Automatic sample feeding device and processing equipment

Abstract

The utility model belongs to the technical field of vacuum machining, and discloses an automatic sample feeding device and machining equipment. The automatic sample feeding equipment comprises a pipeline, a track, a conveying assembly, a magnetic coupling system and a transfer mechanism. The pipeline is connected with the vacuum generator, and the vacuum generator can maintain the vacuum environment of the pipeline; the track is arranged in the pipeline, and the output direction is the same as the axis direction of the pipeline; the conveying assembly is arranged on the track, a bearing piece is arranged on the conveying assembly, and the bearing piece is used for bearing a sample; the magnetic coupling system is used for driving the conveying assembly to move in the output direction of the track. The transfer mechanism comprises a transfer cavity communicated with the pipeline, a transfer assembly is arranged in the transfer cavity, and the transfer assembly can extend into the pipeline and take down the bearing piece, so that the sample can be transferred to a processing station. The device can quickly and accurately complete automatic sample feeding. The machining equipment can improve the automation degree and reduce the labor cost.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum mechanical processing, in particular to an automatic sample feeding device and processing equipment. Background Art

[0002] Artificial vacuum can achieve a local ultra-clean vacuum environment, which is of great significance for the preparation of specific materials and scientific research. In order to better utilize the high cleanliness characteristics of vacuum to continuously study the preparation of devices and test their performance, a vacuum interconnection system is usually used to ensure that the research samples are not exposed to the atmosphere and introduced into contamination during the process of transferring from one device to another. However, most existing technologies use a magnetic coupling transmission method, which cannot accurately transfer samples to the processing chamber. At present, domestic vacuum interconnection systems use manual or semi-automatic methods, that is, manual adjustment is used to achieve the transfer of samples in the vacuum interconnection. In this way, a large amount of manpower will inevitably be required in the preparation and testing process. Although manual operation can make up for the above problems, it will take a lot of time to adjust. It is extremely inconvenient to transfer samples under vacuum conditions. When manpower is insufficient, multiple devices cannot be taken into account, resulting in the idleness of some equipment, reducing the effective utilization rate of the equipment.

[0003] Therefore, there is an urgent need for an automatic sample delivery device and processing equipment that can accurately and quickly complete automatic sample delivery without manual operation. Utility Model Content

[0004] The purpose of the utility model is to provide an automatic sample feeding device to solve the problems of inconvenience in taking materials from a vacuum pipeline and failure in fast and accurate material feeding.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] An automatic sample feeding device, comprising:

[0007] A pipeline connected to a vacuum generator, wherein the vacuum generator is capable of maintaining a vacuum environment in the pipeline;

[0008] A track is provided in the pipe, and an output direction is the same as the axial direction of the pipe;

[0009] A conveying assembly is arranged on the track, and a supporting member is provided on the conveying assembly, and the supporting member is used to support the sample;

[0010] a magnetic coupling system for driving the conveyor assembly to move along the output direction of the track;

[0011] The transfer mechanism comprises a transfer chamber connected to the pipeline. A transfer assembly is provided in the transfer chamber. The transfer assembly can extend into the pipeline and remove the supporting member so that the sample can be transferred to the processing station.

[0012] Preferably, the conveying assembly also includes a conveying trolley and a supporting bracket, the conveying trolley is connected to the supporting bracket, a first limiting member is provided on the supporting bracket, a first limiting hole is provided on the supporting member, the first limiting member can be correspondingly snapped into the first limiting hole to limit the supporting member, and the supporting member is also provided with a accommodating groove for accommodating the sample.

[0013] Preferably, the supporting member is provided with at least two first limiting holes along its circumference, and the first limiting member is provided corresponding to the first limiting holes.

[0014] Preferably, at least two of the first limiting holes are symmetrically distributed on the supporting member.

[0015] Preferably, the diameter of the first limiting member gradually decreases in a direction away from the supporting bracket, and forms a first guiding slope.

[0016] Preferably, a supporting member is further provided on the supporting bracket, and the first limiting member is provided on the supporting member. When the first limiting member extends into the first limiting hole, a reserved gap is formed between the bottom end of the supporting member and the supporting bracket.

[0017] Preferably, the transfer end of the transfer assembly is provided with a second limiting member, and the supporting member is provided with a second limiting hole, so that the transfer end can enter the reserved gap so that the second limiting member can extend into the second limiting hole.

[0018] Preferably, the supporting member is provided with at least two second limiting holes along its circumference, and the second limiting member is provided corresponding to the second limiting holes.

[0019] Preferably, the diameter of the second limiting member gradually decreases in a direction away from the transfer end, and forms a second guiding slope.

[0020] Another object of the present invention is to provide a processing device that can realize automatic feeding and processing and reduce labor costs.

[0021] To achieve this purpose, the present invention adopts the following technical solutions:

[0022] A processing device comprises a processing chamber and the automatic sample feeding device, wherein the processing chamber is connected to the transfer chamber, and the transfer component can transfer the supporting member together with the sample into the processing chamber.

[0023] Beneficial effects of the utility model:

[0024] The utility model discloses an automatic sample feeding device. The automatic sample feeding device includes a pipeline, a track, a transmission component, a magnetic coupling system and a transfer mechanism. The pipeline is connected to a vacuum generator, and the vacuum generator can maintain the vacuum environment of the pipeline; the track is arranged in the pipeline, and the output direction is the same as the axial direction of the pipeline; the transmission component is arranged on the track, and a supporting part is arranged on the transmission component, and the supporting part is used to support the sample; the magnetic coupling system is used to drive the transmission component to move along the output direction of the track; the transfer mechanism includes a transfer chamber connected to the pipeline, and a transfer component is arranged in the transfer chamber. The transfer component can extend into the pipeline and remove the supporting part so that the sample can be transferred to the processing station. The device can not only enable the feeding and sample transfer to be carried out under vacuum conditions, but also solve the problem of the inconvenience of manually taking materials from the pipeline. At the same time, it can also realize the rapid and accurate feeding of samples, and is easy to operate.

[0025] The utility model also discloses a processing equipment, which can realize automatic feeding and processing by applying the above-mentioned sample feeding device, thereby improving the degree of automation and reducing labor costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a front view of the processing equipment provided by the utility model;

[0027] Figure 2 It is a structural diagram of the processing equipment provided by the utility model;

[0028] Figure 3 This is a schematic diagram of the structure of the transmission component and transfer component provided by the utility model Figure 1 ;

[0029] Figure 4 This is a schematic diagram of the structure of the transmission component and transfer component provided by the utility model Figure 2 ;

[0030] Figure 5 It is a structural schematic diagram of the transfer support member provided by the utility model.

[0031] In the picture:

[0032] 10. Pipeline; 11. Observation port;

[0033] 20. Track;

[0034] 30. Conveying assembly; 31. Supporting member; 311. First limiting hole; 312. Second limiting hole; 313. Accommodating groove; 32. Conveying vehicle; 33. Supporting bracket; 331. First limiting member; 332. Supporting member; 333. Positioning groove; 34. Reserved gap;

[0035] 40. Magnetic coupling system;

[0036] 50. Transfer mechanism; 51. Transfer chamber; 52. Transfer assembly; 521. Transfer end; 522. Second stopper; 53. Transfer channel;

[0037] 60. Processing chamber. DETAILED DESCRIPTION

[0038] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0039] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0040] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0041] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0042] This embodiment provides an automatic sample delivery device, such as Figure 1-Figure 5As shown, the device includes a pipeline 10, a track 20, a conveying assembly 30, a magnetic coupling system 40, and a transfer mechanism 50. The pipeline 10 is connected to a vacuum generator that maintains a vacuum environment in the pipeline 10. The track 20 is disposed within the pipeline 10, with its output direction aligned with the axis of the pipeline 10. The conveying assembly 30 is disposed within the track 20 and is provided with a support 31 for supporting a sample. The magnetic coupling system 40 is used to drive the conveying assembly 30 to move along the output direction of the track 20. The transfer mechanism 50 includes a transfer chamber 51 in communication with the pipeline 10, within which a transfer assembly 52 is disposed. The transfer assembly 52 can extend into the pipeline 10 and remove the support 31 to allow the sample to be transferred to a processing station.

[0043] In this device, the pipeline 10 is connected to the vacuum generator, and the transfer chamber 51 is connected to the pipeline 10, so that the feeding and sample transfer are carried out under vacuum conditions, thereby ensuring that the sample will not be exposed to the atmosphere and introduced into pollution during the transfer process; in addition, the transfer component 52 can remove the support member 31 together with the sample through the connection position between the transfer chamber 51 and the pipeline 10, and transfer it to the processing station to complete the process of processing the sample, thereby solving the problem of manual material removal from the pipeline 10. At the same time, it can also quickly and accurately realize the feeding of samples, easy operation, high degree of automation, and realize continuous operation of the equipment.

[0044] It is worth noting that in this embodiment, the transfer assembly 52 is a crank rocker mechanism, which is relatively common, has a simple structure, is easy to install and use, and is highly practical. In other embodiments, the transfer assembly 52 can be a mechanical claw clamp or other mechanism. As long as the structure can remove the support member 31 and transfer it to a suitable processing station, it is within the scope of the disclosure protection of this embodiment. In addition, the device also includes a control system. The conveying assembly 30 includes a conveying vehicle 32 and a supporting bracket 33. The conveying vehicle 32 is connected to the supporting bracket 33, and the supporting bracket 33 is set on the track 20. The magnetic coupling system 40 is connected to the control system, and the control system is connected to the conveying vehicle 32. The magnetic coupling system 40 can drive the conveying vehicle 32 to drive the supporting bracket 33 to move on the track 20 through the control system. In addition, a plurality of observation ports 11 are provided on the pipeline 10 along its axis. Through the plurality of observation ports 11, the internal conditions of the pipeline 10 and the specific position of the conveying assembly 30 can be observed in real time.

[0045] In addition, considering that the magnetic coupling system 40 drives the support member 31 to move to the position where the pipe 10 is connected to the transfer chamber 51 (the pipe 10 and the transfer chamber 51 are connected through the transfer channel 53), it is impossible to ensure that the support member 31 is facing the transfer chamber 51 (that is, it cannot face the transfer channel 53). Figure 3-Figure 5As shown, a positioning groove 333 is provided on the support bracket 33, and a positioning member is provided below the track 20. The positioning member and the transfer channel 53 are projected in the vertical direction on the same straight line. The end of the positioning member is conical (the diameter gradually decreases in the direction close to the track 20). After the support member 31 moves to the transfer channel 53, the positioning member extends vertically upward, and its conical end can first extend into the positioning groove 333. As the positioning member gradually enters the positioning groove 333, it can drive the support bracket 33 along the preset position. Since the positioning member and the transfer channel 53 are projected in the vertical direction on the same straight line, when the positioning member completely enters the positioning groove 333, the support bracket 33 can be moved to a position where the support member 31 is directly opposite the transfer channel 53, thereby improving the transfer speed and accuracy of the transfer assembly 52 to transfer the support member 31, thereby improving the overall work efficiency. It is further explained that in order to improve the positioning accuracy, a plurality of positioning grooves 333 can be provided.

[0046] like Figure 2-Figure 5 As shown, the support bracket 33 is provided with a first stopper 331. The support member 31 is provided with a first stopper hole 311. The first stopper hole 311 can be correspondingly engaged with the first stopper hole 311 to limit the support member 31. The support member 31 is also provided with a receiving groove 313 for accommodating the sample. This arrangement ensures the stability of the support member 31 during the feeding process, ensuring that the support member 31 does not shake during the feeding process, thereby preventing the sample from falling during the feeding process. In addition, the support member 31 is also provided with a receiving groove 313. Placing the sample in the receiving groove 313 prevents the sample from falling off the support member 31 during the feeding process, thereby ensuring a good feeding effect. It should be noted that in this embodiment, the support member 31 accommodates and secures the sample via the receiving groove 313. In other embodiments, a clamping member, a fixed pressure plate, or other structures can also be used to secure the sample. All structures that can secure the sample are within the scope of the disclosure of this embodiment.

[0047] To further ensure the stability of the supporting member 31, as Figure 3-Figure 5 As shown, the supporting member 31 is provided with at least two first limiting holes 311 along its circumference, and the first limiting member 331 is provided corresponding to the first limiting hole 311. Through the multiple first limiting holes 311 and the multiple first limiting members 331, the support member 31 can be further fixed, so that the support member 31 is more stable during the feeding process. It should be noted here that, in this embodiment, there are two first limiting holes 311, and the two first limiting holes 311 are symmetrically distributed on the supporting member 31. This arrangement can ensure the uniformity of the force on the supporting member 31, thereby producing a good fixing effect. In other embodiments, more first limiting holes 311 can also be provided, as long as it is ensured that the multiple first limiting holes 311 can be evenly and symmetrically distributed along the circumference of the supporting member 31. No other restrictions are made in this embodiment.

[0048] To ensure that the support member 31 is placed more conveniently, as Figure 3-Figure 5 As shown, the diameter of the first stopper 331 gradually decreases as it moves away from the support bracket 33, forming a first guiding slope. When the support member 31 is placed on the support bracket 33, the first stopper 331 needs to be inserted into the first stopper hole 311. This arrangement facilitates the insertion of the first stopper 331 into the first stopper hole 311, effectively avoiding the inconvenience of the first stopper 331 and the first stopper hole 311 being aligned, as well as the problem of excessive friction between the first stopper 331 and the first stopper hole 311, which makes it difficult for the first stopper 331 to enter the first stopper hole 311.

[0049] In addition, if Figure 3-Figure 5 As shown, the support bracket 33 is further provided with a support member 332, and a first position-limiting member 331 is disposed on the support member 332. When the first position-limiting member 331 extends into the first position-limiting hole 311, a reserved gap 34 is formed between the bottom end of the support member 31 and the support bracket 33. The support member 31 is supported by the support member 332, and the reserved gap 34 is formed between the bottom end of the support member 31 and the top end of the support bracket 33. This facilitates the insertion of the transfer assembly 52 into the reserved gap 34, and allows the support member 31 to be quickly and accurately removed from the first position-limiting member 331, thereby simplifying the operation, thereby compensating for the disadvantage of mechanical operation that cannot realize complex processes, and improving feeding efficiency.

[0050] To ensure the stability of the support member 31 during the transfer process, Figure 3-Figure 5 As shown, the transfer end 521 of the transfer assembly 52 is provided with a second limiting member 522, and the supporting member 31 is provided with a second limiting hole 312. The transfer end 521 can extend into the reserved gap 34 so that the second limiting member 522 can extend into the second limiting hole 312. After the transfer end 521 extends into the reserved gap 34, the position is adjusted so that the second limiting member 522 is aligned with the first limiting hole 311. At this time, the transfer assembly 52 can drive the transfer end 521 upward in the vertical direction so that the second limiting member 522 can extend into the second limiting hole 312 accordingly. Continuing to move the transfer end 521 upward can abut against the bottom of the supporting member 31 and support the supporting member 31 upward, thereby removing the supporting member 31 from the support member 332 and transferring it to the processing station. In this structure, when transferring the supporting member 31, the transfer end 521 can not only provide an upward supporting force, but the second limiting member 522 can also limit the supporting member 31, thereby ensuring stability and reliability during the transfer process; at the same time, the simple and convenient operation method can also ensure the high efficiency of feeding.

[0051] It should be noted that in this embodiment, the support member 31 is provided with at least two second limiting holes 312 along its circumference, and the second limiting members 522 are provided corresponding to the second limiting holes 312; and the diameter of the second limiting member 522 gradually decreases in the direction away from the transfer end 521, forming a second guide slope. The multiple second limiting holes 312 and the multiple second limiting members 522 can further ensure the fixing effect of the support member 31 during the transfer process of the support member 31, thereby ensuring the stability of the support member 31 during the transfer process. The configuration of the second limiting member 522 gradually decreasing in the direction away from the transfer end 521 can facilitate the second limiting member 522 to extend into the second limiting hole 312, and can effectively avoid the inconvenience of the second limiting member 522 and the second limiting hole 312 being inconvenient, and the problem of excessive friction between the second limiting member 522 and the second limiting hole 312 making it difficult to enter, thereby improving the transfer efficiency.

[0052] What needs to be explained here is that Figure 3-Figure 5 As shown, in this embodiment, two second limiting holes 312 are provided, and the two second limiting holes 312 are symmetrically distributed on the supporting member 31. This arrangement can ensure uniform force when the supporting member 31 is transferred. In other embodiments, multiple second limiting holes 312 can also be provided, as long as the multiple second limiting holes 312 are evenly and symmetrically distributed along the circumference of the supporting member 31. This embodiment is not limited to other aspects. It is further explained that the transfer chamber 51 is vertically connected to the pipeline 10 through the transfer channel 53, and the corresponding two first limiting holes 311 and the two second limiting holes 312 are all arranged on the outer periphery of the accommodating groove 313, and the connecting line of the two first limiting holes 311 is the same as the axial direction of the pipeline 10, and the connecting line of the two second limiting holes 312 is perpendicular to the axial direction of the pipeline 10 (that is, the axial direction of the transfer channel 53), so that after the transfer end 521 extends into the reserved gap 34 along the axial direction of the transfer channel 53, the two second limiting members 522 can be directly opposite to the two second limiting holes 312 without adjusting the angle, thereby increasing the transfer speed of the supporting member 31.

[0053] Based on the above automatic feeding device, this embodiment also provides a processing equipment, such as Figure 1-Figure 2 As shown, the device includes a processing chamber 60 and the aforementioned automatic sample feeding device. The processing chamber 60 is connected to the transfer chamber 51. The transfer assembly 52 can transfer the supporting member 31 and the sample into the processing chamber 60. This device not only ensures that the feeding, transfer, and processing processes are all carried out in a vacuum environment, but also improves the overall degree of automation and work efficiency, greatly reducing labor costs.

[0054] Based on the above processing equipment, the following describes the usage process of the processing equipment in this example:

[0055] First, the magnetic coupling system 40 drives the conveying assembly 30 to move along the output direction of the track 20 to the position where the pipeline 10 is connected to the transfer chamber 51 (the position of the transfer channel 53);

[0056] Next, the transfer assembly 52 passes through the transfer passage 53 and extends into the pipe 10 , placing the transfer end 521 at the reserved gap 34 , and moving the transfer end 521 upward in the vertical direction to remove the supporting member 31 ;

[0057] Next, the support 31 is transferred through the transfer chamber 51 to the processing chamber 60 to complete the sample processing.

[0058] Finally, after the processing is completed, the transfer assembly 52 takes out the supporting member 31 from the processing chamber 60 and transfers it back to the conveying assembly 30 for subsequent feeding, and the cycle continues.

[0059] To sum up, the automatic feeding device provided in this embodiment can solve the problem of inconvenience in taking materials from the vacuum pipeline and the inability to feed materials quickly and accurately; the processing equipment can realize automatic feeding and processing by applying the above device, reduce labor costs, and improve the degree of automation and processing efficiency.

[0060] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. An automatic sample feeding device, characterized in that: include: A pipeline (10) is connected to a vacuum generator, wherein the vacuum generator is capable of maintaining a vacuum environment in the pipeline (10); A track (20) is arranged in the pipe (10), and the output direction is the same as the axial direction of the pipe (10); A conveying assembly (30) is arranged on the track (20), and a supporting member (31) is provided on the conveying assembly (30), and the supporting member (31) is used to support the sample; a magnetic coupling system (40) for driving the conveying assembly (30) to move along the output direction of the track (20); The transfer mechanism (50) includes a transfer chamber (51) connected to the pipeline (10), wherein a transfer assembly (52) is provided in the transfer chamber (51), and the transfer assembly (52) can extend into the pipeline (10) and remove the supporting member (31) so that the sample can be transferred to the processing station.

2. The automatic sample feeding device according to claim 1, characterized in that: The conveying assembly (30) further includes a conveying trolley (32) and a supporting bracket (33), wherein the conveying trolley (32) is connected to the supporting bracket (33), and a first limiting member (331) is provided on the supporting bracket (33), and a first limiting hole (311) is provided on the supporting member (31), and the first limiting member (331) can be correspondingly snapped into the first limiting hole (311) to limit the supporting member (31), and the supporting member (31) is also provided with a receiving groove (313) for receiving the sample.

3. The automatic sample feeding device according to claim 2, characterized in that: The supporting member (31) is provided with at least two first limiting holes (311) along its circumference, and the first limiting member (331) is provided corresponding to the first limiting hole (311).

4. The automatic sample feeding device according to claim 3, characterized in that: At least two of the first limiting holes (311) are symmetrically distributed on the supporting member (31).

5. The automatic sample feeding device according to any one of claims 2 to 4, characterized in that: The diameter of the first position-limiting member (331) gradually decreases in a direction away from the supporting bracket (33), and forms a first guiding inclined surface.

6. The automatic sample feeding device according to any one of claims 2 to 4, characterized in that: A support member (332) is further provided on the supporting bracket (33), and the first limiting member (331) is provided on the supporting member (332). When the first limiting member (331) extends into the first limiting hole (311), a reserved gap (34) is formed between the bottom end of the supporting member (31) and the supporting bracket (33).

7. The automatic sample feeding device according to claim 6, characterized in that: The transfer end (521) of the transfer assembly (52) is provided with a second limiting member (522), and the supporting member (31) is provided with a second limiting hole (312). The transfer end (521) can enter the reserved gap (34) so ​​that the second limiting member (522) can extend into the second limiting hole (312).

8. The automatic sample feeding device according to claim 7, characterized in that: The supporting member (31) is provided with at least two second limiting holes (312) along its circumference, and the second limiting member (522) is provided corresponding to the second limiting holes (312).

9. The automatic sample feeding device according to claim 7, characterized in that: The diameter of the second limiting member (522) gradually decreases in a direction away from the transfer end (521), and forms a second guiding inclined surface.

10. A processing equipment, characterized in that, The invention comprises a processing chamber (60) and an automatic sample feeding device as described in any one of claims 1 to 9, wherein the processing chamber (60) is connected to the transfer chamber (51), and the transfer component (52) is capable of transferring the supporting member (31) together with the sample into the processing chamber (60).

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