upper surface of the base 1. A support plate 11 is provided between the bracket 10 and the vacuum chamber 2. The two ends of the support plate 11 are respectively fixedly connected to the vacuum chamber 2 and the bracket 10. The bracket 10 and the support plate 11 are used to support and fix the spray device, greatly improving the stability of the spray device installation.

[0038] Reference Figure 3The spraying device includes a plurality of peristaltic pumps 12 fixedly mounted on a support plate 11. The input ends of the plurality of peristaltic pumps 12 are fixedly connected to a liquid infusion tube 13. The ends of the plurality of liquid infusion tubes 13 away from the peristaltic pumps 12 penetrate the side wall of the vacuum chamber 2 and extend to the interior of the corresponding chambers. The spraying device also includes a plurality of nozzles 14 fixedly connected to the horizontal section of the bracket 10. The output end of the peristaltic pump 12 is fixedly connected to a connecting tube 15. The end of the connecting tube 15 away from the peristaltic pump 12 penetrates the bracket 10 and is connected to the corresponding nozzle 14. When in use, the user can turn on one of the peristaltic pumps 12, and transport the liquid organic polymer material to the nozzle 14 through the liquid infusion tube 13 and the connecting tube 15 connected to the peristaltic pump 12, and spray it onto the external substrate through the nozzle 14 to form a layer of organic polymer film. Then, the above steps are repeated to start other peristaltic pumps 12 in sequence to spray different organic polymer materials, thereby forming a multi-layer organic polymer composite film.

[0039] The implementation principle of the present application is as follows: when in use, the user first places different types of organic polymer materials into different chambers in the vacuum chamber 2 respectively, seals the vacuum chamber 2, and then extracts the air inside the vacuum chamber 2 through the vacuum pump 7 and the exhaust hose 8 to provide a vacuum environment for thin film deposition, and at the same time energizes the heating wire 5 to heat the organic polymer material until the organic polymer material melts to form a solution. At this time, the user can turn on one of the peristaltic pumps 12, and transport the liquid organic polymer material to the nozzle 14 through the infusion tube 13 and the connecting tube 15 connected to the peristaltic pump 12, and spray it onto the external substrate through the nozzle 14 to form a layer of organic polymer film, and then repeat the above steps to start other peristaltic pumps 12 in turn to spray different organic polymer materials, thereby forming a multi-layer organic polymer composite film, which tries to avoid the problem that the existing deposition equipment cannot simultaneously deposit polymers of multiple different materials separately, causing great inconvenience to users.

[0040] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A high-temperature resistant organic polymer thin film deposition device, comprising a base (1) with a vacuum chamber (2) mounted on its upper surface, a vacuum assembly for evacuating the interior of the vacuum chamber (2) mounted on the base (1) on one side of the vacuum chamber (2), and a supporting structure mounted on the base (1) on the other side of the vacuum chamber (2), characterized in that: A plurality of partitions (4) are provided in the inner cavity of the vacuum chamber (2) to divide the inner cavity of the base (1) into a plurality of chambers. A heating structure is embedded in the partitions (4). A plurality of spraying devices corresponding to the chambers are installed on the support structure.

2. The high temperature resistant organic polymer thin film deposition device according to claim 1, characterized in that: A sealing cover (6) for sealing the vacuum chamber (2) is embedded in the top opening of the vacuum chamber (2), and the sealing cover (6) is screwed to the inner wall of the opening end of the vacuum chamber (2).

3. The high temperature resistant organic polymer thin film deposition device according to claim 2, characterized in that: The vacuum assembly comprises a vacuum pump (7) fixedly connected to the upper surface of the base (1); a vacuum hose (8) is fixedly connected to the vacuum end of the vacuum pump (7); an end of the vacuum hose (8) away from the vacuum pump (7) passes through the sealing cover (6) and is connected to the inner cavity of the vacuum chamber (2); a sealing bearing (9) is installed at the connection between the vacuum hose (8) and the sealing cover (6).

4. The high temperature resistant organic polymer thin film deposition device according to claim 1, characterized in that: A column (3) is fixedly connected to the center of the bottom wall of the vacuum chamber (2), and a plurality of partitions (4) are distributed in a ring shape around the circumference of the column (3).

5. The high temperature resistant organic polymer thin film deposition device according to claim 1, characterized in that: The partition (4) is made of a high-temperature resistant metal material, and the heating structure is a plurality of heating wires (5) embedded in the partition (4) and electrically connected to an external power source.

6. The high temperature resistant organic polymer thin film deposition device according to claim 1, characterized in that: The support structure comprises a U-shaped bracket (10) fixedly connected to the upper surface of the base (1), a support plate (11) being provided between the bracket (10) and the vacuum chamber (2), and two ends of the support plate (11) being fixedly connected to the vacuum chamber (2) and the bracket (10), respectively.

7. The high temperature resistant organic polymer thin film deposition device according to claim 6, characterized in that: The spraying device includes a plurality of peristaltic pumps (12) fixedly mounted on the support plate (11), the input ends of the plurality of peristaltic pumps (12) are fixedly connected to the infusion tube (13), and the ends of the plurality of infusion tubes (13) away from the peristaltic pumps (12) pass through the side wall of the vacuum chamber (2) and extend to the interior of the corresponding chambers respectively. The spraying device also includes a plurality of nozzles (14) fixedly connected to the horizontal section of the bracket (10), the output end of the peristaltic pump (12) is fixedly connected to a connecting tube (15), and the end of the connecting tube (15) away from the peristaltic pump (12) passes through the bracket (10) and is connected to the corresponding nozzle (14).

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